S. Gupta. The University of Alabama

Transcription

1 Overview of Sputtering Technologies for Thin-Film Head Applications S. Gupta Associate Professor Dept. of Metallurgical and Materials Engineering

2 Collaborators and Sponsors This work was supported in part by Materials Research Corporation, Sony Corporation and Veeco Instruments. Major collaborators: A. Tsoukatos (Maxtor, CO) G. Choe (Maxmedia, CA) K. Rook (Veeco Instruments) Y. Feng (IBM) S. Funada (Western Digital) J. Ishii (Lockheed-Martin)

3 Hard-Biased MR/Spin Valve Head

4 Materials Used in Thin-Film Head Fabrication APPLICATION! Undercoat/Overcoat/Gap! Poles! Coils! Shields (MR)! MR Layer! Soft Adjacent Layer (SAL)! Hard Bias/Contacts! AF material (for pinning or exchange bias)! Spacer between MR/SAL! Protective Coating! GMR Multilayers MATERIALS! Al 2 O 3, AlN! CoZrNb, FeN, FeCoBC, Ni 45 Fe 55! Permalloy! Permalloy! NiFe, NiFeRh! Cr/CoPt, Cr/CoPtCr, FePt, Ta/Au/Ta, Rh! FeMn, NiO, NiCoO! Ta, Ti, Al 2 O 3, SiO 2! Carbon (DLC)! NiFe/Ag, NiFeCo/Ag, NiFeCo/Cu

5 Thin-Film Head Layer Requirements GMR Spin Valves and Multilayers Monolayer control of film thicknesses Clean, smooth interfaces for high GMR ratio and high H ex Hard Bias Multilayers High coercivity High remanent magnetization Collimators and/or spacers for liftoff requirements Soft Poles Oriented, very soft magnetic material with very high saturation magnetization

6 Features of Process Tools In-Line and Cluster Tools Static Deposition Modules for Poles, Shields, MR Sensors, Hard Bias Rotating Magnetron or Broad Erosion Circular Cathodes Electromagnet for Orientation Temperature Control Bias Planetary Module for Nanoscale Control of Thickness and Repeatability in GMR Spin Valves and Multilayers 6-10 Rectangular Cathodes Permanent magnet orientation Precise Thickness/Repeatability Control to less than 0.1 nm Independent Sun and Planet Speed Control Power Supply Control Uniformity Control to better than 3%, 3 σ over 200 mm wafers Computer-simulated Cathode Design Planetary motion, velocity profiling, apertures Monolayer /Interface Control Power turn-on/turn-off with substrate out of deposition zone Short residence time between layers Bias utilized to control interfacial properties

7 GMR Spin Valves and Multilayers References Thickness and process optimization of planetary magnetron sputtered FeMn spin valves, Y. Feng, K. Rook, S. Gupta, Y. Huai, J. Appl. Phys. 87, 6612 (2000). Low resistance spin dependent tunneling junctions with naturally oxidizing tunneling barrier, Kyusik Sin, Chester Chien, Lena Miloslavsky, Shin Funada, Mark Miller, Hua-Ching Tong, and Subhadra Gupta, IEEE Trans. Magn. 36, 2818 (2000). Magnetoresistance in Spin-Dependent Tunneling Junctions Fabricated by Ion Beam Deposition, J. Wang, A. Devasahayam, S. Gupta, H. Hegde, J. Xiao, G. Landry, S. Basu, Proc. 44 th Conf. on Magnetism and Magnetic Materials, San Jose, CA, November, Growth of Giant Magnetoresistive Spin Valves with Strong Exchange Bias Field, G. Choe, A. Tsoukatos, and S. Gupta, IEEE Trans. Magn. 34, 867 (1998). High exchange anisotropy and high blocking temperature in strongly textured NiFe (111) /FeMn (111) films, G. Choe and S. Gupta, Appl. Phys. Lett. 70, 1766, (1997). Room Temperature GMR Studies in (Cr,Ta)/[Au, NiFe] n Multilayers, A. Tsoukatos, S. Gupta and Y. Huai, IEEE Trans. Magn. 33, 3517 (1997). NiFe Underlayer Effects on Exchange Coupling Field and Coercivity in NiFe/FeMn Films, G. Choe, S. Funada, A. Tsoukatos and S. Gupta, IEEE Trans. Magn. 33, 3514 (1997). Giant magnetoresistance and high sensitivity in annealed NiFeCo/Ag multilayers, J. W. Dykes, Y.K. Kim, A. Tsoukatos, S. Gupta, S.C. Sanders, J. Appl. Phys. 79, 5584 (1996). Deposition conditions and thickness dependence on magnetic properties of sputtered NiFeCo thin films, A. Tsoukatos, S. Gupta, and Y. K. Kim, J. Appl. Phys. 79, 5446 (1996).

8 GMR Spin Valves FeMn-based spin valves optimized on cluster tool with planetary and static modules Monolayer deposition rate control with substrate bias and excellent vacuum conditions allow precise tailoring of interface smoothness, which directly affects SV performance Highly repeatable spin valves with excellent properties achieved : DR/R > 9.4%, H ex > 470 Oe

9 Spin Valve Structure Ta 5.0 nm FeMn nm Co nm Cu nm Co 1.0 nm NiFe 6.0 nm Ta 5.0 nm R/R > 9.4% H ex > 470 Oe SiO 2 substrate

10 X-Ray Reflectance Measurement (nm) Accuracy of Thickness Control in Planetary Deposition Mode Sun speed and rotation counts used to control Cu film thickness Calibrated Cu Thickness (nm)

11 GMR Ratio vs. Cu Spacer Thickness NiFe/Co/Cu/FeMn Top Spin Valve

12 GMR Ratio vs. Pinned Layer Thickness for NiFe/Co/Cu/NiFeCo/FeMn Spin Valve Normalized R/R (a.u.) NiFeCo pinned layer thickness (Å)

13 GMR Ratio vs. Pinned Layer (Co) thickness NiFe/Co/Cu/Co/FeMn Top Spin Valve

14 GMR Ratio vs. Pinning Layer Thickness NiFe/Co/Cu/Cu/FeMn Top Spin Valve

15 Hysteresis Loop for Exchange Biased Top Spin Valve Theoretical Free layer Pinned layer Actual data Magnetization H applied

16 Repeatability of Exchange Field

17 Spin Valve GMR Ratio

18 GMR Repeatability Data for Top Spin Valve Spin valve repeatability on Cymetra 14 DR/R (%), Rs (ohms/sq), Rs unif. (% 3 sigma) Rs Unif Ave Rs DR/R (%) Sample number

19 GMR Multilayer Structures Film Structure (NiFeCo/Ag) (NiFe/Au) (NiFeCo/Cu) R/R 6.5% (following RTA) 7.5% (as-deposited) 18% (as-deposited)

20 GMR Ratio for NiFeCo/Cu Multilayer

21 Low Angle X-Ray Diffraction Spectra for Au/NiFe GMR Multilayers DC Magnetron Sputtered Au/NiFe MLs (NiFe 1.5 nm and Au nm). GMR Values of 7.4% Achieved As-Deposited. Coherent Smooth Interface Pattern Observed by Low-angle X-ray Diffraction and also by TEM. Intensity (a.u.) 2θ (deg.)

22 GMR Ratio and Saturation Field vs. Au Thickness in (NiFe/Au) Multilayers

23 Hard Bias Films References Collimated deposition of hard bias magnetic film via long throw techniques, K. Rook, S. Gupta, Y. Feng, R, Hieronymi, B. Murphy, I. Wagner, S. Sanders, M. Watson, J. Appl. Phys. 87,5738 (2000). High coercivity CoPtCr, CoPt films deposited at high power and high bias conditions for hard bias applications in MR heads, G. Choe, S. Funada, A. Tsoukatos and S. Gupta, J. Appl. Phys. 81, 4894 (1997). Cr/(CoPtCr, CoPt x ) layered film studies for hard bias applications, A. Tsoukatos, S. Gupta and D. Marx, J. Appl. Phys. 79, 5018 (1996). Hard Magnetic Bias Layers for Magnetoresistive Head Applications, A. Tsoukatos, S. Gupta and J. Ishii, Proc. Int l. Symp. On Sputtering Plasmas, May 1995.

24 Lift-Off Process for Hard Bias/Contact Layer Deposition

25 Hard Bias / Contact Layers Magnetic Properties CoPt with bias, no collimation H c > 2000 Oe; M r t> 4 memu/cm 2 CoCrPt, no bias, collimation H c >1600 Oe; M r t> 3 memu/cm 2 Uniformity, Repeatability +/- 3%, 3 σ, within wafer +/- 3%, 3 σ, wafer-to-wafer Collimated Deposition for Lift-off Physical collimation Long throw

26 B-H Loop of CoPt (60 nm)/cr (20 nm) Deposited at High Power and Bias

27 Coercivity and M r tuniformity Data Cr/Co 75 Pt 12 Cr 13 films

28 Repeatability Runs: Cr/Co 75 Pt 12 Cr 13 Films

29 Computer Simulation of Long-Throw vs. Traditional

30 Collimation Angle vs. T/S Spacing Long Throw Deposition

31 Computer Simulation of Physically Collimated Deposition Angular distribution of collimated deposition Modeled step coverage of collimated deposition

32 Hard Bias Deposition for Lift-off Traditional Process

33 Hard Bias Deposition for Lift-off Long Throw, Low Pressure

34 Hard Bias Deposition for Lift-off Physical Collimation

35 High B sat Materials Reference Sputter deposition of 45%Ni-55%Fe for High Moment Poles, K. Rook, S. Gupta, R. Hieronymi and B. Murphy, J. Appl. Phys. 87, 5843 (2000).

36 Oriented Soft Pole Layers FeCoBC, CoZrNb, FeTaN and Ni 45 Fe 55 soft magnetic materials for very low coercivity and high saturation magnetization. DC magnetron process yields excellent film uniformity. Electromagnetic orienting field provides exceptional orientation. Minimal interaction of cathode and orienting magnetic fields allows independent control of film uniformity and film orientation.

37 Coercivity Along the Easy and Hard Axis for High B sat Materials for Poles ( 1 µm)

38 Dispersion at 90% of Saturation (α 90 ) and Skew Data for High B sat Materials for Poles ( 1 µm)

39 Saturation Magnetization for High B sat Materials for Poles ( 1 µm) I s (Tesla)

40 Easy Axis Coercivity and Saturation Magnetization Uniformity for Oriented CoZrNb Films Normalized H c-e I s (Tesla)

41 Thickness Dependence of Anisotropy Field (H k ) and Easy Axis Coercivity (H ce ) for DC Magnetron Sputtered Oriented CoZrNb Films

42 Hysteresis Loop for Oriented FeTaN (70 nm)

43 Magnetic Properties of FeTaN vs. Nitrogen Ratio

44 Film Resistivity of FeTaN vs. Nitrogen Ratio

45 Hysteresis Loop for Oriented 45% Ni / 55% Fe (1.4 µm)

46 Influence of Deposition Conditions on Ni 45 Fe 55 Films

47 Processes Developed for Thin-Film Heads Application Undercoat/Overcoat/Gap Poles/ MR Shields MR Sensor/ SAL Hard-Biased Bilayers Exchange-Coupled Multilayers Thin Spacers GMR Spin Valves Materials/Processes Al 2 O 3, AlN CoZrNb, Laminated FeN, FeCoBC NiFe, NiFeRh Cr/CoPt, Cr/CoPtCr Ta/NiFe/FeMn NiFe/NiCoO Ta, Ti, Al 2 O 3, SiO 2 Ta/NiFe/Co/Cu/Co/NiFe/ FeMn/Ta Results Pinhole-free 30 nm films H c-e < 0.2 Oe M sat > 2 T H c-e < 1.5 Oe α 90 <1 o H c > 2000 Oe, M r t> 4 memu/cm 2 H ex > 200 Oe H c < 50 5 nm Uniformity < 3%, 3σ R/R > 9.4% H ex > 470 Oe

48 Conclusions DC Magnetron Sputtering Processes Developed in Conjunction with Advanced Cathodes and Tools for MR and GMR Heads. Cooler Processes, Better Uniformity and Improved Magnetic Performance Achieved for a Large Range of Materials and Applications Examples shown of Production Processes Developed for: Spin Valves Hard Bias Layers Soft Poles