VAPORIZER PRODUCTS. Product Guide. MSP Corporation Rice Creek Parkway, Suite 300. Shoreview, Minnesota 55126, U.S.A.

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1 Product Guide VAPORIZER PRODUCTS MSP Corporation 5910 Rice Creek Parkway, Suite 300 Shoreview, Minnesota 55126, U.S.A. Phone: Fax:

2 ABOUT MSP CORPORATION ABOUT MSP MSP Corporation is an instrument and equipment company creating products for scientific research and industrial applications. We are known world-wide for our expertise in micro- and nano-particles and their creative use in research and manufacturing. Our products are user friendly and designed as productivity enhancing tools for aerosol research, pharmaceutical inhaler testing, thin-film deposition in semiconductor device fabrication, contamination control, and life science applications. Contact us today to solve your own application challenges and connect to our worldwide distribution network. VAPORIZATION PRODUCTS MSP s Turbo Vaporizer is a droplet-vaporization, direct liquid injection vaporizer for liquid source vaporization and vapor delivery in thin film deposition by CVD, PECVD and ALD processes. 2 Product Guide VAPORIZER PRODUCTS

3 TURBO VAPORIZERS MSP Coporation offers a complete line of vaporization products for thin film deposition in semiconductor device fabrication and large area industrial coating applications. The Turbo Vaporizer is a droplet-vaporization (DV), direct liquid injection (DLI) vaporizer designed to meet modern demanding vaporization needs. A carrier gas atomizes the liquid to form fine droplets, which are then injected into a high efficiency turbo heat exchanger to form vapor. Heat is transferred through the gas to the suspended droplets for vaporization. Liquid-to-metal contact and thermal decomposition are greatly reduced or largely eliminated. MODEL 2800 TURBO-VAPORIZER Thorough liquid vaporization with low thermal decomposition atomizes the liquid to form fine droplets direct injection of droplets into a high efficiency turbo heat exchanger to form vapor improving the vapor quality and uniformity reducing the response time of the vaporizer Modern 2800 Turbo Vaporizer Flow Simulation 2800 This Model 2800 is designed for very even and gentle heating of thermally sensitive precursors to create pure vapor with minimal decomposition. The result is improved film quality as well as reduced down time of the thin film deposition system. Standard Temperature Range 40 C C Typical Power 300W Typical Maximum Liquid Flow 90 g/hr (DI Water) Typical Gas Flow Range 12 to 30 SLPM Construction Stainless steel, PCTFE, Viton Dimensions 12 x 8 x 8 Mass 16 lb (7.8kg) Product Guide VAPORIZER PRODUCTS

4 TURBO VAPORIZERS MODEL 2820 TURBO-VAPORIZER Thorough liquid vaporization with low thermal decomposition atomizes the liquid to form fine droplets direct injection of droplets into a high efficiency turbo heat exchanger to form vapor improving the vapor quality and uniformity reducing the response time of the vaporizer 2820 This Model 2820 is designed for high capacity vapor generation for high throughput chemical vapor deposition (CVD) applications using less thermally sensitive precursors. Standard Temperature Range 40 C C Typical Power 300W Typical Maximum Liquid Flow 150 g/hr (DI Water) Typical Gas Flow Range 20 to 50 SLPM Construction Stainless steel, PCTFE, Viton Dimensions 12 x 8 x 8 Mass 16 lb (7.8kg) 4 Product Guide VAPORIZER PRODUCTS

5 TURBO VAPORIZERS MSP offers a line of high performance vaporizers, which are referred to as performance-enhanced vaporizers, or PE vaporizers. These PE vaporizers make use of a precision piezo-valve to control the rate of liquid flow into an atomizer to form very fine droplets for vaporization, leading to reduced thermal decomposition and by-products formation. PERFORMANCE ENHANCED TURBO-VAPORIZER SYSTEM A Performance Enhanced Turbo-Vaporizer is at the heart of the latest generation vaporization system, that is intended to handle demanding applications in atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes. MSP s Turbo Vaporizer is noted for its precision thin film deposition capabilities needed for fabricating sophisticated semiconductor devices. The additional components which enable the system to perform in very low precursor flow applications (<5mg/min), or provide very stable vapor outputs include: the model 2910 Flow Controller which provides quick and accurate control of the piezo valve; The model 2930 Liquid Flow Sensor provides accurate flow sensing with a low pressure drop; and the model 2920 line of filters ensures particle-free vapor output with high efficiency filtering. Product Guide VAPORIZER PRODUCTS

6 TURBO VAPORIZERS MODEL 2800PE TURBO-VAPORIZER The Performance Enhanced (PE) vaporizers elevate the performance of the popular 2800 series Turbo Vaporizer from MSP to a new high level unmatched by previous vaporizers. This is accomplished by: reducing the atomized droplet size to further reduce thermal decomposition and byproduct formation increasing the temperature stability of the vaporization system improving the film quality and thickness uniformity reducing the response time of the vaporizer low dead volume 2800PE Model 2800PE is designed for very even and gentle heating of thermally sensitive precursor to create pure vapor with minimal decomposition. The result is improved film quality as well as reduced response time of the thin film deposition system. The PE vaporizer design minimized liquid dead volume to reduce the response time of the vaporizer and improves the throughput of the film deposition tool. Digital liquid flow controllers with advanced control algorithms further enhance the vaporizer performance by maintaining stable vapor output over an extended period of time or permitting short duration pulses to be generated for high speed pulsed vapor delivery in ALD applications. Standard Temperature Range 40 C C Typical Power 300W Typical Maximum Liquid Flow 90 g / hr (DI Water) Typical Gas Flow Range 12 to 30 SLPM Wetted Materials Stainless steel, Peek, PCTFE, Elgiloy Dimensions 11.6 x 6.8 x 4.8 Mass 15.8 lb (7.3kg) 6 Product Guide VAPORIZER PRODUCTS

7 TURBO VAPORIZERS MODEL 2820PE TURBO-VAPORIZER The Performance Enhanced (PE) vaporizers elevate the performance of the popular 2800 series Turbo Vaporizer from MSP to a new high level unmatched by previous vaporizers. This is accomplished by: reducing the atomized droplet size to further reduce thermal decomposition and by-product formation reducing the atomized droplet size to further reduce thermal decomposition and byproduct formation increasing the temperature stability of the vaporization system improving the film quality and thickness uniformity reducing the response time of the vaporizer low dead volume 2820PE Model 2820PE is designed for high capacity vapor generation for less thermally sensitive precursors. The PE vaporizer design minimized liquid dead volume to reduce the response time of the vaporizer and improves the throughput of the film deposition tool. Digital liquid flow controllers with advanced control algorithms further enhance the vaporizer performance by maintaining stable vapor output over an extended period of time or permitting short duration pulses to be generated for high speed pulsed vapor delivery in ALD applications. Standard Temperature Range 40 C C Typical Power 300W Typical Maximum Liquid Flow 150 g/hr (DI Water) Typical Gas Flow Range 20 to 50 SLPM Wetted Materials Stainless steel, Peek, PCTFE, Elgiloy Dimensions 11.7 x 4.7 x 4.8 Mass 16 lb (7.3 kg) Product Guide VAPORIZER PRODUCTS

8 TURBO VAPORIZERS MODEL 2830PE TURBO-VAPORIZER The Performance Enhanced (PE) vaporizers elevate the performance of the popular 2800 series Turbo Vaporizer from MSP to a new high level unmatched by previous vaporizers. This is accomplished by: reducing the atomized droplet size to further reduce thermal decomposition and byproduct formation increasing the temperature stability of the vaporization system improving the film quality and thickness uniformity reducing the response time of the vaporizer low dead volume 2830PE Model 2830PE is intended for use in low flow applications, where the full capacity of the 2800 PE is not required, but very even and gentle heating is required for thermally sensitive precursors. The PE vaporizer design minimized liquid dead volume to reduce the response time of the vaporizer and improves the throughput of the film deposition tool. Digital liquid flow controllers with advanced control algorithms further enhance the vaporizer performance by maintaining stable vapor output over an extended period of time or permitting short duration pulses to be generated for high speed pulsed vapor delivery in ALD applications. Standard Temperature Range 40 C C Typical Power 300W Typical Maximum Liquid Flow 40 g/hr (DI Water) Typical Gas Flow Range 5 to10 SLPM Wetted Materials Stainless steel, Peek, PCTFE, Elgiloy Dimensions 11.6 x 4.6 x 4.4 Mass 10 lb (4.6kg) 8 Product Guide VAPORIZER PRODUCTS

9 TURBO VAPORIZERS MODEL 2840PE TURBO-VAPORIZER Performance Enhanced (PE) vaporizers elevate the performance of the popular 2800 series Turbo Vaporizer from MSP to a new high level unmatched by previous vaporizers. This is accomplished by: reducing the atomized droplet size to further reduce thermal decomposition and byproduct formation increasing the temperature stability of the vaporization system improving the film quality and thickness uniformity reducing the response time of the vaporizer low dead volume 2840PE Model 2840PE is intended for vaporizing liquid with a minimum amount of pressure drop through the unit and improved system response time. The PE vaporizer design minimized liquid dead volume to reduce the response time of the vaporizer and improves the throughput of the film deposition tool. Digital liquid flow controllers with advanced control algorithms further enhance the vaporizer performance by maintaining stable vapor output over an extended period of time or permitting short duration pulses to be generated for high speed pulsed vapor delivery in ALD applications. Standard Temperature Range 40 C C Typical Power 300W Typical Maximum Liquid Flow 30 g/hr (DI Water) Typical Gas Flow Range 12 to 30 SLPM Wetted Materials Stainless steel, Peek, PCTFE, Elgiloy Dimensions 9.9 x 4.7 x 4.4 Mass 7.2 lb (3.3kg) Product Guide VAPORIZER PRODUCTS

10 TURBO VAPORIZERS MODEL 2841PE TURBO-VAPORIZER Performance Enhanced (PE) vaporizers elevate the performance of the popular 2800 series Turbo Vaporizer from MSP to a new high level unmatched by previous vaporizers. This is accomplished by: reducing the atomized droplet size to minimize thermal decomposition and byproduct formation increasing the temperature stability of the vaporization system improving the film quality and thickness uniformity reducing the response time of the vaporizer minimizing the dead volume 2841PE Model 2841PE is intended for vaporizing de-ionized water with high capacity. The PE vaporizer design focus on minimized liquid dead volume to reduce the response time of the vaporizer and improves the throughput of the film deposition tool. Digital liquid flow controllers with advanced control algorithms further enhance the vaporizer performance by maintaining stable vapor output over an extended period of time or permitting short duration pulses to be generated for high speed pulsed vapor delivery in ALD applications. Standard Temperature Range 40 C C Typical Power 500W Typical Maximum Liquid Flow 300 g/hr (DI Water) Typical Gas Flow Range 12 to 30 SLPM Wetted Materials Stainless steel, Peek, PCTFE, Elgiloy Dimensions 11.7 x 4.7 x 4.8 Mass 16 lb (7.3kg) 10 Product Guide VAPORIZER PRODUCTS

11 FLOW SENSORS & CONTROLLERS MODEL 2910 MULTI-FUNCTION CONTROLLER The Multi-Function Controller can be used to maintain a steady liquid flow rate or to generate repeatable short duration vapor pulses for ALD applications. The 2910 Multi-Function Controller has three PID control loops with: One (1) dedicated PID loop for piezo-valve and liquid flow control Two (2) additional PID loops for other control functions such as temperature, pressure, liquid level, etc. The Model 2910 Multi-Function Controller is designed as an accessory for use with the PE vaporizers from MSP. The 2910 controller software allows the user to tune the PID loop of the controller to handle a very wide range of liquid flow rates and respond quickly using an adaptive algorithm MECHANICAL SPECIFICATIONS Dimensions 5.55 x 7.63 x 1.23 Weight 0.8 lb (0.4 kg) Mounting Slots two slots 0.19 wide x 0.50 long, 7.00 apart Operating Temperature 10 C to 50 C Ambient Storage Temp. -10 C to 60 C Operating Humidity 20% to 80% non-condensing ELECTRICAL Power 2A Cycle Time 100ms FLOW CONTROL LOOP (PID 1) Controlled Devices 2800PE series Turbo-Vaporizers, for other devices consult factory Flow Sensors MSP 2930, MicroMotion LF Series, Other 0-5V Analog Flow Sensors GENERAL PURPOSE LOOPS (PID 2 & 3) Input Signal. 0 5V Input Impedance 10kΩ Output Signal Source up to 0-24V Note MicroMotion is a trademark of Micro Motion Inc. Product Guide VAPORIZER PRODUCTS

12 FLOW SENSORS & CONTROLLERS MODEL 2930 LIQUID FLOW SENSOR An ideal companion for the PE vaporizers and model 2910 Multi-Function Controllers MSP offers several liquid flow sensors to cover a wide range of liquid flow rates needed for thin film deposition in semiconductor applications. The lower limit of each sensor is typically below 1.0% of full scale. The Model 2930 Liquid Flow Sensor has a very low pressure drop thanks to its straight flow through design. The customer can choose a suitable sensor for each application to cover full scale flow FLOW SENSOR FS1 FS2 FS3 Full Scale for water.05 g/min 1.0 g/min 5.0 g/min Wetted Materials Quartz Glass / PEEK / SS316 / Viton / Silicon RTV Borosilicate Glass 3.3 / PEEK / Teflon / SS316 / Viton / Silicon RTV Overpressure Resistance 100 bar 5 bar 3 bar Maximum Pressure Drop 5 mbar 2 mbar 1 mbar Capillary Inner Diameter 480 µm 1.0 mm 1.8 mm Port Connectors 1/8 Male VCR fitting Dimensions 1/8 Male VCR fitting Weight 1.0 lb (0.5 kg) Mounting Slots four slots 0.15 wide on a 4.75 x.75 pattern Operating Temperature 10 C to 50 C Ambient Storage Temperature -10 C to 60 C Operating Humidity 20% to 80% non-condensing ELECTRICAL Voltage 4 to 9 Volts Nominal Operating Current 6.8mA CONNECTOR PINOUT Pin Function 1 +8V 2 GPIO 3 Not used 4 RS485A 5 RS485B 6 Gnd 12 Product Guide VAPORIZER PRODUCTS

13 FLOW SENSORS & CONTROLLERS MODEL 2940 LIQUID FLOW CONTROLLER This digital Liquid Flow Controller is designed to work with the 2800PE series Turbo-Vaporizers to: maintain a steady liquid flow as low as 1 mg/ min generate short durations pulses with response time as short as 200 ms compensate for flow rate variation due to system pressure and temperature changes 2940 The Model 2940 is a family of controllers for liquid flow control. Each controller is comprised of a sensor to sense the mass flow rate of the liquid and generate a voltage to operate the piezoelectric control valve in the 2800PE series Turbo Vaporizer. This all-digital flow control system is suitable for maintaining steady liquid flow rate as well as for generating repeatable short duration vapor pulses for ALD applications. FLOW CONTROLLER FC1 FC2 FC3 Wetted Materials Quartz Glass / PEEK / SS316 / Silicon RTV Borosilicate Glass 3.3 / PEEK / Teflon / SS316 / Viton / Silicon RTV Overpressure Resistance 10 bar 5 bar 3 bar Maximum Pressure Drop 5 mbar 2 mbar 1 mbar Capillary Inner Diameter 480 µm 1.0 mm 1.8 mm Full Scale Flow of DIW 50 mg/min 1 g/min 5 g/min Port Connectors 1/8 Male VCR fitting Dimensions 4.75 x 5.89 x 1.19 Weight 1.0 lb (0.5 kg) Mounting Slots four slots 0.15 wide on a 4.75 x.75 pattern Operating Temperature 10 C to 50 C Ambient Storage Temperature -10 C to 60 C Operating Humidity 20% to 80% non-condensing ELECTRICAL Power 2A COMMUNICATIONS PINOUT Pin Function 1 +24V 2 Set-point (0 5V) 3 Monitor (0 5V) 4 RXD 5 TXD 6, 7, 8, 9 Ground Product Guide VAPORIZER PRODUCTS

14 VAPOR & PROCESS GAS FILTERS Conventional point-of-use filters are used in a compressed gas line to remove particle from a high purity gas. The Vapor and Process Gas filters from MSP are used downstream of a vaporizer under vacuum flow conditions to remove particles from a gas/vapor mixture. In such an application, the carrier gas, such as nitrogen, argon or helium is mixed with a chemical precursor vapor containing hafnium, zirconium, or other elemental species of interest for atomic layer deposition (ALD), chemical vapor deposition (CVD), or plasma enhanced (PECVD) deposition. MODEL 2920 VPG-A3 FILTER High efficiency Vapor and Process Gas Filtration. High Filtration Efficiency Low pressure drop All stainless steel 316 construction 2920 VPG-A3 Filter SINTERED POWDER FILTER The Model 2920 VPG-A3 is a sintered powder metal media filter with high filtration efficiency. It has provided effective particle control for semiconductor thin film deposition processes. The A3 is an in-line filters with ½ VCR male fittings. 2.5 nm Filter Efficiency % (twelve 9s) 10 nm Filter Efficiency % (nine 9s) 100 nm Filter Efficiency % (six 9s) Wetted Materials: Stainless Steel 316 Temperature Range Up to 300 C Operating Pressure Ultra High Vacuum Weight 1 lb 14 Product Guide VAPORIZER PRODUCTS

15 VAPOR & PROCESS GAS FILTERS MODEL 2920 VPG-A6 FILTER Ultra-High efficiency Vapor and Process Gas Filtration. Very High Filtration Efficiency Extremely low pressure drop All stainless steel 316 construction 2920 VPG-A6 Filter SINTERED FIBER FILTER The VPG-A6 filter provides effective particle control for particles of all sizes down to the smallest measureable particle size in semiconductor metrology. The new Nano-Filtration MediaTM used in the A6 is comprised of sintered stainless steel fibers of a homogeneous construction with efficiency and pressure drop capabilities not previously attainable by a conventional sintered metal powder or sintered fiber filter media construction. The new 2920 VPG-A6 filter has an exceptionally high efficiency making precise filter efficiency determination difficult. Filter pressure drop is lower than the already very low pressure drop of the standard 2920 VPG-A3 filter. 2.5 nm Filter Efficiency % (twelve 9s) 10 nm Filter Efficiency % (ten 9s) 20 nm Filter Efficiency % (nine 9s) Wetted Materials: Stainless Steel 316 Temperature Range Up to 300 C Operating Pressure Ultra High Vacuum Weight 0.44 kg (1 lb) Product Guide VAPORIZER PRODUCTS

16 VAPOR & PROCESS GAS FILTERS MODEL 2920 VPG-C1 FILTER Ultra-High efficiency Vapor and Process Gas Filtration. Very High Filtration Efficiency Low pressure drop All stainless steel 316 construction 2920 VPG-C1 Filter The Model 2920 VPG-C1 is a sintered powder metal media filter with high filtration efficiency. It has provided effective particle control for semiconductor thin film deposition processes. The C1 is a large surface area cross-flow filter with ½ VCR male fittings. 2.5 nm Filter Efficiency % (twelve 9s) 10 nm Filter Efficiency % (nine 9s) 100 nm Filter Efficiency % (six 9s) Wetted Materials: Stainless Steel 316 Temperature Range Up to 300 C Operating Pressure Ultra High Vacuum Weight 3 lb MSP Corporation 5910 Rice Creek Parkway, Suite 300 Shoreview, Minnesota 55126, U. S. A. Phone: Fax: sales@mspcorp.com U.S. and foreign patents pending; Copyright 2014, MSP Corporation (MSP-Vaporizer Product Guide, Rev. A). The MSP Logo is a Registered Trade Mark of MSP Corporation. Turbo Vaporizer and PE Vaporizer are trademark of MSP Corporation. All rights reservd Product Guide VAPORIZER PRODUCTS