FM Collection & Identification Services. Taywin Channo Asst. QA & Lab Manager

Transcription

1 FM Collection & Identification Services Taywin Channo Asst. QA & Lab Manager

2 Agenda 01 Microelectronic Laboratory Overview 02 How We Can Help You? 03 Contamination Analysis 04 Source of Contamination

3 Main Functions DI Plant & Product Cleanliness Polyester wiper Foam wiper Foam swab MiraSAT wiper CoverMAX Deionized water Contamination & Failure Analysis FM collection samples from customer s work area/tooling Product contamination Process mapping Chemical & Material Qualification Detergent Chemical Raw material Cleanroom bag Gloves Hair Net/Shoe Cover etc.

4 Analytical Equipment and Techniques 1. Scanning Electron Microscopy - Energy Dispersive X-ray Spectroscopy (SEM-EDX) 2. Inductively Coupled Plasma - Mass Spectrometry (ICP-MS) 3. Attenuated Total Reflectance - Fourier Transform Infrared Spectroscopy (ATR-FTIR) 4. Fourier Transform Infrared Spectroscopy (FTIR) 5. Ion Chromatography (IC) 6. Liquid Particle Counter (LPC) 7. Total Organic Carbon (TOC) 8. Non Volatile Residue (NVR) SEM/EDX ICP-MS FTIR ATR-FTIR TOC LPC IC NVR

5 Do You Have These Problems? High defective/failure trend in production line Fiber or particle contamination in process Unable to identify root cause or source of contamination How to eliminate or reduce fiber & particle contamination

6 How We Can Help? F M SAMPLE COLLECTION Identify fiber and particle contamination from customer s work surface, tooling and components during normal operations with existing cleaning SOP s Collect samples of consumables used in current production or suspected materials to assist in identifying sources of fiber or particle contamination

7 Sample receiving and background information Sample Preparation SEM/EDX Analysis ATR-FTIR Analysis Analysis Report Contamination Analysis Flow

8 Sample Receiving & Background Information Check and review sample includes the following information: a) Sample identification Using a permanent marker, mark the zip lock bag to denote the sample s name, sample collection area/work surface or component that has been cleaned b) Number of sample Sample after collection at work surface/tooling should be placed in an individual cleaned zip lock bag c) Analysis turnaround time (TAT) Unless notified otherwise, all samples received will be logged and processed for standard turnaround times (15 Business Days, sample submitted 10) Ink is smeared and illegible Place 2 samples after collection in same cleaned zip lock bag

9 Sample Preparation Fiber/Particle Sampling a) Press a double-sided adhesive carbon tape to the surface of an SEM sampling stub b) Touch adhesive carbon dot to particulates c) Visual inspection the sampled particulates under 40X microscope c Sampled particulates a b Touch adhesive carbon dot to particulates

10 SEM/EDX Analysis To identify unknown material, we usually begin by imaging and sizing of unknown material using Scanning Electron Microscopy in conjunction with Energy Dispersive X-Ray Spectroscopy (SEM/EDX). EDX is an elemental analysis technique to identify type of unknown material that it is inorganic or organic material. Copper (Cu) Stainless Steel (SST300s) Stainless Steel (SST300s) EDX (elemental analysis) Organic Material Tin (Sn) Tin (Sn) Background Sample Tin (Sn) EDX spectrum of Organic Material EDX spectrum of Inorganic Material

11 ATR-FTIR Analysis If it was identified as being organic, as its spectrum contained only carbon (C) and Oxygen (O). We will do further analysis by Fourier Transform Infrared (FTIR) spectroscopy employing a Diamond Attenuated Total Reflectance (Diamond-ATR) identified the unknown organic material and possible source of the contamination by compare the collected spectra with the FTIR libraries. SEM image EDX (elemental analysis) Organic Material Unknown Material Polyester Material Result of a library search of the unknown material. It matches with polyester material. SEM image of unknown Organic material

12 Analysis Report: Contamination on PolyCHECK Wiper after wiped Customer s Tooling 1 1 Stainless Steel (SST300s) 2 Stainless Steel (SST300s) Cellulose fiber Cellulose fiber FTIR analysis, fiber contaminations were identified as cellulose base material.

13 Analysis Report: Fiber Contam on Foam Swab, collected from Customer s Work Area 1 Cellulose fiber FTIR analysis, fiber contamination was identified as cellulose base material. 1

14 Analysis Report: Consumable Used in Current Customer Production 1 1 Aluminum Oxide (Al/O) 2 3 Aluminum 1000x magnification 2 3 Aluminum Oxide particles (Al/O) on UltraFine Sponge Aluminum 1000x magnification Aluminum 700x magnification

15 Analysis Report: Consumable Used in Supplier site Cotton Swab (Tip) SEM Image Cellulose fibers from Cotton Swab (Tip) Cotton Swab (Handle) Polypropylene residue FTIR analysis, Cotton swab Tip & handle were identified as cellulose base material

16 Sources of Contamination People Skin flakes, oil and fluid Cosmetics & perfume Clothing debris (lint, fiber etc.) Hair Human activities Tool Generated Metal to metal Friction and wear particle Lubricants and emissions Vibrations Facilities Walls, Floors and ceilings Paint and coatings Air conditioning debris Furniture, table and chairs, fittings etc. Water supply, spills and leaks Static electricity generation Indirect Materials Packing material Stationery like paper and pen Cleaning chemical Plasticizers (outgases) Wiper, Tape, Swab, Sponge Mops and dusters Hair nets & shoe covers

17 Sources of Contamination (Continue) Polycellulose Polycellulose wiper Non-Woven wiper Cleanroom paper Cotton swab Label Polyester Polyester wiper CR bunny suit Garment Polypropylene Shoe cover Hair Nets Medical tray Polystyrene/Polycarbonate Packaging material Polydimethylsiloxane (Si/O) Silicone sealant Metal Particles (Stainless Steel, Aluminum, Iron, etc.) Tool generated (M2M, friction & wear particle) Scratch on working surface, table Others Hair - Human Talcum (MgSiO) - Powder/Environment Aluminum oxide - Sponge Human hair Talcum

18 THANK YOU For more information or to discuss an FM audit of your facility, please contact us at