Background Statement for Ratification Ballot of SEMI Draft Document 5658A New Standard: GUIDE FOR PENTAKIS (DIMETHYLAMINO) TANTALUM (PDMAT)

Transcription

1 Background Statement for Ratification Ballot of SEMI Draft Document 5658A New Standard: GUIDE FOR PENTAKIS (DIMETHYLAMINO) TANTALUM (PDMAT) Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document. Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, patented technology is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided. Notice: This document was approved with additional technical change during adjudication of Letter Ballot # 5658A by the European Chapter of the Liquid Chemicals Global Technical Committee during its meeting on 10/6/2015. This Ratification Ballot is issued in order to satisfy the conditions for Letter Ballot approval by the Liquid Chemicals Global Technical Committee in accordance with of the Regulations. If the Ratification Ballot voting response meets the minimum acceptance conditions per Regulations 10, then it will be automatically published. One copy of the revised Draft Document is included to show the intended final published version. Only these proposed additional technical changes are shown in the other copy of the Draft Document with revision markups showing these intended changes, as an aid to the voter. Additions are indicated by underline and deletions are indicated by strikethrough. Contents for vote are limited to only considering these proposed additional technical changes. All content for a new Standard and Safety Guideline or all proposed technical and editorial changes for revisions of Standards and Safety Guidelines that were included in the original Letter Ballot and passed TC Chapter review, including the ones passed with editorial changes, are incorporated, without revision markups, in both copies. All other editorial changes, if any, made and approved during the TC Chapter review are incorporated also, without revision markups, in both copies. Background The following is the complete list of the new proposed technical change(s) with their justifications: Technical Changes: : Replace grade with tier. Justification: Consistency with rest of document 2. Table 1: Delete Boiling Point row PDMAT sublimes from the solid rather than boiling from a liquid 3. Table 1: Delete Vapor Pressure rows What had been included in the table was a time/pressure combination for sublimation or effectively a pint on the vapour pressure curve. The entry under vapour pressure was an equation for calculating this: log10p = /T. The problem with this is that the units for pressure in the equation is mmhg rather than SI units (Pascals) for pressure. If you change the units, then the constants change. It was simpler to remove the equation since it is not helpful in specifying the material. Ballot Adjudication Information Task Force Review Committee Adjudication Group: Solvents in Advanced Processes Joint EU Gas & Liquid Chemicals TC Chapter Date: October 26, 2016 October 26, 2016

2 Time & 10am 12 pm, CET 2pm-5pm, CET Timezone: Location: SEMICON Europa SEMICON Europa City, Country: Grenoble, France Grenoble, France Leader(s): Jean-Marie Collard (Solvay), Jean-Marie Collard (Solvay), Standards Staff: James Amano, James Amano, This meeting s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation. Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person, but would like to participate by telephone/web, please contact Standards staff. Check on calendar of event for the latest meeting schedule. Page 1

3 SEMI Draft Document R5658A New Standard: GUIDE FOR PENTAKIS (DIMETHYLAMINO) TANTALUM (PDMAT) *Copy with Technical Change Markup* 1 Purpose 1.1 The purpose of this document is to provide a guide for PDMAT for which a need has been identified. 2 Scope 2.1 The scope of this document covers a grade tier of PDMAT, which is used in the semiconductor industry for the deposition of Tantalum Nitride based layers by atomic layer deposition. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. 3 Limitations 3.1 None 4 Referenced Standards and Documents 4.1 None 5 Terminology 5.1 Acronyms PDMAT Pentakis Dimethylamino Tantalum (or Pentakis Dimethylamido Tantalum) 6 Properties Table 1 Properties of PDMAT Molecular formula Ta[N(CH 3) 2] 5 Molecular weight g/mol CAS number Boiling point Vapor pressure (P=mm Hg, T=K) Melting point Solubility in water Appearance 80 C at 0.05mmHg log 10P = /T >100 C (dec) Reacts Orange crystals 7 Suggested Values 7.1 The suggested values for PDMAT for Tier A are listed in Table 2. 8 Grade 1 Procedures 8.1 This section does not apply to this chemical. Page 2

4 9 Grade 2 Procedures 9.1 This section does not apply to this chemical. 10 Grade 3 Procedures 10.1 This section does not apply to this chemical. 11 Grade 4 Procedures 11.1 This section does not apply to this chemical. 12 Tier A Procedures 12.1 Standardized test methods are being developed for all parameters at the purity level indicated. Until standardized test methods are published, test methodology should be determined by user and producer. 13 Tier B Procedures 13.1 This section does not apply to this chemical. 14 Tier C Procedures 14.1 This section does not apply to this chemical. 15 Tier D Procedures 15.1 This section does not apply to this chemical. Page 3

5 Table 2 Suggested Values for PDMAT Previous SEMI Reference # -- Tier A (Guide) Assay ( 1 H NMR) 99% Hydrocarbons ( 1 H NMR) 1% Chloride (Cl) 5 ppm Aluminium (Al) 5000 ppb Antimony (Sb) Arsenic (As) 300ppb Barium (Ba) Boron (B) -- Cadmium (Cd) Calcium (Ca) 3000ppb Chromium (Cr) 4000ppb Copper (Cu) 3000ppb Iron (Fe) 5000 ppb Lead (Pb) Lithium (Li) Magnesium (Mg) Manganese (Mn) Nickel (Ni) 3000 ppb Potassium (K) 5000ppb Sodium (Na) 4000ppb Tin (Sn) Titanium (Ti) -- Vanadium (V) -- Zinc (Zn) 4000 ppb NOTICE: SEMI makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights and the risk of infringement of such rights are entirely their own responsibility. Page 4

6 SEMI Draft Document R5658A New Standard: GUIDE FOR PENTAKIS (DIMETHYLAMINO) TANTALUM (PDMAT) *Copy of Intended Final Version* 1 Purpose 1.1 The purpose of this document is to provide a guide for PDMAT for which a need has been identified. 2 Scope 2.1 The scope of this document covers a tier of PDMAT, which is used in the semiconductor industry for the deposition of Tantalum Nitride based layers by atomic layer deposition. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. 3 Limitations 3.1 None 4 Referenced Standards and Documents 4.1 None 5 Terminology 5.1 Acronyms PDMAT Pentakis Dimethylamino Tantalum (or Pentakis Dimethylamido Tantalum) 6 Properties Table 1 Properties of PDMAT Molecular formula Ta[N(CH 3) 2] 5 Molecular weight g/mol CAS number Melting point >100 C (dec) Solubility in water Reacts Appearance Orange crystals 7 Suggested Values 7.1 The suggested values for PDMAT for Tier A are listed in Table 2. 8 Grade 1 Procedures 8.1 This section does not apply to this chemical. Page 5

7 9 Grade 2 Procedures 9.1 This section does not apply to this chemical. 10 Grade 3 Procedures 10.1 This section does not apply to this chemical. 11 Grade 4 Procedures 11.1 This section does not apply to this chemical. 12 Tier A Procedures 12.1 Standardized test methods are being developed for all parameters at the purity level indicated. Until standardized test methods are published, test methodology should be determined by user and producer. 13 Tier B Procedures 13.1 This section does not apply to this chemical. 14 Tier C Procedures 14.1 This section does not apply to this chemical. 15 Tier D Procedures 15.1 This section does not apply to this chemical. Page 6

8 Table 2 Suggested Values for PDMAT Previous SEMI Reference # -- Tier A (Guide) Assay ( 1 H NMR) 99% Hydrocarbons ( 1 H NMR) 1% Chloride (Cl) 5 ppm Aluminium (Al) 5000 ppb Antimony (Sb) Arsenic (As) 300ppb Barium (Ba) Boron (B) -- Cadmium (Cd) Calcium (Ca) 3000ppb Chromium (Cr) 4000ppb Copper (Cu) 3000ppb Iron (Fe) 5000 ppb Lead (Pb) Lithium (Li) Magnesium (Mg) Manganese (Mn) Nickel (Ni) 3000 ppb Potassium (K) 5000ppb Sodium (Na) 4000ppb Tin (Sn) Titanium (Ti) -- Vanadium (V) -- Zinc (Zn) 4000 ppb NOTICE: SEMI makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights and the risk of infringement of such rights are entirely their own responsibility. Page 7