2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics

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1 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (OPT MEMS 2009) Clearwater, Florida, USA August 2009 IEEE Catalog Number: ISBN: CFP09MOE-PRT

2 Table of Contents Monday, 17 August 2009 MA Imaging I MA1 Neural Imaging with MEMS Microscopes MA2 Dental Optical Coherence Tomography Employing Miniaturized MEMS-based Imaging Probe 1 MA3 Dual-Axes Confocal Microscopy for Clinical Skin Imaging 3 MB Electric and Magnetic Forces MB1 From O-MEMS to no-mems MB2 Tunable Micro Liquid Droplets Using Dielectric Force 5 MB3 Inter-Nanomagnet Force Actuated Deformable Diffractive Optics 7 MB4 Magnetic Actuation Type Low Cost Polymer MEMS Mirror Fabricated by Photolithography 9 and Wet Etching Processes MB5 Wireless Driving of Micromirror Using Electromagnetic Induction 11 MC Nanoscale Measurements and Sensing MC1 High Throughput Nanomechanical Measurements on Proteins DNA and RNA with a 13 T-shaped Cantilever MC2 Plasmonic Nanoprobe Integrated with Near-field Scanning Microscope 15 MC3 A Study on the Spectral Characteristics of Au Nanoantennas 17 MC4 Monolithic Silicon Photonic Crystal Slab Fiber Tip Sensor 19 MC5 Multiple Slot Waveguides for Enhanced Biochemical Sensing 21 MD Fluidic and Thermal MD1 TBD MD2 Sensing of Thermal History using Thermoluminescent Microparticles 23 MD3 Concentration Measurement for Sub-µLiter Solution Using a Cantilever Sensor with an 25 On-Tip Integrated Micro Spherical Reflecting Mirror 1 of 5 11/3/2009 8:13 AM

3 MD4 Large MEMS-Based Programmable Slit Mask For Multi-Object Spectroscopy 27 MD5 Development of Micro Optical Viscosity Sensor with Focus Control System for In-Process 29 Monitoring Tuesday, 18 August 2009 TuA Optoelectronics and Nanowires TuA1 Nanowire Optoelectronics TuA2 Enhanced Electro-Optic Effects in Suspended Rib Waveguides 31 TuA3 Optomechanical Interactions between Nanophotonic Wires on a Silicon-on-Insulator-Chip 33 TuA4 Stroboscopic Imaging of Oscillating Nanowires 35 TuB Projection TuB1 Optical MEMS Display TuB2 Microscanner Using Self Aligned Vertical Comb Drives in a Switched Electrode 37 Configuration for Large Static Rotation TuB3 Adaptive Silicone-Membrane Lenses: Planar vs. Shaped Membrane 39 TuB4 Development of Electrostatically Driven Micromirror Arrays for Daylight Guiding on Large 41 Areas TuB5 2D Scanning MEMS Stage Integrated with Microlens Arrays for High-Resolution Beam 43 Steering TuB6 Sub-nm Order Fluctuation Control of Narrowed Pitch 2K-GxL Device for High Contrast 45 TuC Precision and Medical TuC1 Towards the Realization of the First European MEMS Atomic Clock 47 TuC2 MEMS Tunable Michelson Interferometer with Robust Beam Splitting Architecture 49 TuC3 Spherical Silicon Micro-Mirrors Bent by Anodic Bonding 51 TuC4 An Electrothermally Actuated Bi-Axis Scanning Micromirror for Medical Imaging 53 TuC5 Maximization of Constant Velocity Scan Range of Electrothermally-Actuated Micromirror by 55 Pulse Width Modulated Drive TuD Imaging II 2 of 5 11/3/2009 8:13 AM

4 TuD1 Biologically Inspired Optical Structures for Wide Field-of-View Imaging and Wide Angle 57 Illumination TuD2 Lensfree On-Chip Imaging for Telemedicine Applications 59 TuD3 Optical MEMS Filter for Gas Spectroscopy 61 Wednesday, 19 August 2009 WA Adaptive Optics and Space WA1 Microshutter Array for the James Webb Space Telescope WA2 MOEMS-Based Programmable Diffraction Gratings for Future Astronomical Instruments 63 WA3 Reliability-based Characterization of Single Crystalline Silicon Micromirrors for Space 65 Applications WA4 High-Fill-Factor, Tip-Tilt-Piston Micromirror Array with Hidden Bimorph Actuators and 67 Surface Mounting Capability WA5 A Tunable Microlens with 0.9 mm Scan Range and Small Lateral Shift 69 WB Submicrometer and Three Dimensional WB1 Nanoimaging: Plasmonics and Beyond the Plasmonics 71 WB2 Silica Microdisk Coupled Resonator Optical Waveguide 73 WB3 Liquid Immersion Angled Exposure for 3D Photolithography 75 WB4 A CMOS Compatible Low Temperature Process for Photonic Crystal MEMS Scanner 77 WB5 Atomic Layer Deposition of Optical Coatings Inside Microchannels 79 WB6 Direct Visualization of Light Propagation Inside a Planar Artificial Compound Eye using a 81 Rhodamine 6G Doped Photosentive Polymer Resin WC Nanofabrication, Assembly and Alignment WC1 Optoelectronic Tweezers Integrating with Lensless Imaging for Wide Field Interactive 83 Optical Manipulation WC2 Nano-Stamping of Quantum Dot Based Inorganic Light Emitting Devices 85 WC3 High Vertical Resolution 3D Nanoimprint Technology for Nanophotonic Applications 87 WC4 Quantum Dot Photodiodes Fabricated by Electrostatic Layer-by-layer Self-Assembly 89 3 of 5 11/3/2009 8:13 AM

5 WC5 Enhanced Trapping and Rotation of Sub-micron Particles and Cells Through 91 Nanostructures WC6 Plasmonic Nanoarrays made in Porous Alumina Template 93 WP Poster Session WP1 Spectroscopic Studies in Protein Films with Highly Sensitive Single-Mode Guided-Wave 95 Plataforms WP2 A Novel White-Light Scanning Interferometer for Absolute Nano-Scale Gap Thickness 97 Measurement WP3 Introducing Triangular Lattices to Dynamic Photonic Crystal Structures for Optical Storage 99 and Processing WP4 High System Performances with Plasmonic Waveguides and Functional Devices 101 WP5 Simulation of Coupling Between Parallel SOI Nanowaveguides and its Dependence on 103 Temperature WP6 Sensitivity Dependence on the High Index Coating Thickness of the Biosensor using a 105 Guided Mode Resonant Filter WP7 A Nano-Ring Resonator Based on 2-D Hexagonal-Lattice Photonic Crystals 107 WP8 Design, Fabrication and Characterization of Monolithically Integrated Vertical-Cavity 109 Surface-Emitting Laser(VCSEL)and Resonance Enhanced Photodetector for Biomedical WP9 Two Dimensional Photonic Crystal Switches 111 WP10 Micromachined Reflective X-ray Concentrator For Microanalysis 113 WP11 CMOS-MEMS Based Optical Phase Shifter Array with High Fill Factor 115 WP12 Fabrication of Arrayed Waveguide Grating by the Casting Method using a Micro-die 117 WP13 Development of a Micro Displacement Sensor with Monolithic-Integrated 119 Two-Dimensionally Distributed Photodiodes WP14 Thin Film ph-sensitive Hydrogel Based Chemiresponsive Surface Plasmon Resonance 121 Device WP15 Optical Image Analysis of the Novel Ultra-Lightweight and High-Resolution MEMS X-ray 123 Optics WP16 Air Friction Loss of Comb Drive Resonant Micro Mirrors for Laser Scanning Display 125 WP17 Optical Characterization Technique for MEMS Comb-Drive Resonators of 5 11/3/2009 8:13 AM

6 WP18 Tunable MEMS-based Optical Linear (1D) Diffusers for Dynamic Laser Beam Shaping and 129 Homogenizing WP19 Large-Aperture, Rapid Scanning MEMS Micromirrors for Free-Space Optical 131 Communications WP20 Manufacturability Analysis of Assembled FT Microspectrometer 133 WP21 Design and Fabrication of 2-DOF Silicon Micromirror with Sloped Electrodes 135 WP22 A MEMS Scanner with Four Orthogonally Arranged Rotators Actuated by Electromagnetic 137 Force WP23 Comb- Actuated Resonant Torsional Scanner for Microdisplays 139 WP24 Variable-Focus SU-8 Membrane Mirror with Enhanced Stroke using Feedback Control 141 Thursday, 20 August 2009 ThA Subwavelength Binary Photonic Structures ThA1 Multifunctional Optofluidic Microscope 143 ThA2 Color-Changing Photonic Crystal Based on Liquid Infiltration and Exfiltration 144 ThA3 Demonstration of a Monolithic Dielectric Microstructured Surface with a Reflectivity of 146 ThA4 Large-Scale Application of Binary Subwavelength Structures 148 ThA5 RGB Color Filter Comprising Aluminum Film with Surface Plasmon Enhanced 150 Transmission through Sub-Wavelength Hole-Arrays ThB Optical Communications ThB1 Low Power 3D MEMS Optical Switches 152 ThB2 A Mixed-signal Analysis Tool for MOEMS based on Circuit Simulator 154 ThB3 All Optically Driven MEMS Deformable Mirrors via Direct Cascading with GaAs/GaP Wafer 156 Bonded PIN Photodetectors ThB4 Electrically Separated Two-Axis MEMS Mirror Array Module for Wavelength Selective 158 Switches 5 of 5 11/3/2009 8:13 AM