FluoroCouncil Presentation at SEMI s Sustainable Manufacturing Forum at Semicon West July 12, 2016

Transcription

1 FluoroCouncil Presentation at SEMI s Sustainable Manufacturing Forum at Semicon West 2016 July 12, 2016

2 About the FluoroCouncil Represents leading manufacturers of fluoropolymers, fluoroelastomers, and fluorotelomer-based surface treatment agents and surfactants Member companies: Archroma Management LLC - Arkema France Asahi Glass Co., Ltd. - Daikin Industries, Ltd. Solvay Specialty Polymers - The Chemours Company LLC 3

3 Focus of the FluoroCouncil Support end use market access to the unique and critical benefits of FluoroTechnology Facilitate global transition from long-chain per- and polyfluoroalkyl substances (e.g. PFOA) to more sustainable alternatives Seek science- and risk-based regulatory outcomes that support this transition 4

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5 FluoroTechnology Fluorotelomer-based products - Fluoroplastics - Fluorochemicals Fluorotelomer-based products: polymers and surfactants Short fluorinated chains that may be attached to organic polymer backbones Modify material properties: surface modification & protection, water & oil repellency; soil resistance, wetting and spreading Applications: Textiles, Paper, Stone & Tile, AFFF, Surfactants, Etching agent additives Fluoroplastics & Fluoroelastomers High molecular weight polymers PTFE, Melt Copolymers, Thermoset Elastomers Fluorinated backbone Material properties: chemical resistance, thermal stability, resilience (elastomers) Applications: Aerospace Materials, Hydraulic tubing, Chemical Processing, Semiconductor Manufacture, Transportation Fluorochemicals Refrigerants Cleaning solvents Blowing agents Etching agents CFC alternatives (e.g., HFCs) Not FluoroCouncil activities 6

6 Fluorotelomer or ECF-based - Side-chain Fluorinated Polymers and Surfactants The key functionality is the perfluoroalkyl chain A perfluoroalkyl chain F(CF 2 ) n -, where n is the number of fluorinated carbons, is attached to a polymer backbone (e.g., acrylic polymer) The polymer backbone is NOT fluorinated Perfluoroalkyl chain F(CF 2 ) n - Perfluoroalkyl chain is derived from a perfluorinated chemical raw material Connector Connector is a linking group of atoms that connects the perfluoroalkyl chain to the polymer backbone PFOA was never a raw material, but a byproduct, impurity, and potential degradation product Regulatory focus on long-chain fluorotelomer (>= C8) or ECF -based sulfonated (>=C6) substances Polymer Backbone 7

7 Fluorotelomer or ECF-based Applications (e.g., in Photolithography) In Semicon Industry - Mainly found in process chemicals Fluorinated Surfactants Etching agent additives For compound semiconductors and piezoelectric ceramic filters. In photolithography process to enhance surface wettability of the etchant Photoacid Generator (PAG) additives Anti-reflective coating (ARC) additives to provide low surface tension and regulate reflective characteristics of the coating Fluorinated Polymers Fluorinated X-linking agents in photoresists and antireflective products Protective coatings for Printed Circuit Boards 8

8 Fluoroplastics (Fluoropolymers, e.g., PTFE, PFA, PVDF) The polymer backbone is fluorinated The polymer consists of several tens to hundred thousands of monomer units MW from 500k to >10 million PFOA can be used as a processing aid and is not a monomer or reactant Regulatory focus on processing aids 9

9 Fluoroplastics Applications in the Semiconductor Industry Primarily used as a material of construction Typical uses of Fluoroplastics in fluid handling in semiconductor manufacturing: Wafer carriers, chemical tanks Tubing, piping, valves, fittings, storage tanks for DI water, chemical dispensing and distribution. Filtration media Fluoroplastics are also used in plants that manufacture high purity chemicals, including storage and transportation to a semiconductor fab. 10

10 The Regulatory Environment PFOA and other long-chain fluorinated chemicals are under significant global regulation and NGO pressure: North America EPA SNURs, Environment Canada, California Prop 65, drinking water and site cleanup issues Europe REACH restriction, Norway, Germany, Sweden International Stockholm POPS Convention Manufacturing in China/India/Russia under no existing regulation 11

11 U.S. Regulatory History Highlights EPA expresses concern with PFOS/PFOA 2000 EPA begins to approve short-chain alternatives 2006 Carpet SNUR for long chain finalized 2013 End of Stewardship Program phase out of PFOA and related substances M phase-out of PFOS/PFOA complete 2002 Start of PFOA Stewardship Program 2006 EPA issues chemical action plan for PFOA and other long-chain substances 2009 Proposed SNUR for remaining uses of long chain

12 PFOA Stewardship Program Success Baseline Direct Emissions Product Content Source: EPA Summary Tables Baseline = Year 2000 or other Some signatories report data ranges The graphic summary contains estimates Direct Emissions: Manufacturing emissions data for PFOA, PFOA salts and higher homologues Product Content: Product content data for PFOA, PFOA salts, higher homologues and precursors data reports expected in 2016 Baseline 13

13 Transition to alternatives Achieving full replacement of PFOA and long chain perfluorochemicals has required a wide range of activities Developing new technology Equal performance Improved health and environmental profile Significant investment (>$700M) Qualifications throughout the supply chain Maintaining best practices with alternatives Policy approaches that foster transition 14

14 Current State Manufacture of PFOA in the U.S. ceased in Use of PFOA and other long-chains by companies who signed the US EPA PFOA Stewardship Program has ceased pursuant to the goals of the program. These companies have completed this transition globally as of

15 Current State (cont d) Despite challenges, major progress is occurring Virtual elimination of long chains in some industries Ex: carpets in U.S.; semiconductor replacement of PFOS Transition and qualification of fluoropolymers made with new processing aids is occurring in all major industries Key issue: Non-Stewardship companies continue to provide long chains, which has slowed and complicated transition Unwarranted expansion of concerns to all FluoroTechnology in Europe 16

16 Role of the Semiconductor Industry The Semiconductor industry can contribute to this global regulatory strategy by working with its supply chain to transition to products made with short-chain alternatives. Key Questions you can ask to support regulation: Are components made of fluoropolymers made without PFOA? Do chemicals used in the process contain long chain fluorinated chemicals? Has the supply chain made the transition to short chains? Can a certification program help drive the transition and meet regulatory requirements? Collaboration with Fluorocouncil in support of FluoroTechnology 17

17 Key Messages Fluoroplastics are essential materials of construction to SEMI member companies Fluorotelomer and ECF-based products are essential substances enabling today s photolithography Long chain PFCA s are being regulated globally; alternatives exist, have been reviewed by regulators, and are in use Work with your supply chain to stay ahead and source sustainable materials FluoroCouncil seeks to collaborate and partner with SEMI to support FluoroTechnology 18

18 Thank you.