surface metrology. As the world s leader in precise, noncontact, 3-D surface metrology, Zygo has continually

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1 N E W V I E W

2 As the world s leader in precise, noncontact, 3-D surface metrology, Zygo has continually provided new advanced measurement capabilities to its existing line of powerful and reliable 3-D Surface Profilers. The NewView 5000 is the latest addition to the proven, award-winning NewView product line. The NewView 5000 represents the latest innovations in 3-D surface metrology. surface metrology.

3 Control your Disk Drive and Head Manufacturing process. Measure sliders Characterize form, surface texture, step heights, etch depths, angles and more at all steps of the manufacturing process from wafer process to slider fabrication to HGA and HSA assembly of thin film magnetic heads. The NewView 5000 provides fully-automated and production-ready measurements of critical head parameters of inductive thin film, MR thin film and giant MR (spin valve) thin film sliders at the various form factor sizes and designs. The NewView 5000 is designed to meet the challenges and rapidly changing requirements of conventional and leading-edge magneto-optical data storage technologies of the future. head, PTR at under 3 secs. per head (bar level). Increased automation and gauge capabilities at 6 sigma repeatability and reproducibility. The NewView 5000 has all the power and tools you need to do 100% in-process ABS and PTR measurements of your sliders for maximized process control monitoring, yield enhancement, and cost reduction. Measure disks and substrates The NewView 5000 provides fast, accurate surface characterization microroughness and waviness, laser- texture, dub-off and more at all steps of the manufacturing process The NewView 5000 offers advanced surface metrology capabilities and process control for sensor recession (PTR), air bearing surface flatness (ABS), multi-level cavity depth, suspensions, and more. Control the entire ABS forming process from etch to final lap, at wafer, bar, or slider level. Definitive, fast, production measurements of ABS at under 5 secs. per High -volume manufacturing and production process The NewView 5000 integrated into production workflow for in-line process control metrology

4 from blank metal substrates to coated disks and magnetic media. Alternative hard disk form factors, substrates, and materials like optical disks and floppy disks can also be characterized. The NewView 5000 generates the quantitative parameter data related to the head-disk interface to provide you with the necessary information for rapid process control. Advanced Surface Metrology and Analysis The NewView 5000 uses noncontact scanning white light interferometry to acquire ultra-high Z resolution data. Zygo s proprietary vertical scanning technique and patented frequency domain analysis provides 0.1 nm vertical resolution in a single measurement. A high performance, closed-loop piezo-based scanning transducer, employing low noise linear capacitive sensors, ensures extremely accurate and repeatable linear motion over the full range. Optically tuned imaging objectives are used with a continuously variable image zoom for high quality and enhanced imaging, optimal field of view, and resolution. Six precision indexed positions are preset for optimal measurement of the various form factor sliders. Calibration can be easily verified and performed in the field with the provided NIST-traceable standards. The NewView 5000 features a proprietary metrology foundation design including an ultra-rigid support structure, granite base, reduced footprint vibration isolation table, and integrated workstation. The results are precise measurements with unparalleled speed and accuracy for superior GRR. Productivity is enhanced with a number of standard and optional automation modules. The NewView 5000 is well suited for production environments by providing full automation, thereby eliminating operator variability and increasing throughput and yields. A motorized 5-position objective turret under programmable software control with position sensing eliminates operator error. Programmable stages for precise and automated sample positioning allows for repetitive control of measurements to meet production throughput requirements. Standard and custom sample fixturing is available to provide easy and repetitive sample loading. Integrated autofocus makes sample focusing easy and automatic. The NewView 5000 includes Zygo s advanced and comprehensive MetroPro metrology software running under WindowsNT on the latest generation Pentium -based PC. MetroPro is standard and provides full system control capabilities and quantitative surface metrology analysis on hundreds of reportable parameters such as roughness, step heights, power spectra, bearing ratio and much more. MetroPro s intuitive and graphical user interface makes it easy to learn Rapid process feedback and monitoring of part tolerances with maximum efficiency

5 and use. Real time on-screen SPC and user-definable pass/fail flagged results are easily displayed and logged, eliminating operator subjectivity. You can use any of the standard measurement applications built into MetroPro, or easily create customized applications to handle your measurement needs with maximum efficiency. All applications can be password protected to prevent accidental changes in measurements or process setup. This functionality, under WindowsNT, allows it to easily handle data files and all networking requirements. At Zygo, our ability to support your business starts with an in-depth understanding of your process. By studying the details of your production process, we can tailor a precision solution of measurement and automation systems. Your solution is engineered to take advantage of the particular strengths of your process, and improve the areas that are holding you back from efficiency and maximum yield. We combine the most proven sensor technology with tested analysis software and parts handling automation to create a complete automated optical inspection system to improve your efficiency. For a complete evaluation of how the NewView 5000 can help improve and refine your process to maximize throughput and enhance yield, call Zygo today. Worldwide service and support Zygo is committed to maintaining a presence around the globe, giving you the dedicated service and support you deserve, wherever you re located. We respond quickly to your needs because we understand the effects of downtime on a high-volume precision manufacturing production line. We have field representatives in over 40 countries around the world, and each is always prepared to undertake an on-site analysis and devise a solution that is just right for you. Corrections to manufacturing process. Reduction in scrap and rework, resulting in increased yield and lower costs.

6 Zygo Advanced Metrology Systems Laurel Brook Road Middlefield, CT Voice: Fax: Zygo Automation Systems 2505-A Trade Centre Avenue Longmont, CO Voice: Fax: Zygo Vision Systems 2193-B Anchor Court Newbury Park, CA Voice: Fax: Zygo Advanced Imaging Systems 650 North Mary Avenue Sunnyvale, CA Voice: Fax: Zygo Corporation. Zygo and the Zygo logo are registered trademarks of Zygo Corporation. WindowsNT is a registered trademark of Microsoft Corporation. Pentium is a registered trademark of Intel Corporation. Covered by one or more of the following US patents: 5,402,234; 5,398,113; 5,558,003. Other U.S. and foreign patents pending. SB M 7-98