SUSTAINABLE PRODUCTIVITY

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1 SUSTAINABLE PRODUCTIVITY Dereck D Devlin General manager Atlas Copco Taiwan September 2nd 2015

2 SUSTAINABLE PRODUCTIVITY Working with Customers to ensure the most sustainable productivity is sustainable and efficent Customer s Needs Reduce the Electricity Charges for production Continues reliable operation, reduce down time Increase overall efficiency of plant room and utilities Utilize latest technology's Reduce Life Cycle Costs

3 Typical applications of compressed dry air (CDA) - Pressure range : from 7 to 10,5 bars - PDP : -40 C average to -70 C for critical applications - Application : Cooling, purging, pneumatics tools - Cooling : Scanning lens, bonding tips - Purging : vacuum pumps, venturi pumps - Pneumatics : instrumentation IC functionality, ageing test, power & performance, assembly process - Pneumatics : chips sorting, packaging - Rough vacuum : pick and place, wire bonding - ZG booster for cooling of the scanning lens (SCAD) - ZS low pressure for WWT 3

4 COMPRESSED AIR AND UTILITY VACUUM Around 10%-12% of the electrical energy in industry today is used to generate compressed Air and vacuum. Air leaks account for a mayor energy waste, a 10mm hole in a system can waste around 5% of your total air demand both in compressed air and vacuum. Generating too high a pressure can be wasteful too! 1 bar increase in air pressure costs 7% increase in energy. Running equipment when not needed can waste substantial amounts of energy, a typical vacuum pump running unloaded consumes 90% of the full load demand

5 WHAT IS HYBRID? What is the most efficient car technology? Diesel & Elecric drive hybrid What is the most efficient compressor room? Turbo & ZR VSD hybrid 5

6 Rough vacuum 6 2 main applications of rough vacuum : Pick and place of the chips after sawing operation : -24 inch of mercury at point of use Wire and Die bonding dry process : Tray holding : -22 Inch of Mercury Main technology used : Vacuum venturi (CDA) and liquid ring Main targets : Reduce water moisture contents and reduce CDA usage (number of air ejectors). Convert from Vacuum Venturi to Plant Vacuum. Rough SER calculations shows a benefit of 30% when using GV screw instead of Liquid Ring (3,6 KW /100cfm versus 5,2).. And N2 rough purity gas application : PPM level (60% of total N2 usage) : Ideally less than 0.5 PPM for purging process and wafer storage cabinets to prevent oxidation

7 7 ROUGH VACUUM RANGE GHS VSD+ Oil sealed rotary screw pumps with variable speed drive Optimal operating range from 400mbar(a) to 10mbar(a) Nominal displacement : m 3 /h Air cooled version Noise level db(a) Energy savings (average of 50%) - Variable speed drive (VSD) - Plug and play system - Elektronikon MK5 Graphic - Provided with an inlet filter, inlet valve and canopy (low noise level) - Best in class in oil retention - Humid version and Turbo version

8 8 VARIABLE SPEED FEATURE Variable speed drive Set point control BENEFIT Average 50% energy savings Optimize the energy you use to maintain your process vacuum level and optimize your process efficiency and performance

9 ENERGY EFFICIENCY Use the energy efficently Recover heat of compression by using the cooling water to heat boiler feed water Generate Air at the optimum pressure for the application don t waste power pressurizing to a higher level than needed Slow down the units to the demand needed with Variable speed equipment Ensure maintenance is optimized and the systems checked for leaks Modern well maintained equipment can give over 30% energy savings

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11 COMMITTED TO SUSTAINABLE PRODUCTIVITY.

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