Overview. MICROgARd LIqUId FILTeRS

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1 CONTAMINATION CONTROL SOLUTIONS MICROgARd LIqUId FILTeRS UPE and nylon liquid filters delivering superior cleanliness and high retention capabilities and eliminating potential sources of contamination in bulk chemical systems Overview Microgard TM filters deliver high-purity solutions for bulk chemicals and bulk chemical distribution systems, and eliminate potential sources of contamination by removing particles and gels at the start of the process. Manufactured in a world-class cleanroom environment, Microgard filters ensure better initial cleanliness, lower contaminant extractables than polypropylene (PP), and higher chemical compatibility in solvents than polysulfone (PS) or polyethersulfone (PES) membranes. Optimized for a Variety of Chemical Applications Microgard filters are optimized for filtration of a variety of chemical applications. Microgard Plus, Microgard Plus LE, Microgard PI, Microgard UPE and Microgard UPX filters are available in an allpolyethylene construction, while the Microgard LE Nylon filter is constructed of a nylon membrane. Choice of UPE or Nylon Membranes Microgard filters are constructed of ultra-high molecular weight polyethylene (UPE) or nylon membranes, depending on the filter. The UPE membrane, utilized in Microgard Plus, Microgard Plus LE, Microgard UPE and Microgard UPX, promotes high-purity photochemical filtration with an excellent retention rating. With retention ratings as low as 3 nm, Microgard filters take advantage of some of the tightest membrane technologies available in the market. The asymmetric UPE membrane increases flow and reduces pressure drop, resulting in reduced defects and increased throughput. The nylon membrane, utilized in Microgard LE Nylon, promotes maximum flow and provides high retention capabilities with its nonsieving retention capabilities. With retention ratings to 1 nm and at twice the thickness of standard nylon filters, Microgard LE Nylon returns twice the performance and ensures low defectivity in advance chemicals. The hydrophilic nylon membrane eliminates pre- wetting, resulting in reduced chemical usage and less system downtime during filter changeouts. With either construction, these filters provide low surfactant binding, excellent wettability and superior downstream cleanliness and do not require prewetting, making them ideal for solvent-based chemicals. Microgard PI filters have been optimized for filtration of polyimide and other high-viscosity chemicals. Additional downstream supports ensure ultimate durability in the most demanding applications. The following table summarizes the Microgard filter attributes.

2 Filter Attributes Filter Type Retention Membrane Construction Applications Microgard Plus LE 3 nm Hydrophobic UPE Asymmetric Solvent-based chemicals 5 nm 1 nm LE Nylon 1 nm Polyamide (nylon ) Asymmetric Aqueous and solvent-based nm chemicals Plus 1 nm Hydrophobic UPE Symmetric Solvent-based chemicals nm 3 nm.5 μm.1 μm. μm Microgard UPE/UPX.5 μm Hydrophobic UPE Symmetric Solvent-based chemicals.1 μm. μm Microgard PI. μm Hydrophobic UPE Symmetric Polyimide and other.5 μm high-viscosity chemicals 1. μm Features and Benefits Benefits Features UPe Filtration Nylon Filtration Asymmetric and sub 1 nm membrane technology Lower cost of ownership Reduced particle contamination The asymmetric membrane with retention ratings to 3 nm enables Microgard Plus and Plus LE to increase flow and reduce pressure drop, resulting in reduced defects and increased throughput. Microgard filters do not require prewetting with solvent-based photochemicals, resulting in lower operational costs and a more consistent, reliable process. The all-polyethylene UPE construction lowers metallic and ionic contamination that can leach from other materials. The nylon membrane with retention ratings to 1 nm and at twice the thickness of standard nylon filters enables Microgard LE Nylon to return twice the performance and ensure low defectivity in advance chemicals. Microgard LE Nylon eliminates prewetting, resulting in reduced chemical usage while minimizing system downtime during filter changeouts. The proprietary cleaning technology of the Microgard LE Nylon filter delivers the lowest levels of organic, metal extractables and particle shedding. Optimized for a variety The Microgard Plus, Microgard Plus LE, Microgard LE Nylon offers superior of chemical applications Microgard PI, Microgard UPE and wettability, making it ideal for aqueous Microgard UPX filters provide low and solvent-based chemicals. surfactant binding, excellent wettability and superior downstream cleanliness and do not require prewetting, making them ideal for solvent-based chemicals. Microgard PI has been optimized for filtration of polyimide and other high-viscosity chemicals. entegris, INC.

3 Microgard Plus, Plus LE and LE Nylon Filters Specifications Plus/Plus Le Le Nylon Materials: Membrane Hydrophobic UPE Polyamide (nylon ) Surface area UPX 1 nm 9 cm (9.9 ft ) Others 8 cm (8. ft ) 1 1 nm 13, cm (1.1 ft ) 1 7 cm (7.5 ft ) nm 1, cm (1.9 ft ) Others 1, cm (1.7 ft ) nm, cm (5.8 ft ) 1, cm (15.1 ft ) Others, cm (1.5 ft ) 3 3, cm (3.3 ft ) 1 asym. 13, cm (1. ft ) asym., cm (8. ft ) Supports, core sleeve HDPE HDPE O-ring EPDM and TEV* TEV Operating Maximum forward.3 MPa (3. bar, 5 psid,.8 MPa (.8 bar, 1 psid, conditions: differential pressure 3.5 kg/cm C (8 F).9 kg/cm C (8 F) Maximum reverse. MPa (. bar 35 psid,.1 MPa (.1 bar, 31 psid, differential pressure.5 kg/cm C (8 F). kg/cm C (8 F) Operating temperature C (1 F) 5 C (1 F) * TEV: Teflon fluoropolymer encapsulated Viton fluoroelastomer Performance Data Differential Pressure (kpa) Differential Pressure (bar) Microgard Plus 1 Filters Microgard Plus LE 1 Asymmetric UPE Filters nm nm nm 5 nm nm µm 8. 1 nm 8..5 µm.... µm Flow Rate (L/min) 1 C (8 F) Flow Rate (L/min) 1 C (8 F) Microgard LE Nylon 1 Cartridge Filters nm nm Flow Rate (L/min) 1 5 C (77 F) Differential Pressure (psid) Differential Pressure (psid) Differential Pressure (bar) Differential Pressure (psid) entegris, INC. 3

4 Dimensions MICROGARD PLUS/PLUS LE/LE NYLON Code Code UPX Ø 9 mm (.7 ) Ø 81.5 mm (3.1 ) REF Ø 83 mm (3.7 ) REF 1 filter length = 5. mm ±1.5 mm (9.5 ±. ) filter length = 89. mm ±3. mm (19. ±.1 ) 3 filter length = 73.7 mm ±.5 mm (8.85 ±.18 ) 1 filter length =.3 mm ±1.5 mm (1.33 ±. ) filter length = 5.5 mm ±3. mm (19.9 ±.1 ) 3 filter length = 75. mm ±.5 mm (9.53 ±.18 ) 17.3 mm (.8 ) 11 mm ±1.5 mm (.33 ±. ) 17.3 mm ±1.5 mm (5.1 ±. ) End View Chemlock Key on Cartridge Ø 95.3 mm (3.75 ) Ordering Information* 1 cartridge with key =.5 mm ±1.5 mm (1.5 ±. ) cartridge with key = 51.7 mm ±3. mm (.11 ±.1 ) Microgard Plus/Plus Le /Le Nylon Filters Part Number CW K K = Optional Chemlock key attached to cartridge for use O-ring with Chemlock LT = TEV (Plus) Pleat housing ONLY LE = EPDM (Plus) M= M pleat Cartridge ST = TEV (Plus LE/LE nylon) P = Standard Length 1 = TEV O-ring (only ") Code S = CT = Special clean for.3,.5,.1 = Code 1 = 1 and. μm with TEV o-rings, S = Code 5 = (special clean is standard for - Retention sub-.3 μm products) with spear 3 = 3 Rating Filter Type G =. μm A = Symmetric V =.1 μm UPE Z =.5 μm S = Asymmetric Y = 3 nm UPE X = nm N = Nylon T = 1 nm F = 5 nm K = 3 nm * This information serves as a guide. Please contact your local representative to confirm part numbers. entegris, INC.

5 Microgard UPE/UPX Filters Specifications UPe Materials: Membrane Hydrophobic UPE Hydrophobic UPE Surface area 1 85 cm (9.1 ft ) 5 cm (5. ft ) 17, cm (18.3 ft ) 1 11, cm (11.8 ft ) 3 5,5 cm (7. ft ) UPX Supports, core sleeve HDPE HDPE O-ring TEV, EPDM TEV or Kalrez perfluoroelastomer Operating Maximum forward.35 MPa (3.5 bar, 5 psid, 3.5 kg/cm 5 C (77 F) conditions: differential pressure Maximum reverse differential pressure Operating temperature.7 MPa (.7 bar, psid,.8 kg/cm C (8 F) C (1 F) Performance Data Differential Pressure (bar) Differential Pressure (bar) 1. Microgard UPE Cartridge Filters µm µm. µm Typical Flow Rate (L/min) 1 C (8 F) Microgard UPX Cartridge Filters µm µm. 8.. µm Differential Pressure (psid) Differential Pressure (psid) Typical Flow Rate (L/min) 1 C (8 F) entegris, INC. 5

6 Dimensions MICROGARD UPE Code 1 filter = 5. mm ±1.5 mm (9.5 ±. ) filter = 89. mm ±3. mm (19. ±.1 ) 3 filter = 73.7 mm ±.5 mm (8.85 ±.18 ) End View Chemlock Key on Cartridge Ø 9 mm (.7 ) Ø 95.3 mm (3.75 ) Code 5 1 filter =.3 mm ±1.5 mm (1.33 ±. ) filter = 5.5 mm ±3. mm (19.9 ±.1 ) 3 filter = 75. mm ±.5 mm (9.53 ±.18 ) 1 cartridge with key =.5 mm ±1.5 mm (1.5 ±. ) cartridge with key = 51.7 mm ±3. mm (.11 ±.1 ) Ø 9 mm (.7 ) 1 filter = 39. mm ±. mm (1.17 ±.8 ) filter = 555. mm ±. mm (1.85 ±.1 ) 3 filter = 797. mm ±. mm (31.38 ±.1 ) MICROGARD UPX Code : 11. mm ±1.5 mm (.33 ±. ) 1 : 5. mm ±1.5 mm (8.8 ±. ) End View Chemlock Key on Cartridge Ø 8 mm (3.1 ) Ø 95.3 mm (3.75 ) : 17.3 mm ±1.5 mm (5.1 ±. ) 1 :.3 mm ±1.5 mm (9.5 ±. ) 1 cartridge with key =.5 mm ±1.5 mm (9.71 ±. ) Ordering Information* Microgard UPe Cartridge Filters Part Number CWU P K K = PFA Chemlock key (optional) for use O-ring with Chemlock LT = TEV housing only LE = EPDM (1 and only) Cartridge Length 1 = 1 = 3 = 3 Cartridge Configuration = Code 5 = Code 5 Retention Rating Z =.5 μm V =.1 μm G =. μm Microgard UPX Cartridge Filters Part Number CWU P K K = PFA Chemlock key (optional) for use O-ring with Chemlock 1 = TEV housing only K1 = Kalrez** (1 and only) Cartridge Length S = 1 = 1 Cartridge Configuration = Code Retention Rating Z =.5 μm V =.1 μm G =. μm * This information serves as a guide. Please contact your local representative to confirm part numbers. **Kalrez o-ring available in 1 configuration only. entegris, INC.

7 Microgard PI Filters Specifications Materials: Membrane Hydrophobic UPE Surface area nm 88 cm (9.7 ft ).5 nm, 1. μm 8 cm (8. ft ) Supports, core sleeve HDPE O-ring TEV Operating Maximum forward.39 MPa (3.9 bar, 5. psid, kg/cm ) conditions: differential 5 C (77 F) Maximum reverse.55 MPa (.55 bar, 39.3 psid,.8 kg/cm ) differential 5 C (77 F) Operating temperature C (1 F) Performance Data Microgard PI 1 Cartridge Filters Dimensions MICROGARD PI 5. mm ±1.5 mm (8.8 ±. ) Differential Pressure (kpa) 1. µm.5 µm 1. µm 1 3 Typical Flow Rate (L/min) Ordering Information* 3 1 Differential Pressure (psid).3 mm ±1.5 mm (9.5 ±. ) End View Chemlock Key on Cartridge Ø 95.3 mm (3.75 ) Ø 8 mm (3.1 ) Microgard PI Cartridge Filters Part Number P I A 1P1 K K = Optional Chemlock key attached to cartridge Retention for use with Chemlock Rating housing ONLY G =. μm H =.5 μm A = 1. μm 1 cartridge with key =.5 mm ±1.5 mm (9.71 ±. ) * This information serves as a guide. Please contact your local representative to confirm part numbers. entegris, INC. 7

8 For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit and select the Customer Service link for the center nearest you. Terms and Conditions of Sale All purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit and select the Legal Notices link from the footer. Entegris, the Entegris Rings Design, Microgard and Chemlock are trademarks of Entegris, Inc. Teflon is a registered trademark of E.I. du Pont de Nemours and Company. Viton and Kalrez are registered trademarks of DuPont Dow Elastomers, L.L.C. entegris, INC. Corporate Headquarters 19 Concord Road Billerica, MA 181 USA Customer Service Tel Customer Service Fax In North America Entegris, Inc. All rights reserved Printed in USA ENT-313