2016 Target 2016 Achievements TSMC: Waste Production Disposal Vendor: Recycle and Treatment Other Industries: Reuse 14.

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1 Material Issue Management Our Strategies Source Reduction Promote raw materials usage reduction, require process tool suppliers to review and minimize chemical usage Circular Economy Study and develop waste reuse and recycling technology, encourage and support vendors to develop recycling technology Audit & Guidance Initiate within Science Park Industry Association to establish Vendor Assessment Standard and leverage the power of association members to upgrade the overall quality of waste industry TSMC 2020 Vision 2020 Goals Maintain waste recycling rate >95% and waste landfill rate < 1% Unit waste output < 0.32 kg/ 8 e wafer-layer TSMC understands the importance of waste resource management in green manufacturing and our supply chain. We manage waste as a resource, categorize and collect waste at the source, raise waste recyclability, and also collaborate with waste treatment and recycling facilities to search for or develop possible recycling measures to reduce the amount of waste sent to incinerators and landfills. TSMC also adopts proactive actions to strengthen vendor auditing effectiveness to ensure legal and proper recycling and treatment of wastes. Life Cycle Management of Transportation Recycled Products TSMC GPS System: - Deviation from designated route - Unusual or extended stops Target Achievements 2017 Targets TSMC: Production Disposal Vendor: Recycle and Treatment Other Industries: Reuse Achieve waste recycling rate of 95% and above Achieve waste landfill rate below 1% Rate 95% Landfill Rate 0.12 % The 7 th consecutive year less than 1% Rate 95% Landfill Rate 1% New Goal Unit waste output < 0.36 kg/ 8 e wafer-layer 14.6% On-site Reuse Production 85.4% Production Piping segregation reduction management In-house pretreatment and reuse 5% Treatment (Incineration /Landfill) 1% Energy Recovery Process.4% On-site Facility Audit Equipment availability and ESH management Product/ throughput 30 types Turning waste into more than 30 types of recycled products As other industrial raw material Ex. Optoelectronics industry, Chemical industry. Products life streams track Monthly sales check Receiving industries, customers, and their applications check Receipt check Achieved Surpassed 78

2 TSMC actively collaborates with process tool suppliers to reduce chemical usage and waste. In order to sustainably use our resources, the first priority of our waste management is source reduction; the second is waste reuse on-site and material recycling, followed by energy recovery, and finally disposal through incineration and landfill. In TSMC, the usage of all chemicals is reviewed and differentiated for its ultimate treatment after use. Through 25 different types of wastewater classification system (or as much as 36 types for new factories), TSMC can reuse and recycling chemical wastes, which are then transported to our contractors to produce more than 30 types of recycled products that will be circulated in use in other industries. In addition, in order to ensure proper recycling and treatment of our waste, we have established strict vendor control procedures and regular on-the-spot audit are required to properly track the flow of recycled product downstream. 95% Recycled (321,935 Metric Tons) 14.6% - TSMC in-house reuse and recycling.4% - Outsource material recycling 1.0% - Outsource energy recycle (Alternative fuel) 5% Non-recycled (16,938 Metric Tons) 4.8% - Incineration/Treatment 0.12% - Landfill 95% Rates 321,935 Metric Tons 338,873 Metric Tons Total Quantity and Treatment Status Statistic Total Outsourcing Disposal 123, , ,050 6,167 6,671 7,163 In-house Rate Landfill Rate 123,754 6, , ,984 7,309 6,777 46,889 18, ,280 6,671 Taiwan Sites Overseas Sites Unit: Metric Tons/Year ,050 7,163 General Hazardous ,591 7,309 33,158 4,301 42,180 5,156 61,026 5,436 90,596 1, ,100 1, ,024 1, ,873 6, , ,899 5,097 4, ,164 1,974 2,212 2, Taiwan Sites Overseas Sites Unit: Metric Tons/Year Taiwan Sites Overseas Sites Unit: Metric Tons/Year Taiwan Sites Overseas Sites Unit: % Taiwan Sites Overseas Sites Unit: % Note 1: Total waste = Outsourcing disposal waste + In-house recycling waste = General waste + Hazardous waste Note 2: Hazardous wastes are defined by local governments

3 Reduction and Resource Management Due to the Taiwan EPA s expanded NH 3 -N standards for wastewater influent in and tighter limits in as well as the continued increase in TSMC s advanced technology capacity and increased demand for raw materials usage, TSMC forecasts that without adopting proactive waste reduction activities, the amount of waste outsourced per 8 e wafer-layer would have increased to 0.49kg in from 0.25kg in, and forecasts a potential increase to 0.67kg in Therefore, in, TSMC formed a cross-organization waste management task force led by a TSMC Vice Unit Output Trendchart President to promote raw material source reduction and in-house waste reuse and recycling and conduct company-wide usage and waste reduction projects. In, TSMC invested in waste regeneration equipment and collaborated with suppliers to optimize processes to minimize raw material use and improve equipment with monthly tracking of execution progress. The amount of waste outsourced for processing per 8 e wafer-layer has been reduced to 0.35kg from the 0.49kg forecast. In 2017, our company-wide usage and waste reduction projects have been expanded to reduce the unit waste output to 0.32kg in Unit: kg / 8 e wafer-layer 0.67 Key Projects on Reduction In-house regeneration and reuse W-H 2 SO 4 to reduce W-H 2 SO 4 amount Water content reduction to reduce W-(NH 4 ) 2 SO 4 amount 46,889 Metric Tons/Year 10,920 Metric Tons/Year Process optimization to cut chemical consumption Water content reduction to reduce CaF 2 sludge amount 10,600 Metric Tons/Year 1,224 Metric Tons/Year % % % % VOC carousel rotor cleaning fluid reduction Copper extraction from W-CuSO 4 to reduce W-CuSO 4 amount 980 Metric Tons/Year 445 Metric Tons/Year Unit waste output (Actual) Unit waste forecast output (Goal) Unit waste forecast output (Without adopting proactive waste reduction activities) Note 1: Unit waste output has continued to rise due to 1. the increased complexity of TSMC manufacturing processes and 2. to comply with new regulation of wastewater standards, TSMC transform NH 3 -N into waste ammonia sulfate Note 2: TSMC adopted proactive waste reduction activites since, therefore our waste output forecast is based on unit Reduction Project NT$503,442,900 Cost saving for waste treatment from chemical waste reduction of H 2 SO 4, H 2 O 2, (NH 4 )OH, CuSO 4, Photoresist, Solvent, Developer Income from NT$420,011,100 of used chemicals, wafers, targets, batteries, lamps, packaging materials, paper cardboard, metals, plastics, and other wastes 80

4 Conversion of TSMC into Useful Recycled Products Case Study Key Projects on Reduction TSMC was first in the semiconductor industry to adopt two waste resource regeneration technologies TSMC (NH 4 ) 2 SO 4 H 2 SO 4 Recycled Products Industrial grade ammonia sulfate, Ammonia, Plaster Industrial grade sulfuric acid, Oleum, Sulfates (water treatment agent) 1. Copper Extraction from Copper Sulfate In, TSMC cooperated with vendors to develop and implement in-house copper extraction equipment to produce copper tube 9.7 metric tons from copper sulfate. This system avoids sending 445 metric tons waste copper sulfate out for external treatment, saving NT$2.2 million. 2. Sulfuric Acid On-site Regeneration and Reuse In, TSMC has successfully implemented the first regeneration system for regenerating waste sulfuric acid. This recycled acid is used on-site to react with ammonia wastewater to produce reusable ammonium sulfate. This system avoids the discharge of ammonia wastewater into public wastewater treatment plants and reduces waste sulfuric acid outsourced for treatement. In, a waste sulfuric acid regeneration system was set up at all fabs, and 46,889 metric tons waste sulfuric acid were reused on-site for a cost saving effect of NT$150 million. As-Was Manufacturing Activities TSMC On-site H 2 SO 4 NH 3 -N water Environmental Sustainability and Circular Economic Practice Reduce waste H 2 SO 4 production Outsource Final Discharge Outsource CuSO 4 H 3 PO 4 HF Organic Solvent Developer Stripper CaF 2 Sludge Chemical Drum Copper tube/plate, Copper sulfide Industrial grade H 3 PO 4, Phosphate (water biologicle nutrients) Industrial grade HF, Artificial fluorite Industrial grade organic solvent Display industry developer Alternative fuel Cement additive, Artificial fluorite Recycled plastic pellets Manufacturing Activities CuSO 4 As-Was Environmental Sustainability Practice Regeneration System Recycled Copper Tube Outsource Manufacturing Activities TSMC On-site H 2 SO 4 NH 3 -N water Regeneration System Reclaim NH 3 -N NH 3 -N water Reclamation System Reuse waste H 2 SO 4 in wastewater treatment system (NH 4 ) 2 SO 4 recycling Turn waste into a resource Resin Activated Carbon Lubricating Oil Quartz Glass Wood Pallets Lamp Recycled resin Recycled activated carbon Lubricating oil Optical materials, Concrete additives Alternative fuel Raw materials of mercury, metal, glass TSMC On-site Reduce w-cuso 4 amount and transportation carbon footprint by on-site pretreatment which turning waste CuSO 4 into copper material. 321,935 Metric Tons TSMC recycled 321,935 metric tons of waste in, which is a gain of more than NT$420 million through meticulous waste classification. Lead Acid Battery Mixed Hardware Raw lead and recycled plastic pellets Raw metal material Category Raw materials of paper, plastic, glass, metal 81

5 Cleanup and Vendor Management TSMC carefully selects waste disposal and recycling vendors through a team composed of related departments including corporate ESH division, procurement division, and waste management section. TSMC's team visits and examines potential waste vendor according to our New Vendor Selection Procedure. For existing vendors, TSMC performs annual assessments and audits of site operations, and communicate our suggestions. TSMC encourages improvement for vendors lagging behind the average and continues to reinforce their performance by working with them to implement improvements when necessary. To ensure proper treatment of our waste, regular on-site audit and recycled product sales data are checked and reviewed with data obtained from Taiwan s EPA to ensure recycled products flow downstream properly. In, TSMC terminated transactions with five disposal vendors whom were scored as inadequate without improvement actions and introduced five new partners through a rigorous vendor selection process. In, all vendors were encouraged to acquire ISO14001 certification, upgrade equipment, and strengthen management of product flow downstream. The percentage of good and excellent vendors improved to 59% from 22% in. In, TSMC focused on upgrading the overall quality of the waste recycling and treatment industry by initiating and implementing the Vendor Assessment Standard with the members of Science Park Industry Association. TSMC believes that integrating the power of industry association members to implement a Tracking and Management System for all members will help sustainable development in Taiwan. Case Study TSMC's "GPS Satellite Fleet" In order to monitor waste disposal activities, TSMC also adopts proactive actions to strengthen vendor auditing effectiveness. All waste transportation vendors are requested to join the TSMC s GPS Satellite Fleet so that cleanup transportation routes and abnormal stays for all trucks can be traced. In addition, all waste recycling and treatment vendors install CCTV in operation sites for the purpose of review and auditing in tracing waste receiving and handling status. In addition, TSMC has strengthened tracking the flow of recycled product to ensure the appropriate reuse of the product. All these actions are to ensure legal and proper recycling and treatment of wastes. In, all waste transportation vendors joined TSMC s GPS Satellite Fleet system. This system has provided 100% system auditing instead of an individual unscheduled truck-following audit for selected vendors. management education and training course for waste vendor On-site audit with Science Park Administration for waste recycling technical evaluation Regular waste vendor on-site audit 82

6 Process Flow in Vendor Management Corporate ESH Division Procurement Division Management Section Legal Division New Vendor All TSMC Existing Vendors Vendor Selection Vendor Auditing Vender Evaluation Weekly Monthly illegal news tracking GPS Satellite fleet tracking Recycled products sales flow track Environmental violation track Document check Validation of permit and operation management flow -recycled products mass balance check 50% Good (Score 80~89) 9% Excellent Evaluation Result (Score >90) 6% Inadequate (Score 60~69) Quarterly Receipt and cargo CCTV check On-site audit Recycled product specifications and sales flow check Pollution monitoring report check Excellent (Score >90) Good (Score 80~89) Satisfactory (Score 70~) Inadequate (Score 60~69) Assessment of ESH management Yearly and operating condition Note: Public or municipal waste treatment facility were not included in audit process 35% Satisfactory (Score 70~) 83