HERO unchained. Modular AGV for multiple handling applications. Semicon Europa 2015, Dresden

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1 HERO unchained Modular AGV for multiple handling applications Semicon Europa 2015, Dresden HAP Handhabungs-, Automatisierungs- u. Präzisionstechnik GmbH Dresden Gostritzer Str. 63, Dresden, Germany

2 Company Overview HAP Handhabungs-, Automatisierungs- u. Präzisionstechnik GmbH Dresden Gostritzer Str. 63, Dresden, Germany

3 Quick Facts Established 1991 Background Carl Zeiss Jena Today Automation specialist 70 employees 15 Mio Euro turnover in 2014 Based in Dresden, Germany HAP Company Info 3

4 Business Fields Carrier Handling PCB Handling Mask Handling Wafer Handling 40% 30% 30% Share of turnover in 2014 HAP Company Info 4

5 Up to 2014 HAP - Automated Carrier Handling Confidential Information

6 LUNA & HAP-HERO 180 installations Serving approx. 800 equipment HAP - Automated Carrier Handling Confidential Information 6

7 LUNA & HAP-HERO 180 installations Serving approx. 800 equipment But all either in safety cells or RGVs, which are connected by rail and cable chain limited applications due to low distance and flexibility HAP - Automated Carrier Handling Confidential Information 7

8 LUNA in FSI Bay Quelle: Robert Bosch GmbH Separated handling area (safety cell) High throughput Loading of up to 3 equipment Possibility of additional applications, as: Sorting from transport to process carriers Batch alignment Wafer-ID reading Filling with dummy wafers Start in 2006 Installed base > 60 HAP - Automated Carrier Handling Confidential Information 8

9 HAP-HERO Mobile RGV Moving distance of up to 35m Loading of many systems in a row Safe man-machine interaction Start in 2009 Installed base > 110 Quelle: Infineon Technologies Dresden HAP - Automated Carrier Handling Confidential Information 9

10 HAP-HERO HAP - Automated Carrier Handling Confidential Information 10

11 Since 2015 HAP - Automated Carrier Handling Confidential Information

12 HERO FAB Fully free travelling AGV HAP - Automated Carrier Handling Confidential Information

13 Application Expertise HAP Company Info 13

14 HERO FAB Modular Approach HAP - Automated Carrier Handling Confidential Information

15 HERO FAB - Base System Most modular base unit, incl.: Navigation Energy Safety base package Advantages Versatile applications all based on same system Fast and efficient adaptions HAP - Automated Carrier Handling Confidential Information 15

16 HERO FAB Modular Approach SMIF pods Open cass. Boxes FOUP FOSB 200mm Carrier 300mm Carrier Spares Special Apps. Handling (with or w/o buffer) Transport Base system HAP - Automated Carrier Handling Confidential Information 16

17 Version for Open Cassettes Optionally with 2 buffers ISO 3 and better Robot reach up to 85cm Optional vertical safety scanners HAP - Automated Carrier Handling Confidential Information 17

18 Version for SMIF Pods Optionally with up to 4 buffers Robot reach up to 85cm can reach 4 rack levels Optional vertical safety scanners HAP - Automated Carrier Handling Confidential Information 18

19 Version for Transport Boxes Optionally with up to 6 buffers Robot reach up to 85cm can reach 4 rack levels Optional vertical safety scanners Optional box opener Adaptive endeffector to handle both, boxes and cassettes HAP - Automated Carrier Handling Confidential Information 19

20 Version for Transport Boxes Optionally with up to 6 buffers Robot reach up to 85cm can reach 4 rack levels Optional vertical safety scanners Optional box opener Adaptive endeffector to handle both, boxes and cassettes HAP - Automated Carrier Handling Confidential Information 20

21 Special Applications Finally, a verion for special wet transport applications HAP - Automated Carrier Handling Confidential Information 21

22 TWK Advantages HAP - Automated Carrier Handling Confidential Information 22

23 Thank you for your attention! HAP - Automated Carrier Handling Confidential Information

24 For more information please contact: Tel.: Fax: Mail: Web: HAP Company Info 24