csi PRODUCTION SOLUTIONS csi PRODUCTION SOLUTIONS FOR CRYSTALLINE SILICON SOLAR CELLS

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1 csi PRODUCTION csi PRODUCTION FOR CRYSTALLINE SILICON SOLAR CELLS

2 3 PASSION FOR EFFICIENCY PHOTOVOLTAICS CONTENT Process machines and automation systems by Manz offer many advantages for customers in the photovoltaic industry. They are characterized by maximum efficiency and reliability. Maximum process quality and, at the same time, low cost of ownership are evidence of the high level of development and welldesigned system solutions. The presence of the Manz group, with its own production facilities in Germany, Slovakia, Hungary, Taiwan and China, as well as worldwide service centers, guarantees short response and delivery times. You too can share in the benefits. photovoltaic csi solutions 4 automation solutions 8 metrology solutions 10 metallization solutions 12 wet chemical solutions 14 laser process solutions 16

3 5 PHOTOVOLTAIC csi a The conversion of sunlight into electrical energy is carried out in solar cells, the core component of photovoltaic equipment. The process of manufacturing this equipment includes a variety of steps from extracting silicon to manufacturing the modules. Within the value chain of manufacturing crystalline silicon solar cells, Manz focuses on the third stage: the process of going from wafer to cell. POWERING INNOVATION Almost all of the world s larger manufacturers use Manz systems for manufacturing solar cells. Our core areas include: Automation, Test & Inspection, Metallization Lines, Laser Processing Technology and Wet Chemistry. CrystalLine SILICON Solar cells Process Stages FULLY INTEGRATED 60 MW CELL LINE 01. inline wafer tester and sorter 02. automation 03. Texturing 04. AUTOMATION 05. Doper 06. Diffusion A. Option: selective Emitter Laser Process 07. AUTOMATION and Inline Box buffer 08. Phosphor Glass Removal 09. AUTOMATION 10. Anti-Reflex Coating (from Q3/2011) 11. AUTOMATION and Inline Box buffer 12. Automation 13. Metallization 14. Front/Rear Side Print inspection 15. Drying Furnace 16. Drying and Firing Furnace 17. Inline Laser Edge Isolation 18. Inline cell tester and sorter manz PRODUCTS External Supplier When developing new processes, our focus is on the economical manufacture of solar cells. Doing so means Manz has a hand in increasing efficiency and cutting costs in the field of photovoltaics. In conjunction with high-performance imageprocessing systems, precise and fast robotic systems allow for cycle times of under one second with minimal breakage rates. With a throughput of 2,400 wafers per hour, our integrated 60 MW back-end line is currently the fastest production line on the market for metallization (screen printing), laser edge isolation, inspection, and sorting of solar cells. Within this third stage of the value chain, Manz s products will cover approximately 90% of all investments made, including the new vacuum coating systems of Manz Coating key Facts Year of Foundation Headquarters Core Competencies Worldwide locations 1987 Reutlingen/Germany Robotics, motion, metrology, control, process technology Germany, China, Taiwan, USA, Spain, Slovakia, Hungary, South Korea, India, Israel

4 9 AUTOMATION SpeedPicker SpeedPicker with Bernoulli Gripper Manz offers economical inline automation systems for the manufacture of crystalline solar cells: These systems range from those that load and unload processing machines to complete automation solutions with integrated buffer systems and the ability to connect them to central manufacturing computer systems. Precise and fast robotic systems connected with high-performance imageprocessing systems ensure that breakage rates remain low while machine availability remains high. With cycle times of less than a second, equipment with a total yearly output of up to 100 MW can be manufactured using only one production line. Manz s standard systems include: Loading and unloading of cleaning and texturing equipment Loading and unloading of diffusion equipment Loading and unloading of PSG etching equipment Loading and unloading of anti-reflective coating equipment (the SiNA series, for example) Inline box buffer systems with a capacity of up to 8,000 cells LOADING AND UNLOADING OF PROCESS TOOLS Your advantages: Excellent uptime and lowest breakage rates Wafer feed in Manz stack box or cassettes or inline interlinked Integrated vision system for breakage detection and precise positioning of wafers All inline integration from loading texturing until SiN unloading Fully automated buffers up to 2 hour production Standardized mechanical and electrical interfaces Integrated control cabinet fast installation and start up All important measurement systems can be integrated Standardized stack boxes and cassettes Small footprint SPEEDPICKER The SpeedPicker is a new automation system which was specially developed for the requirements of the solar market. Compared to other systems in the market, the system is the most powerful in terms of: Space: 50 % reduction After sales costs: 50 % reduction Investment: 50 % reduction Safe wafer handling with lowest breakage rates of 0.05% 0.5% lower breakage rate than competitive products Excellent uptime Lowest breakage rates 50 % less space and costs Lowest breakage rates

5 11 METROLOGY Cell Tester Cell Sorter Testing and measuring wafers and cells during manufacturing is an important means of controlling the quality of manufactured cells. Even the tiniest mechanical defects in the cells such as micro-cracks, for example can have a negative impact on the efficiency of the entire module or render it completely unusable. All systems are equipped with Manz automation systems and guarantee the lowestpossible breakage rates as well as a high level of tool availability and throughput. Manz s quality-control and metrology systems also test the quality of wafers and cells in all important process steps within the production line, thereby increasing the productivity of the systems and assuring the quality of the products. Increases cell efficiency by precise testing and sorting For the purposes of quality control, Manz manufactures complete wafer testing systems, which are used by wafer manufacturers for their end-of-line inspection and by cell manufacturers for their receiving inspections. INLINE WAFER TESTER / IWT 3600 Modular design: Available as stand-alone system or integrated into frontend After further production steps, the cell testing and sorting modules in the backend area of the plant measure the various levels of quality and sort each cell into the designated module class. The cell testers are suitable for both end-of-line inspections after manufacturing cells as well as for carrying out receiving inspections when manufacturing modules. All measurement systems are highly integrated into the testing machines and therewith allow a maximum performance with respect to throughput and crossinformation usage. The availability of I/V analysis, hot spot detection and electroluminescence analysis integrated within one testing system will allow cell loss analysis and automatically indicate process related issues. Available inspection systems: Geometry and chips Thickness measurement Micro crack inspection TTV measurement Saw mark measurement (Total Thickness Variation) Bow measurement Charge carrier lifetime Inspection contamination measurement Conductivity measurement Doping (p or n type) INLINE CELL TESTER / ICT 2400 Modular design: Available as inline tester within Manz backend system or as stand-alone system Loading from Manz stack box Sorting module with 12 bins High throughput of 3,600 wafer/h Your advantages: Minimal breakage, high throughput Cell transport to the test modules by vacuum conveyor belt Vision systems for precise positioning and chip detection High performance I-V curve measurement with Xenon flash (h.a.l.m.) Available inspection systems: Electroluminescence inspection Front side inspection Rear side inspection Color inspection Hot Spot measurement High-performance software for linking the results of all test stations (classification scheme) Highly efficient electroluminescence inspection NEW: Identifies Hot Spots on solar cells and increases the efficiency of solar modules! Optional: Laser edge isolation

6 13 METALLIZATION High Accuracy Printer (HAP) 2400 High Accuracy Printer (HAP) 1200 Metallization printing a conductive layer onto cells is an important process in the manufacture of crystalline solar cells. In this area, Manz offers both high-output printing systems as individual modules, as well as a complete back-end line with a throughput of 2,400 cells per hour in a single production line. Manz also has the right solutions for new, advanced processes (selective emitters, for example). The HAP (High Accuracy Printing) 2400 system is required for double printing or printing on selective emitter structures. The system recognizes pre-processed patterns such as a print or a selective emitter structure and prints aligned auto-matically on this structure with a precision of +/- 10 µm. The Manz Aerosol Printer uses an aerosol deposition procedure that allows metallic front contacts to be applied without ever coming into contact with the cell. Eliminating the use of the printing screen has additional benefits: besides cutting costs (manufacturing, cleaning, and preproduction costs), it is a contact-free procedure, which leads to a significant reduction in breakage rates. INLINE screen printing SYSTEM High throughput: up to 2,400 cells/h Loading module with integrated micro-crack inspection High-accuracy cell placement on printing conveyor Parallel cell screen printing system for enlarged process window and fastest cycle time Easy maintenance on screen printing parts (quick change system for screen and squeegee) Excellent accessibility of screen printing parts Very safe wafer handling lowest breakage rate Vision system for print control and closed loop feedback function Fully integrated horizontal drying furnace Statistical process data collection for continuous production optimization MES interface (optional) high accuracy printing / HAP 2400 Your advantages of the high accuray printing process: Single cell high accuracy screen printing system High throughput: up to 2,400 cells/h High precision vision system for wafer alignment High precision vision system for recognition of pre-processed structures on wafer Parallel screen printing for fastest cycle time Very safe wafer handling Highest accuracy in screen printing process AEROSOL printing Advanced printing process for front-side metallization of solar cells High throughput: up to 2,400 cells/h Direct writing process: no screen cost Non-contact printing: no breakage, possibility to handle thinner wafers Less shadowing: increased cell efficiency up to 0.5% High throughput up to 2,400 wafers/h Less material consumption No contact printing: no breakage, handling of thinner wafers possible

7 15 WET CHEMICAL PSG Etching Sponge Roller Manz offers newly developed wet chemical solutions for manufacturing crystalline solar cells. This includes the manufacturing stages of cleaning, saw damage removal, texturing, phosphosilicate glass removal, and one-sided etching processes. In this context, Manz uses experience and expertise from Manz Taiwan, which has been focused on the manufacture of wet chemical equipment for over 20 years. Manz Taiwan is the market leader in the field of wet chemical equipment for the manufacture of printed circuit boards and flat panel displays and having installed more than 2,000 pieces of equipment is the market leader in the electronics and FPD industries. Wet chemical equipment from Manz is characterized by the following innovative features: Minimal breakage through the use of sponge rollers, completely closed system, drive mechanism using magnetic clutches for the highest level of safety, easy to operate using the Manz touch screen, highly integrated Manz automation solutions, extremely low manufacturing costs (CoO), extremely economical use of chemicals and water. Ipsg 3000 Inline Phosphorous Glass Removal System High throughput of 3,000 wafer/h for an 8 lane configuration based on 156 x 156 mm wafers Minimum breakage rate due to the application of soft sponge rollers concept with minimized mechanical stress on substrates Sponge rollers are geared by a mechanical coupling system, which allows wear free transport and keeps drive system out of process chamber Minimized chemical consumption due to optimized tank design High process flexibility SW controlled switch - over between spray and immersion process with individual shiftable spray function Two step cascade rinse with standby function to reduce water consumption Combined roll off/air knife dryer with standby function for reduced CDA consumption Easy to operate via GUI with touch screen Compatible with highly integrated automation systems from Manz Process developed with Fraunhofer ISE High throughput of 3,000 wafer/h Lowest breakage due to effective sponge roller concept Optimized tank system for less chemical consumption

8 17 LASER PROCESS Laser Edge Isolation Selective Emitter Manz is working intensively on new methods to increase both the efficiency of solar cells and throughput rates, while at the same time cutting solar cell manufacturing costs. To do so, Manz uses high-efficiency laser processes to achieve this goal. To generate a selective emitter, Manz uses a laser-based procedure developed by the ipe (University of Stuttgart, Institute for Physical Electronics). With this technology, using an additional laser-processing step, the level of doping under the contact structure, which is applied in a later stage of the process, is increased significantly. In conjunction with Manz s HAP (high accuracy printer), an increase in the solar cell s efficiency of up to 0.5% can be achieved. During the development of these systems, Manz ensured that existing cell production lines can be upgraded. Manz s laser systems are applied for many other Manz high accuracy processes such as: Laser edge isolation, dielectric layer opening or laser drilling to generate back-contact cells such as MWT and EWT. LASER EDGE ISOLATION Edge isolation by laser grooving High throughput of up to 2,400 wafer/h Safe wafer handling and lowest breakage rates Loading/Unloading from/into Manz Box/Cassette or alternative carrier Modular design available as inline or stand-alone system Combination of high performance laser process with high precision machine allows a minimum dead area ( 100 μm) SELECTIVE EMITTER High throughput of up to 2,400 wafer/h Safe wafer handling lowest breakage rates Increase of cell efficiency up to 0.5% in combination with high ohmic emitter and Manz HAP (high accuracy printing) Loading/Unloading from/into Manz Box/Cassette or alternative carrier Modular design available as inline or stand-alone system Minimum dead area of 100 µm Lowest breakage rates Increase cell efficiency up to 0.5%

9 Manz Automation AG Steigaeckerstr Reutlingen Germany Phone Fax info@manz.com

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