4 ème FORUM ARCSIS. Industrie 4.0 : A 200mm Semi-Conductor Fab Modernization

Transcription

1 4 ème FORUM ARCSIS Industrie 4.0 : A 200mm Semi-Conductor Fab Modernization Alain PLANCHAIS, PMP Rousset Digital Front-End Manufacturing & Technology R&D, Projects & Program Manager

2 Summary 2 ARCSIS January th Forum Presentation Automation & Market Environment R8 Fab Modernization Project Fab Modernisation Solutions Some realizations Conclusion

3 200mm Fabs Re-awaken! 3 SEMICON 2016 Grenoble Conference : C.G. Dieseldorf Director Industry Research & Analysis SEMI, Industry Research & Statistics, San Jose,United States)

4 More and Moore Manufacturing challenges 4 Biggest Automation Challenge: ROI < 24 months

5 Factory automation - the real time challenge toward Industry Industry 4.0 Mc Kinsey Digital Compass

6 Semi-conductor Industry Automation 6 The ideal situation starting point in the world of Automation in the semi-conductor industry Building Design anticipated for for Automation Tools Tools Design using standard interfaces to robotics 300mm 300mm Fab Fab 300mm Fab i.e. Crolles 300 i.e. Crolles 300 i.e. Crolles 300 Layout Layout Optimized to get the best industrial performances Optimized to get the best industrial performances

7 Rousset 8 Automation 7 Rousset 8: a 200mm legacy fab Building Tools Layout Process / Product Design anticipated for robotic products no longer available Area dispersion to extend shop floor Standard load port interface (SMIF) but 40% incompatible with conventional lot transportation Tools software outdated Tools alignment not always possible Space limited both vertical and horizontal Heterogeneous conveyer systems Legacy fab survive thanks to high mix processes, low volume of products Requires processes and products flexibility More complex dispatching of lot on equipment 200mm Legacy fabs in Europe will survive thru Automation

8 January 2016 Factory A Factory B Factory C Singapore Benchmark Factory D Singapore 200mm open cassette 200mm open cassette 200mm 200mm SMIF 100% of lots transported inter-bay by roller type solution (like Muratec RST) Robotization of manual loading machines (FSI, Balzers, ) 25% of the fab covered with mixed solutions FSI room completely automated by robotics (6 tools) Strong robotics program supported by the government for people productivity Inter-bay project with AGV like Global Foundries Strong robotics program supported by the government for people productivity Inter-area done by PRI transport 8 95% of tool loading done by either AGV or adapted robotic solution 2015 autonomous robot introduction for loading reticle + 2 new implanters 5 Adept robots deployed GF Fab 3 working with Adept on Mobile Robot solution since 2 years 100% automation of NPW kitting, pre-measurement, transportation to machine, passage on machine, and sent for post measurement afterwards Next step use HAP solution for test wafers stockers 39 Adept robots deployed and 55 ongoing 10 more robots delivered

9 Context: Industrial Challenges Financial performance Quality, Yield, Supply chain Productivity R8 Project Scope 9 Health & Safety Vision: Objectives: Robotisation Ergonomy Management Gains Automated Material Handling Automated Tool loading Wafer Flow Management interbay Wafer Flow Management intrabay

10 PVD PRS/UVH WC M PDG V3 V2 E4 E5 E6 D4 D2 MSP CU C2 C3 POC EPC FSI I2 CIL CUV D3 E1 E2 E3 V1 D1 C0 MSP C1 MTU POX WBU PTU Solution A Solution B Solution C Sub-areas Solutions 10 METRO PHOTO S O R 1 7 Inter-bay IMPLANT PHOTO FSI ETCH DIFF CVD2 PVDMTU CVD1 CMP PT PT BL BL Reclaim Reclaim D0 D0 SCR SCR

11 Solutions vs Challenges 11 Challenges Robustness Sustainability Quality EHS Risk Reticles storage Reticles Transport Auto-Scheduling FSI Robotization Automatic Loading

12 Project potential solutions 12 Solutions Pros Cons RST Constraints OTS Overhead Tracking System (Muratec) Speed / Throughput Reliable Semi-conductor adapted (no footprint, cleanroom) Buffer near tool preferred stocker Price Required ceiling height Low Ceiling height 3,6 m Study on ceiling charge to be done About 40% of tools cannot be loaded from top AGV Automatic Guided Vehicule Autonomous motion at walking speed No guidance necessary Anti-collision technology built inside Intelligent path calculation Incremental deployment No environment modifications Limited integration efforts Disparate point of loading and I/O Usage flexibility Speed / Throughput Some space required Batteries charging Some maintenance required Cannot be used in hithroughput area Cannot be used in tight area RGV Rail Guided Vehicle High Throughput /vehicle Can load tool from side Tools must be aligned No flexibility COO Corridor width > 1.2m Two sides loading port required More complex integration LMS Linear Motion Systems High Throughput area. Alternative AMHS low ceiling Adaptator for front loading tool Specific solution Study must be done with supplier COO Specific study More complex integration Videos: Courtesy ST Crolles 300 / ST Tours

13 Statistical Process Control R8 & Industry Advanced Process Control, Fault Detection Classification, Run to Run Factory simulation & optimization Automatic flow scheduling Virtual Metrology Predictive scheduling Predictive maintenance Equipment health monitoring Wait Time Waste management Detailed equipment modeling

14 FSI Mercury move / day 11 tools SMIF Equipment Automatic loading against RSI No Lot inversion No Waiting time The FSI Robotization Project from design 14 Integration STAUBLI Robot Brooks SMIF port R2D COMET for load balancing Automatic detection of wafer breakage 14

15 FSI Mercury move / day 11 tools SMIF Equipment Automatic loading against RSI No Lot inversion No Waiting time The FSI Robotization Project to realization 15 Integration STAUBLI Robot Brooks SMIF port R2D COMET for load balancing Automatic detection of wafer breakage Realization ATG Robotics (Avignon) Focussia (Montpellier) 15

16 FSI Manual Loading Step 1 : Open the POD to extract the carrier Step 2 : Transfer the wafers to a teflon Carrier 16 Repeat for up to 4 carriers in batch Step 3 : When needed, create mirror carriers manually to get 2 or 4 carriers for FSI Step 4 : Place the teflon carriers into the FSI Step 5 : Automation to download recipe & start FSI process

17 MES VFEI TCP 17 EI FSI PassThrough SECS/HSMS TCP SECS/HSMS TCP EI Robot Cell SECS/HSMS TCP Robot Cell PassThrough SECS/HSMS TCP SECS/HSMS TCP Data Collection SECS Serial COMET CVS SMIF1 SECS Serial SMIF2 SECS Serial ASCII TCP Robot Controller SECS Serial FSI STM ATG Other Robot Cell Peripherals (shelves, I/Os ) Suppliers FOCUSSIA

18 Transport reticles & stocking Reticle management must include both stocker & transport No or very low gain if stocker and tracks dissociated (cf. Muratec) Reticles management must be single mask pod Reticles cleanliness Easier software integration Internal system management + reticle identification RTD Planner to load mask in advance Better operators acceptation RSI (TMS) Reduction Photo Pilot Line 18

19 E84 Solution for Automated Material Handling Systems What is E84? E84 Cost : 19 Market products is 4-5 K$ / controller Join project with Ecole de Mines and Focussia based on RASPBERRY PI Scalable low cost solution Solution validated at Crolles Product manufacturing by Vegatec 16-RO / 09/

20 Conclusion - R8 Modernization Project 20 With these key projects, we are able to: Gain market share Dramatically improve fab Robustness to support our divisions business Increase gross margin Strongly improve fab Quality Build product leadership Significantly reduce Repetitive Strain Injuries and Improve workstation ergonomics Manage our expenses

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22 22 Backup

23 Industry 4.0 Definition 23