Optical Coatings. Photonics 4 Luxury Coatings , Genève. Dr. Andreas Bächli Head of Optical Coatings at RhySearch, Buchs (SG)

Size: px
Start display at page:

Download "Optical Coatings. Photonics 4 Luxury Coatings , Genève. Dr. Andreas Bächli Head of Optical Coatings at RhySearch, Buchs (SG)"

Transcription

1 Optical Coatings Photonics 4 Luxury Coatings , Genève Dr. Andreas Bächli Head of Optical Coatings at RhySearch, Buchs (SG)

2 RhySearch The Research- and Innovation Center in the Rhine Valley RhySearch founded in 2013 (by St.Gallen & Liechtenstein) Board of directors with strong representation of the industry Further growth supported by strategy and approved investment plan Today 9 employees APPLIED R&D in three areas: PROVIDE A NETWORK TO LOCAL BUSINESS Optical coatings Precision manufacturing Packaging ENABLE INNOVATION PROZESSES CTI approved since Q1/2017 2

3 Optical Coatings RhySearch in a nutshell Dual-Ion-Beam Sputtering Site acceptance test ongoing VIS-NIR Broad-Band Monitoring Ta 2 O 5, Hf, Si, more upon request Laser Induced Damage Threshold (LIDT) IS1254 (e.g. S-on-1 test procedure) = 1064, 532, 355 nm (ns-pulse) = 1030 nm (fs-pulse) Degradation Chamber for Optical Components (cooperation with NTB) Ar, N 2,,humidity, Temp up to 250 C Investigate degradation under 355 nm irradiation (ns, up to 100 khz) Laser LIDT under controlled harsh conditions LIDT: Set-up and picture of damaged spot acknowledge: CTI-project Cavity-Ring-Down (CRD) 1064 nm and 638 nm (ISO 13142) Reflectivity measurements our goal 1 ppm detection limit 3

4 Optical Coatings RhySearch in a nutshell Dual-Ion-Beam Sputtering Site acceptance test ongoing VIS-NIR Broad-Band Monitoring Ta 2 O 5, Hf, Si, more upon request Laser Induced Damage Threshold (LIDT) IS1254 (e.g. S-on-1 test procedure) = 1064, 532, 355 nm (ns-pulse) = 1030 nm (fs-pulse) Degradation Chamber for optical components (cooperation with NTB) Ar, N 2,, humidity, temp up to 250 C Investigate degradation under 355 nm irradiation (ns, up to 100 khz) LIDT under controlled harsh conditions Cavity-Ring-Down (CRD) 1064 nm and 638 nm (ISO 13142) Degradation Chamber acknowledge: CTI-project Reflectivity measurements our goal 1 ppm detection limit 4

5 intensity Optical Coatings RhySearch in a nutshell Dual-Ion-Beam Sputtering Site acceptance test ongoing VIS-NIR Broad-Band Monitoring Ta 2 O 5, Hf, Si, more upon request Laserpulse high reflective mirrors Cavity time Laser Induced Damage Threshold (LIDT) IS1254 (e.g. S-on-1 test procedure) = 1064, 532, 355 nm (ns-pulse) = 1030 nm (fs-pulse) Degradation Chamber for optical components (cooperation with NTB) Ar, N 2,,humidity, Temp up to 250 C Investigate degradation under 355 nm irradiation (ns, up to 100 khz) LIDT under controlled harsh conditions Cavity-Ring-Down (CRD) 1064 nm and 638 nm (ISO 13142) Schematic illustration of Cavity-Ring-Down Reflectivity measurements our goal 1 ppm detection limit 5

6 Optical Coatings RhySearch in a Nutshell Ion-Beam-Sputtering Coating Tool (IBS) Dual-Ion-Beam configurations VIS-NIR Broad-Band Monitoring Ta 2 O 5, Hf, Si, more upon request Laser Induced Damage Threshold (LIDT) IS1254 (e.g. S-on-1 test procedure) = 1064, 532, 355 nm (ns-pulse) = 1030 nm (fs-pulse) Degradation Chamber for optical components (cooperation with NTB) Ar, N 2,, humidity, temp up to 250 C Investigate degradation under 355 nm irradiation (ns, up to 100 khz) LIDT under controlled harsh conditions Setup of RhySearch DIBS /picture and tool from Veeco Cavity-Ring-Down (CRD) 1064 nm and 538 nm (ISO 13142) Reflectivity measurements our goal 1 ppm detection limit 6

7 Overview Introduction to RhySearch Optical Coatings Coating Process Optical Interference Applications Function of optical coating Application specific challenges 7

8 What are Optical Coatings? Coatings make functional glass in the path of the light non reflecting Coatings are used to guide, to alter or to filter light Source: Source: RhySearch Glass has a function Coating has a function 8

9 Physical Vapor Deposition (PVD) evaporation source(s) substrate holder vacuum chamber reactive gas (e.g., N 2, ) process control material A material B Various configurations available with different strengths and weaknesses 9

10 Coating Processes Water absorbed after coating Substrate coating material other atoms Substrate Substrate Ar+ Plasma Target targetmaterial material B Ar + Ions Plasma material A material B Evaporation (e-beam) Magnetron sputtering Ion-beam-sputtering (IBS) standard coating stable coating very dense coatings high reflectivity mirror higher reflectivity mirror highest reflectivity mirror low edge performance best edge performance best edge performance lower cost medium cost higher cost 10

11 Reflection and Interference of Light Waves speed of light c ismaterial dependent c = n c 0 incident reflected n 0 n s transmitted = n s n 0 n s + n 0 I 2 t 4 % window glass 8 % sapphire glass Source: RhySearch 11

12 Reflection and Interference of Light Waves speed of light c ismaterial dependent c = n c 0 /4 incident n 0 n s reflected n 0 n f n s peak meets valley reflected waves cancel for /4 film thickness transmitted I t Note: reflected light waves reflected light intensities transmitted = n s n 0 n s + n 0 I 2 t 4 % window glass 8 % sapphire glass 12

13 Reflection and Interference of Light Waves speed of light c ismaterial dependent c = n c 0 /4 n 0 peak meets valley incident reflected n f n s reflected waves cancel for /4 film thickness transmitted I t n 0 n s single MgF 2 layer on glass reduces R from 4 % to 1.5 % n f = n 0 x n s transmitted = n s n 0 n s + n 0 I 2 t 4 % window glass 8 % sapphire glass 13

14 Reflection and Interference of Light Waves speed of light c ismaterial dependent c = n c 0 n 0 peak meets valley incident reflected n f n s reflected waves cancel for /4 film thickness transmitted I t n 0 n s peak meets peak transmitted = n s n 0 n s + n 0 I 2 t 4 % window glass 8 % sapphire glass n 0 n f n s transmitted I t reflected waves get more intense for /2 film thickness 14

15 Perfect Mirror can be Formed by a Layer Stack n H n L n 0 n s Alternating transparent thin layers with high and low index of refraction make a mirror with reflection for one transmitted I t peak meets peak n 0 n f n s transmitted I t reflected waves get more intense for /2 film thickness 15

16 Functions by Optical Coatings A wide range of functions function: mirror filter beam-splitter incident angles spectral response polarization By varying layer material (oxides, fluorides, nitrides, metals ) number of layers (one to [many] hundred) Transmission Spectra Single line blocking Broad band mirror Longpasss filter Narrow band transm individual layer thicknesses (few nm to few µm) Laser mirror 16

17 Anti-Reflective Coating Glasses Coatings enhance view and lifestyle Scratch-resistant, easy to clean... Source: Endoscope Coatings enable transmission Many different glass types, size, Source: Wientjes R et. Al PLoS ONE (2013) 18

18 Dichroic Filter (Color filter) Beamer Filter to generate the colors Long term color accuracy Source: and Entertainment Lighting Heatresistant filter to generate colors Consistent exact color and to get the artist s wish in a product, Source: 19

19 Narrow Band Transmission Distance Measurement Filter to boost signal to noise ratio in time-of-flight detection High blocking, low angular dependence, Source: Source: Telecom Filter to select a single wavelength Extremely narrow band pass, Source: 22

20 Mirrors Laser cavity mirror Mirrors with very high reflection Low loss, laser damage resistant, Source: hoststar.ch Laser scanner heads Mirror with very high (broadband) reflection High flatness, Source: Scanlab 23

21 Optical Coatings PVD coating processes Interference in thin film multilayer system Enabling technology for many applications Challenges are application dependent and what There I want is a to strong say, before optical I coating conclude industry in Switzerland across the entire value chain (tools, materials, vacuum, coating, ) with players supplying the global marketplace that can provide solutions to meet your requirements 24

22 Thank you Andreas 25

Coatings. Ion Assisted Deposition (IAD) process Advance Plasma Source (APS) plasma-ion assisted Deposition. Coatings on Optical Fibers

Coatings. Ion Assisted Deposition (IAD) process Advance Plasma Source (APS) plasma-ion assisted Deposition. Coatings on Optical Fibers Anti-Reflection Custom Ion Assisted Deposition (IAD) process Advance Plasma Source (APS) plasma-ion assisted Deposition Anti-Reflection on Optical Fibers OptoSigma supplies a wide selection of optical

More information

SELECTION OF OPTICAL COMPONENTS FOR COMMON LASER TYPES

SELECTION OF OPTICAL COMPONENTS FOR COMMON LASER TYPES FEMTOSECOND LASER OPTICS SELECTED SPECIAL COMPONENTS METALLIC COATINGS FOR LASER AND ASTRONOMICAL APPLICATIONS 41 SELECTION OF OPTICAL COMPONENTS FOR COMMON LASER TYPES INTRODUCTION PRECISION OPTICS OPTICAL

More information

Understanding Optical Coatings For Military Applications

Understanding Optical Coatings For Military Applications Understanding Optical Coatings For Military Applications By Trey Turner, Chief Technology Officer, REO Virtually all optical components used in military applications, such as target designation, rangefinding

More information

About us. Capabilities

About us. Capabilities Catalog 215 Content About us... 2 Capabilities... 2 Anti-reflection coatings... 4 High reflection coatings... 5 Beamsplitter coatings... 6 Filter coatings... 7 Multiband precision filters... 8 DLC coatings...

More information

High Performance Optical Coatings Deposited Using Closed Field Magnetron Sputtering

High Performance Optical Coatings Deposited Using Closed Field Magnetron Sputtering High Performance Optical Coatings Deposited Using Closed Field Magnetron Sputtering D.R. Gibson, I.T. Brinkley, and J.L. Martin Applied Multilayers LLC, 1801 SE Commerce Avenue, Battle Ground, WA 98604

More information

PRECISION OPTICAL FILTERS BY EOSS - ENHANCED OPTICAL SPUTTERING SYSTEM. Fraunhofer

PRECISION OPTICAL FILTERS BY EOSS - ENHANCED OPTICAL SPUTTERING SYSTEM. Fraunhofer PRECISION OPTICAL FILTERS BY EOSS - ENHANCED OPTICAL SPUTTERING SYSTEM EOSS ENHANCED OPTICAL SPUTTERING SYSTEM Fraunhofer IST, Braunschweig Contact: Dr. M. Vergöhl +49 531 2155 640 EOSS Coating System

More information

PROCEEDINGS OF SPIE. Thin-film polarizer for high power laser system in China

PROCEEDINGS OF SPIE. Thin-film polarizer for high power laser system in China PROCEEDINGS OF SPIE SPIEDigitalLibrary.org/conference-proceedings-of-spie Thin-film polarizer for high power laser system in China Jianda Shao, Kui Yi, Meiping Zhu Jianda Shao, Kui Yi, Meiping Zhu, "Thin-film

More information

Roll-to-roll Technology for Transparent High Barrier Films

Roll-to-roll Technology for Transparent High Barrier Films Roll-to-roll Technology for Transparent High Barrier Films Presented at the AIMCAL Fall Technical Conference, October 19-22, 2008, Myrtle Beach, SC, USA Nicolas Schiller, John Fahlteich, Matthias Fahland,

More information

Dielectric II-VI and IV-VI Metal Chalcogenide Thin Films in Hollow Glass Waveguides (HGWs) for Infrared Spectroscopy and Laser Delivery

Dielectric II-VI and IV-VI Metal Chalcogenide Thin Films in Hollow Glass Waveguides (HGWs) for Infrared Spectroscopy and Laser Delivery Dielectric II-VI and IV-VI Metal Chalcogenide Thin Films in Hollow Glass Waveguides (HGWs) for Infrared Spectroscopy and Laser Delivery Carlos M. Bledt * a, Daniel V. Kopp a, and James A. Harrington a

More information

Optical Coatings. Phone: Fax: Domostroitelnaya str St. Petersburg, Russia

Optical Coatings. Phone: Fax: Domostroitelnaya str St. Petersburg, Russia The Fresnel reflection at the boundary of media with different refractive indices and interference in thin films allow the optical components reflecting and transmitting properties to be selectively and

More information

OPTICS AND COATINGS. MADE in GERMANY

OPTICS AND COATINGS. MADE in GERMANY OPTICS AND COATINGS MADE in GERMANY INTRODUCTION PRECISION OPTICS OPTICAL COATINGS SELECTION OF OPTICAL COMPONENTS FOR COMMON LASER TYPES CONTENTS INTRODUCTION ABOUT LAYERTEC 2 PRECISION OPTICS 3 SPUTTERING

More information

Hafnium(IV) Oxide Patinal

Hafnium(IV) Oxide Patinal Product Information Hafnium(IV) Oxide Patinal GENERAL INFORMATION Hafnium oxide is used for thin films with high refractive index in AR coatings, filters, mirrors, and beam splitters for the spectral region

More information

Vacuum Deposition of High Performance Gas Barrier Materials for Electronics Applications

Vacuum Deposition of High Performance Gas Barrier Materials for Electronics Applications Vacuum Deposition of High Performance Gas Barrier Materials for Electronics Applications Hélène Suttle DPhil Research Student Department of Materials -University of Oxford AIMCAL Fall Conference October

More information

Hafnium(IV) Oxide Patinal

Hafnium(IV) Oxide Patinal Product Information Hafnium(IV) Oxide Patinal GENERAL INFORMATION Hafnium oxide is used for thin films with high refractive index in AR coatings, filters, mirrors, and beam splitters for the spectral region

More information

FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST OPTICAL COATINGS

FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST OPTICAL COATINGS FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST OPTICAL COATINGS OPTICAL FUNCTIONAL COATINGS AT THE FRAUNHOFER IST The development of optical functional films and the related coating processes

More information

VACUUM VIEWPORTS. Introduction... I 03 KF Viewports... I 09 I 01. VACUUM / Components & Consumables

VACUUM VIEWPORTS. Introduction... I 03 KF Viewports... I 09 I 01. VACUUM / Components & Consumables I VAUUM VIEWPORTS Introduction... I 03 KF Viewports... I 09 I I 01 Neyco manufactures a range of UHV viewports in F, ISO or KF flange styles including a variety of coatings to enhance performance. Materials

More information

Substance M2 Patinal GENERAL INFORMATION AREAS OF APPLICATION THIN FILM PROPERTIES. Product Information

Substance M2 Patinal GENERAL INFORMATION AREAS OF APPLICATION THIN FILM PROPERTIES. Product Information Product Information Substance M2 Patinal GENERAL INFORMATION Substance M2 Patinal (Aluminium Lanthanum Oxide) is a medium refractive index material for evaporation, covering a wide spectral range from

More information

Laser damage threshold of AR coatings on phosphate glass

Laser damage threshold of AR coatings on phosphate glass Laser damage threshold of AR coatings on phosphate glass Optical Coatings for Laser Applications Wednesday, 12 th April 2017, Buchs SG, Switzerland dirk.apitz@schott.com, SCHOTT Suisse SA, Advanced Optics,

More information

In-situ laser-induced contamination monitoring using long-distance microscopy

In-situ laser-induced contamination monitoring using long-distance microscopy In-situ laser-induced contamination monitoring using long-distance microscopy Paul Wagner a, Helmut Schröder* a, Wolfgang Riede a a German Aerospace Center (DLR), Institute of Technical Physics, Pfaffenwaldring

More information

Magnesium Fluoride Patinal

Magnesium Fluoride Patinal Product Information Magnesium Fluoride GENERAL INFORMATION Magnesium fluoride is by far the most used low index material in the wavelength region UV-NIR. In the IR above 4 µm, Magnesium fluoride is usually

More information

Thin Films & AR Coated. Viewports. Thin Film & AR Coated. Viewports

Thin Films & AR Coated. Viewports. Thin Film & AR Coated. Viewports Thin Films & AR Item Page Thin Film Coatings Introduction P 02 Kodial Zero Length with Anti-Reflective Coatings P 04 Kodial Zero Length with Anti-Reflective Coatings-Non-Magnetic P 07 Kodial Zero Length

More information

Low-cost, deterministic quasi-periodic photonic structures for light trapping in thin film silicon solar cells

Low-cost, deterministic quasi-periodic photonic structures for light trapping in thin film silicon solar cells Low-cost, deterministic quasi-periodic photonic structures for light trapping in thin film silicon solar cells The MIT Faculty has made this article openly available. Please share how this access benefits

More information

FEL Irradiation Tolerance of Multilayer Optical System

FEL Irradiation Tolerance of Multilayer Optical System FEL Irradiation Tolerance of Multilayer Optical System Satoshi Ichimaru, Masatoshi Hatayama NTT Advanced Technology Corporation 1. Introduction 2. Damage formation - Thermal process vs Non-thermal process

More information

ise J. A. Woollam Ellipsometry Solutions

ise J. A. Woollam Ellipsometry Solutions ise J. A. Woollam Ellipsometry Solutions Capabilities The ise is a new in-situ spectroscopic ellipsometer developed for real-time monitoring of thin film processing. Using our proven technology, the ise

More information

Precision Optical Engineering

Precision Optical Engineering Precision Optical Engineering Products: Prisms Windows Mirrors Flats and Master angles Sight Glasses Key Features: Prisms (Contacted, Cemented, AR coated, Mounted) Windows (Flat, wedged, curved, drilled,

More information

Studies Toward Improving the Laser Damage Resistance of UV Coatings. Authors: Samuel Pellicori and David Sanchez Materion Coating Materials News

Studies Toward Improving the Laser Damage Resistance of UV Coatings. Authors: Samuel Pellicori and David Sanchez Materion Coating Materials News TECHNICAL PAPER Studies Toward Improving the Laser Damage Resistance of UV Coatings Authors: Samuel Pellicori and David Sanchez Materion Coating Materials News The shift in laser wavelength to UV is accompanied

More information

Simultaneous Reflection and Transmission Measurements of Scandium Oxide Thin Films in the Extreme Ultraviolet

Simultaneous Reflection and Transmission Measurements of Scandium Oxide Thin Films in the Extreme Ultraviolet Simultaneous Reflection and Transmission Measurements of Scandium Oxide Thin Films in the Extreme Ultraviolet Introduction Guillermo Acosta, Dr. David Allred, Dr, Steven Turley Brigham Young University

More information

Power Vision Ltd. PV Research. Power Vision Ltd. Unit R2, Herald Park, Crewe, Cheshire, CW1 6EA, UK Tel:

Power Vision Ltd. PV Research. Power Vision Ltd. Unit R2, Herald Park, Crewe, Cheshire, CW1 6EA, UK   Tel: Power Vision Ltd PV Research Power Vision Ltd Unit R2, Herald Park, Crewe, Cheshire, CW1 6EA, UK www.pvoptical.com Tel: +44 1270 253000 Flexible Whether it be fast AR coating onto temperature sensitive

More information

Optical Coatings for Laser Facets Fabricated by Reactive Ion-Beam Sputter Deposition

Optical Coatings for Laser Facets Fabricated by Reactive Ion-Beam Sputter Deposition Optical Coatings for Laser Facets Fabricated by Reactive Ion-Beam Sputter Deposition Steffen Lorch Reactive ion-beam sputter deposition is the best method to fabricate stoichiometric and dense layers for

More information

Improved LIDT values for dielectric dispersive compensating mirrors applying ternary composites

Improved LIDT values for dielectric dispersive compensating mirrors applying ternary composites Improved LIDT values for dielectric dispersive compensating mirrors applying ternary composites b T. Willemsen* a,b ; S. Schlichting b ; M. Gyamfi; M. Jupé b ; H. Ehlers b ; U. Morgner a and D. Ristau

More information

Plasma Activated EB-PVD of Titanium and its Compounds by Means of Large Area SAD

Plasma Activated EB-PVD of Titanium and its Compounds by Means of Large Area SAD AIMCAL 2005 Myrtle Beach, SC, USA, October 19th, 2005 Plasma Activated EB-PVD of Titanium and its Compounds by Means of Large Area SAD E. Reinhold, C. Steuer VON ARDENNE Anlagentechnik GmbH, Dresden, Germany

More information

Enhancement of extreme ultraviolet emission from laser irradiated targets by surface nanostructures

Enhancement of extreme ultraviolet emission from laser irradiated targets by surface nanostructures Enhancement of extreme ultraviolet emission from laser irradiated targets by surface nanostructures EXTATIC WELCOME WEEK Ellie Floyd Barte, M.Sc 23 September 2017 Outline Introduction and Motivation Experiments

More information

Recent Progress on 2012 SAT for UVOIR Coatings

Recent Progress on 2012 SAT for UVOIR Coatings Recent Progress on 2012 SAT for UVOIR Coatings By Manuel Quijada Outline Project Objectives Methods & Facilities Results Conclusions & Future Plans Acknowledgements 2 Enhanced FUV Coating Applications

More information

Previous Lecture. Vacuum & Plasma systems for. Dry etching

Previous Lecture. Vacuum & Plasma systems for. Dry etching Previous Lecture Vacuum & Plasma systems for Dry etching Lecture 9: Evaporation & sputtering Objectives From this evaporation lecture you will learn: Evaporator system layout & parts Vapor pressure Crucible

More information

Durable Neutral Color Anti-Reflective Coating for Mobile Displays

Durable Neutral Color Anti-Reflective Coating for Mobile Displays Durable Neutral Color Anti-Reflective Coating for Mobile Displays By John Madocks and Phong Ngo, General Plasma, Inc. Figure 1: Samsung S4 with top half of cover glass coated with AR+DLC Abstract An in-line

More information

Substance WR4 Patinal

Substance WR4 Patinal Product Information Substance WR4 Patinal GENERAL INFORMATION Substance WR4-SF Patinal was developed for the deposition of hydrophobic layers by evaporation in vacuum. Compared to other hydrophobic layers,

More information

Laser Speckle Reducer LSR-3000 Series

Laser Speckle Reducer LSR-3000 Series Datasheet: LSR-3000 Series Laser Speckle Reducer LSR-3000 Series Speckle noise from a laser-based system is reduced by dynamically diffusing the laser beam. A diffuser is bonded to a thin elastic membrane,

More information

Solar Selective Absorber Coating Methods Plasma Processes

Solar Selective Absorber Coating Methods Plasma Processes Solar Selective Absorber Coating Methods Plasma Processes Paul Gantenbein & Elimar Frank SPF - Institut für Solartechnik University of Applied Sciences Rapperswil (HSR) Optical properties of a selective

More information

Prometheus-L Reactor Building Layout

Prometheus-L Reactor Building Layout Prometheus-L Reactor Building Layout Two Main Options for the Final Optic (1) SiO 2 or CaF 2 wedges 85 40 cm stiff, lightweight, actively cooled, neutron transparent substrate 4.6 m (2) Grazing incidence

More information

An innovative approach to coatings on large optics

An innovative approach to coatings on large optics An innovative approach to coatings on large optics OpTIC Strategic Conference 16 th -17 th November 2010 "Photographie: Philippe Bourgeois" CILAS - Établissement Marseille Z.I. St Mitre 15 avenue de la

More information

High Rate low pressure PECVD for barrier and optical coatings

High Rate low pressure PECVD for barrier and optical coatings High Rate low pressure PECVD for barrier and optical coatings, Matthias Fahland, John Fahlteich, Björn Meyer, Steffen Straach, Nicolas Schiller Outline Introduction PECVD New developments magpecvd arcpecv

More information

PLASMA FLOW AND PLASMA EXPANSION AROUND 3D OBJECTS IN METAL PLASMA IMMERSION ION IMPLANTATION

PLASMA FLOW AND PLASMA EXPANSION AROUND 3D OBJECTS IN METAL PLASMA IMMERSION ION IMPLANTATION PLASMA FLOW AND PLASMA EXPANSION AROUND 3D OBJECTS IN METAL PLASMA IMMERSION ION IMPLANTATION Darina Manova & Stephan Mändl 1 Motivation 2 Motivation Visualisation of Water Flow from Dynamic Sand Dunes

More information

MPROBE SPECTROSCOPIC REFLECTANCE SYSTEM: MEASURING THICK FILMS

MPROBE SPECTROSCOPIC REFLECTANCE SYSTEM: MEASURING THICK FILMS Thin Film Measurement solution Software, sensors, custom development and integration MPROBE SPECTROSCOPIC REFLECTANCE SYSTEM: MEASURING THICK FILMS MPROBE system is used for a wide range of applications:

More information

PERIODIC STRUCTURES FORMATION ON BERYLLIUM, CARBON, TUNGSTEN MIXED FILMS BY TW LASER IRRADIATION

PERIODIC STRUCTURES FORMATION ON BERYLLIUM, CARBON, TUNGSTEN MIXED FILMS BY TW LASER IRRADIATION PERIODIC STRUCTURES FORMATION ON BERYLLIUM, CARBON, TUNGSTEN MIXED FILMS BY TW LASER IRRADIATION C. P. LUNGU 1, C. M. TICOS 1, C. POROSNICU 1, I. JEPU 1, M. LUNGU 1, P. DINCA 1, O. POMPILIAN 1, D. URSESCU

More information

Deposition of Multilayer Optical Coatings Using Closed Field Magnetron Sputtering

Deposition of Multilayer Optical Coatings Using Closed Field Magnetron Sputtering Deposition of Multilayer Optical Coatings Using Closed Field Magnetron Sputtering D. R. Gibson, I. Brinkley and E. M. Waddell Applied Multilayers LLC, 1801 SE Commerce Avenue, Battle Ground, WA 98604 United

More information

R&D ACTIVITIES AT ASSCP-BHEL,GURGAON IN SOLAR PV. DST-EPSRC Workshop on Solar Energy Research

R&D ACTIVITIES AT ASSCP-BHEL,GURGAON IN SOLAR PV. DST-EPSRC Workshop on Solar Energy Research R&D ACTIVITIES AT -BHEL,GURGAON IN SOLAR PV at the DST-EPSRC Workshop on Solar Energy Research (22 nd 23 rd April, 2009) by Dr.R.K. Bhogra, Addl. General Manager & Head Email: cpdrkb@bhel.co.in Dr.A.K.

More information

Swiss National Optics Plattform SNOP

Swiss National Optics Plattform SNOP Swiss National Optics Plattform SNOP History IZOT founded in 2011 as photonic network platform in Eastern Switzerland First outcome: formation of a group of interest in high end optical coating technologies

More information

EUV optics lifetime Radiation damage, contamination, and oxidation

EUV optics lifetime Radiation damage, contamination, and oxidation EUV optics lifetime Radiation damage, contamination, and oxidation M. van Kampen ASML Research 10-11-2016 Preamble Slide 2 ASML builds lithography scanners High-resolution photocopiers Copies mask pattern

More information

New Performance Levels for TPV Front Surface Filters

New Performance Levels for TPV Front Surface Filters LM-4K54 June 1, 24 New Performance Levels for TPV Front Surface Filters TD Rahmlow, JE Lazo-Wasem, EJ Gratrix, PM Fourspring, and DM DePoy NOTICE This report was prepared as an account of work sponsored

More information

Application note. Coated wafer mapping using an Agilent Cary 7000 Universal Measurement Spectrophotometer (UMS) with Solids Autosampler

Application note. Coated wafer mapping using an Agilent Cary 7000 Universal Measurement Spectrophotometer (UMS) with Solids Autosampler Coated wafer mapping using an Agilent Cary 7000 Universal Measurement Spectrophotometer (UMS) with Solids Autosampler Application note Materials testing and research Authors Travis Burt, Farinaz Haq Agilent

More information

PRACTICAL DESIGN AND PRODOCTION OF OPTICAL THIN FILMS

PRACTICAL DESIGN AND PRODOCTION OF OPTICAL THIN FILMS PRACTICAL DESIGN AND PRODOCTION OF OPTICAL THIN FILMS RONALD R.WILLEY LexaLite International Corporation Charlevoix, Michigan Marcel Dekker, Inc. New York Basel Hong Kong Contents From the Series Editor

More information

Effect of γ irradiation on optical components

Effect of γ irradiation on optical components Effect of γ irradiation on optical components S. Baccaro, A. Piegari, I. Di Sarcina, A. Cecilia Abstract Optical components operating in radiation environments, like nuclear facilities, High Energy Physics

More information

Glass in energy. Glasses for solar energy I: low-e and solar control glass MAT 498

Glass in energy. Glasses for solar energy I: low-e and solar control glass MAT 498 Glass in energy Glasses for solar energy I: low-e and solar control glass MAT 498 Lehigh University Rui M. Almeida Glass in energy Spring 2012 1 The use of glass in solar energy involves two general types

More information

The ratio of total pulse energy to maximum pulse power.

The ratio of total pulse energy to maximum pulse power. Guide Number Revision Effective Date Page C 04/13/2015 1 of 6 Subject Date of Issue Parent Command Media Optical Coating Laser Damage Resistance and Laser Damage Threshold Testing Plan 09/08/2014 P708

More information

PATTERNING OF OXIDE THIN FILMS BY UV-LASER ABLATION

PATTERNING OF OXIDE THIN FILMS BY UV-LASER ABLATION Journal of Optoelectronics and Advanced Materials Vol. 7, No. 3, June 2005, p. 1191-1195 Invited lecture PATTERNING OF OXIDE THIN FILMS BY UV-LASER ABLATION J. Ihlemann * Laser-Laboratorium Göttingen e.v.,

More information

Si DRIE APPLICATION In Corial 210IL

Si DRIE APPLICATION In Corial 210IL Si DRIE APPLICATION In Corial 210IL CORIAL 210IL ICP-RIE equipment for deep Si etching applications Enlarged functionality with capability to deep etch silicon, silicon carbide, glass, sapphire, and quartz

More information

Grazing-Incidence Metal Mirrors for Laser-IFE

Grazing-Incidence Metal Mirrors for Laser-IFE Grazing-Incidence Metal Mirrors for Laser-IFE M. S. Tillack, J. E. Pulsifer, K. L. Sequoia J. F. Latkowski, R. P. Abbott 21-22 March 2005 US-Japan Workshop on Laser IFE San Diego, CA The final optic in

More information

Productivity versus Profitability in Vacuum Web Coating

Productivity versus Profitability in Vacuum Web Coating Productivity versus Profitability in Vacuum Web Coating Liz Josephson, Applied Films Corp., Longmont, USA Dirk Hoffmann, Applied Films GmbH & Co KG, Alzenau, Germany Gerard Loebig, Applied Films GmbH &

More information

Physical Vapor Deposition (PVD) Zheng Yang

Physical Vapor Deposition (PVD) Zheng Yang Physical Vapor Deposition (PVD) Zheng Yang ERF 3017, email: yangzhen@uic.edu Page 1 Major Fabrication Steps in MOS Process Flow UV light Mask oxygen Silicon dioxide photoresist exposed photoresist oxide

More information

Maximizing the Potential of Rotatable Magnetron Sputter Sources for Web Coating Applications

Maximizing the Potential of Rotatable Magnetron Sputter Sources for Web Coating Applications Maximizing the Potential of Rotatable Magnetron Sputter Sources for Web Coating Applications V.Bellido-Gonzalez, Dermot Monaghan, Robert Brown, Alex Azzopardi, Gencoa, Liverpool UK Structure of presentation

More information

Energy Efficient Glazing Design. John Ridealgh Off-Line Coatings Technology Group Pilkington European Technology Centre

Energy Efficient Glazing Design. John Ridealgh Off-Line Coatings Technology Group Pilkington European Technology Centre Energy Efficient Glazing Design John Ridealgh Off-Line Coatings Technology Group Pilkington European Technology Centre 2 John Ridealgh 30th November 2009 Talk Outline Pilkington Group Limited & NSG Group

More information

Influence of Annealing Temperature on the Properties of ITO Films Prepared by Electron Beam Evaporation and Ion-Assisted Deposition

Influence of Annealing Temperature on the Properties of ITO Films Prepared by Electron Beam Evaporation and Ion-Assisted Deposition Kasetsart J. (Nat. Sci.) 42 : 362-366 (2008) Influence of Annealing Temperature on the Properties of ITO Films Prepared by Electron Beam Evaporation and Ion-Assisted Deposition Artorn Pokaipisit 1 *, Mati

More information

Application note. Quality control of beam splitters and quarterwave-mirrors using the Agilent Cary 7000 Universal Measurement Spectrophotometer (UMS)

Application note. Quality control of beam splitters and quarterwave-mirrors using the Agilent Cary 7000 Universal Measurement Spectrophotometer (UMS) Quality control of beam splitters and quarterwave-mirrors using the Agilent Cary Universal Measurement Spectrophotometer (UMS) Application note Materials testing and research Authors David Death Farinaz

More information

Web Based Photonic Crystal Biosensors for Drug Discovery & Diagnostics

Web Based Photonic Crystal Biosensors for Drug Discovery & Diagnostics Web Based Photonic Crystal Biosensors for Drug Discovery & Diagnostics Stephen C. Schulz Introduction SRU Biosystems Inc., Woburn MA Biosensors, Instruments, Software, and Applications Drug Discovery and

More information

AC Reactive Sputtering with Inverted Cylindrical Magnetrons

AC Reactive Sputtering with Inverted Cylindrical Magnetrons AC Reactive Sputtering with Inverted Cylindrical Magnetrons D.A. Glocker, Isoflux Incorporated, Rush, NY; and V.W. Lindberg and A.R. Woodard, Rochester Institute of Technology, Rochester, NY Key Words:

More information

Transparent Heat Mirror Using Plasma Polymer Fluorocarbon Fabricated by Continuous Roll-to-Roll Sputtering

Transparent Heat Mirror Using Plasma Polymer Fluorocarbon Fabricated by Continuous Roll-to-Roll Sputtering 2R Conference USA 2018 Transparent Heat Mirror Using Plasma Polymer Fluorocarbon Fabricated by Continuous Roll-to-Roll Sputtering Sang-Jin Lee, Ph.D/Principal Researcher Sung Hyun Kim, Mac Kim, Tae-Woon

More information

THE INCREASE IN THICKNESS UNIFORMITY OF FILMS OBTAINED BY MAGNETRON SPUTTERING WITH ROTATING SUBSTRATE

THE INCREASE IN THICKNESS UNIFORMITY OF FILMS OBTAINED BY MAGNETRON SPUTTERING WITH ROTATING SUBSTRATE Plasma Physics and Technology 3(3):1 14, 216 Department of Physics, FEE CTU in Prague, 216 THE INCREASE IN THICKNESS UNIFORMITY OF FILMS OBTAINED BY MAGNETRON SPUTTERING WITH ROTATING SUBSTRATE Golosov

More information

COMMERCIAL PRODUCTS GROUP. World Leader in High Performance, Ultra-Durable Thin Film Coatings

COMMERCIAL PRODUCTS GROUP. World Leader in High Performance, Ultra-Durable Thin Film Coatings COMMERCIAL PRODUCTS GROUP Into the Future DSI was established in 1985 with a contract to develop an energy-efficient coating for halogen light bulbs. Since then, we have expanded our role in this specialized

More information

Damage Threats and Response of Final Optics for Laser-Fusion Power Plants

Damage Threats and Response of Final Optics for Laser-Fusion Power Plants Damage Threats and Response of Final Optics for Laser-Fusion Power Plants M. S. Tillack 1, S. A. Payne 2, N. M. Ghoniem 3, M. R. Zaghloul 1 and J. F. Latkowski 2 1 UC San Diego, La Jolla, CA 92093-0417

More information

Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings

Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings SHARP, J, MULLER, I Castillo, MANDAL, P, ABBAS, A, WEST, G, RAINFORTH, W M, EHIASARIAN, Arutiun

More information

Solid-Phase Synthesis of Mg2Si Thin Film on Sapphire substrate

Solid-Phase Synthesis of Mg2Si Thin Film on Sapphire substrate Proc. Asia-Pacific Conf. on Semiconducting Silicides and Related Materials 2016 JJAP Conf. Proc. 5, https://doi.org/10.7567/jjapcp.5.011302 Solid-Phase Synthesis of Mg2Si Thin Film on Sapphire substrate

More information

Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings

Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings SHARP, J, MULLER, I Castillo, MANDAL, P, ABBAS, A, WEST, G, RAINFORTH, W M, EHIASARIAN, Arutiun and

More information

Czochralski Crystal Growth

Czochralski Crystal Growth Czochralski Crystal Growth Crystal Pulling Crystal Ingots Shaping and Polishing 300 mm wafer 1 2 Advantage of larger diameter wafers Wafer area larger Chip area larger 3 4 Large-Diameter Wafer Handling

More information

Polarizing and non-polarizing mirrors in far UV for the Hydrogen Lyman-α radiation (λ = 121.6nm)

Polarizing and non-polarizing mirrors in far UV for the Hydrogen Lyman-α radiation (λ = 121.6nm) UVX 1 (11) 169 173 DOI: 1.151/uvx/1123 C Owned by the authors, published by EDP Sciences, 11 Polarizing and non-polarizing mirrors in far UV for the Hydrogen Lyman-α radiation (λ = 121.6nm) F. Bridou,

More information

Applied Research for Vacuum Web Coating: What is Coming Next?

Applied Research for Vacuum Web Coating: What is Coming Next? Applied Research for Vacuum Web Coating: What is Coming Next? Matthias Fahland, John Fahlteich, Steffen Günther, Manuela Junghähnel, Claus Luber, Nicolas Schiller, Cindy Steiner, Steffen Straach, Michiel

More information

Spectrometer gratings based on direct-write e-beam lithography

Spectrometer gratings based on direct-write e-beam lithography Spectrometer gratings based on direct-write e-beam lithography U.D. Zeitner, T. Flügel-Paul, T. Harzendorf, M. Heusinger, E.-B. Kley Fraunhofer Institut für Angewandte Optik und Feinmechanik Jena, Germany

More information

Supporting Information for

Supporting Information for Electronic Supplementary Material (ESI) for Nanoscale. This journal is The Royal Society of Chemistry 2015 Supporting Information for Large-Scale Freestanding Nanometer-thick Graphite Pellicle for Mass

More information

Standard Optics Information

Standard Optics Information INFRASIL 301, 302 1. GENERAL PRODUCT DESCRIPTION Heraeus INFRASIL 301 and 302 are optical quartz glass grades manufactured by fusion of natural quartz crystals in an electrically heated furnace. They combine

More information

HOMOSIL, HERASIL 1, 2 and 3

HOMOSIL, HERASIL 1, 2 and 3 HOMOSIL, HERASIL 1, 2 and 3 1. GENERAL PRODUCT DESCRIPTION Heraeus HOMOSIL, HERASIL 1, 2, and 3 are optical quartz glass grades manufactured by flame fusion of natural quartz crystals. They combine excellent

More information

Characterisation of Fe-Ni amorphous thin films for possible magnetostrictive sensor applications

Characterisation of Fe-Ni amorphous thin films for possible magnetostrictive sensor applications Characterisation of Fe-Ni amorphous thin films for possible magnetostrictive sensor applications Contents 9.1 Introduction 9.2 Experiment 9.3 Results and Discussions 9.4 Conclusion 9.1 Introduction Magnetostrictive

More information

High Rate Deposition of Reactive Oxide Coatings by New Plasma Enhanced Chemical Vapor Deposition Source Technology

High Rate Deposition of Reactive Oxide Coatings by New Plasma Enhanced Chemical Vapor Deposition Source Technology General Plasma, Inc. 546 East 25th Street Tucson, Arizona 85713 tel. 520-882-5100 fax. 520-882-5165 High Rate Deposition of Reactive Oxide Coatings by New Plasma Enhanced Chemical Vapor Deposition Source

More information

Product specification TiNOX energy

Product specification TiNOX energy Product specification TiNOX energy 1. Technical properties of the coating Version 6 of the 12 th April 2018 TiNOX energy is a highly selective absorber coating deposited in an environmental friendly air

More information

Fabrication of the Crystalline ITO Pattern by Picosecond Laser with a Diffractive Optical Element

Fabrication of the Crystalline ITO Pattern by Picosecond Laser with a Diffractive Optical Element Fabrication of the Crystalline ITO Pattern by Picosecond Laser with a Diffractive Optical Element C.W. Chien and C.W. Cheng* ITRI South Campus, Industrial Technology Research Institute, No. 8, Gongyan

More information

Advanced Glass Refinement by Thin Films - Trends and Challenges of Thin Film Technologies for Windows and Facade Glasses

Advanced Glass Refinement by Thin Films - Trends and Challenges of Thin Film Technologies for Windows and Facade Glasses Advanced Glass Refinement by Thin Films - Trends and Challenges of Thin Film Technologies for Windows and Facade Glasses Dr.-Ing. Manuela Junghähnel Fraunhofer Institute for Elect ron Beam and Plasma Technology

More information

Laser-induced contamination on highreflective

Laser-induced contamination on highreflective Master Thesis Laser-induced contamination on highreflective optics by Paul Wagner 715818 University of Applied Science Darmstadt DLR - German Aerospace Center (Deutsches Zentrum für Luft- und Raumfahrt)

More information

PHS6317 NANO-ENGINEERING OF THIN FILMS

PHS6317 NANO-ENGINEERING OF THIN FILMS PHS6317 NANO-ENGINEERING OF THIN FILMS Ludvik Martinu, ing., PhD Professor Chairholder: NSERC Multisectorial Industrial Research Chair in Coatings and Surface Engineering ludvik.martinu@polymtl.ca www.polymtl.ca/larfis

More information

Plasma Quest Limited

Plasma Quest Limited Plasma Quest Limited A Remote Plasma Sputter Process for High Rate Web Coating of Low Temperature Plastic Film with High Quality Thin Film Metals and Insulators Dr. Peter Hockley and Prof. Mike Thwaites,

More information

MICROFABRICATION OF OPTICALLY ACTIVE InO X MICROSTRUCTURES BY ULTRASHORT LASER PULSES

MICROFABRICATION OF OPTICALLY ACTIVE InO X MICROSTRUCTURES BY ULTRASHORT LASER PULSES Journal of Optoelectronics and Advanced Materials Vol. 4, No. 3, September 2002, p. 809-812 MICROFABRICATION OF OPTICALLY ACTIVE InO X MICROSTRUCTURES BY ULTRASHORT LASER PULSES Foundation for Research

More information

Mass Production of Clear Barriers. Requirements on Vacuum Web Coaters for Quality Assurance. Rainer Ludwig, Applied Films, Alzenau, Germany.

Mass Production of Clear Barriers. Requirements on Vacuum Web Coaters for Quality Assurance. Rainer Ludwig, Applied Films, Alzenau, Germany. Mass Production of Clear Barriers Requirements on Vacuum Web Coaters for Quality Assurance Rainer Ludwig, Applied Films, Alzenau, Germany Abstract An increasing number of packages using Transparent Barrier

More information

A Functional Micro-Solid Oxide Fuel Cell with. Nanometer Freestanding Electrolyte

A Functional Micro-Solid Oxide Fuel Cell with. Nanometer Freestanding Electrolyte Electronic Supplementary Material (ESI) for Journal of Materials Chemistry A. This journal is The Royal Society of Chemistry 2017 SUPPLEMENTARY INFORMATION A Functional Micro-Solid Oxide Fuel Cell with

More information

4. Surface & Metrology

4. Surface & Metrology 4. Index Surface roughness Friction, wear Surface treatment & Coating Metrology Surface Structure ( 표면구조 ) Contaminant ( 불순물 ) Oxide ( 산화물 ) Fe 2 O 3, Al 2 O 3, Cu 2 O, CrO Surface structure( 표면구조 ): work

More information

Deep-etched fused silica grating as a (de)multiplexer for DWDM application at the wavelength of 1.55µm

Deep-etched fused silica grating as a (de)multiplexer for DWDM application at the wavelength of 1.55µm Deep-etched fused silica grating as a (de)multiplexer for DWDM application at the wavelength of 1.55µm Yanyan Zhang*, Changhe Zhou, Huayi Ru, Shunquan Wang Shanghai Institute of Optics and Fine Mechanics,

More information

Click here to continue >

Click here to continue > Capability Matrix Please click on any of the blue or green circles contained in the matrix below to progress to more specific CVI Infrared Optics capability Optical components Optical Glass Silicon Ge

More information

Thin Film Micro-Optics

Thin Film Micro-Optics Thin Film Micro-Optics New Frontiers of Spatio-Temporal Beam Shaping Ruediger Grunwald Max Born Institut for Nonlinear Optics and Short Pulse Spectroscopy Berlin, Germany ELSEVIER Amsterdam Boston Heidelberg

More information

Improvement of gas barrier properties by combination of polymer film and gas barrier layer

Improvement of gas barrier properties by combination of polymer film and gas barrier layer Improvement of gas barrier properties by combination of polymer film and gas barrier Y. Tsumagari, H. Murakami, K. Iseki and S. Yokoyama Toyobo Co., LTD. RESEARCH CENTER, - Katata 2-chome, Otsu, Shiga,

More information

Mirrors, Lenses, and IR Components

Mirrors, Lenses, and IR Components Mirrors, Lenses, and IR Components High performance optical components and coating services PLEIGER Laseroptik A benchmark for quality - CO 2 mirrors - ZnSe lenses - IR components - Coating services PLEIGER

More information

Chapter 4. Laser Diode Facet Coating Using Al2O3, SiO2, TiO2, and ZrO2

Chapter 4. Laser Diode Facet Coating Using Al2O3, SiO2, TiO2, and ZrO2 Chapter 4 Laser Diode Facet Coating Using Al2O3, SiO2, TiO2, and ZrO2 4. Laser Diode Facet Coating Using Al 2 O 3, SiO 2, TiO 2 and ZrO 2 The facet coating is one of the most important aspects of the high-power

More information

Optical and Electrical Characterization of CuO Thin Films as Absorber Material for Solar Cell Applications

Optical and Electrical Characterization of CuO Thin Films as Absorber Material for Solar Cell Applications American Journal of Condensed Matter Physics 16, 6(1): 1-6 DOI: 1.5923/j.ajcmp.11.1 Optical and Electrical Characterization of CuO Thin Films as Absorber Material for Solar Cell Applications K. S. Wanjala

More information

Large Area Coating for Glazing IOP Vacuum Symposium Daresbury 11 th Feb 2010

Large Area Coating for Glazing IOP Vacuum Symposium Daresbury 11 th Feb 2010 Large Area Coating for Glazing IOP Vacuum Symposium Daresbury 11 th Feb 2010 Off-Line Coatings Technology Group Pilkington European Technology Centre 2 NSG Group Pilkington a member of NSG Group from June

More information

Optical parameter determination of ZrO 2 thin films prepared by sol gel dip coating

Optical parameter determination of ZrO 2 thin films prepared by sol gel dip coating International Journal of ChemTech Research CODEN (USA): IJCRGG ISSN : 0974-490 Vol.6, No.13, pp 534-5346, November 014 MESCon 014 [4th -5 th September 014] National Conference on Material for Energy Storage

More information