PHS6317 NANO-ENGINEERING OF THIN FILMS

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1 PHS6317 NANO-ENGINEERING OF THIN FILMS Ludvik Martinu, ing., PhD Professor Chairholder: NSERC Multisectorial Industrial Research Chair in Coatings and Surface Engineering Winter 2017 Bienvenue, welcome 1

2 Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 2

3 Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 3

4 Nano-engineering of thin films: «Play» with the microstructure on the nanoscale Application Advanced technology Nano-technoloqy Properties Metrology Optimization Functions Process control In situ Real-time Fabrication Phase transformation de phase Material transfer Physico-chimical reactions Microstructure Growth Surface conditions Evolution Control on the nanoscale Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 4

5 Nano-engineering of thin films: «Play» with the microstructure on the nanoscale Application Advanced technology Nano-technoloqy PHS6317 Nano- Engineering of thin films Properties Metrology Optimization Functions PHS8321 Charac. of advanced materials Process control In situ Real-time Microstructure Growth Surface conditions Evolution Control on the nanoscale Fabrication Phase transformation de phase Material transfer Physico-chimical reactions PHS8310 Microfabrication PHS6314 Thin film nucleation and growth Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 5

6 Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 6

7 Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 7

8 Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 8

9 Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 9

10 25 January 10 February 17 March Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 10

11 3 March 24 March Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 11

12 17 February 3 March 18 and 20 April Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 12

13 Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 13

14 Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 14

15 Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 15

16 Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 16

17 Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 17

18 Functional Coating and Surface Engineering Laboratory larfis.polymtl.ca Directors Mission Team Ludvik Martinu Jolanta Sapieha To develop new fabrication techniques and new materials for thin film systems and coatings possessing tailored optical, optoelectronic, microand nano-mechanical, tribological, and protective properties, and other functional characteristics Plasma- and ion-based processes Optical & tribo-mechanical metrology Plasma enhanced chemical vapor deposition PECVD High power pulsed magnetron sputtering - HiPIMS Multifunctional coatings Ellipsometry Roll coating Dual ion beam Nano-indentation Nano-tribology Plasma-enhanced chemical vapor deposition, pulsed magnetron sputtering, dual ion beam sputtering, hybrid processes, reactor design, new materials, plasma surface processing, plasma diagnostics and monitoring. Optical properties: ellipsometry (UV-VIS-NIR-IR), prism coupling, electro-optic measurements, spectrophotometry. Tribo-mechanical properties: depth-sensing indentation, nanotribology, micro-scratching, adhesion, wear, friction, erosion, tribo-corrosion, functional properties and stability.

19 Design & fabrication of optical coatings Hard and protective tribo-coatings Aerospace and aviation Automotive Biomedical Smart materials Metameric filters Interference filters Health and safety Decorative coatings Applications: Optical interference filters for optical instrumentation, telecommunication, ophthalmics, security and sensors, smart systems for energy and environmental control, and decorative anticorrosive applications. Materials and micro/nanostructure Functional properties: adhesion control, wear, erosion and corrosion resistance, thermal and environmental stability, biocompatibility, etc. Modeling and predictive tools Nanocomposite materials Erosion and wear Matrix Nanocrystals Multilayer and graded index interference filters Nanoparticles and nanocomposite thin films Surface imaging after indentation, wear and corrosion Microstructure and materials analysis: scanning and transmission electron microscopies, X-ray diffraction, ion beam analysis, X-Ray photoelectron spectroscopy, etc. Molecular dynamic simulation Spherical solid particle Coating Substrate 14 nm (262,000 atoms) Finite element models Modelling, simulation, prediction, failure mechanisms, design of coating architectures: multilayers, nanocomposites, graded layers, nanolaminates, nanoporous systems.

20 NSERC Multisectorial Industrial Research Chair in Coatings and Surface Engineering Since 2012 Research Program: Optical Coatings and Protective Tribological Coatings Ophthalmic lenses Aircraft engines Optoelectronics, security Energy generation and distribution Eco-energetic windows Industrial valves Space exploration Industrial Chair Highlights (L. Martinu): - Second largest NSERC Chair in Canada - Research personnel: about 30 - Important synergies between different sectors - Recently renewed for the second term ( )

21 PHS 6317 course schedule Winter January Introduction Scientific and technological challenges 20 Fabrication methods Vapor-phase (vacuum) techniques 27* Fabrication methods Plasma processes, surface interactions 3 February Fabrication methods Complementary techniques Spray technol. 10* Fabrication methods Plasma diagnostics 17* Optics of thin films 1 24 Optics of thin films 2, miniquiz 1 (5%) 3 March* Design of optical filters (20% - March 24) March 6-10 Winter/Spring break 17 March* Presentations Emerging fabrication techniques (30%) 24* Tribological coatings and thin films 31 Passive functional coatings and thin films 7 April Active functional coatings and thin films, miniquiz 2 (5%) 18 April* Presentations Emerging applications of nanostructured films (40%) Winter 2017 Polytechnique Montreal, Nano-engineering of Thin Films 21

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