Bearings for Extreme Special Environment (5) Linear Motion Bearings and Unit Products

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1 Bearings for Extreme Special Environment (5) Linear Motion Bearings and Unit Products H. TAKEBAYASHI Outlines of Koyo EXSEV bearing series (bearings for extreme special environments) have been explained in the Koyo Engineering Journal No. 156E, 157E, 158E, 16E. In this report, the compositions of linear motion bearings (linear motion ball bearing, linear way, cross roller way ) for use in extreme special environments, low particle generation characteristics and particle lives of linear way s, and application examples of unit products for use in a clean environment are described. Key Words: EXSEV, bearing, linear way, unit, special environment 1. Introduction Koyo has been marketing bearings for extreme special environment under the trade name "Koyo EXSEV (Extreme Special Environment) Bearings" for use under extreme special environment, such as vacuum, clean, high-temperature and extreme severe conditions. Bearings for extreme special environment "Koyo EXSEV Bearings" have already been introduced in the previous four series. Linear motion bearings and unit products are introduced in this 5th report. To be more specific, the compositions of linear motion bearings (linear motion ball bearing, linear way s and cross roller way bearing units) for extreme special environment, low particle generation characteristics and particle generation life in linear way products, using linear way bearings for extreme special environment are described in this report. 2. Types and Compositions of Linear Motion Bearings for Extreme Special Environment 1) Linear motion bearings for extreme special environment are also produced on the commercial base as well as other general bearings for extreme special environment. Linear motion bearings consist mainly of linear way ball bearing, linear way and cross roller way bearing unit as shown in Fig. 1. Figure 1 (a) shows linear motion ball bearings. These are bearings with retainers, balls and side plates, assembled into the external cylinder. s move linear in the axial direction keeping rolling contact with shafts. Figure 1 (b) shows linear way s. These are designed to allow balls to circulate inside a casing. The casing moves linear on a track rail. Figure 1 (c) shows cross roller way s. Cylindrical rollers with retainers are mounted between two raceway bases with two v-shaped surfaces as raceways, making a linear movement. Table 1 shows the examples of compositions of linear motion ball bearings for use in extreme special environments. Table 2 shows the examples of compositions of linear way s for use in extreme special environments. Table 3 shows the examples of compositions of a cross roller way s for use in extreme special environments. Martensite stainless steel () is principally used as a material for raceway parts (external cylinder, casing, track rail and raceway base), balls and cylindrical rollers. Ceramics and special metallic materials can sometimes be used to meet the requirements for heat, corrosion resistance and non-magnetic characteristics. As the material for a retainer and side plate, austenite stainless steel (SUS34 etc) is mainly used. As for solid lubricants to be used in bearings for extreme special environment, special polymeric fluoride, silver (Ag), PTFE and molybdenum dioxide (MoS 2 ) are applied for the coating of linear motion bearings or balls, raceways and retainers. In particular to comply with the recent requirements, from semi-conductor production equipment and so on, for low particle generation and low gas emission characteristics special polymeric fluoride coating is applied on the whole of linear motion bearings as well as general rolling bearings. Table 1 Example of the composition of the linear motion ball bearing for use in extreme special environments Outer cylinder Retainer Si 3 N 4 (Ceramics) SUS34 SUS631 Special polymeric fluoride coating Ag ion plating KOYO Engineering Journal English Edition No.161E (22) 57

2 Table 3 Example of the composition of the cross roller way for use in extreme special environments Raceway base Special polymeric Cylindrical fluoride coating roller Retainer SUS34 (a) Linear motion ball bearings (b) s (c) Cross roller way s Fig. 1 Linear motion bearings for use in extreme special environments Table 2 Example of the composition of the linear way bearing unit for use in extreme special environments Casing Track rail Special polymeric Ag ion plating Si 3 N 4 (Ceramics) fluoride coating SUS34 3. Particle Generation Characteristics and Particle Generation Life of Linear Way Bearing Unit The estimation on particle generation characteristics and particle generation life for linear way s with special polymeric fluoride coating (hereinafter called as Clean Pro) for the recent clean requirements, particularly from semiconductor and liquid-crystal industries, have been studied and the result of the study is introduced here. Clean Pro is the trademark of Koyo signifying special polymeric fluoride coating (thickness less than.5lm) on the bearings. It is thought that the same result can be applied for particle generation characteristics and particle generation life of linear motion ball bearings, too as balls circulate in both cases. Linear motion bearings with balls (point contact) will be discussed here. Linear motion bearings with rollers (line contact) will be studied separately Particle Generation Characteristics 2) Figure 2 shows the test method to examine particle generation characteristics. In this test equipment, moment is loaded by a bracket weight and reciprocating motion of two linear way slide units (casing, balls and side plate) are given through a stepping motor and belt. During this motion the particle generated from a linear way is measured with a particle counter. The test was conducted for three kinds of linear way s i.e. a degreased stainless steel linear way without any lubricant, stainless steel linear way applied with Clean Pro and linear way coated with ceramics (silicon nitride) on balls in addition to Clean Pro. Test guide Bracket Driving pulley Idler Belt Rail Idler pulley Block Stepping motor Fig. 2 Test method 58 KOYO Engineering Journal English Edition No.161E (22)

3 Each has been tested and compared until particle generation life (until the number of particles with diameter larger than.1lm exceeds 1 particles/.1 cf) is reached. Figure 3 shows the test results. s applied with Clean Pro showed around 35 times longer life compared to that of linear way s without lubricant. s with balls of silicon nitride (Si 3 N 4 ) in addition to Clean Pro process showed six times longer life than that of stainless steel units applied with Clean Pro. This shows linear way s applied with Clean Pro has longer particle generation life compared to that of linear way s without lubricant. In addition, the combination of Clean Pro and silicon nitride balls showed a superior particle generation life. Particle generation life ratio Rail, Casing Bearing : 3NCLGBK9L2PR/3 (rail width 9mm, length 3mm) Atmosphere: Class 1, room temperature Load : 1 N (moment) Speed : 13mm / sec Particle Generation Life 3) Table 4 shows test bearings. Three different kinds of linear way s were used: a stainless steel linear way ; stainless steel Clean Pro treated linear way ; and stainless steel Clean Pro treated linear way with silicon nitride balls Si3N4 Lubricant No lubricant (dry) Clean Pro Clean Pro Fig. 3 Test results (linear way s) Bearing type Table 4 Specifications of test bearings Rail & casing A All stainless steel SUS34 B C All stainless steel Hybrid ceramic Si 3 N 4 Clean Pro : Special polymeric fluoride coating (coating thickness less than.5 lm) Hybrid ceramics : Bearing with silicon nitride balls SUS34 SUS34 Figure 4 and Table 5 show test apparatus and test conditions. In the test apparatus two slide units are installed; one on top of the base plate and the other one below the base plate so that radial load can be loaded through the loading spring. The test bearings also make reciprocating motion on the rail through a belt attached to the slide unit. The particle counting sensor is attached on the same position as the base plate in the center of the test apparatus. The amount of particle generation is measured by inhaling the particle through the sensor at one litter/ minute. Particle counter Item Pulley Limit sensor Reciprocating motion counter Rail 2 Load Rail 1 Driving motor axle Fig. 4 Test apparatus Zero sensor Table 5 Test conditions Load spring Casing 2 Casing 1 Load Content Driving belt Limit sensor Acrylic resin case Atmosphere Inside clean room (class 1), room temperature Average speed, mm/sec 25 Acceleration, mm/sec 2 5 Stroke, mm 25 Load, N 4, 8, 16 (radial direction) Figure 5 shows the particle generation change tested on the three kinds of linear way s at radial load of 8 N. A similar tendency is observed as Fig. 3 even though test methods and conditions are not the same. In other words, it can be observed that the particle generation life will be longer in the ascending order of stainless steel linear way bearing unit, stainless steel Clean Pro linear way and Clean Pro linear way with silicon nitride balls. The amount of particle generation of Clean Pro linear way with silicon nitride balls at the steady state is smaller compared to that of stainless steel Clean Pro linear way at steady state and the particle generation life is also longer by around three times. Figure 6 shows the result of the particle generation life test, conducted on the two kinds of linear way s (stainless steel balls, silicon nitride balls). The vertical line shows particle generation life and the horizontal line shows P / Ce (P = dynamic equivalent load, Ce = basic dynamic load rating). Each plot indicates the average value of five test data. KOYO Engineering Journal English Edition No.161E (22) 59

4 Amount of particle generation, pieces/.1 cf (particle diameter larger than.1lm) Particle life, km 1.E+5 1.E+4 1.E+3 1.E+2 1.E+1 1.E Stainless steel without coating Fig. 5 Particle generation L=5 (P/Ce) 1 Stainless steel + coating Traveling length, km.5.1 P/Ce Fig. 6 Particle life Load: 8 N Hybrid ceramics + coating N=5, Average value Stainless steel + coating Hybrid ceramics + coating L=1.7 (P/Ce) 1 From this result an equation for the particle generation life of a linear way applied with Clean Pro is derived: L = a (P / Ce) 1 L : Particle generation life, km Atmosphere; room temperature Traveling speed; less than.5 m / sec P / Ce; less than 15% a : Material factor All stainless steel 1.7 Combined with ceramic 5. P : Dynamic equivalent load Ce : Basic dynamic load rating That is, the particle generation life of stainless steel Clean Pro linear way s can be estimated taking 1.7 as the material factor (a) and that of Clean Pro linear way with silicon nitride balls taking 5. as the material factor (a). This particle generation life estimation equation is derived from test data on five pieces and can be used for a rough prediction of particle generation life. It is our intention, however, to estimate particle generation life more precisely by accumulating more data in the near future. 4. Review on Unit Products for Extreme Special Environment 4. 1 Performance of Linear Motion Unit Product Figure 7 shows the construction of a linear motion unit product. A linear way is used for the linear motion unit product and is driven by a steel belt. Silicon nitride balls are used for the linear way s in addition to Clean Pro treatment to satisfy a vacuum condition and low particle generation (for clean environment). Conventional rolling bearings mounted on a driving pulley are also treated with Clean Pro. Figure 8 shows particle generation characteristics of a linear motion unit. For measurement of particle generation, a linear motion unit was installed in the clean bench and the amount of particles with a diameter larger than.1lm was measured at every 1 reciprocating motions. The amount of particle generation here means the number of particles generated (particle diameter larger than.1lm) in suction amounts of 1 cf for every 1 reciprocating motions of the linear motion unit in the clean bench. It can be observed that although comparatively larger amount of particles was generated in the early period of the test, it became stable after reciprocating motions and reached a particle generation life of more than 25 reciprocating motions. The amount of particles generated during the stable period was around 1 pieces. Particle generation, more than.1lm Pick up Driving pulley Steel belt or wire Fig. 7 Construction of linear motion unit product SMeasuring method Test conditions Stroke: 3mm Speed: 25mm/ sec Particle generation measurement at every 1 reciprocating motions Diameter of measured particle larger than.1lm Reciprocating motion, unit of 1 times Pick up Stepping motor Fig. 8 Particle generation of linear motion unit The present status on unit products for extreme special environment (using conventional rolling bearings and linear motion bearing) is introduced in this section. Particle generation characteristics and positioning accuracy of linear motion s for clean environment are discussed first and product examples afterwards. 6 KOYO Engineering Journal English Edition No.161E (22)

5 Figure 9 is the measurement result of positioning accuracy of a linear motion unit. Repeat positioning accuracy was measured by a laser measuring apparatus at the following conditions; stroke : 3mm, speed : 25mm / sec. It was confirmed that repeating positioning accuracy of less than ±5lm can be secured even for belt driven linear motion units with a solid lubricant. Y axle table drive A X axle table drive Slewing table u Slide unit A-A cross section u23 Positioning accuracy, lm Number of reciprocating motions Fig. 9 Positioning accuracy of linear motion unit product 4. 2 Examples of Unit Products for Extreme Special Environments Figure 1 shows an X-axle table (using linear way bearing unit and ball screw) for vacuum and clean environments. All parts of the table, a linear way, ball screw, ball screw support bearings, table are made of stainless steel to satisfy vacuum and clean requirements. The linear way, ball screw and ball screw support bearings are processed with Clean Pro on all the surfaces to achieve low particle generation (for clean environments). Also silicon nitride balls can be used whenever special performance is needed for unit products. 5. Conclusion Linear motion bearings and units for extreme special environments have been described here. Today superior low particle generation characteristics of Koyo linear motion bearings and unit products have been drawing much attention and are extensively used in the semi-conductor and liquid crystal equipment. It is considered that semi-conductor and liquid crystal equipment manufacturers will require still lower particle generation, higher load carrying capacity and higher temperature resistance in the future. Accordingly much higher performance of rolling bearings, linear motion bearings and unit products will be required. To comply with such needs it is important for us to do further research and development on materials and solid lubricants. References LWLFG18C1B A 37 5 X axle table Y axle table Slewing table drive Fig. 11 XYh alignment table 2 Base Support bearing screw Support bearing 1) Koyo Seiko Co., Ltd.: EXSEV Bearing Series Ceramic Bearing and EXSEV Bearings, CAT. No 28, 6. 2) K. Tsuru: Koyo Engineering Journal, 154E (1999) 51. 3) H. Toyota, T. Kida: Proceedings of the Conference on Tribology of the Japanese Society of Tribologists (Takamatsu ) ) Koyo Machine Industries Co., Ltd.: Koyo Engineering Journal, 158E (21) 78. Fig. 1 X-axle table Figure 11 shows an XYh alignment table unit for vacuum and clean environments 4). Stainless steel is used for all parts considering vacuum and clean environments. Specially thin ball bearings are used for the swivel axle support of the table unit to provide high load rating and high rigidity. Clean Pro is processed on the rolling elements of this unit. H. TAKEBAYASHI * * Aerospace & Super Precision Engineering Department, Bearing Engineering Center, Dr. KOYO Engineering Journal English Edition No.161E (22) 61

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