Smarter sensing solutions

Transcription

1 Easy access to microsystems production through contract manufacturing services Espoo, Finland June 14th 2011 Smarter sensing solutions Colibrys Foundry presentation: Sean Neylon

2 Business Model The Colibrys business model is based on two elements Development, manufacture and sale of proprietary, high performance MEMS based motion sensors for harsh environment and safety critical applications in Energy, Mil/Aeropsace and Industrial markets Accelerometers Inertial Vibration Tilt Shock Seismic Partially captive foundry - Contract manufacturing of custom MEMS components and microsystems within limits of unused capacities 2

3 Foundry Business Guidelines Processes must be consistent with existing core process capability Medium volume applications - nominally wafers / year Full or partial fab processes Wafer fab chips or fully assembled and tested parts Work only with MEMS mature customers Preferably proven applications Foundry revenue >$6mio/year Production Products: Electro-mechanical Opto-mechanical Radiation sensing 3

4 State-of-the-art Facilities Closed 2009 Stafford, TX, USA Stand-alone building subleased from I/O Wafer Fab (class 100/1000) >310m2 Assembly/Test (class ) >280m2 150mm wafers Capacity > wafers/yr Neuchatel, Switzerland Stand-alone building Consolidated all manufacturing in Neuchatel since 2009 Wafer Fab (Class 100/1000) >985m2 150mm wafers (transition ) Capacity > wafers/yr Assembly/Test (class ) >530m2 Piloting & specials Customized testing 4

5 Key process tools Photolith UTS DSA1600 (double-sided stepper) EVG 620 mask aligner Positive resist and lift-off processes Deposition Metals: (sputter) Ti, Au, TiW, Al Metals: (evaporation) Ti, Ta, Pt, Al, Au, Thin Films: PECVD, LPCVD nitride (stoechiometric and low-stress) Wet/Dry Etch KOH / HF DRIE - Alcatel AMS200 RIE Wafer encapsulation (multi-stack) licon Fusion Bonding: stress free, Wafer and chip scale packaging Anodic bonding Metrology Precision membrane thickness 5

6 Process architectures (1) 1,2 or 3 level stacked Bulk silicon Al O 2 1, 2 or 3 level stacked licon-on-insulator (SOI) Al O 2 6

7 Process architectures (2) Microheater Pt2 electrode Pt1 heater low stress silicon nitride 2 level thick Poly (4inch) Al poly1 poly2 3N4 Shutter Stopper Substrate contact O2 wafer Incident light beam 7

8 Electro-mechanical products Micro-heaters (CO2 gas and mass airflow sensors) 6 inch wafers processes Platinum heaters on stress controlled membranes 30c die cost / $600 per wafer >98% yield Pressure sensors Absolute & differential capacitive Motion sensors Gyros Watch components Escapement Springs 8

9 Opto-mechanical products Thermally actuated Variable Optical Attenuator Microshutters Huntsman (Ciba) - Araldite Digitalis Gold award winner (Euromould 2008) ICIS Innovation Awards 2010 MEMS based Stereo lithographic (SL) 3D rapid manufacturing and prototyping machine Tunable laser components Intel tunable lasers Spectrometers gas spectrophotometer Quartz Lens Photosteppers, range finders Variable Optical Attenuator Spectrophotometer components Microshutter chips Microshutter module Tunable laser elements Diffractive Optical Lens 9

10 Radiation sensing Physics: High energy particle detection Dental imaging X-ray imaging 10

11 Full Turn-key SIP capability MEMS device design Process architecture design MEMS device manufacture Electronics system design IC manufacture (Outsourced) Hybrid assembly System in package (SIP) Hermetic packaging Microsystem (Subcontract) Testing 11

12 Industrial Partner Quality & Project Management Colibrys invests on a permanent base in Quality Management systems ISO ISO OHSAS RoHS, REACH Risk mitigation: ICS BCP SSMP Tools: SPC / FMEA / DoE / 8D / Lean 6 gma Industrial standards: Aerospace, Telecommunications, Automotive Phased transition to production (Design reviews) Specialist engineering support Rigorous review controls Customer participation throughout 12

13 13 multi-cultural, small, fast, flexible, a symbol of creativity and fertility, strongly territorial, successful through intelligent mutation culture of Colibrys