Contents. Introduction... Preface... VII

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1 Contents Introduction... V Preface... VII Fundamental Concepts of Ion-Beam Processing R.S. Averback, P. Bellon Introduction: Basic Mechanisms of Ion Solid Interactions Electronic Excitation Nuclear Collisions ThermalSpikes Radiation-EnhancedDiffusion Primary Recoil Spectrum Irradiation-Induced Stresses and Surface Effects DefectAccumulation Collective Behavior: Irradiation-Induced Viscous Flow PhaseTransformations Order-Disorder Alloys: Cu 3 Au Phase-SeparatingAlloys:AgCu Amorphization Phase Transformations: Effective Temperature Model Phase Decomposition Order Disorder Beyond the Effective Temperature Criterion Conclusions References Precipitate and Microstructural Stability in Alloys Subjected to Sustained Irradiation P. Bellon Introduction Elementary Processes in Metallic Alloys Subjected to Irradiation Precipitate Evolution in Irradiated Alloys

2 xii Contents 3.1 ExperimentalObservations Models with Unidirectional Ballistic Mixing Models Including Full Account of Forced Mixing Order DisorderTransformations Radiation-Induced Segregation and Precipitation Defect Clustering and Related Microstructural Evolutions Conclusion References Spontaneous Patterning of Surfaces by Low-Energy Ion Beams Eric Chason, Wai Lun Chan Introduction Varieties of Ion-Induced Pattern Formation Competing Kinetic Mechanisms and the Linear Instability Model BH Instability Model Diffusional Roughening and the ES Instability Other Regimes of Patterning Beyond the Instability Model. 66 References Ion-Beam-Induced Amorphization and Epitaxial Crystallization of Silicon J.S. Williams, G. de M. Azevedo, H. Bernas, F. Fortuna Introduction Overview of Ion-Beam-Induced Amorphization TheEffectofTemperatureonDefectAccumulation Preferential Amorphization at Surfaces and Defect Bands Mechanisms of Amorphization: The Role of Defects Layer-by-Layer Amorphization Overview of Ion-Beam-Induced Epitaxial Crystallization: ExperimentandModeling IBIECTemperatureDependence IBIECObservationsandDependencies Ion-Cascade Effects on IBIEC: The Role of Atomic Displacements and Mobile Defects IBIECModels InterfaceEvolution IBIEC and Silicide Precipitation Precipitate Distribution Phase Composition, Structure and Orientation Conclusion References

3 Contents xiii Voids and Nanocavities in Silicon J.S. Williams, J. Wong-Leung Introduction FormationofNanocavitiesandVoidsbyIonIrradiation NanocavityFormationbyHandHeIrradiation Irradiation-Induced Vacancy Excess and Void Formation Interaction of Impurities with Nanocavities Interactions at Low Levels of Metal Contamination Interactions at High Metal Concentration Levels Mechanisms for Metal Trapping and Precipitation at Cavities Trapping and Precipitation at So-Called R p /2 Defects Stability Under Subsequent Irradiation Interaction of Defects with Voids and Nanocavities Preferential Amorphization Shrinkage and Removal of Open-Volume Defects During Amorphization Conclusions References Damage Formation and Evolution in Ion-Implanted Crystalline Si Sebania Libertino, Antonino La Magna Introduction Point-Like Defects Formation and Evolution PointDefectProperties Point-Defect Generation: Electron Irradiation vs. Ion Implantation and Role of Impurities Room Temperature Diffusion of Point-Like Defects Evolution from Point to Secondary Defects Formation and Annihilation of I Clusters and Extended Defects Evolution from Secondary Defects to Interstitial Clusters InterstitialClusterFormationandDissociation Interstitial Cluster Characterization Extended Defect Characterization Transition from Defect Clusters to Extended Defects SimulationofDefectEvolution Conclusion References Point Defect Kinetics and Extended-Defect Formation during Millisecond Processing of Ion-Implanted Silicon K. Gable, K.S. Jones Conclusions References

4 xiv Contents Magnetic Properties and Ion Beams: Why and How T. Devolder, H. Bernas Introduction MagneticAnisotropyinUltrathinFilms Controlling Thin-Film Magnetic Anisotropy by Ion Irradiation The Strategy Modeling Ballistic Recoil-Induced Structural Modifications Experimental Measurements of Structural Modifications Experimental Variation of the Magnetic Anisotropy (MagneticProperties) RelationBetweenStructuralandMagneticAnisotropies MagneticReversalPropertiesUnderIrradiation AMagneticAnisotropyPhaseDiagram Summary Magnetization Reversal in Irradiation-Fabricated Nano-Structures Ion Beam-Induced Ordering of Intermetallic Alloys A Word on Control of Exchange-Bias Systems via Ion Irradiation References Structure and Properties of Nanoparticles Formed by Ion Implantation A. Meldrum, R. Lopez, R.H. Magruder, L.A. Boatner, C.W. White Introduction NanoparticleSynthesis Microstructures Optoelectronic Properties Nonlinear Optical Materials Light-Emitting Materials Magnetic Materials SmartNanocomposites Controlling Nanocrystal Size, Spacing, and Location Conclusion References Metal Nanoclusters for Optical Properties Giovanni Mattei, Paolo Mazzoldi, Harry Bernas Introduction Optical Properties of Metal Nanoclusters Metal-Nanoparticle Synthesis by Ion Implantation TheIssueofSizeDistribution Ion Implantation for Plasmonic Nanostructures Nucleation and Growth of Metal Nanoparticles Linear(LO)andNonlinearOptical(NLO)Properties Core-Satellite for Nonlinear Optical Properties

5 Contents xv 5 PlasmonicNanostructures Conclusions References Ion Beams in the Geological Sciences A. Meldrum, D.J. Cherniak Introduction Diffusion Applications Experiments AlterationProcesses Radiation Effects in Minerals Conclusion References Ion-Beam Modification of Polymer Surfaces for Biological Applications G. Marletta Introduction Surface Properties Drive Biological System Interactions RoleofSurfaceFreeEnergy(SFE) SurfaceTermination Electronic Structure and Electrical Properties of Surfaces IonBeamsandSurfaceProperties Ion-Dose-DependentChemistry Beam-Induced Modification of Surface Properties Relevant to Biological Interactions Biological Response of Ion-Beam Modified Polymer Surfaces Conclusions References Index

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