Power Vision Ltd. PV Research. Power Vision Ltd. Unit R2, Herald Park, Crewe, Cheshire, CW1 6EA, UK Tel:

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1 Power Vision Ltd PV Research Power Vision Ltd Unit R2, Herald Park, Crewe, Cheshire, CW1 6EA, UK Tel:

2 Flexible Whether it be fast AR coating onto temperature sensitive substrates or high rate deposition of semiconductor materials at elevated temperatures, the PV Research can suit almost any requirement and be specified with a number of options. Substrate heating up to 500 C (Stationary, 250 C Rotating) High energy plasma source providing substrate bombardment for enhanced film growth, pre deposition substrate etching and in process reactive plasmas Meissner trap (<1x10-6 mbar) for water sensitive processes or standard turbo pumping (<1x10-5 mbar) Flexible 2, 3 or 4 magnetron/plasma source configurations to suit your application Masking designed to optimise uniformity with your substrate Pulsed DC or DC sputtering modes Dual power supply option for Co Deposition Multiple gas inlet configurations for reactive or non-reactive processes. Active reactive control if required using target voltage or plasma emission Integrated RGA for gas analysis Baratron for increased process measurement Configurable pumping arrangement to ensure suitable process parameters Added to this the optical coating and thin film design expertise of Power Vision and the sourcing of a wide range of sputtering targets gives an exceptional ability to provide the complete tool for your coating needs. PV Solar The initial PV Research system, the PV Solar, has been used in university based research for solar cells, optimising efficiency and production optimisation of coating processes. The PV Solar utilised many of the options of the standard PV Research and provided a flexible tool to explore the highest deposition rates and temperatures to achieve the highest efficiency coatings. Polymer and Temperature Sensitive Substrates The PV Research has stemmed from the development of a fast process ophthalmic system currently available as the PV Express. With this the PV Research has shown to be very capable at coating polymers and temperature sensitive materials. The process has been developed with a thermally efficient sputter process with optimised magnetrons and a cool plasma source. This allows for excellent adhesion, optical quality and durability of coatings deposited onto polymers and other substrates commonly found difficult. Easy to use and maintain Fast Pump and vent cycles using the LoadLock In House coating design facility to meet specific coating requirements Able to coat a wide range of substrates including CR39, Polycarbonate, Glasses and semiconductors In situ plasma cleaning provided by a plasma source Fast The Load Lock and small chamber design of the PV Research provides very fast pump down and vent times, significantly reducing the overall cycle time. This allows for fast and simple coating generation for large statistical sample sets.

3 Reflectance (%) PV Research: Performance Coatings The multiple magnetron arrangement of the PV Research allows for multiple and several materials to be incorporated within a single deposition. This allows a choice of coating materials to be selected in order to provide the optimal coating for the customer. The PV Research is capable of depositing many conventional sputtering materials including; Metals (Al, Ag, Au, Ge, Si) Oxides (SiO 2, Nb 2 O 5, ZrO 2, TiO 2, HfO 2 ) TCO Coatings (Al:ZnO, ITO) Nitrides (TiN, SiN) Co deposition of alloys (With our second Power Supply option) Many other materials are possible, please enquire for further details. Coating Designs A wide range of coating designs are possible with the PV Research from polarizing beam splitters to AR s or dielectric and metallic mirrors to new material research into TCO s or hard wearing materials. The flexibility of the 3 magnetron and plasma source configuration allows for coating combinations such as mirror and AR optics or the use of a TCO combined optical coating or hard durable surfaces. Complete with in house coating design ability Power Vision is well placed to provide a complete coating tool to compliment your research. Coating quality The in-situ plasma source and close separation magnetron deposition allows for high density coating materials, producing excellent durability and adhesion of the coating materials. When combined with a wide range of available coating materials, this provides an excellent ability to meet your coating requirements such as the broad band visible AR below. Broad Band AR Wavelength (nm) Broadband AR Easy to Use

4 The machine is easy to use and operated through a simple touch screen control panel through an intuitive application (see below) Substrates are placed into a specially designed substrate holder accommodating 4, 100mm substrates or 6, 80mm substrates. The substrate holder is configured to specifically hold your substrates or is provided as a blank to allow multiple holder types in the same holder. This makes the PV Research ideal for complex substrates geometries where a specific holder type is required. Recipes for various coatings are preinstalled and the operator simply chooses the appropriate recipe and then presses START. The machine is fully automated and can even be operated remotely using an internet connection. For the advanced user, coatings can be customised using Engineer level software accessed via a security code. Internet support Each PV Research is fitted with an Ethernet access point connected to the machine s computer. This allows access for updates, rapid fault finding, diagnosis and process refining. Remote machine control can be used by your own trained staff or by engineers at PowerVision. In Summary Traditionally the market for coating systems has been dominated by large, expensive machines operated by facilities with the infrastructure to support such equipment. The PV Research is aimed at addressing the requirement for small and simple to operate research tools, be it the large facilities with highly specialised requirements or smaller facilities looking for a general purpose research tool. The PV Research operates a fast loadlock system enabling the user to achieve process pressures very quickly. The small chamber dimensions then allows for optimal utilisation of target materials to achieve high deposition rates in excess of 1nm/s depending on the material. The system utilises a plasma source to ensure high density and stoichiometric films, available with a variety of gasses including O 2, N 2 and Ar for oxides, nitrides, semiconductors and metals or to allow in situ substrate cleaning prior to deposition. The coating recipe is chosen on the touch screen display and then all that is needed is to press start. The rest is automatic. The PV Research occupies a small footprint, 700 mm wide and 800 mm deep. Only 1720 mm high, the machine has been designed to fit through a normal single door frame. Powered by a regular 400V/50Hz or 208V/60Hz 3- phase supply, highly suited to compact or busy facilities. The use of a loadlock and the simple and infrequent requirement for cleaning means that the system does not require operating in a full clean room but only a clean manufacturing area. When considered with the simple operation of the system, small foot print and limited ancillary equipment required, it makes the PV Research an ideal research tool for any facility.

5 Technical Information Power requirement: 3 phase, L1, L2, L3 + earth 400V 50Hz or 208V 60Hz Other facility requirements Compressed air, dry and oil free, 4 bar High purity gasses depnding on the material and configuration choices. Clean, closed loop chilled DI water Internet connection for secure remote real time diagnostic support and upload of new coating designs Dimensions Single unit, 700mm x 800mm x 1718mm (w x d x h) Dual Power Supply option, 700mm x 800mm x 2000mm (w x d x h) Maintenance PowerVision supports the PV Research with a comprehensive product support programme and on-site maintenance contracts. Spare parts and consumables are held in stock at PowerVision at all times. Warranty and training The PV Research is supported by a comprehensive one year warranty on parts. PowerVision provides full training for a technician on-site following installation. Power Vision Ltd Unit R2, Herald Park, Crewe, Cheshire, CW1 6EA, UK Tel: Fax: enquiries@pvoptical.com or sales@pvoptical.com