Series SFA100/200/300

Transcription

1 Cartridge Type/Disc Style Series SF00/200/300 Precision filtration for general gases used in the electronic industry, etc. Compressed air, Nitrogen, etc. PTFE membrane element is made into a cartridge. (Filtration μm (Filtering efficiency 99.99%)) Made into a cartridge by polyester holder and fluorine rubber (FKM) gasket. ll products are tested at the time of shipment. Purification test irtight test Elements are replaceable. Clean gas filter Cartridge type (Disc style) SF size Rated flow rare l/min(nr) 0 Up to Up to Up to How to order (, OUT) 0 Rc NPT 2 TSJ 3 UOJ 02 Rc, NPT, TSJ, UOJ /4 SF302 SF03 SF200 Rated flow rate l/min (NR) Note ) Filtration area cm 2 Element part no. Note 2) Mass kg SF00-02 SF0-02 SF SF20-02 SF SF30-02 SF02-02 SF SF SF03-02 SF SF NPT /4 (Female thread) NPT /4 (Female thread) NPT / 4 (Female thread) TSJ /4 Tube Swage Joint UOJ /4 Union O-ring Joint ED00S-X0V ED0S-X0V ED20S-X0V ED00S-X0V ED0S-X0V ED20S-X0V ED00S-X0V ED0S-X0V ED20S-X0V Note ), at pressure drop 0.02 MPa Note 2) Element part numbers include numbers 3 to 7 in the construction figure. (Refer to page 226.)

2 Series SF00/200/300 Specifications Operating fluid Operating pressure Note ) Operating temperature Element proof differential pressure Element reverse differential pressure Filtration Note 2) Purification in the outlet side Main material Case Filter medium Seal ir, Nitrogen Max MPa, Vacuum.3 x 0-6 kpa 5 to 80 C Max. MPa Max MPa μm (Filtering efficiency 99.99%) Particle with μm or larger 0 pcs/6 l Stainless steel 36 (Interior/Exterior: Electrolytic polishing) PTFE membrane Fluororubber (FKM) Packaging ntistatic sealed double package Note ) The maximum operating pressure is 0.99 MPa since this product does not conform to the High Pressure Gas Safety Law. Note 2) Based on SMC s measuring conditions. (Refer to Technical Data SM ) Construction w e q t u r y No Description Case V-clamp Holder Holder 2 Filter medium Seal V-seal Material Stainless steel 36 Stainless steel 304 Polyester PTFE FKM Note Electrolytic polishing (Interior/Exterior) Cartridge element 226

3 Cartridge Type/Disc Style Series SF00/200/300 Flow Characteristics Fluid: Compressed air Inlet temperature: 20 C Dimensions SF0 SF00/0, SF200/20, SF300/30 MPa 2 x Rc /4, NPT /4 øb 0 00 Flow rate l/min (NR) 000 SF00-02 SF0-02 SF SF20-02 SF SF30-02 Rc /4 NPT /4 Rc /4 NPT /4 Rc /4 NPT / øb SF20 SF02, SF202, SF302 2 x TSJ /4 MPa øb SF02-02 SF TSJ /4 SF Tube Swage Joint øb Flow rate l/min (NR) SF03, SF203, SF303 SF30 MPa 2 x UOJ /4 ø9.5 ø6.5 7 øb SF03-02 SF UOJ /4 SF Union O-ring Joint øb Flow rate l/min (NR) 227

4 Cartridge Type/Straight Style Series SFB00 Precision filtration for general gases used in the electronic industry, etc. Compressed air, Nitrogen, etc. PTFE membrane element is made into a cartridge. (Filtration μm (Filtering efficiency 99.99%)) Made into a cartridge by polyester holder and fluorine rubber (FKM) gasket. ll products are tested at the time of shipment. Purification test irtight test Elements are replaceable. is included as a standard. Clean gas filter (Straight style) SFB type Type 0 Cartridge type How to order (, OUT) 0 Rc NPT 2 TSJ 3 UOJ 4 M5 (Female thread) 02 M5 Made to Order Description Nil luminum case X8 (Refer to page 238.) Rc, NPT, TSJ, UOJ Female thread /4 M5 SFB03-02 Specifications SFB02-02 SFB0-02 Operating fluid Operating pressure Note) Operating temperature Element proof differential pressure Element reverse differential pressure Filtration Note2) Purification in the outlet side Main material Packaging Case/Cover Filter medium Seal ir, Nitrogen Max MPa, Vacuum.3 x 0-6 kpa 5 to 80 C Max. Max MPa μm (Filtering efficiency 99.99%) Particle with μm or larger 0 pcs/6 l Stainless steel 36 (Interior/Exterior: Electrolytic polishing) PTFE membrane Fluororubber (FKM) ntistatic sealed double package Note ) The maximum operating pressure is 0.99 MPa since this product does not conform to the High Pressure Gas Safety Law. Note 2) Based on SMC s measuring conditions. (Refer to Technical Data SM ) Rated flow rate l/min (NR) Note) Filtration area cm 2 Element part no. Mass kg SFB SFB0-02 NPT /4 (Female thread) ED30S-X0V SFB TSJ /4 0 (Including O-rings) 6 SFB03-02 SFB04-M5 UOJ /4 M5 (Female thread) 9 6 Note), at pressure drop 0.02 MPa 228

5 Clean Gas Strainer: Cartridge Type/Straight Style Series SFB200 Cartridge made of stainless steel 36 sintered metallic element (Nominal filtration: 20 μm) Clean gas strainers made of an element (20 μm, stainless steel 36 sintered metal) to protect regulators and vacuum regulators are also available. Clean gas strainer (Straight style) type Type 20 Cartridge type (Strainer) How to order SFB (, OUT) 0 Rc NPT 2 TSJ 3 UOJ Made to Order Description Nil Optional filtration S00VX3 (Refer to page 238.) 02 Rc, NPT, TSJ, UOJ /4 Specifications Operating fluid Operating pressure Operating temperature Note) Element proof differential pressure Element reverse differential pressure Nominal filtration Case/Cover Main material Seal Filter medium Packaging ir, Nitrogen Max MPa, Vacuum.3 x 0-6 kpa 5 to 80 C Max..0 MPa Max..0 MPa 20 μm Stainless steel 36 (Interior/Exterior: Electrolytic polishing) Fluororubber (FKM) Stainless steel 36 sintered metal ntistatic sealed double package Rated flow rate l/min (NR) Note) Filtration area cm 2 Element part no. Mass kg SFB SFB20-02 NPT /4 (Female thread) ES00S-20V 0 0 SFB TSJ /4 (Including O-rings) 7 SFB UOJ / Note), at pressure drop 0.02 MPa 229

6 Series SFB00/200 Construction Flow Characteristics Fluid: Compressed air Inlet temperature: 20 C SFB04-M5 q e t rw MPa y 0 Flow rate l/min (NR) 00 No Description Case Cover Clean gas filter Element Clean gas strainer O-ring Hexagon socket head screw Material Note Stainless steel 36 Electrolytic polishing (Interior/Exterior) PTFE membrane For SFB0 Stainless steel 36 sintered metal For SFB20 FKM Stainless steel 304 M3 SFB0-02 MPa 0 00 Flow rate l/min (NR) SFB20-02 MPa Flow rate l/min (NR) 230

7 Clean Gas Filter/Clean Gas Strainer: Cartridge Type/Straight Style Series SFB00/200 Dimensions SFB00/200: Rc /4 SFB0/20: NPT /4 SFB04: M5 2 x M5, Rc /4, NPT /4 ø24 2 x ø SFB00-02, SFB0-02, SFB04-M5 Rc /4 NPT /4 M5 SFB02-02, SFB202-02: TSJ /4 (Tube Swage Joint) 2 x TSJ /4 2 x ø Width across flats 87 SFB03-02, SFB203-02: UOJ /4 (Union O-ring Joint) 2 x UOJ /4 2 x ø4.5 7 ø6.5 ø Width across flats 2 23

8 Disposable Type/Straight Style Series SFB300 Precision filtration for gases used in the semiconductor process Compressed air, Nitrogen, etc. How to order SFB PTFE membrane with high reliability Filtration μm (Filtering efficiency 99.99%) ll products are tested at the time of shipment. Purification test Helium leak test Pressure holding test is included as a standard. Clean gas filter (Straight style) 30 3 type Type Disposable type (Narrow size) Disposable type (Long size) (, OUT) 0 Rc 2 TSJ 5 URJ * SFB3: Only 5 is selectable. 02 Rc, NPT, TSJ, UOJ /4 Rated flow rate l/min (NR) Note) SFB SFB TSJ /4 45 SFB URJ /4 SFB35-02 URJ /4 Note), at pressure drop 0.02 MPa Filtration area cm 2 0 Mass kg

9 Disposable Type/Straight Style Series SFB300 Specifications Operating fluid Operating pressure Note ) Operating temperature Element proof differential pressure Element reverse differential pressure Filtration Note 2) Purification in the outlet side Helium leak volume Main material Case/Cover Filter medium O-ring ir, Nitrogen Max MPa, Vacuum.3 x 0-6 kpa 5 to 20 C Max. Max MPa μm (Filtering efficiency 99.99%) Particle with μm or larger 0 pcs/6 l 4.0 x 0-9 Pa m 3 /sec or less Stainless steel 36 (Interior/Exterior: Electrolytic polishing) PTFE membrane Stainless steel 304 Note ) The maximum operating pressure is 0.99 MPa since this product does not conform to the High Pressure Gas Safety Law. Note 2) Based on SMC s measuring conditions. (Refer to Technical Data SM ) Construction q e r w No Description Case Cover Element Material Note Electrolytic polishing Stainless steel 36 (Interior/Exterior) PTFE membrane Stainless steel 36 sintered metal 233

10 Series SFB300 Flow Characteristics Fluid: Compressed air Inlet temperature: 20 C SFB30-02 Dimensions SFB300-02: Rc /4 2 x Rc /4 2 x ø4.5 (Mounting hole) MPa ø SFB302-02: TSJ /4 (Tube Swage Joint) Flow rate l/min (NR) 2 x ø4.5 (Mounting hole) 2 x /4 TSJ ø SFB305-02, SFB35-02: URJ /4 (Union Ring Joint) 2 x ø4.5 (Mounting hole) 2 x /4 URJ ø SFB SFB

11 Disposable Type/Multiple Disc Style Series SFC00 Precision filtration for gases used in the semiconductor process Compressed air, Nitrogen, etc. How to order SFC PTFE membrane with high reliability Filtration μm (Filtering efficiency 99.99%) ll products are tested at the time of shipment. Purification test Helium leak test Pressure holding test Clean gas filter Disposable type (Multiple style) type Rated flow rare l/min (NR) 0 Up to 2 (, OUT) 0 Rc 2 TSJ 5 URJ Rc, TSJ, URJ Rc, TSJ, URJ /4 3/8 Rated flow rate l/min (NR) Note) SFC00-02 SFC00-03 Rc 3/8 (Female thread) SFC02-02 TSJ /4 2 SFC02-03 TSJ 3/8 SFC05-02 URJ /4 SFC05-03 URJ 3/8 Note), at pressure drop 0.02 MPa Filtration area cm Mass kg