Substance WR4 Patinal

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Product Information Substance WR4 Patinal GENERAL INFORMATION Substance WR4-SF Patinal was developed for the deposition of hydrophobic layers by evaporation in vacuum. Compared to other hydrophobic layers, Substance WR4-SF Patinal has the following advantages: In addition to its excellent hydrophobic properties, Substance WR4-SF Patinal is also oleophobic which eases the removal of e.g. fingerprints. Substance WR4-SF Patinal forms very durable and well adhering coatings on silicate and oxide layers. Optical coatings made on both, mineral glass and plastic substrates, can be coated with Substance WR4-SF Patinal. The low reflection of an AR-coated surface increases the visibility of fingerprints and other contaminations due to a larger contrast between clean and dirty surface areas. The excellent hydrophobic and oleophobic properties of Substance WR4-SF Patinal protect these surfaces from becoming contaminated and not being fully functional any more. Additionally, a WR4-SF coated layer is easier to clean. Substance WR4-SF Patinal is delivered as tablets made from a metallic carrier doped with the hydrophobic substance. AREAS OF APPLICATION Hydrophobic & oleophobic topcoat for ophthalmic lenses Topcoat for camera lenses, binocular lenses & automotive cameras Topcoat for optical filters, spectroscopic windows & other sensitive optical components Status: 02 / 2018, Page 1 of 7

THIN FILM PROPERTIES Substance WR4-SF Patinal Static θs Sliding angle Boiling test Acidic resistance Salt water Abrasion test (4000 cycles) Water 116 30 116 112 112 ~ 105 Ethylene Glycol 102 23 102 Hexadecane 70 8 70 Contact Angle Measured with a Krüss DSA 100 or a Krüss Mobile Drop Sliding angle For an indication of surface smoothness a 15 µl water droplet is applied to the coated surface, then the angle of a tilting table of a Krüss DSA 100 is slowly increased to determine the angle at which the droplet starts to slide off. Boiling test 30 min. in boiling water Acidic resistance 72 hours in a 5 wt% HCl (aq) solution Salt water test 72 hours in a 4.6 wt% NaCl (aq) solution Abrasion test Substance WR4-FS Patinal shows highest mechanical durability and resistance to wiping and abrasion. Abrasion test conditions with steel wool: Cycles: up to 8000, 1 cycle = 2 hubs of 50 mm Hub length: 50 mm Speed: 60 cycles/min Load: 10 N/cm² Abrasion material: Steel wool #0000 Status: 02 / 2018, Page 2 of 7

Abrasion resistance of Substance WR4-SF Patinal with steel wool NOTES FOR EVAPORATION Evaporator source Resistance heated thermal evaporator Electron beam evaporator (indirect) Tablet holder For resistive heating: Box type Ta or W boat (see fig. 2) For e-beam heating: Mo or Ta liner with perforated cover (see fig. 3) Temperature 400 800 C recommended 600 C Chamber pressure < 4 10-5 mbar Substrate temperature From RT up to < 300 C recommended RT QCR-settings Density 1.5 g/cm³, z-ratio 1.0 Thickness (QCR) 15 20 nm (depending on tooling factor) In general, we recommend the more moderate resistive source heating over e-beam heating. If e- beam heating is unavoidable, the e-beam ought not to be focused directly onto the tablet. Status: 02 / 2018, Page 3 of 7

Adhesion and Durability WR4-SF Patinal durable films with good adhesion can be obtained when deposited onto oxidic surfaces, especially onto SiO2 or Substance L5 Patinal films. AR Coatings A WR4-SF Patinal layer can be deposited right on top of the final SiO2 layer of an AR stack. It can also be directly deposited onto MgF2 layers with acceptable performance, but an intermediate layer of a few nm SiO2 between MgF2 and WR4-SF Patinal is suggested for higher durability. Hydrophobic Glass If WR4-SF Patinal is to be applied onto a glass surface it can either be deposited directly onto the clean surface (e.g. silicate glasses) or on top of a thin SiO2 adhesion promoting layer (recommended). Evaporation Process Steps 1. Substrate cleaning 2. WR4-SF Patinal tablet transfer to evacuation chamber Place WR4-SF Patinal tablet (see figure 1) into evaporation chamber immediately after unpacking from original package and start evacuation. For tablet handling please use tweezers. Fig. 1: Substance WR4-SF Patinal Fig. 2: Box type boat Fig. 3: Liner with perforated cover 3. Optional plasma cleaning for adhesion and durability improvement Process gas: Ar or Ar/O2 mixture (80% / 20%) Process time: 3 min 4. Adhesion layer (if required) Material: SiO2 as preferred adhesion layer or Substance L5, Al2O3, ZrO2, etc. Deposition rate: 0.15 0.3 nm/s Thickness: 5-30 nm 5. Substance WR4-SF Patinal Evaporation conditions as displayed above Process power: constant power (no rate control), low power setting depending on equipment Substrate temperature range: RT < 300 C, but recommendation is no substrate heating Status: 02 / 2018, Page 4 of 7

Evaporation/boat temperature can be increased, but be aware that discoloration of WR4 tablet (rear side) indicates a too high boat temperature Process time: 60 s 90 s till onset of evaporation, additionally up to 300 s for depletion of tablet Chamber pressure: < 4*10-5 mbar 6. Post deposition ripening Chemical ripening will be achieved during ambient storage, without acceleration Optional: Store in a warm and humid environment (e.g. > 50 C @ 80% RH for > 2 h) Optional: Curing in air for ca. 1 h at higher temperatures (up to 150 C) The evaporated substance forms a thin layer on the substrate. Optimum properties can be obtained for films of ca. 10-20 nm with full depletion of the tablet. The refractive index of Substance WR4-SF is about 1.3 in the visible spectral range. For optimum results on AR-coatings, the final AR-Layer should be reduced in optical thickness to compensate the added Substance WR4-SF Patinal layer. In order to provide sufficient evaporation material it may be necessary to use more than one WR4- SF Patinal tablet dependent on PVD chamber size. As a rule of thumb please refer to following table: PVD chamber diameter [mm] No. of tablets Rate [nm/s] Evaporation time [s] 600-950 1 tablet 0.4 210 950-1300 2 tablets 0.36 233 1300-1600 3 tablets 0.35 274 1600-2000 4 tablets 0.32 328 Status: 02 / 2018, Page 5 of 7

PRODUCTS Substance WR4-SF Patinal is available as doped metallic tablets. Product Code Description Dimensions 1.01822.0023 Substance WR4-SF Patinal Tablets Ø 11 mm x h 7 mm Storage conditions Shelf life of Substance WR4-FS Patinal is 5 months for ambient conditions. However, we recommend storage in a cool and dry place in the original sealed package (+2 and +8 C). Allow for full accommodation to room temperature before opening the package in order to prevent condensation of humidity from the environment onto the tablet. Shipping conditions Substance WR4-SF Patinal in the original package can be shipped without special precautions or temperature settings without detrimental effect on shelf life. SPECIFICATION RoHS information The RoHS compliance information is part of the Certificate of Analysis (CoA) for each batch of Patinal material. Contact angle 110 Sizes 1.01822.0023 h = 6.5 7.5 mm Ø = 10.5 11.5 mm Application test Each batch has to pass a specific application test assessing its evaporation behavior. Status: 02 / 2018, Page 6 of 7

Quality assurance Research, production and sales of our Patinal evaporation materials take place under a certified DIN EN ISO 9001 quality management system and DIN EN ISO 14001 environmental management system. The quality of the materials is assured by our manufacturing processes, in-process controls and quality tests. Each batch is released only after passing our chemical analysis and application tests designed to confirm the suitability of the material for the evaporation process. Handling precautions Product safety information required for safe use is not included in this document. Before handling, read product and safety sheets and container labels for safe use, physical and health hazard information. The material safety data sheet is available online at www.patinal.com, from your EMD representative or distributor, or by calling your global Merck KGaA, Darmstadt, Germany, contact. Disclaimer Products are warranted to meet the specifications set forth on their label/packaging and/or certificate of analysis at the time of shipment or for the expressly stated duration. EMD MAKES NO REPRESENTATION OR WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE REGARDING OUR PRODUCTS OR ANY INFORMATION PROVIDED IN CONNECTION THEREWITH. Customer is responsible for and must independently determine suitability of EMD s products for customer s products, intended use and processes, including the non-infringement of any third parties intellectual property rights. EMD shall not in any event be liable for incidental, consequential, indirect, exemplary or special damages of any kind resulting from any use or failure of the products: All sales are subject to EMD s complete Terms and Conditions of Sale. Prices are subject to change without notice. EMD reserves the right to discontinue products without prior notice. EMD, EMD Performance Materials, the vibrant M, Patinal are trademarks of Merck KGaA, Darmstadt, Germany. Status: 02 / 2018, Page 7 of 7