SCHOTT MEMpax New options for the MEMS industry NMN Technology Day Schott AG Grünenplan 06.11.2012
Agenda 2 Agenda 1. SCHOTT thin glass for Electronics & Biotech 2. MEMS Industry and Motivation for MEMpax 3. Properties & applications 4. Prospects of the market
1. SCHOTT thin glass for Electronics & Biotech 3 a) Camera Imaging Digital image sensors for mobile phones and cameras All those image sensors need thin glass wafers as: Infrared cut-filter Sensor cover glass Cover glass
1. SCHOTT thin glass for Electronics & Biotech 4 b) Display (Touch panel) market Resistive touch screens in car navigation systems Capacitive touch sensors for industrial applications Thin front glass needed for soft touch Thin glass needed for compact designs
1. SCHOTT thin glass for Electronics & Biotech 5 c) MEMS (Micro-Electro-Mechanical Mechanical Systems) Most of today s sensors for pressure, acceleration and rotation are based on MEMS technology and used in automotive (ESP) and consumer systems (Smartphone, Wii) MEMS are semiconductor products and need thin glass wafers as: Protection Cover Substrate
1. SCHOTT thin glass for Electronics & Biotech 6 d) Opto-Electronics Neutral color glass with high transmittance Addressing a variety of consumer applications: CD / DVD Pick-up systems Projection Substrates
1. SCHOTT thin glass for Electronics & Biotech 7 e) Microscopy glass Microscopy slides as carrier of the test sample Microscopy cover slips protect the test sample: Slides Cover slips
1. SCHOTT thin glass for Electronics & Biotech 8 f) Microfluidics Microfluidic chips are instruments for biological, chemical and medical analysis Glass is gaining importance as substrate material: Flow reactors Lab-on-a-chip
1. SCHOTT thin glass for Electronics & Biotech 9 E&B glass portfolio und applications MEMS MEMpax AF32 eco Camera Imaging Opto Electronics D263 T eco Touch Panel B 270 D263 M Microscopy
Agenda 10 Agenda 1. SCHOTT thin glass for Electronics & Biotech 2. MEMS Industry und Motivation for MEMpax 3. Properties & applications 4. Prospects of the market
2. MEMS Industry und Motivation for MEMpax 11 Glas in der MEMS Industrie Numerous MEMS sensors are produced in combination of semiconductor wafers and glass wafers Examples: Pressure sensors Acceleration-sensor
2. MEMS Industry und Motivation for MEMpax 12 SCHOTT motivation factors for MEMpax Since more than 10 years SCHOTT BOROFLOAT 33 is the preferred glass of the MEMS industry due to its outstanding material properties This glass is produced d to a micro float process, down to a thickness of 0.7 mm The trend towards smaller and smaller structures demands thinner and thinner glass wafers Up to now these thin glass wafers can be produced only in very cost-intensive and complex lapping and polishing processes Polish prices, yield losses and wafer sizes are cost drivers Now SCHOTT in Gruenenplan transferred successfully the mixture of BOROFLOAT 33 in a down-draw process With identical glass composition glass thicknesses down to 01 0.1 mm can be realized and therefore wafers can be manufactured WITHOUT polishing
Agenda 13 Agenda 1. SCHOTT thin glass for Electronics & Biotech 2. MEMS Industry und Motivation for MEMpax 3. Properties & applications 4. Prospects of the market
3. Properties & applications 14 Comparison of production flows for a 200 µm wafer Traditional MEMpax Float glass (> 0.7 mm) Down-draw glass (0.2 mm) Cut to size Cut to size Grinding Polishing Washing Wafer (0.2 mm) Wafer (0.2 mm)
3. Properties & applications 15 MEMpax - general product information -1 Product: MEMpax is a thin borosilicate glass made in the SCHOTT down-draw draw process Available in all industry standard wafer formats, e.g. 4, 6, 8 and 12 Thickness range 0.1 0.7 mm Target markets are the MEMS and biotech industry Advantages: Significant cost advantage compared to polished glass wafers The CTE of MEMpax is matching the CTE of silicon Enabling anodic bonding with silicon wafers Very thin wafers without grinding and polishing Fire-polished surface with roughness below 1 nm Wafer formats up to 12 in thicknesses < 300 µm
3. Properties & applications 16 MEMpax - general product information -2 Geometrical specification: Wafer - sizes: 4, 6, 8 and 12 Thickness range: 100 700 µm Thickness tolerance: ± 10 µm TTV: < 10 µm Warp: < 300 µm Surface roughness: <08nm 0.8 Chemical and physical specification: MEMpax has the same chemical and physical properties as the well established SCHOTT glass type BOROFLOAT 33
3. Properties & applications 17 MEMpax CTE in comparison to material used in semiconductor industry Dynamical elongation based on initial length l/l 0 with a heat-up rate of 5 K/min 0,0030 0,0025 0,0020 l/l0 0,0015 0,0010 0,0005 0,0000 0 100 200 300 400 500 600 700 temperature ( C) MEMpax Silicon
3. Properties & applications 18 Thin glass production at SCHOTT Down-Draw process - key characteristics: Fire-polished surface with surface roughness < 1nm Thickness range down to 25µm High flexibility regarding change of glass types Available glass types: MEMpax AF32 eco D263 T eco
3. Properties & applications 19 Benefits for our customers MEMpax Miniaturization Cost advantage New Applications
3. Properties & applications 20 Main applications for MEMpax wafers MEMS: High thermal stability The CTE of 3.25 10-6 K -1 matches to Silicon Perfectly suited for anodic bonding Good insulator at temperatures up to 450 C Biotech: High resistance to chemical solvents Low fluorescence Excellent transmission Especially suitable for applications where glass-silicon compounds are important. MEMpax has the same excellent properties as BOROFLOAT 33 and is therefore suited for anodic bonding with Silicon wafers.
Agenda 21 Agenda 1. SCHOTT thin glass for Electronics & Biotech 2. MEMS Industry und Motivation for MEMpax 3. Properties & applications 4. Prospects of the market
4. Prospects of the market 22 Prospects of the market - MEMS The MEMS market grew another 12% in 2011 compared to less than 2% for the overall semiconductor industry (Source: IHS isuppli) Smart phones, tablets and other consumer devices are the largest growth markets for MEMS. Automotive MEMS also grew by double-digits thanks to safety mandates and a strong demandd in China. MEMS enable new therapy schemes (e.g. insulin pumps) and are also growing quickly in industrial and energy applications. All in all, IHS isuppli predicts that the MEMS market grows at $1 billion a year to top $12 billion in 2015. SCHOTT MEMpax is available to support this market with high quality glass wafers
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