Project EFFORTLESS Epitaxy Factory of the Future for Transformational Leverage of Europe s Compound Semiconductor EcoSystem Domain: Process Technologies supplying Smart Health, Energy, Manufacturing and other Societal Challenges Contact ; Iwan Davies, IQE plc, idavies@iqep.com ; 5 th June 2014 Slide 1
Compound Semiconductors (CS) will play a critical role in virtually ALL future KETs; Microelectronic, Photonic, Nano, Bio, Defence and Space Technologies, because of their highly advanced electronic, optical and thermal properties EU collectively, and almost all member states individually, have invested heavily in CS technologies over many years, including many National, FP1-7 and current and planned H2020 projects Europe s Micro-electronics, Photonics, Power, Defence and Space Industries have a high reliance on CS technologies, some critical technologies of which are sourced outside the EU Europe has a wealth of technology in CS technologies, and is home to many globally competitive CS centric companies In order to take full advantage of this technology position, and support EU s Vision of providing 20% of Global chip production, Europe requires a high volume source of lowest cost, highly sophisticated CS epitaxial wafers (epiwafers) EFFORTLESS will deliver this vision by bringing together Europe s supply side and downstream companies to provide a Globally competitive CS Epi supply chain Slide 2
Current and Future technologies enabled by Compound Semiconductors Slide 3
A high capacity, ultra low cost, open access CS Epi Foundry, located in De Cymru (South Wales), UK (IQE) Designed and built using green Factory of the Future principles, highest levels of automation, with low energy and materials consumption to ensure lowest cost, highly complex CS epiwafer structures, at up to 300mm diameter Will provide a critical epiwafer supply to Europe s growing CS Ecosystem, bringing together most of Europe s leading players, both upstream and downstream Will provide powerful leverage of existing and planned Pilot lines Positioned to supply low-cost, high-volume commercial epiwafers to e.g. existing Pilot-Line projects, from an EU source Will act as centre of the World s first CS cluster, Europe s 5 th Semiconductor cluster Will provide a clear route for Europe s advanced semiconductor industry to be highly competitive in global markets Slide 4
EUROPEAN SUPPLIERS GLOBALLY COMPETITIVE EU SUPPLY CHAIN Substrates Crystal Growth Equipment Metrology Tools Chemical Precursors R&D / IP EASEF European Advanced Semiconductor Epitaxy Foundry GaN, GaAs, InP and Sb based epitaxy. Substrates including Si, GaAs, InP, Ge, SiC, GaN & Ga/InSb Chip Foundries & IDMs System Integrators, SMEs and RTOs Current and future EU pilot lines ECSEL, Brussels, 5th June 2014: Slide 5
Pre-Prod / Prod Licence Transfer Allocation SMEs - Small medium enterprises RTO Research and Technology Organisations Univ - Universities Equipment Metrology Chemicals Substrates Means of Engagement and Inputs to the Foundry SMEs Univ, RTOs Four modes of operating within the Foundry EASEF European Advanced Semiconductor Epitaxy Foundry Factories of the Future 5G/LTE communications BIG data Lighting the future Bio-photonics Future cities Healthcare Clean Energy Safety and Security Climate Transport Space / Defence Pre production/production epi wafer supply to customers own design (std foundry model) Licence of Epi technology from SME s, Univ, RTO s, or customers for offer to Global Market Transfer of Epi Technology from SME s, Univ, RTO s or customers for customers own use Allocation of Epi capacity for customer s own use (run by customers own staff, or EASEF staff) LEDs Power / RF CPV Solar Wireless Photonics CMOS ++ GaN on Si or SiC VCSELs IR Sensors & Imaging Si Photonics InP Telecomms HP Lasers Slide 6
WP1 Equipment Suppliers WP 1.1 Epi-Growth & Processing Equipment Suppliers Task High throughput, low-cost ownership of up to 300mm-capable epiwafer tools; fully automated and capable of clustering with each other and/or characterisation tools. WP 1.2 Characterisation Equipment Suppliers Task Highest throughput, cluster-able tools for in situ and/or ex situ characterisation WP2 Quick Fab Device Processing Task Design Quick Fab tests across all product lines WP3 Precursor / Raw Material Suppliers & Recycling WP 3.1 Precursor Suppliers & Recycling Key Task Bulk distribution of Group III metal-organics Sub Task onsite generation and / or purification of Group III sources WP3.2 Substrate Suppliers Task low-cost high diameter substrates GaAs InP Si Ga/InSb SiC Ge FS-GaN up to 200mm 150-200mm 300mm 150-200mm 150-200mm 150-200mm 200-300mm WP 3.3 Reclaim & Recycling Task reclaim of substrates, by-product and effluent Slide 7
WP4 Epi-growth Services & Infrastructure WP4.1 Epi-wafer Supply Business models Task develop a business model to facilitate outside epi technologies Pre production/production epi wafer supply to customers own design (std foundry model) Licence of Epi technology from SME s, Univ, RTO s, or customers for offer to Global Market Transfer of Epi Technology from SME s, Univ, RTO s or customers for customers own use Allocation of Epi capacity for customer s own use (run by customers own staff, or EASEF staff) WP4.2 Information Systems ERP, SPC, FoF, data handing WP4.3 Fab Design infrastructure, clean-room design, air-handling, services WP5 Micro-Electronic Supply Chain Companies Task low-cost, high throughput and reliable epiwafers WP 5.1 RF Supply Chains WP 5.2 Power Electronics Supply Chains WP 5.3 CMOS++ Supply Chains WP6 Photonics Supply Chain Companies Task low-cost, high throughput and reliable epiwafers WP 6.1 Infra-red (IR) WP6.2 Solar CPV WP6.3 VCSEL WP6.4 InP Photonics WP6.5 LEDs WP6.6 High-Power Lasers WP7 Impact, Dissemination & Exploitation WP8 Management Slide 8
Potential interaction with existing and future European Projects: Existing ENIAC Projects Existing FP7 AGATE EPPL E2COGaN CSSL E2SG VIDaP HiPoSwitch Potential New H2020 Progs. ICT-28 PIC Pilot Line ICT-28 MWIR Sensors Pilot Line Potential New ECSEL Projects Slide 9