Mitgliedschaften des fmt Bergische Universität Wuppertal Institut für Polymertechnologie Atmospheric Pressure Plasma Jets: Concepts and Realization of Miniaturized Jets and Jet Arrays Deutsche Gesellschaft für Plasmatechnologie Arbeitsgemeinschaft Plasmaphysik Forschungszentrum für Mikrostrukturtechnik fmt and Institut für Polymertechnologie Bergische Universität Wuppertal Rainer-Gruenter-Str. 21 42119 Wuppertal
Objectives and Future Challenges Future Challenges Applications Tool for atmospheric pressure plasma treatment of large 3D-Objects. Probably Tool for direct patterning of large 2D-objects by atmospheric pressure plasmas Technology Plasma Jet Arrays Integrated Micro Jet Arrays Miniaturization Cold atmospheric plasmas 2
Today's Cold Atmospheric Pressure Plasmas Foto: Sherman Treaters Barrier Barrier discharge discharge (corona) (corona) for for plasma plasma treatment treatment of of plastic plastic foils foils (homogeneous) (homogeneous) 2-D 2-D work work pieces pieces Single Single jet jet (PlasmaTreat) (PlasmaTreat) blown blown arc arc type type Small Small 3-D 3-D work work pieces pieces 3
Basic Technology of DBD Jet Dielectric Barrier Discharge 5 slm He Length: up to 60 mm Diameter: 4 mm Power: < 10 W Dielectric: Glas 4
More Advanced DBD Jet Electrodes Plasma jet Helium flow Outer tube Inner tube with reactive gas or precurser flow for deposition 5
Multi-Jet-Array electrical connection reactive gas working gas (He) DBD discharge in glow mode flushing gas Power: up to 100 W (2-6 kv; 10-15 khz) Helium working gas flow: 20 50 slm Reactive gas flow: 0 5 slm Static treatment area: 22 cm 2 Dynamic treatment width: 60 mm 6
Applications Metal cleaning (done at EADS labs) Plasma head trace Surface Energy vs. Position Surface Energy [mn/m] 70 60 50 40 30 20 10 0 not treated 1 2 3 Postion 7 a
Applications Polymer treatment to increase adhesive joint strength Without plasma treatment DBD plasma jet Commercial single arc jet Commercial single jet Ar Commercial single jet N 2 Multi-Jet He Multi-Jet He + O 2 Air Polycarbonat (PC) Polyethylen (PE) Teflon (PTFE) AP PU SK AP PU SK AP PU SK DBD-Multi-Jet is comparable to other commercial atmospheric plasmas. But: Low temperature Applicable to 3D objects Large working width or area Not measured < 1MPa 1 2 MPa > 2 MPa 8
Miniaturization 9
Concept of Micro Jet Arrays Reactive process gas supply Through additional distribution layer inside the jet array From the side Working gas supply Fractal gas distribution layer Porous ceramic 10
How to Make a Micro Jets Cylindrical coplanar barrier discharge integrated in ceramic Low temperature cofired ceramic as dielectric barriers Hole with plasma jet Metal electrodes 11
Dimensions of Micro Jet Array Thickness of electrodes 10 15 µm 0.6 1.0 mm 1.0 2.0 mm 0.6 1.2 mm d Ideal: 50 µm Feasible: 200 µm (delamination) 12
Real Micro Jets Porous ceramic Helium flow Ground electrode High voltage electrode V4D Existence and length of jets depends on: Geometry Gas flow Driving voltage Good results e.g. for Geometry V4D: Jet length: 12 mm Voltage: 5,5 kv; typ. 10-15 khz Helium flow: 10 slm Gas velocity: 4.1 m/s 13
Further Steps and Applications Further Steps Applications On large 2D-objects Make real arrays (modular?) Homogeneous treatment Local treatment direct patterning Control of wetability Etching Deposition Make better gas supply Make jets smaller Make arrays addressable Plastic electronics Solar cells on plastic or glass Intelligent plastic foils for medical or biological use 14
Conclusions 1. Multi-Jet-Arrays based atmospheric pressure DBD plasmas are possible. 2. Treatment of large 3D-objects is feasible. 3. Miniaturization of Jets and Arrays can be done. 4. Some interesting applications are at the horizon. 15
Thank You for Your attention 16