Performance at Wafer-Scale

Similar documents
This journal is The Royal Society of Chemistry S 1

Fast Growth of Strain-Free AlN on Graphene-Buffered Sapphire

Postprint.

Defense Technical Information Center Compilation Part Notice

Nanoparticle generation using sputtering plasmas

Preparation and characterization of Co BaTiO 3 nano-composite films by the pulsed laser deposition

Electronic Supplementary Material

CHARACTERIZATION AND PROPERTIES OF TITANIUM-VANADIUM OXIDE THIN FILMS PREPARED BY ArF LASER ABLATION

Supporting Information. for Efficient Low-Frequency Microwave Absorption

arxiv:cond-mat/ v2 [cond-mat.mtrl-sci] 29 Nov 2003

Band offset engineering in ZnSnN 2 -based heterojunction for low-cost solar cells

Ultrathin Nanosheets of Feroxyhyte: A New Two-dimensional. Hefei National Laboratory for Physical Sciences at Microscale,

Supporting Information

Metal-Insulator Transition Property of Hf-Doped VO 2 (M1) Films and Its Application for Reconfigurable Silicon Photonic Device

Supplementary Information. Epitaxial Growth of Single Layer Blue Phosphorus: A New Phase of Two-Dimensional Phosphorus

Electronic Supplementary Information (ESI) Self-assembly of Polyoxometalate / Reduced Graphene Oxide

Angle-resolved photoemission spectroscopy for VO2 thin films grown on TiO2 (001) substrates

Rapid degradation of methylene blue in a novel

Thin Film Characterizations Using XRD The Cases of VO2 and NbTiN

Tungsten Oxide Nanorods Array and Nanobundle Prepared by Using Chemical Vapor Deposition Technique

Fabrication and characterization of photocatalyst coatings by heat treatment in carbon powder for TiC coatings

Pre-treatment of low temperature GaN buffer layer deposited on AlN Si substrate by hydride vapor phase epitaxy

Deposited by Sputtering of Sn and SnO 2

Supplementary Information

Electronic Supplementary Information

RSC Advances.

A Multi-step Ion Exchange Approach for Fabrication of Porous BiVO 4 Nanorod Arrays on Transparent Conductive Substrate

Supporting Online Material for

for New Energy Materials and Devices; Beijing National Laboratory for Condense Matter Physics,

Supporting Information

Near Infrared Reflecting Properties of TiO 2 /Ag/TiO 2 Multilayers Prepared by DC/RF Magnetron Sputtering

The Effects of Nonstoichiometry on Optical Properties of Oxide Nanopowders

Graphene/Fe 3 O Quaternary Nanocomposites: Synthesis and Excellent Electromagnetic Absorption Properties

Supplementary Information

Single-crystal nanorings of b-gallium oxide synthesized using a microwave plasma

Supporting Information

SYNTHESIS OF SnO 2 NANORODS BY HYDROTHERMAL METHOD FOR GAS SENSOR APPLICATION

Supporting Information

Sn Wears Super Skin: A New Design For Long Cycling Batteries

InGaN quantum dot based LED for white light emitting

Supporting Information. Solution-Processed 2D PbS Nanoplates with Residual Cu 2 S. Exhibiting Low Resistivity and High Infrared Responsivity

Wire-shaped Supercapacitor with Organic. Electrolyte Fabricated via Layer-by-Layer Assembly

Transparent Heat Mirror Using Plasma Polymer Fluorocarbon Fabricated by Continuous Roll-to-Roll Sputtering

EFFECT OF GROWTH TEMPERATURE ON THE CATALYST-FREE GROWTH OF LONG SILICON NANOWIRES USING RADIO FREQUENCY MAGNETRON SPUTTERING

Anomaly of Film Porosity Dependence on Deposition Rate

Urchin-like V 2 O 3 /C Hollow Nanospheres Hybrid for High-Capacity and Long-Cycle-Life Lithium Storage

Supplementary information. performance Li-ion battery

Influence of stress on Raman spectra in Ba 1 x Sr x TiO 3 thin films

Solid-Phase Synthesis of Mg2Si Thin Film on Sapphire substrate

Simple Synthesis of Single-crystalline Nanoplates of Magnesium Oxide

Supporting Information

Optical, microstructural and electrical studies on sol gel derived TiO 2 thin films

The Effects of the Adding V2O5 on the Oxide Semiconductor Layer of a Dye-sensitized Solar Cell

Deposition and characterization of sputtered ZnO films

SYNOPSIS OF A THESIS. to be submitted by A. KARUPPASAMY. for the award of the degree DOCTOR OF PHILOSOPHY

Preparation and structural characterization of thin-film CdTe/CdS heterojunctions

Study for double-layered AZO/ATO transparent conducting thin film

Microstructure, morphology and their annealing behaviors of alumina films synthesized by ion beam assisted deposition

Supporting Information. Trapping the Catalyst Working State by Amber-Inspired Hybrid

Formation of Cupric Oxide Films on Quartz Substrates by Annealing the Copper Films

Crystallographic Orientation-Aligned ZnO Nanorods Grown by a Tin Catalyst

Synthesis and Characterization of Cadmium Sulfide Nanoparticles

X-ray Studies of Magnetic Nanoparticle Assemblies

GROWTH MECHANISM OF NANODIMENSIONAL VANADIUM DIOXIDE ON SILICON SURFACE OBTAINED BY ML-ALD METHOD

Supporting Information. Experimental and Theoretical Investigation of Mesoporous MnO 2

Supplementary Figure S1. Scheme for the fabrication of Au nanohole array pattern and

Supporting Information

Biexciton Emission from Edges and Grain. Boundaries of Triangular WS 2 Monolayers

Enhancement of connectivity and flux pinning in MgB2 superconducting bulks and wires

Enhanced Light Trapping in Periodic Aluminum Nanorod Arrays as Cavity Resonator

Energy-level matching of Fe(III) ions grafted at surface and. doped in bulk for efficient visible-light photocatalysts

Yanmei Liu, Min Li, Qingqing Fang, Qingrong Lv, Mingzai Wu, and Shuai Cao

CHAPTER-VII SUMMARY AND CONCLUSIONS

Supplementary Materials for

Controllable Growth of Semiconductor Heterostructures Mediated by Bifunctional Ag 2 S Nanocrystals as Catalyst or Source-Host

Synthesis, Characterization and Optical Properties of ZnS Thin Films

Electronic Supplementary Information (ESI)

Amorphous Er 2 O 3 films for antireflection coatings

Annealing Effects on the Properties of Copper Selenide Thin Films for Thermoelectric Applications

Preparation of Large-area, Crack-free Polysilazane-based Photonic. Crystals

Micron-Sized Nanoporous Antimony with Tunable Porosity for. High Performance Potassium-Ion Batteries

Supplementary Figures

Supporting Information. AlN/h-BN Heterostructures for Mg Dopant-Free Deep Ultraviolet Photonics

High Efficiency Heterojunction Cadmium Sulphide (CdS) Thin Film Solar Cells by Thermal Evaporation Technique

Supplementary Figure S1 Photograph of MoS 2 and WS 2 flakes exfoliated by different metal naphthalenide (metal = Na, K, Li), and dispersed in water.

Se precursor. concentration/m. CdO OA OLA HPA Se TOP CdO OA OLA HPA. Nucleation Temperature

Supplimentary Information. Large-Scale Synthesis and Functionalization of Hexagonal Boron Nitride. Nanosheets

Supporting Information

Ceramic Processing Research

Near Infrared Reflecting Properties of TiO 2 /Ag/TiO 2 Multilayers Prepared by DC/RF Magnetron Sputtering

Supplementary Figure 1: Schematic phase diagram of surfactant-water-oil systems showing a variety of self-assembled structures. (Adapted from ref.

Assembling Ordered Nanorod Superstructures and Their Application as Microcavity Lasers

Photoelectrochemical cells based on CdSe films brush plated on high-temperature substrates

Supporting Information. Kirkendall Diffusion, and their Electrochemical Properties for use in Lithium-ion

The Effect of Annealing Heat Treatment on Structural and Optical Properties of Ce-doped ZnO Thin Films

LUMINESCENCE PERFORMANCE OF RED PHOSPHOR K 2 ZnSiO 4 : Eu 3+ FOR BLUE CHIP

and their sensitivity to ammonia gas

Growth of bulk single crystals β-fesi 2 by chemical vapour deposition

Heterostructures of Oxides and Semiconductors - Growth and Structural Studies

SUPPLEMENTARY INFORMATION

Transcription:

Supporting Information Self-Assembling VO 2 Nanonet with High Switching Performance at Wafer-Scale Jiasong Zhang, Haibo Jin*, Zhuo Chen, Maosheng Cao, Pengwan Chen, Yankun Dou, Yongjie Zhao, Jingbo Li* School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081, P.R. China *Corresponding Author E-mail: (H. J.) hbjin@bit.edu.cn; (J.L.) lijb@bit.edu.cn. 1

1. Morphology and structure identification The low-magnification SEM image of the VO 2 nanonet (Figure S1a) shows uniform distribution of the nanorods on the 2-inch (001)-sapphire (Figure S1b). The structure of asgrown VO 2 nanonets was characterized by Raman and XRD, as shown in Fig. 1c and 1d. It is found the as-grown nanonets are of the monoclinic M phase and highly oriented with the crystallographic relation (020) M or (002) M //(001) S. The characteristic peaks of Raman pattern in Fig. 1c are in good consistence with the Raman results of VO 2 (M) reported by Donev et al.. 1 Above 45 o C, Raman peaks of the as-grown sample are submerged in noise due to high conductivity of the sample. Raman results of annealed samples show no large change from that of as-grown samples except the suppressed conductivity at high temperature (Fig. S1c). XPS measurements were performed to examine the oxidation states of V ions in samples (Fig. S1d). It is shown that the as-grown VO 2 contains partial V 3+ ions together with V 4+ ions, inferring the existence of oxygen vacancies. To replenish oxygen in as-grown samples, the short-time annealing process was employed. The as-grown samples were annealed in a short annealing furnace at 400 o C for 30 s under air atmosphere with a pressure of 10 4 Pa. The XPS results of annealed samples show that V 3+ ions disappear after the short-time annealing, confirming the oxygen vacancies were satisfactorily compensated by the short-time annealing. No additional XRD peaks (Fig. 1d) were observed after annealing. 2

Figure S1. Morphology and structure characterizations of VO 2 nanonets. a, SEM image of synthesized nanonets at low magnification. b, Photomacrograph of as-grown sample. c, Temperature-dependent Raman data of the annealed VO 2 nanonets, indicating no structural transition was induced by the short-time annealing. d, High-resolution XPS data of as-grown and short-time annealed samples, showing the as-grown films contain partial V 3+ ions together with V 4+ ions, however the V 3+ ions disappear after the short-time annealing. The position of the V 2p 3/2 core-level peak in the annealed sample is ~515.9 ev, close to the wellestablished value of ~515.8 ev for V 4+ in VO 2. 2 In the as-grown sample, the V 2p 3/2 core-level peak broadens and shifts toward lower binding energy by ~0.2 ev (Note: the binding energy of the V 2p 3/2 core level is 515.4 ev for V 3+ in V 2 O 3 3 ), indicating a reduction in the oxidation state of V from V 4+ toward V 3+. 3

2. Horizontally epitaxial growth of VO 2 nanorods The growth directions of nanorods were determined by TEM (Fig. S2). The SAEDs indicate that the nanorods are well crystallized. Two growth directions were determined, i.e. [200](020) M and [002](020) M, as indexing of SAEDs in the insets of Fig. S2. The present two growth modes are reasonable, considering lattice mismatches between VO 2 and sapphire for different growth directions. The lattice mismatches are -4.46% (minus denotes the compressive strain) along the [200](020) M //< 1 10>(001) S direction, 2.11% along [002](020) M //<1 10>(001) S and 2.59% along [101](020) M //< 1 10>(001) S, respectively. 4 The smaller strain energy may serve as the compensational driving force for the [002](020) M growth. However, the growth direction [101](020) M which is equivalent to the [002](020) M was not observed by TEM observations. The [002](020) M and [101](020) M directions correspond to the same <011>{200} R direction in the high-temperature tetragonal structure (R phase). Since the growth was conducted at 230 o C, higher than the temperature of phase transition from low-temperature M phase to high-temperature R phase (~68 o C), the growth orientation of the nanorods is transformed from its high-temperature R phase. The lower mismatch strain along [002](020) M //<1 10>(001) S than that along [101](020) M //<1 10>(001) S makes the growth direction [002](020) M preferred. Therefore, the nanorods are found to epitaxially grow along two directions, [200](020) M and [002](020) M. 4

Figure S2. TEM images of as-grown nanorods. a, TEM image of a nanorod. The inset: SAED pattern of the [010] zone axis taken from the rod, indicating the rod grows along [200](020)M. This implies that the closest-packed V-V chain aligns along the growth direction of the nanorods. b, TEM image of another nanorod. The inset: SAED pattern of the [0 1 0] zone axis, indicating the growth direction of the rod is along [002](020)M with the V-V pair chain obliquely crossing the rod. 3. Details of the nucleation process 5

Figure S3. SEM images of the samples prepared at 230 C. a, 27min; b, 30min; c, 32min; d, 33min. Nuclei were observed on the (001)-sapphire after an incubation period of ~27 min. Some of the nuclei show regular hexagonal shape, indicating the formation of heteroepitaxial nuclei on the (001)-sapphire which has the threefold symmetry structure in-plane. In the nucleation process, new nuclei continuously form on substrate and primary large-size nuclei. At ~33 min, small nanorods grow from the secondary nuclei, while the primary large-size nuclei still exist. 4. Effects of orientations of substrates on the growth of VO 2 nanonets VO 2 nanostructures were grown on differently oriented sapphire substrates (Fig. S4). Differently oriented sapphire substrates lead to great difference of the morphology of VO 2. In fact, there are lattice-matching relations between (2 01) M and (100) S and between (100) M and (102) S. 5 The sample grown on (100)-sapphire shows a monodirectional array of nanorods in Fig. S4b with a preferred orientation of (2 01) M //(100) S as determined by XRD (Fig. S4e). This is because of the absence of multifold symmetric structure in (100) S. For the sample grown on (102)-sapphire, no regular growth was observed in Fig. S4c. In the lattice-matching relation of (100) M //(102) S the lattice mismatch is too large (up to 5%) to achieve the horizontally epitaxial growth of VO 2 on the (102)-sapphire. The VO 2 nanonet shows better electrical switching property than the VO 2 nanostructures grown on (100)-sapphire and (102)- sapphire as shown in Fig. S4g-i. 6

Figure S4. SEM images, XRD patterns and thermal hysteresis loops of resistance of VO2 nanostructures grown on differently oriented sapphire substrates. a, d, g, (001)sapphire. b, e, h, (100)-sapphire. c, f, i, (102)-sapphire. 5. Thermochromic properties of VO2 nanonets Figure S5. SEM image of VO2 on (001)-sapphires grown with the vanadyl oxalate concentration of 2.5 mmol/l at 230 oc for 4 h. 7

Table S1. Summary of VO 2 films and their thermochromic properties Samples T lum (LT/HT a ) T lum T sol (LT/HT) T sol Max T 2000nm (LT/HT) T 2000nm Ref. VO 2 nanonet 46.71%/46.15% 0.56% 59.5%/48.8% 10.7% 67.0% 92.6%/50.7% 41.9% this work VO 2 porous film 50.6%/49.4% 1.2% 58.9%/44.2% 14.7% 6 VO 2 porous film 43.3%/39.9% 3.4% 42.9%/28.8% 14.1% 54.6% 75.1%/24.1% 51.1% 7 VO 2 porous film 7.9% 70.2% 97.0%/61.4% 35.6% 8 TiO 2 /VO 2 /TiO 2 57.6%/54.7% 2.9% 46.1%/43.2% 2.9% 64.1% 54.4%/16.1% 38.3% 9 VO 2 /TiO 2 49.5%/44.8% 4.7% 52.2%/37.1% 15.1% 55.7% 78.7%/21.6% 57.1% 10 T vis b a) LT is the abbreviation of low temperature, denoting the properties are of the low-temperature M phase, and HT stands for the properties of the high-temperature R phase. b) Max T vis denotes the maximum of visible transmittance. The thermochromic properties reported in this work were calculated from the experimental optical data. The integrated luminous transmittance ( T lum, 380 780 nm) and solar modulating ability (,300 2500 nm) are two major performance parameters of smart windows, Tsol which were calculated from the following equations: 11, 12 T lum, sol = ϕ lum, sol ϕ ( λ) T( λ) dλ lum, sol ( λ) dλ T = T T lum, sol lum, sol( LT ) lum, sol( HT ) where T(λ) denotes transmittance at wavelength λ, ϕ (lum ) is the standard luminous efficiency function for the phototropic vision, and ϕ (sol) air mass 1.5 corresponding to the sun standing 37 above the horizon. 13 is the solar irradiance spectrum for (1) Donev, E. U.; Lopez, R.; Feldman, L. C.; Haglund, R. F. Confocal Raman Microscopy across the Metal- Insulator Transition of Single Vanadium Dioxide Nanoparticles. Nano lett. 2009, 9, 702-706. (2) Silversmit, G.; Depla, D.; Poelman, H.; Marin, G. B.; De Gryse, R. Determination of the V2p XPS Binding Energies for Different Vanadium Oxidation States (V 5+ to V 0+ ). J. Electron. Spectrosc. 2004, 135, 167-175. 8

(3) Zhang, Z.; Gao, Y.; Chen, Z.; Du, J.; Cao, C.; Kang, L.; Luo, H. Thermochromic VO 2 Thin Films: Solution- Based Processing, Improved Optical Properties, and Lowered Phase Transformation Temperature. Langmuir 2010, 26, 10738-10744. (4) Rogers, K. An X-ray Diffraction Study of Semiconductor and Metallic Vanadium Dioxide. Powder Diffr. 1993, 8, 240-244. (5) Bayati, M. R.; Molaei, R.; Wu, F.; Budai, J. D.; Liu, Y.; Narayan, R. J.; Narayan, J. Correlation between Structure and Semiconductor-to-Metal Transition Characteristics of VO 2 /TiO 2 /Sapphire Thin Film Heterostructures. Acta Mater. 2013, 61, 7805-7815. (6) Cao, X.; Wang, N.; Law, J. Y.; Loo, S. C. J.; Magdassi, S.; Long, Y. Nanoporous Thermochromic VO 2 (M) Thin Films: Controlled Porosity, Largely Enhanced Luminous Transmittance and Solar Modulating Ability. Langmuir 2014,1710-1715. (7) Kang, L.; Gao, Y.; Luo, H.; Chen, Z.; Du, J.; Zhang, Z. Nanoporous Thermochromic VO 2 Films with Low Optical Constants, Enhanced Luminous Transmittance and Thermochromic Properties. ACS Appl. Mater. Inter. 2011, 3, 135-138. (8) Zhou, M.; Bao, J.; Tao, M.; Zhu, R.; Zhang, X.; Xie, Y. Periodic Porous Thermochromic VO 2 (M) Film with Enhanced Visible Transmittance. Chem. Commun. 2013, 6021-6023. (9) Jin, P.; Xu, G.; Tazawa, M.; Yoshimura, K. Design, Formation and Characterization of a Novel Multifunctional Window with VO 2 and TiO 2 Coatings. Appl. Phys. A 2003, 77, 455-459. (10) Chen, Z.; Gao, Y.; Kang, L.; Du, J.; Zhang, Z.; Luo, H.; Miao, H.; Tan, G. VO 2 -Based Double-Layered Films for Smart Windows: Optical Design, All-Solution Preparation and Improved Properties. Sol. Energ. Mat. Sol. C. 2011, 95, 2677-2684. (11) Mlyuka, N. R.; Niklasson, G. A.; Granqvist, C. G. Thermochromic VO 2 -Based Multilayer Films with Enhanced Luminous Transmittance and Solar Modulation. Phys. Status. Solidi. A 2009, 206, 2155-2160. (12) Sun, Y. M.; Xiao, X. D.; Xu, G.; Dong, G. P.; Chai, G. Q.; Zhang, H.; Liu, P. Y.; Zhu, H. M.; Zhan, Y. J. Anisotropic Vanadium Dioxide Sculptured Thin Films with Superior Thermochromic Properties. Sci. Rep. 2013, 3. (13) ASTM G173-03 Standard Tables of Reference Solar Spectral Irradiances: Direct Normal and Hemispherical on a 37 Tilted Surface, Annual Book of ASTM Standards, Vol. 14. 04, American Society for Testing and Materials, Philadelphia, PA, USA, Http://Rredc.Nrel.Gov/Solar/Spectra/Am1.5. 9