Quartz Glass for Optics Data and Properties

Quartz Glass for Optics Data and Properties

Quartz Glass for Optics Data and Properties = 3D material, optically isotropic. In quartz glass, the homogeneity is typically specified in one direction only. Heraeus manufactures quartz glass grades, which are controlled and specified in all 3 directions regarding striae, homogeneity and stress induced birefringence, for the most demanding applications. These materials are identified by the 3D symbol. 1 For raw formed ingots the bubble specification is valid for the area defined by the minimum diameter tolerance. For machined parts it is defined as 1 % of the material. 2 Bubbles or inclusions.8 mm diameter are not counted. For Suprasil 311/312 and Suprasil 1/2 a specification for bubbles and inclusions of 1µm is possible on request. 3 For non-spherical bubbles the diameter is averaged. 4 The Dn value is the maximum permissible lateral variation in refractive index (measured by interferometer at 32.8 after subtraction of tilt and offset) over 9% of the diameter or edge length of a fine ground piece, or 8% of a raw formed ingot. The maximum test diameter is 4 mm. Larger pieces are measured using overlapping interferograms. 5 Does not apply to drawn rods. Lower values available on request. 7 The residual strain values refer to the measured phase difference per cm light path. The residual strain value is specified over 9% of the diameter or edge length of a fine ground piece, or 8% of a raw formed ingot. n. sp. = not specified Refractive index at C and 1 bar The given values are interpolated from measured values having an accuracy of ± 3 1-5. In contrast to other optical glasses, quartz glass shows very little difference in refractive index from melt to melt. *without Suprasil 1, 2, Grade Bubbles and Inclusions Homogeneity Residual Strain Fluorescence OH-Content The bubble grade is given for every 1 cm 3. 4 Dn-value Quartzglass from Heraeus is free of inclusions. Excitation by Hg-Lamp@ Total cross- 4 Striae class as l = 254 and UG 5-filter; DIN 58927 sections (in mm Lamp-power: 8W; (μg/g) DIN ISO 111 3 ) per DIN ISO 111 PV value /cm of all bubbles (per mm (Peak-to-Valley) Detection: adapted eye (TBCS value) thickness) Suprasil 311 1/1*.8.15 2 / -;5 3 1-5 free ca. 2 Suprasil 312 1/1*.8.15 2 / -;5 4 1-5 free ca. 2 Suprasil 1 1/1*.8.15 2 / -;5 4 1 - slight blue 1 Suprasil 2 1/1*.8.15 2 / -;5 1 1 - slight blue 1 Suprasil 1/1*.8.15 acc. MIL n. sp. 5 slight blue 1 Suprasil 1 1/1*.8.15 2 / -;5 5 1-5 free 1 Suprasil 2 Grade A 1/1*.8.15 2 / -;5 5 1-5 free 1 Suprasil 2 Grade B 1/1*.8.15 2 / -;5 1 1-5 free 1 Suprasil CG 1/1*.8.15 acc. MIL 1 - free 1 Suprasil 1 ArF / KrF 1/1*.8.15 2 / -;5 5 1-5 free 1 Suprasil 2 ArF / KrF 1/1*.8.15 2 / -;5 5 1-5 free 1 Spectrosil 1/1*.8.15 2 / -;5 1 1-5 free 1 Homosil 11 1/2*.1.3 2 / -;5 3 1-5 blue-violet ca. 1 1/1*..1 2 / -;5 4 1-5 blue-violet ca. 1 Infrasil 1 1/1*.1.3 2 / -;5 5 1-5 blue-violet 8 Infrasil 2..1 1/1*.35.1 2 / -;5 1-5 blue-violet 8 HOQ 31 2...3 1/1*.3 kg 1/2*1. > kg Synthetic Fused Silica Cultured Quartz Natural Quartz Natural Quartz 1 2 5.5 n. sp. n. sp. 1 blue-violet ca. 7 Suprasilfamily Homosil / Herasil / Infrasil / HOQ 19 1,5572 - ArF 193,4 1,13-1,551-2,54-1,54729 2 1,52845 1,5287 232,94-1,51834 2 1,51334 1,51359 KrF 248,4 1,833-1,239 1,24 4 x Nd:YAG 2 1,4998 1,49993 274,87 1,497 1,4934 28 1,4941 1,49439 1,48779 1,488 XeCl 8 1,4854 1,48583 3 1,48274 1,48292 HeCd 325 1,4814 1,48182 N2 337 1,47921 1,47938 3 1,4785 1,47881 1,47529 1,47544 (ni) 35,48 1,47447 1,4742 38 1,47248 1,4722 1,4712 1,4725 (nh) 4,5 1,492 1,4975 (ng) 435,83 1,49 1,481 HeCd 441, 1,422 1,434 Kr 447,1 1,4578 1,4591 (nf) 48,13 1,4313 1,4324 Ar 488 1,41 1,4313 Ar 514,5 1,415 1,41 2 x Nd:YAG 532 1,71 1,81 (ne) 54,7 1,8 1,18 (nd) 587,5 1,4584 1,4585 HeNe 32,8 1,4572 1,45711 (nc) 5,27 1,4537 1,454 Ruby 94,3 1,45542 1,45552 Kr 752,5 1,45419 1,45428 8 1,45332 1,45341 8 1,452 1,45259 9 1,45175 1,45185 GaAs 95 1,4518 1,45177 1 1,442 1,451 Nd:YAG 14 1,4493 1,44972 HeNe 1153 1,44859 1,4488 1 1,4485 1,44815 Nd:YAG 1319 1,447 1,448 1 1,44578 1,44589 1 1,44342 1,44353 18 1,487 1,499 1,4389 1,43821 2 1,431 1,43515 1,4313 1,43177 1,42789 1,4284 28 1,42377 1,42393 1,41925 1,41941 3 1,41427 1,41444 1,881 1,897

Optical Homogeneity The false colour interferogram below shows the typical two-dimensional refraction-index distribution. The interferogram belongs to a circular blank. The sectional view along the diameter shows the refraction-index distribution across the blank. One can clearly see the very low value in the center of the plate and the rise close to the edge. Typical transmission including Fresnel es (1-R) 2 Suprasil 311, 312 Suprasil 1, 2, 1 9 8 7 1 1 Suprasil 311 / 312 Suprasil 1 / 2 / Sample thickness: 1 mm 2 1 () Suprasil 1, 1 ArF / KrF Suprasil 2 Grade A, 2 ArF / KrF Suprasil 2 Grade B, Suprasil CG Spectrosil Homosil 11 HOQ 31 Infrasil 1, 2 The uppermost curves in the transmission graphs indicate the calculated Fresnel es for two uncoated surfaces. 1 9 8 7 1 1 1 9 8 7 1 1 Suprasil 1 / 2 Grade A Suprasil 2 Grade B, CG Spectrosil Sample thickness: 1 mm 2 1 () Homosil 11 Infrasil 1, 2 HOQ 31 Sample thickness: 1 mm 2 1 () Please find our transmission calculator online at www.optics.heraeus-quarzglas.com

Technical Properties Internal transmission (%) Values of pure transmissions of a 1 mm thick sample for selected UV-s. Suprasil ArF/ KrF - specified - Suprasil - family - typical - Homosil 11 - typical - 193,4 99, 98, 92, 248,4 99,8 99, 98, 2 99,9 99,9 99, Refraction index dispersion Dispersion constants (Sellmeier) Homosil / Herasil / Suprasil -family, Spectrosil Infrasil / HOQ B1 4,73115591 1-1 4,7527 1-1 B2,3138719 1-1,277838 1-1 B3 9,4498 1-1 8,722744 1-1 C1 1,2995717 1-2 2,8488895 1-3 C2 4,12892 1-3 1,183952 1-2 C3 9,8785322 1 1 9,5812 1 1 Mechanical data Suprasil - family, Spectrosil Homosil / Herasil / Infrasil / HOQ Density g/cm 3 2, Mohs-hardness 5,5...,5 Micro-hardness N/mm 2 8...98 Knoop-hardness N/mm 2 58... Modulus of elasticity N/mm 2 7, 1 4 (at C) Modulus of torsion N/mm 2 3 1 4 Poisson s ratio,17 Thermal data Suprasil - Family, Spectrosil Homosil / Herasil / Infrasil / HOQ Softening temperature C ~ 1 ~ 17 Annealing temperature C ~ 11 ~ 118 strain temperature C ~ 125 ~ 175 Max. working temperature continuous C ~ 9 ~ 11 short-term C ~ 1 ~ 1 Relative temperature coefficients of the refractive index in 1 - K -1 Suprasil -family, Homosil / Herasil / Spectrosil Infrasil / HOQ...ºC...ºC...ºC...ºC 237,8 14, 14,9 15,2 15,3 35 11 11,2 11,5 11, 54,1 9,9 1,1 1, 1,7 587, 9,8 1, 1,5 1, 43,8 9, 9,8 1,4 1,5 Abbe constant n d 1 n d = n F n 7,8 ±,5 c Birefringence constant @ 33 cm bar 3,54 ±,5 3,1 ±,5 Sellmeier Equation: n 2-1 = B 1 l 2 /(l 2 - C 1 ) + B 2 l 2 /(l 2 - C 2 ) + B 3 l 2 /(l 2 -C 3 ) l in μm at C Typical trace impurities in quartz glass Impurities Suprasil - family, Spectrosil / Homosil 11 Infrasil / HOQ Al = aluminium,1 1 Ca = calcium,15 1 1 Cr = chrome,1,1,1 Cu = copper,3,1,1 Fe = iron,5,2,8 K = potassium,1,1,8 Li = lithium,1 1 1 Mg= magnesium,5,1,1 Na = sodium,1 1 1 Ti = titanium,5,1 1 Compressive strength N/mm 2 11 Tensile strength N/mm 2 Bending strength N/mm 2 7 Torsional strength N/mm 2 Sound velocity m/s 57 Electrical data Resistivity in V m C 1 1 C 1 8 8 C,3 1 4 1 C 1,3 1 3 Dielectric strength in kv/mm (Layer thickness 5 mm) C... C 4...5 Dielectric loss angle (tg d) 1kHz,5 1...1MHz <,1 3 1 4 MHz,4 Mean specific heat J/kg K...1 C 772... C 94...9 C 152 Heat conductivity W/m K C 1,38 1 C 1,4 C 1,55 C 1,7 C 1,84 9 C 2,8 Mean thermal expansion coefficient K -1-1... C -... C 2,7 1-7...1 C 5,1 1-7... C 5,8 1-7... C 5,9 1-7... C 5,4 1-7...9 C 4,8 1-7 Dielectric constant ( ) C...1 MHz 3,7 23 C...1 MHz 3,8 23 C 3 1 4 MHz 3,81

HQS-SO Quartz Glass for Optics Data and Properties 1.13/V1.5_E Germany Heraeus Quarzglas GmbH & Co. KG Optics Quarzstr. 8, 34 Hanau Phone +49 (181) 35-2 85 Fax +49 (181) 35-2 7 sales.hqs.optics.de@ heraeus.com USA Heraeus Quartz America, LLC. Optics 1 Heraeus Blvd. 518 Buford, Georgia Phone +1 (78) 714-43 Fax +1 (78) 714-4355 sales.hqs.optics.us@ heraeus.com Suprasil is a registered international trademark of Heraeus and is also a trademark of Heraeus in BR, CN, DE, ES, GB, JP and US. Infrasil is a registered international trademark of Heraeus and is also a trademark of Heraeus in CN, DE, GB, JP, SE and US. Herasil is a registered international trademark of Heraeus and is also a trademark of Heraeus in BR, CN, DE, ES, GB and JP. HOQ is a registered trademark of Heraeus in the European Union (EU) and in the US. Homosil is a registered international trademark of Heraeus and is also a trademark of Heraeus in BR, CN, DE, GB, JP and SE. Spectrosil is a registered trademark of Heraeus in the European Union (EU). In the above context, Heraeus means Heraeus Holding GmbH or any affiliate of Heraeus Holding GmbH, e.g Heraeus Quarzglas GmbH & Co KG. The data given here is correct for January 13 and is subject to change. China UK Korea Heraeus ShinEtsu Quartz (China) Inc. QianJiang Tower, th Floor, Room A, No. 971 Dongfang Road 122 Shanghai Phone +8 (21) 8722-89 Fax +8 (21) 8751434 sales.hqs.optics.cn@heraeus.com Heraeus Quarzglas UK 4 Tannery House Tannery Lane Send, Woking Surrey GU23 7EF Phone +44 (1483) 213323 Fax +44 (1483) 213329 sales.hqs.optics.uk@heraeus.com HS Advanced Materials Co., Ltd. 149-3, Hoechuk-ri, Gwanghyewon-myun Jincheon-gun, Chungbuk, 35-834 Korea Phone +82 (43) 532 5371 Fax +82 (43) 532 5334 ymji@hs-am.com www.optics.heraeus-quarzglas.com