Brooks Mass Flow Meter Model 5863 Mass Flow Controller Model 5853

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Installation and Operation Manual X-TMF-5853-63-MFC-eng PN 541-C-022-AAG November, 2008 Brooks Mass Flow Meter Model 5863 Mass Flow Controller Model 5853

Section 5 Information Installation and Operation Manual X-TMF-5853-63-MFC-eng PN 541-C-022-AAG November, 2008 5-1 General This section contains the procedures for the receipt and installation of the instrument. See Section 2 for dimensional and connection requirements. Do not attempt to start the system until the instrument has been permanently installed. It is important that the start-up procedures be followed in the exact sequence presented. 5-2 Receipt of Equipment 5-3 Recommended Storage Practice When the instrument is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to your nearest Product Service Department. Brooks Instrument 407 W. Vine Street P.O. Box 903 Hatfield, PA 19440 USA Toll Free (888) 554-FLOW (3569) Tel (215) 362-3700 Fax (215) 362-3745 E-mail: BrooksAm@BrooksInstrument.com www.brooksinstrument.com Brooks Instrument Brooks Instrument Neonstraat 3 1-4-4 Kitasuna Koto-Ku 6718 WX Ede, Netherlands Tokyo, 136-0073 Japan P.O. Box 428 Tel 011-81-3-5633-7100 6710 BK Ede, Netherlands Fax 011-81-3-5633-7101 Tel 31-318-549-300 Email:BrooksAs@BrooksInstrument.com Fax 31-318-549-309 E-mail: BrooksEu@BrooksInstrument.com Remove the envelope containing the packing list. Carefully remove the instrument from the packing case. Make sure spare parts are not discarded with the packing materials. Inspect for damaged or missing parts. If intermediate or long-term storage of equipment is required, it is recommended that the equipment be stored in accordance with the following: a. Within the original shipping container. b. Stored in a sheltered area, preferably a warm, dry, heated warehouse. c. Ambient temperature of 70 F (21 C) nominal, 109 F (43 C) maximum, 45 F (7 C) minimum. d. Relative humidity 45% nominal, 60% maximum, 25% minimum. Upon removal from storage a visual inspection should be conducted to verify the condition of equipment is as received. 26

Installation and Operation Manual X-TMF-5853-63-MFC-eng PN 541-C-022-AAG November, 2008 Section 5 Information 5-4 Return Shipment Prior to returning any instrument to the factory visit the Brooks website www.brooksinstrument.com for a Return Materials Authorization Number (RMA#), or contact one of the following locations: Brooks Instrument 407 W. Vine Street P.O. Box 903 Hatfield, PA 19440 USA Toll Free (888) 554-FLOW (3569) Tel (215) 362-3700 Fax (215) 362-3745 E-mail: BrooksAm@BrooksInstrument.com www.brooksinstrument.com Brooks Instrument Brooks Instrument Neonstraat 3 1-4-4 Kitasuna Koto-Ku 6718 WX Ede, Netherlands Tokyo, 136-0073 Japan P.O. Box 428 Tel 011-81-3-5633-7100 6710 BK Ede, Netherlands Fax 011-81-3-5633-7101 Tel 31-318-549-300 Email:BrooksAs@BrooksInstrument.com Fax 31-318-549-309 E-mail: BrooksEu@BrooksInstrument.com Instrument must have been purged in accordance with the following: All flow instruments returned to Brooks requires completion of Form RPR003-1, Brooks Instrument Decontamination Statement, along with a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing by Brooks personnel. Copies of these forms can be downloaded from the Brooks website www.brooksinstrument.com or are available from any Brooks Instrument location listed above. 5-5 Transit Precautions To safeguard the instrument against transportation damage, it is recommended to keep the instrument in its factory container until ready for installation. 5-6 Removal from Storage Upon removal of the instrument from storage, a visual inspection should be conducted to verify its "as-received" condition. If the instrument has been subject to storage conditions in excess of those recommended (See Section 4-3), it should be subjected to a pneumatic pressure test in accordance with applicable vessel codes. 27

Installation and Operation Manual X-TMF-5853-63-MFC-eng PN 541-C-022-AAG November, 2008 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller. Products purchased by Seller from a third party for resale to Buyer ( Resale Products ) shall carry only the warranty extended by the original manufacturer. All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse, accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of Seller are not covered by this limited warranty, and shall be at Buyer s expense. Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller. BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration. The primary standard calibration equipment to calibrate our flow products is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards. Visit www.brooksinstrument.com to locate the service location nearest to you. START-UP SERVICE AND IN-SITU CALIBRATION Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards. CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. HELP DESK In case you need technical assistance: Americas 1-888-554-FLOW Europe +(31) 318 549 290 Within Netherlands 0318 549 290 Asia +011-81-3-5633-7100 Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks......Brooks Instrument, LLC Buna...DuPont Dow Elastomers Kalrez... DuPont Dow Elastomers Teflon... E.I. DuPont de Nemours & Co. Viton... DuPont Performance Elastomers