Semiconductor Perspectives in Pure Water Analytics 8 News THORNTON Leading Pure Water Analytics Dissolved Ozone Equipment Controls Periodic UPW Ozonation Ozonation is proven to effectively disinfect and sanitize ultrapure water. The Smart Dissolved Ozone Sensor from THORNTON provides rapid, accurate response to ozone concentrations, and also offers excellent sensitivity to zero ozone. The customer In the southwest US, one of the world s top 10 semiconductor companies designing and manufacturing embedded semiconductors for automotive, consumer, and other industrial markets, faces the daily challenges of efficiently maintaining a large UPW (Ultrapure Water) system. The factory is an 8-inch (200 mm) wafer manufacturing facility. A 160,000-squarefoot facility produces microcontrollers and embedded flash memories for their various markets. Manufacturing capability at the factory currently reaches the 0.18- micron technology node and started production back in the early 1990 s. Ozone system efficiency critical to operation The facility uses periodic ozonation to ensure their UPW distribution loop is free from bacteria. The THORNTON ozone sensor measures the ozone output level and allows the UPW Plant Operator to adjust, or tune, the ozone generating system output to ensure ozone concentration achieves an effective oxidation level. Although there are many steps in the water purification process, bacterial and microorganism contaminants often exist in distribution loops. Loops such as the one in this facility transport large volumes of ultrapure water in plastic pipe comprised of many connection fittings, sample points and sensor installation locations. All of these can contribute to increasing contamination levels if not routinely cleaned.
Ozone sensor features designed with customer needs in mind The THORNTON ozone sensor provides rapid, accurate response to ozone concentrations. In addition, it also offers excellent sensitivity to zero ozone. Publisher / Production Mettler-Toledo AG Process Analytics Im Hackacker 15 CH-8902 Urdorf Switzerland Illustrations Archive MarCom CH-8902 Urdorf Switzerland Ozone has many benefits as a sanitizer. There are no byproducts generated as with other chemical sanitizing agents and residual dissolved ozone rapidly breaks down to oxygen in water. However, ozone generating equipment is both a capital and operational investment and efficient operation is key to return on investment. To accomplish effective ozone operation requires the use of a stable and reliable dissolved ozone measurement system. Many features built into the THORNTON ozone sensor contribute to its reliability and low cost of ownership. The key to reliability lies in the sensor design. A robust stainless steel sensor body and housing design provides maximum resistance to deionized water, even at elevated temperatures. The rugged VP style connector is a watertight, superior quality connection designed to provide long lasting integrity. The membrane cartridge is a unique design that offers simple, failsafe membrane replacement. The right transmitter and sensor combination elevates THORNTON above the competition Innovative sensor features, coupled with the capability of the 770MA multiparameter instrument, made the THORNTON ozone measurement system the right choice for monitoring and controlling ozonated ultrapure water in this 200 mm Fab. As in many facilities, when monitoring and control equipment is considered, capability, ease of use and flexibility are desirable attributes regardless of the parameter. The 770MA instrument is a proven asset to water system management throughout the world with its unsurpassed resistivity, ph, TOC and dissolved oxygen measurement capabilities. The addition of dissolved ozone capability only adds more power to an already powerful process monitoring tool. Subject to technical changes. Mettler-Toledo AG 12/06 Printed in Switzerland. www.mt.com/ozone 2 METTLER TOLEDO Semiconductor News
Continuing Innovation A Diverse Measurement Portfolio is Key to Providing Long-Term Solutions THORNTON, the leader in resistivity / conductivity measurement of ultrapure water continues to excel in demanding water purification applications. To provide more value to customers, we continue to expand our expertise and to develop further innovations in measuring technique, software and applications know-how. Synergistic developments Our 770MA and 200-Series Transmitter platforms are well known throughout the world for strong performance and value. In recent years, sensors for ppb-level dissolved oxygen and dissolved ozone have been developed for reliable control of these critical parameters in pure and ultrapure water systems. These important measurement capabilities were built on the longterm expertise in these areas of Mettler- Toledo Process Analytics in Switzerland. The synergism of in-depth applications knowledge, leading sensor technology, and instrumentation experience have resulted in these high performance products for measuring dissolved oxygen and ozone. Total Organic Carbon (TOC) is another critical parameter for the control of organics in critical pure water systems. THORNTON developed the simplified 5000TOC sensor for TOC measurement, avoiding the complexity of slow, mostly off-line analytical TOC measurements and developing a fast and responsive TOC sensor for on-line, real-time measurements a significant innovation in performance and value. Convenient standards New THORNTON conductivity standard solutions enable convenient access to traceable standards for periodic calibration and peace of mind. Standard solutions allow for on-site calibration with ASTM traceability through the ISO9001 Mettler-Toledo Thornton facility for complete confidence. In addition, Thornton provides in-factory and on-site re-calibration services by THORNTON-trained personnel, when requested, for system validation and performance verification. As a global supplier, Mettler-Toledo Thornton is committed to continued expansion of innovative products to meet industry requirements. www.mt.com/thornton 770MA and 200-Series Transmitters are installed globally for pure and ultrapure water treatment system monitoring. ASTM-traceable Conductivity Standard Solutions for convenient verification or calibration. Advanced dissolved oxygen and ozone sensors developed jointly by Swiss and American engineers. METTLER TOLEDO Semiconductor News 3
Reliable Organics Detection 5000TOC: Speed, Accuracy, and Ease of Use Using THORNTON s 770MA and Smart Sensor technology, the 5000TOC Sensor for total organic carbon measurement and control in pure and ultrapure water applications makes on-line TOC measurement easier than ever. It reinforces the 770MA as the most powerful instrument yet for pure water measurements. On-line, continuous TOC measurement capability adds considerable value to the analysis. Major delays caused by off-line and long measurement cycles with traditional TOC analyzers are eliminated. Contamination excursions, which can occur during off-line periods or between grab sample analyses, create doubt about the integrity of process control data. TOC response time using the 5000TOC, is less than one minute, with no gaps, yielding truly continuous, real-time results. Simplicity of operation The simplicity of continuous TOC measurement brings additional value to microelectronics users. Continuous flow TOC measurement has no moving parts and no reagents, so maintenance is minimal. Thornton Smart Sensor technology provides plug & play ease of use when connected to the Thornton 770MA instrument. THORNTON s innovative 770MA multiparameter instrument and Smart TOC Sensor technology offer a compact industrial package suited for today s microelectronics fabs and foundries. Not only is the 5000TOC sensor the first TOC sensor of its kind, the 770MA is the first multiparameter instrument to offer TOC as a measurement parameter. www.mt.com/toc 770MA with 5000TOC Sensor detects inorganics (conductivity) as well as organics (TOC). TOC (ppb) 50 45 40 35 30 25 20 15 10 0 0 0 Device Y Device Thornton 5-10 Minutes Measurement cycle 10 20 30 40 50 60 Time (Minutes) THORNTON s continuous measurement detects short-term excursions missed by batch-type TOC analyzers. 4 METTLER TOLEDO Semiconductor News
More Inputs & More Outputs Advances in Multiparameter Technology Offer Cost-Effective Monitoring Solutions The THORNTON 770MA Multiparameter instrument provides unique capabilities for water treatment measurements from recycle and reclaim to high purity and ultrapure waters. This single transmitter platform accepts multiple sensors and parameters bringing real benefits for operators of complex water systems. Smart sensors Each Smart, factory-calibrated sensor communicates its unique characteristics and calibration data to the transmitter, so the transmitter can automatically configure itself to that specific parameter and sensor for accurate measurement. Imagine measuring any combination of conductivity, resistivity, ph, oxidation reduction potential (ORP), Total Organic Carbon (TOC), dissolved oxygen, dissolved ozone, flow, pressure, tank level and temperature from one transmitter with up to six inputs. This remarkable THORNTON capability is commonly used in microelectronics, pharmaceutical and power plant monitoring and control systems throughout the world for optimal performance. stance, traditional TOC analyzers are challenging to install on an ultrapure water system. But a Smart TOC sensor connected to a THORNTON 770MA provides stateof-the-art TOC measurement, on-line and in real-time for optimal performance, with a simple and less expensive transmitter/ sensor installation. And the single transmitter can provide measurement from up to five more sensors in addition to TOC. For the user, a common display and keypad for many parameters shortens the learning curve and minimizes the chances of forgetting how to access configuration data or calibration routines. The display of many measurements is clarified with a user-defined 6-character label that can be assigned to each measurement. the parameter mix. A measurement system can be back on-line in minutes. The complementary 1875 Smart Calibrator provides internal NIST-traceable resistances, voltages and frequency to allow verifying and calibrating all ranges of all parameters at the push of a button. It can calibrate multiple 770MA Instruments and store the data. Afterwards, it can connect to a PC to print out certificates to document each calibration. The THORNTON 770MA Multiparameter Analyzer/Transmitter with Smart Sensors and Smart Calibrator incorporates powerful innovation with simplicity and customer value for optimized measurement and control. Transmitter convenience As the number of measurement parameters expands, the value to the customer is even greater. It is common for users to integrate a number of specialized transmitters for each parameter such as resistivity, ph or TOC from different instrument providers. Differences in instrument hardware, software, user interface and even physical arrangement add complexity for the system integrator and user. For in- Fewer transmitters are needed when the THORNTON 770MA Multiparameter Transmitter is specified. Multiple measurement inputs to a single transmitter with flexible display options and up to eight configurable outputs reduce the number of instruments and take process improvement and control to another level. Simplified maintenance Minimizing downtime adds additional value. A multiparameter transmitter can be replaced very quickly. The Smart sensors configure their respective measurements in the new transmitter as soon as they are plugged in. Spare parts are reduced to a single transmitter, regardless of Multiparameter instrumentation provides commonality of: Specification System Design Documentation Installation Output Interface Validation Training Startup Calibration User Interface Maintenance Spare Parts www.mt.com/max METTLER TOLEDO Semiconductor News 5
THORNTON Satisfies Strict Requirements THORNTON Leading in UPW Standardization with Top Products Today s semiconductor industry strives to produce devices with ever smaller architectures. This demands a higher degree of process control than ever before. Online water quality measurements must be accurate, efficient, versatile and reliable. These are the qualities that define our products and explain why THORNTON is recognized as the industry leader in pure water analytical measurement. Technological standards in the semiconductor industry Today s semiconductor fabricators manufacture extreme products. A modern-day semiconductor facility can produce more than 30,000 wafers per month, with each containing hundreds of chips. Beginning as thin, round wafers of silicon crystal in diameters of 150, 200, and 300mm, they are subjected to hundreds of process steps to build up a succession of layers of materials and geometries to produce thousands of electronic devices, which together function as integrated circuits (ICs). The devices now produced, which occupy the surface of a one-inch square IC would have occupied the better part of a mediumsized room 20 years ago, when all these devices (transistors, resistors, capacitors, and so on) were only available as discrete units. The conditions under which these processes can work to successfully transform the silicon into ICs require an absolute absence of contaminants. The involvement of THORNTON THORNTON instruments play an important role within the production and distribution of UPW, the primary fluid used in most FEOL (Front-End of Line) and BEOL (Back-End of Line) processes. Hundreds, even thousands, of gallons per minute of UPW are used in a fabrication process. Contaminant-free UPW requires critical process measurement for parameters such as resistivity, dissolved oxygen, TOC and others. THORNTON products are known and respected throughout the industry for providing precision, accuracy and repeatability of measurement for these, and other, process variables. Industrial guidelines Industry experts, such as Balazs Analytical Services in Fremont, California propose guidelines for water systems used within the semiconductor industry. These guidelines have been adopted by SEMI (Semiconductor Equipment and Materials International), the leading semiconductor industry organization supporting the material and equipment suppliers to the industry. Balazs continues to work to advance UPW specifications through participation with SEMI and also the ITRS (International Technology Roadmap for Semiconductors) UPW task force. Thornton has contributed to these efforts over the last 15+ years as an active participant in the SPWCC (Semiconductor Pure Water and Chemicals Conference), an annual technical conference held in San Jose, CA (USA), sponsored by Balazs Analytical Services. Test Attainable Acceptable Alert Critical Resistivity at 25 ºC 18.2 MΩ*cm 18.2 MΩ*cm 18.0 MΩ*cm 17.9 MΩ*cm (% of time) 100 98 TOC [ppb] <1 <2 5 >5 (online) Oxygen [ppb] <10/>1 <10/>1 >10 >20 Note: Attainable levels shown have been reached by some fabricants and should not be misconstrued as normally recommended specifications. 6 METTLER TOLEDO Semiconductor News
These organizations contribute to establishing facility guidelines to assist Facility and Fabrication Engineers in determining practical control limits for their UPW processes. Table: 1 shows current 2004 guidelines for measured resistivity, TOC and Oxygen levels in UPW. Typically, guidelines will be set based on the technology being manufactured in the fab; for example 0.18 µm or 0.13 µm line width technologies. and 5000TOC Sensor have a proven track record for monitoring TOC in UPW applications. These products represent only a few ways in which Thornton instrumentation is leading the way in semiconductor UPW meaurement. As the chart shows, UPW demands low level detection and accuracy. THORNTON s 770MA and 2000 instruments are used throughout the world and are known as the industry standard to many for measuring these parameters. The new high-performance dissolved oxygen sensor, mated with either the 770MA or 2000 platforms, is relied upon to offer stable, accurate DO measurement. The 770MA Transmitter www.mt.com/thornton METTLER TOLEDO Semiconductor News 7
Training and Technical Services On-site instrument operation and calibration training workshops THORNTON s Operator Training Courses are tailored to each customer s requirements. The course is conducted in a classroom setting where interaction between instructor and participants is encouraged. Each attendee is supplied with material detailing the course content. Instruments are provided for hands-on participation. The areas covered in this training program focus on THORNTON instrumentation, calibration, and maintenance specific to your facility. Additional technical topics may be added or substituted as requested. Traceable instrument calibration THORNTON offers instrument calibration and validation services traceable to national standards, industry guidelines and/ or regulatory requirements. Services using factory-trained technicians are available at our facilities in Bedford, Massachusetts or on-site at your location. Each calibrated/ validated instrument is supplied with the appropriate calibration documents. Specialized conductivity calibrations Choose one of seven unique conductivity calibrations to fit your application needs, from standard calibrations to customerspecified temperature and ASTM verification points. System calibrations are also available where the instrument and sensors are calibrated together optimizing system accuracy. Tradeshows Location Dates 2007 Semiconductor SPWCC - 25th Anniv. Santa Clara, CA USA Febr 12-14 SEMI - China Shanghai, China March 21-23 UPW - PA Philadelphia, PA USA April 17-18 SEMICON West San Francisco, CA USA July 17-19 SEMI - Taiwan Taipei, Taiwan Sept 12-14 Service and calibration contracts A THORNTON representative will provide on-site service for items covered under the agreement. These services include, but are not limited to: Calibration/ validation of instrument and sensor system Issuance of appropriate documentation Identification and verification of all software revisions Minor repairs or adjustment of instruments Installation and validation support services TOC test services On-Site System Suitability Testing Tradeshows Location Dates 2007 Power Generation UPW - PA Philadelphia, PA USA April 17-18 Champaign Utility Chem. Champaign, IL USA May 15-17 Tradeshows Location Dates 2007 Pharma UPW Interphex PR San Juan, Puerto Rico Febr 1-2 Interphex East New York, NY USA April 23-25 UPW - PA Philadelphia, PA USA April 17-18 ISPE - Boston Foxboro, MA USA Sept 10-13 Mettler-Toledo Thornton, Inc. 36 Middlesex Turnpike Bedford, MA 01730, USA www.mt.com/pro Visit for more information