Clean Air Filter. Series SFD. Hollow Fiber Element

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Clean Air Filter Series Hollow Fiber Element Nominal filtration rating: 0.0 μm (filtration efficiency 99.99%) Initial pressure drop: 0.0 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure:.0 MPa (at 0 C) 00 00 Up to 00 l/min(anr) Up to 500 l/min(anr) 0/0 Made to Order Up to 00 l/min(anr) HAA HAW AT IDF IDU IDFA IDFB ID IDG AMG AFF AM AMD AMH AME AMF SF LLB AD GD Restriction of Hazardous Substances RoHS compliant 4

Clear resin case Easy to confirm a dirty element. Polycarbonated material is resistant to alcohol-based cleaning solutions. Element replaceable (Cartridge type) Replaceable hollow fiber elements Metal Case Type Piping variation Clean One-touch fittings Female thread Stainless steel or aluminum cases are available. Metal case suitable for an atmosphere exposed to organic solvents and chemicals (s: Air and (Nitrogen)) 00 00 0 0 Type Disposable type (non-replaceable element) Flow rate l/min (ANR) (at inlet pressure 0.7 MPa) Up to 60 Up to 80 Up to 00 Up to 00 One-touch fitting ø4 ø6 ø8 ø8 Rc /4, G /4 Female thread NPT /4 Case material Nominal filtration rating Initial pressure drop Maximum operating pressure (at 0 C) Up to 400 ø0 Operating temperature 5 to 45 C Note) The clean air filter is designed for the filtration of solid objects. It is not suitable for the separation of water and oil. 44 Cartridge type (replaceable element) Up to 500 ø Rc /4, G /4 NPT /4 Air (Nitrogen) 0.0 μm (filtration efficiency: 99.99%) Note) 0.0 MPa (at inlet pressure 0.7 MPa, maximum flow).0 MPa (in case of nitrogen: 0.99 MPa) Up to 00 Rc /4, G /4, NPT /4 Aluminum Made to Order Pages 5 and 5 Stainless steel

Integrated production in a clean environment Under a clean environment, all components have undergone ultrasonic cleaning. Assembly, inspection and antistatic double packaging processes are conducted in an integrated production system. Quality Control At the time of shipment, the series clean air filter is 00% inspected. Shipping inspection Purification test Airtight test Application Examples Assembly environment Clean room : Class M5.5 (ISO class 7) Clean bench: Class M.5 (ISO class 5) Fed. Std. 09E ( ): based on ISO4644-. HAA HAW AT IDF IDU IDFA Clean blow Blow of ionizer IDFB ID IDG When blowing, take care not to entrain ambient air which could contaminate the workpieces. Circuit Examples Air source Air tank After-cooler Main line filter Refrigerated air dryer Mist separator Heatless air dryer or Membrane air dryer Micro mist separator Super mist separator Odor removal filter Substitution of chamber pumping, etc. Clean blow Pumping the cleaning solvents Air micro meter Static paint AMG AFF AM AMD AMH AME AMF SF LLB The equipment mounted to the outlet side of should be cleaned by flushing and have the same level of cleanliness as. Paint + AD GD Hollow fiber membrane The hollow fiber membrane has a porous construction with numerous fine holes on a straw type fiber membrane wall. The hollow fiber membrane filter traps and filtrates the impurities from the compressed air through the overlapping layered fine holes. Clean Air Filter (Image) Impurities (Image) 45

Series Selection Select the model by using the following procedures involving the inlet pressure and the maximum flow rate. [Example] Inlet pressure: 0.6 MPa Maximum flow rate: 00 l/min (ANR). Obtain the intersection A for the inlet pressure and the maximum flow rate by using the maximum flow rate chart.. If the obtained intersection A is above the maximum flow rate line, the 00-C, - 0, -C0, or -C08 are selected. Maximum Flow Rate 000 00-C, - 0 Flow rate (l/min(anr)) 00 00-C08 00-C0 00-C08, - 0 A 00-04 00-06 0 0 0.5 Pressure (MPa) 46

Clean Air Filter Series RoHS Max. operating pressure (MPa)..0 0.8 0.6 0.4 0. Clean air filter Symbol Relationship between Operating Temperature and Max. Operating Pressure 0 0 0 0 0 40 50 Operating temperature ( C) How to Order 00 C08 Size Max. flow rate 00 l/min (ANR) 500 l/min (ANR) Case material Symbol Material 0 Aluminum Stainless steel Symbol and are made to order. For details, refer to page 5. Specifications Symbol C04 C06 C08 C0 C 0 N0 F0 Air flow capacity Nominal filtration rating Note ) Operating pressure range Note ) Operating temperature Initial pressure drop Element proof differential pressure Note ) Proof pressure Element service life Option Symbol Nil B Option None (00 only) The brackets are provided with the 00 series as a standard product. (Nil) ø4 ø6 ø8 ø0 ø Connection size Clean One-touch fittings (Series KP) Rc /4 NPT /4 G /4 Note 00 only 00/00 00 only Female thread 00/00 Different diameters for IN and OUT ports are made to order. For details, refer to page 5. 0 One-touch fittings ø4, ø6, ø8 Rc, NPT, G /4 Air (Nitrogen) Up to 00 l/min (ANR) 0 One-touch fittings ø8, ø0, ø Rc, NPT, G /4 Air (Nitrogen) Up to 500 l/min (ANR) 0.0 µm (99.99%) 00 kpa to.0 MPa (in case of nitrogen: 0.99 MPa) 5 to 45 C 0.0 MPa (at inlet pressure 0.7 MPa, maximum flow) 0.5 MPa.5 MPa year, or when the pressure drop reaches 0. MPa. Note ) Measured under SMC s specified conditions. Note ) The maximum operating pressure varies depending on temperature. Refer to the graph that shows the relationship between operating temperature and maximum operating pressure on the left. Note ) This means that the element does not break at 0.5 MPa. See Specific Product Precautions. Rated flow (l/min (ANR)) Note ) Mass ø4 (One-touch fittings) 60 5 g 00 ø6 (One-touch fittings) 80 5 g ø8 (One-touch fittings) 00 5 g Rc, NPT, G /4 00 5 g 0 Note ) Rc, NPT, G /4 00 60 g 0 Note ) Rc, NPT, G /4 00 50 g ø8 (One-touch fittings) 00 90 g 00 ø0 (One-touch fittings) 400 90 g ø (One-touch fittings) 500 90 g Rc, NPT, G /4 500 60 g Note ) The maximum flow rate when the inlet pressure is 0.7 MPa. Note ) 0 and 0 are produced upon receipt of order. 47 HAA HAW AT IDF IDU IDFA IDFB ID IDG AMG AFF AM AMD AMH AME AMF SF LLB AD GD

Series Flow Characteristics 00-C04 0.04 00-C08 0.04 0. MPa 0. MPa 0.5 MPa 0.7 MPa 0. MPa 0. MPa 0.5 MPa 0.7 MPa Pressure drop (MPa) 0.0 0.0 0.0 Max. flow rate line 0.9 MPa Pressure drop (MPa) 0.0 0.0 0.0 Max. flow rate line 0.9 MPa 0 0 0 40 60 Flow rate (l/min (ANR)) 0.00 0 00 00 00 400 Flow rate (l/min (ANR)) 00-C06 0.04 0. MPa 0. MPa 0.5 MPa 0.7 MPa 00-C0 0.04 0. MPa 0. MPa 0.5 MPa 0.7 MPa Pressure drop (MPa) 0.0 0.0 0.0 Max. flow rate line 0.9 MPa Pressure drop (MPa) 0.0 0.0 0.0 Max. flow rate line 0.9 MPa 0 0 0 40 60 80 00 Flow rate (l/min (ANR)) 0 0 00 00 00 400 500 Flow rate (l/min (ANR)) 00-C08, -0, -N0, -F0 0.04 0. MPa 0. MPa 0.5 MPa 0.7 MPa 00-C, -0, -N0, -F0 0.04 0. MPa 0. MPa 0.5 MPa 0.7 MPa Pressure drop (MPa) 0.0 0.0 0.0 Max. flow rate line 0.9 MPa Pressure drop (MPa) 0.0 Max. flow rate line 0.0 0.0 0.9 MPa 0 0 0 40 60 80 00 0 Flow rate (l/min (ANR)) 0 0 00 00 00 400 500 600 Flow rate (l/min (ANR)) 48

Clean Air Filter Series Construction 00-C t r q w e 00-0 r q w e Component Parts No. Description Material Note 4 5 Element Cover O-ring Cassette Case: Clear resin, Replacement Parts Material set -BR00 No. Description Note Component Parts 4 Element Cover O-ring Case: Clear resin Replacement Parts With countersunk head screws (M) No. Description Material Note Material set -BR00 No. Description Note With countersunk head screws (M) HAA HAW AT IDF IDU IDFA IDFB ID IDG AMG AFF AM 00-C o! r t y q i w u!0 e Component Parts No. Description Material Note 4 5 6 7 8 9 0 Element Cover Fitting body Cassette O-ring A O-ring B Rod cover Tie-rod Cap nut Plain washer Case: Clear resin Aluminum alloy, General type steel General type steel Nickel plated Nickel plated Replacement Parts No. Description Material Note Element set -EL00 With O-rings AMD AMH AME AMF SF LLB AD GD 00-0!0 i t q u w e r y o Component Parts No. Description Material Note 4 5 6 7 8 9 0 Element Cover Fitting body O-ring A O-ring B Rod cover Tie-rod Cap nut Plain washer Case: Clear resin Aluminum alloy General type steel General type steel Nickel plated Nickel plated Replacement Parts No. Description Material Note Element set -EL00 With O-rings 49

Series Dimensions 00-C SMC ø 6 00-C Dimensions A C04 4 00- C06 6 C08 8 B 8 8 8 mounting dimensions 4 00-0 ø Hole shape for bracket mounting SMC 6 5 7 7 7 5 00-C 00-C Dimensions A B 00- C08 C0 C 8 0 5 6 6 mounting dimensions 00-0 SMC 4 6 5 5 7 B 7 7 Applicable tubing O.D. øa ø.5 90.5 Use a countersunk head screw (M) for bracket mounting. SMC 4 4 96.5 4.5 B 6 4 Applicable tubing O.D. øa 4 x.5 4 x 7 8 0.5 96.5 4.5 9 6 50

Series Made to Order Specifications Contact us for detailed specifications, delivery and prices. Metal Case Clean air filter Symbol 0-0 q 0 0 Size Max. flow rate 00 l/min (ANR) The is not applicable. Construction Case material Symbol Material Aluminum Stainless steel e r Symbol 0 N0 F0 Component Parts No. Description Material Note 4 Case Cover Element O-ring Aluminum alloy Aluminum alloy Case: Clear resin w Connection size Rc /4 NPT /4 G /4 The metal case is not available with a clean one-touch fitting. The bracket is provided as a standard product. Replacement Parts No. Description Part no. Note Element set -EL0 -BR0 With O-ring Material: Stainless steel 04 0-0 Component Parts Metal case suitable for an atmosphere exposed to organic solvents and chemicals Specifications The specifications are the same as the standard product. Refer to Specifications on page 47. Flow Characteristics The flow characteristics are the same as the 00-0. Refer to Flow Characteristics on page 48. q e r t No. Description Material Note 4 5 Case Cover Element Hex. socket head set screw O-ring Case: Clear resin Replacement Parts No. Description Part no. Note Element set -EL0 -BR0 With O-ring Material: Stainless steel 04 w HAA HAW AT IDF IDU IDFA IDFB ID IDG AMG AFF AM AMD AMH AME AMF SF LLB AD GD Dimensions 0-0 0-0 5 66 9 5 9 66 ø4 ø4 50 40 50 40 x ø4.5 x ø4.5 5

Series Made to Order Specifications Contact us for detailed specifications, delivery and prices. Different Diameters for IN and OUT Ports Symbol Clean air filter Size Max. flow rate 00 l/min (ANR) 500 l/min (ANR) 00 C04 C06 Case material Symbol Material 0 Option Symbol Nil B Option None (00 only) The brackets are provided with the 00 series as a standard product. (Nil) IN side connection symbol IN side connection symbol C04 C06 C08 C0 C 0 N0 F0 ø4 ø6 ø8 ø0 ø Connection size Clean One-touch fittings (Series KP) Rc /4 NPT /4 G /4 00 Different Diameter Combinations OUT port size C04 C06 C08 0 N0 F0 C04 C06 C08 0 N0 F0 The symbol stands for unavailable combination. IN port size Dimensions 00 different diameters OUT side connection symbol OUT side connection symbol C04 C06 C08 C0 C 0 N0 F0 IN/OUT combination is the below table. IN port size ø4 ø6 ø8 ø0 ø Connection size Clean One-touch fittings (Series KP) Rc /4 NPT /4 G /4 00 Different Diameter Combinations OUT port size C08 C0 C 0 N0 F0 C08 C0 C 0 N0 F0 The symbol stands for unavailable combination. Specifications The specifications are the same as the standard models. Refer to Specifications on page 47. Flow Characteristics When the IN and OUT ports have different diameters, the flow characteristics will be those of the port with the smaller diameter. Refer to Flow Characteristics for the smaller diameter from the chart of standard product on page 48. Construction 00 different diameters The construction and materials are the same as the standard product. Refer to Construction on page 49. One-touch fitting dimensions(a, B) One-touch fitting dimensions(a, B) ø4 q w ø8 q w 4.5 SMC 5.5 ø6 4.5 Basic dimension 7 Fitting dimension A Fitting dimension B ø0 5.5 Fitting dimension A Basic dimension 4.5 Fitting dimension B ø8 ø 5 5.5 5 q C04 (C06) C04 ( 0) C06 (C08) C06 ( 0) C08 ( 0) w C06 (C04) 0 (C04) C08 (C06) 0 (C06) 0 (C08) Total length 8 (A + 7 + B) 76.5 (7 + A) 8.5 (A + 7 + B) 76.5 (7 + A) 77 (7 + A) 00-00- q C08 (C0) C08 ( 0) C0 (C) C0 ( 0) C ( 0) w C0 (C08) 0 (C08) C (C0) 0 (C0) 0 (C) Total length 5.5 (A + 4.5 + B) 0 (4.5 + A) 5.5 (A + 4.5 + B) 0 (4.5 + A) 0 (4.5 + A)

Related Products <Pre-filters for Series > Mist Separator Series AM Refer to pages 6 to 68 for details. Series AM Rated flow (l/min (ANR)) (Nominal size B) AM50C AM50C 00 750 /8, /4 /4, /8 Specifications Compressed air Max. operating pressure Min. operating pressure Note) Proof pressure Ambient temperature Nominal filtration rating.0 MPa 0.05 MPa.5 MPa 5 to 60 C 0. μm (Filtering efficiency 99.9%) Note) With auto drain: 0. MPa (N.O. type), 0.5 MPa (N.C. type) HAA HAW AT IDF IDU IDFA IDFB Micro Mist Separator Series AMD Series AMD Rated flow (l/min (ANR)) (Nominal size B) Super Mist Separator Series AME AMD50C AMD50C 00 500 /8, /4 /4, /8 Refer to pages 69 to 77 for details. Specifications Max. operating pressure Min. operating pressure Note) Proof pressure Ambient temperature Nominal filtration rating Compressed air.0 MPa 0.05 MPa.5 MPa 5 to 60 C 0.0 μm (Filtering efficiency 99.9%) Note) With auto drain: 0. MPa (N.O. type), 0.5 MPa (N.C. type) Refer to pages 87 to 94 for details. ID IDG AMG AFF AM AMD AMH AME AMF Series AME Rated flow (l/min (ANR)) AME50C 00 AME50C 500 Specifications Max. operating pressure Compressed air.0 MPa SF (Nominal size B) /8, /4 /4, /8 Min. operating pressure Proof pressure 0.05 MPa.5 MPa LLB Ambient temperature Nominal filtration rating 5 to 60 C 0.0 μm (Filtering efficiency 99.9%) AD GD Odor Removal Filter Series AMF Refer to pages 95 to 0 for details. Series AMF AMF50C AMF50C Specifications Compressed air Rated flow (l/min (ANR)) 00 500 Max. operating pressure.0 MPa (Nominal size B) /8, /4 /4, /8 Min. operating pressure Proof pressure 0.05 MPa.5 MPa Ambient temperature 5 to 60 C Nominal filtration rating 0.0 μm (Filtering efficiency 99.9%) 5

Related Products Ionizer Series IZS Refer to Best Pneumatics No. 6 for details. Controlled ion balance by sensor Rapid elimination of static electricity by a feedback sensor Ion balance control by an autobalance sensor Ionizer model IZS- (NPN spec.) IZS- P (PNP spec.) Ion generation method Method of applying voltage Output for emitting electricity Ion balance Note) Corona discharge type Sensing DC, Pulse DC, DC ±7000 V ±0 V (in the case of stainless steel electrode needle ±00 V) Air (clean and dry) Air purge Operating pressure Connecting tubing O.D. 0.7 MPa or less ø4 Electrode needle material Tungsten, Silicon, Stainless steel Note) In case where air purge is performed between a charged object and an ionizer at a distance of 00 mm. Ionizer Electrode Cartridge Number, Weight Bar length (mm) Electrode cartridgenumber Mass (g) 00 470 80 4 50 60 7 70 780 9 850 00 00 60 5 0 500 8 40 900 70 00 8 040 Feedback sensor Autobalance sensor Clean Regulator Series SRH/SRP Refer to pages 587 to 607 for details. Stainless steel regulator controlled for contamination Series SRH Series SRP Series SRH Series SRH000 SRH4000 Series SRP Series SRP000 Rc /8 /4 /8 / 9/6-8UNF 7/8-4UNF Rc M5 /8 Clean Gas Filter Series SF Refer to pages to 4 for details. Nominal filtration rating 0.0 μm Series SFA Series SFB Series SFC 54 Cartridge Type Series 00 SFA00 00 SFB00 Series SFB00 SFC00 Type Disc Straight Disposable Type Type Straight Multiple disc Main material Thread Element Housing Seal type M5 /4 PTFE + Stainless Rc Fluorine Polyester steel 6 NPT rubber PTFE (Electropolishing) UOJ TSJ + (FPM) PFA Main material Thread Element Housing Seal type /4 /8 PTFE + Stainless Rc PFA steel 6 TSJ PTFE (Electropolishing) O-ring + URJ PVDF PTFE

Series Specific Product Precautions Be sure to read before handling. Refer to front matters 4 and 4 for Safety Instructions and pages 6 to 8 for Air Preparation Equipment Precautions. Warning Selection. Thoroughly and carefully confirm the purpose of use, required specifications and operating conditions (fluid, pressure, flow rate, nominal filtration rating and environment) then select a model within the specifications.. The product is not certified under the High Pressure Gas Safety law, so for nitrogen, its maximum operating pressure will be 0.99 MPa (gauge pressure).. Contact us beforehand if the product will be used in an application such as a caisson shield, breathing, food and/or medical treatment that affects the human body directly or indirectly. 4. If the compressed air includes ozone, do not use it since it may damage the product or cause malfunction. When it includes ozone, use a clean gas filter (SFA/B/C). Warning Mounting. Instruction manual Mount the product after reading and understanding the instruction manual. Keep it in a location where it can easily be found.. Flushing Flush the piping line when the filter is used for the first time or has been replaced. In the event of connecting such as piping, flush (air blow) when using this product for the first time or replacing its elements in order to reduce the affect of the dust generated from the connection, etc. Flushing the line is also required to eliminate contamination resulting from the piping line installation. Therefore, be sure to flush the line before actually running the system. Fix all mounting parts for use.. Use fittings with resin threads for the connection of fittings to the IN and OUT ports. Using fittings with metal threads could damage the IN and OUT ports. 4. Connect tubing to the IN and OUT one-touch fittings in accordance with the precautions Caution. Connect the piping in accordance with the flow direction marked on the case. If connected in reverse, the element could break.. The mounting orientation does not affect the performance, but if excessive force is applied to the 00 series, the body may become disconnected from the bracket. Therefore, take particular care about the mounting orientation. Warning Caution on Installation. The material of the element is polycarbonate. The material is resistant to wiping with alcohol, but is not suitable for atmospheres or places with organic solvents, chemicals, cutting oils, synthetic oils, ester base compressor oils, alkalis or thread locking agents. Caution. If the pressure difference (pressure drop) between the inlet and the outlet exceeds 0. MPa, it can cause damage to the product.. Do not install the product in a place where it can be affected by a pulsation (including surge pressure) of over 0. MPa.. Use caution regarding the particles that may be emitted from the outlet side of a pneumatic equipment. Installation of a pneumatic equipment on the outlet side can deteriorate the cleanliness because a particle will be generated from the equipment. The mounting position of the pneumatic equipment needs to be considered. 4. Set the air flow capacity with an initial pressure drop of 0.0 MPa or less. If the initial pressure drop is set to be high, its service life will be shorten due to clogging. 5. Determine the product by the maximum consumption flow rate. When using compressed air for an air blow application, calculate the maximum volume of air that will be consumed before selecting the series product size. 6. Generally, the following pollutant particles are contained in compressed air. [Pollutant particle substances contained in the compressed air] Moisture (drainage) Dusts and particles which are in the surrounding air Deteriorated oil which is discharged from the compressor Solid foreign matter such as rust and/or oil in the piping ) The series is not compatible with compressed air which contains fluids such as water and/or oil. ) Install a dryer (IDF, IDG, ID series), mist separator (AM series), micro mist separator (AMD series), super mist separator (AME series), or odor removal filter (AMF series), etc., for the source of the air for the series. 7. Using with a flow-rate much higher than its specification could lead to exceeding the differential pressure the product can resist. Use the product within its specifications. Also, take care about the replacement period of the product, taking into consideration that the differential pressure of the filter will increase over time. 55 HAA HAW AT IDF IDU IDFA IDFB ID IDG AMG AFF AM AMD AMH AME AMF SF LLB AD GD

Series Specific Product Precautions Be sure to read before handling. Refer to front matters 4 and 4 for Safety Instructions and pages 6 to 8 for Air Preparation Equipment Precautions. Caution Piping. Unpacking the sealed package Since the filter is sealed in an antistatic double bag, the inner package should be unpacked in a clean atmosphere (such as a clean room).. Apply a wrench to chamfered flats or hexagon portion on the IN side or the OUT side to prevent the housing from rotating.. Always tighten threads with the proper tightening torque. When attaching fittings to the product, tighten with the proper tightening torque shown below. Material Metal 4. Check the arrow mark on the case which shows the flow direction to connect the IN and OUT ports correctly. If connected in reverse, the element could break. Warning Tightening torque (N m) to to 4 Maintenance. Follow the maintenance procedures in the instruction manual. If handled incorrectly equipment or device can be damaged or cause a malfunction.. When removing the product, exhaust the air and ensure the air is released to atmosphere before removing it.. When the element comes to the end of its life, immediately replace it with a new filter or replacement element (cartridge type). Service life of element The service life of the element ends when either of the following two conditions occurs. ) After year of usage has elapsed. ) When the pressure drop reaches 0. MPa even though the operating period has been less than year. Warning Operating Environment. Do not operate under the conditions listed below due to a risk of malfunction. In locations having corrosive gases, organic solvents, and chemical solutions, or in locations in which these elements are likely to adhere to the equipment. In locations in which salt water, water, or water vapor could come in contact with the equipment. In locations that are exposed to direct sunlight. (Shield the equipment from sunlight to prevent its resin material from ultraviolet ray degradation or overheating.) In locations that have a heat source and poor ventilation. (Shield the equipment from heat sources to protect it from softening degradation due to radiated heat.) In locations that are exposed to shocks and vibrations. In locations with high humidity or a large amounts of dust.. When the product is used for blowing, use caution to prevent the work from being damaged by entrained air from the surrounding area. When the compressed air is used for air blow, the exhausted air from the blow nozzle may have taken in airborne foreign matter (such as solid particle, fluid particle) from the surround air. The foreign matter will be sprayed on the work, and the airborne foreign matter may adhere to it. Therefore, use caution for the surrounding environment. Caution Other Tube Brands.When tubing of brands other than SMC s are used, verify that the tubing O.D. satisfies the following accuracy; ) Polyolefin tube: Within ±0. mm ) Polyurethane tubing: Within +0.5 mm, within 0. mm ) Nylon tubing: Within ±0. mm 4) Soft nylon tubing: Within ±0. mm Do not use tubing which does not meet these outside diameter tolerances. It may not be possible to connect them, or they may cause other trouble, such as air leakage or the tube pulling out after connection. The recommended tube for the clean fitting is polyolefin tube. Other tubes can satisfy the performance in terms of leakage, tensile strength, etc., but impair the cleanliness. Note this point for use. 56