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For highest levels of purity Gas purification systems www.airliquide.de

Individual gas purification... versatile, quick and clean Proven technology For several decades, Air Liquide has been offering you a range of gas purification systems which process gases to the highest levels of purity. For a number of often requested purification tasks, such as the removal of traces of oxygen or moisture from gases, Air Liquide has developed standardized purification systems. All of our gas purification system modules can be used universally, quickly and safely both in laboratories and technical sectors. They have been designed to be particularly user-friendly, a feature which gives them a clear advantage. By various cartridge sizes, some 100 m 3 of gas per hour can be purified just as easily as small gas volumes, in the millilitre range. The processes involved are based on physisorption, chemisorption or catalytic conversion on suitable carrier materials. A gas purification system can be used as Central gas purification (models: R20 or R200) Gas purification in process lines (models: R20, R200 or large aluminum cartridge) Purification at the point-of-use (models: large aluminum cartridge, small glass cartridge, small aluminium cartridge). 2

ALPHAGAZ Purifiers Point-of-use purifiers for laboratory applications Ambient temperature adsorbers O 2 -FREE Name Application Contaminants removed Rare gases, nitrogen, hydrogen, carbon Oxygen, moisture (side effect) monoxide, carbon dioxide, saturated HC Not suitable for oxygen, compressed air, nitrous oxide and non-saturated HC H 2 O-FREE HC-FREE SULPHUR-FREE Rare gases, nitrogen, hydrogen, carbon monoxide, carbon dioxide, saturated HC, non-saturated HC, halogenated HC, nitrous oxide, compressed air, oxygen Rare gases, nitrogen, hydrogen, carbon monoxide, carbon dioxide, methane, compressed air Not suitable for oxygen Rare gases, nitrogen, hydrogen, carbon monoxide, carbon dioxide, saturated HC, compressed air Not suitable for oxygen Moisture (carbon dioxide) Hydrocarbons, oil vapour Mercaptane, carbonyl sulphide, carbon disulphide, hydrogen sulphide, sulphur dioxide, nitrogen monoxide 3

ALPHAGAZ Purifiers Point-of-use purifiers O 2 -Free Small cartridges, large cartridges Specifications and supply forms Applications Rare gases, nitrogen, hydrogen, carbon monoxide, carbon dioxide, saturated HC Not suitable for oxygen, compressed air, nitrous oxide and non-saturated HC Contaminants Oxygen, moisture (side effect) Process Chemisorption: Oxygen is chemically bound to the adsorption material and therefore permanently removed from the gas flow. This process is independent of the ambient temperature and pressure. As a side effect, moisture is adsorbtively removed. Name ALPHAGAZ Purifier O 2 -Free ALPHAGAZ Purifier O 2 -Free-W ALPHAGAZ Purifier O 2 -Free Cartridge Small cartridge Small cartridge Large cartridge Material Aluminium Glass 3) Aluminium Shield gas Helium Helium Argon Supply forms Double pack ex-stock Double pack ex-stock Single pack ex-stock Part no. 123325 123342 123311 Specifications Guaranteed final purity (input 10 ppm each) Oxygen < 5 ppb Moisture < 30 ppb Capacity Oxygen 0.1 l Moisture 0.5 l Oxygen < 5 ppb Moisture < 30 ppb Oxygen 0.1 l Moisture 0.5 l Optical load indication None Optical load indication Colour change from blue to brown Maximum throughput (1 bar; 15 C) 1 m 3 /h 1 m 3 /h 10 m 3 /h Maximum pressure 10/200 bar 2) 10 bar 10 bar Oxygen < 5 ppb Moisture < 30 ppb Oxygen 9 l Moisture 45 l None Length 125 mm 130 mm 1,170 mm Diameter 29 mm 30 mm 71 mm Mounting systems for cartridges (see pages 8 and 9) Low pressure (LP) holder systems for small cartridges LP single holder for installation in pipelines LP bench/wall mount LP combination system High pressure (HP) holder systems for small cartridges High pressure housing PN 200 Not valid for LP single holder for installations in pipelines (< 100 ppb). 2) High pressure housing PN 200 is required for system pressure > 10 bar (max. 200 bar). 3) Please note: use only with splinter protection. Low pressure (LP) holder systems for large cartridges Single holder Wall-mounting bracket with flushing facility (see page 10) 4

ALPHAGAZ Purifiers Point-of-use purifiers H 2 O-Free Small cartridges, large cartridges Specifications and supply forms Applications Rare gases, nitrogen, hydrogen, carbon monoxide, carbon dioxide, saturated HC, non-saturated HC, halogenated HC, nitrous oxide, compressed air, oxygen Contaminants Moisture (carbon dioxide is absorbed, if the above mentioned gases are dry) Process Physisorption: Moisture and carbon dioxide are physically bound to a porous material and therefore removed from the gas flow. This adsorption process is dependent on the ambient temperature and pressure. Name ALPHAGAZ Purifier H 2 O-Free ALPHAGAZ Purifier H 2 O-Free Cartridge Small cartridge Large cartridge Material Aluminium Aluminium Shield gas Helium Argon Supply forms Double pack ex-stock Single pack ex-stock Part no. 123326 123348 Specifications Guaranteed final purity (input Moisture < 20 ppb Moisture < 20 ppb 10 ppm each) Capacity Moisture 1 l Moisture 100 l Optical load indication None None Maximum throughput (1 bar; 15 C) 1 m 3 /h 10 m 3 /h Maximum pressure 10/200 bar 2) 10 bar Length 125 mm 1,170 mm Diameter 29 mm 71 mm Mounting systems for cartridges (see pages 8 and 9) Low pressure (LP) holder systems for small cartridges LP single holder for installation in pipelines LP bench/wall mount LP combination system High pressure (HP) holder systems for small cartridges High pressure housing PN 200 Low pressure (LP) holder systems for large cartridges Single holder Wall-mounting bracket with flushing facility (see page 10) Not valid for LP single holder for installations in pipelines (< 100 ppb). 2) High pressure housing PN 200 is required for system pressure > 10 bar (max. 200 bar). 5

ALPHAGAZ Purifiers Point-of-use purifiers HC-Free Small cartridges, large cartridges Specifications and supply forms Applications Rare gases, nitrogen, hydrogen, carbon monoxide, carbon dioxide, methane, compressed air Not suitable for oxygen Contaminants Hydrocarbons, oil vapour Process Physisorption: Hydrocarbons and oil vapour are physically bound to a porous material and therefore removed from the gas flow. By default, untreated activated carbon is used as adsorber mass. The adsorption process depends on the ambient temperature and pressure. Name ALPHAGAZ Purifier HC-Free ALPHAGAZ Purifier HC-Free Cartridge Small cartridge Large cartridge Material Aluminium Aluminium Shield gas Helium Argon Supply forms Double pack ex-stock Single pack ex-stock Part no. 123327 123349 Specifications Guaranteed final purity (input 10 ppm each) Total hydrocarbons < 10 ppb Total hydrocarbons < 10 ppb Capacity Ethane 1 mg Ethane 55 mg Propane 180 mg Propane 9,000 mg Higher HC 180 mg Oil vapour 8 g Optical load indication None None Maximum throughput (1 bar; 15 C) 1 m 3 /h 10 m 3 /h Maximum pressure 10/200 bar 2) 10 bar Length 125 mm 1,170 mm Diameter 29 mm 71 mm Mounting systems for cartridges (see pages 8 and 9) Low pressure (LP) holder systems for small cartridges LP single holder for installation in pipelines LP bench/wall mount LP combination system High pressure (HP) holder systems for small cartridges High pressure housing PN 200 Not valid for LP single holder for installations in pipelines (< 100 ppb). 2) High pressure housing PN 200 is required for system pressure > 10 bar (max. 200 bar). Higher HC 9,000 mg Oil vapour 450 g Low pressure (LP) holder systems for large cartridges Single holder Wall-mounting bracket with flushing facility (see page 10) 6

ALPHAGAZ Purifiers Point-of-use purifiers Sulphur-Free Small cartridges, large cartridges Specifications and supply forms Applications Rare gases, nitrogen, hydrogen, carbon monoxide, carbon dioxide, saturated HC Not suitable for oxygen Contaminants Mercaptane, carbonyl sulphide, carbon disulphide, hydrogen sulphide, sulphur dioxide, nitrogen monoxide Process Chemisorption: Sulphur compounds (e.g. mercaptane, carbonyl sulphide, carbon disulphide, hydrogen sulphide, sulphur dioxide) and nitrogen monoxide are chemically bound to a porous adsorber material and therefore permanently removed from the gas flow. Name ALPHAGAZ Purifier Sulphur-Free ALPHAGAZ Purifier Sulphur-Free Cartridge Small cartridge Large cartridge Material Aluminium Aluminium Shield gas Helium Argon Supply forms Double pack ex-stock Single pack ex-stock Part no. 123328 123350 Specifications Guaranteed final purity (input 10 ppm each) Hydrogen sulphide < 1 ppm Hydrogen sulphide < 1 ppm Capacity Sulfur dioxide 0.5 g Sulfur dioxide 28.0 g Nitric oxide 0.05 g Nitric oxide 2.8 g Hydrogen sulphide 0.5 g Hydrogen sulphide 28.0 g Optical load indication None None Maximum throughput (1 bar; 15 C) 1 m 3 /h 10 m 3 /h Maximum pressure 10/200 bar 10 bar Length 125 mm 1,170 mm Diameter 29 mm 71 mm Mounting systems for cartridges (see pages 8 and 9) Low pressure (LP) holder systems for small cartridges LP single holder for installation in pipelines LP bench/wall mount LP combination system High pressure (HP) holder systems for small cartridges High pressure housing PN 200 High pressure housing PN 200 is required for system pressure > 10 bar (max. 200 bar). Low pressure (LP) holder systems for large cartridges Single holder Wall-mounting bracket with flushing facility (see page 10) 7

Point-of-use Purifiers... for laboratory applications Mounting systems for small cartridges Low pressure (LP) mounting systems for small cartridges 3) Name Description/Scope of delivery Part no. Fittings Part no. Upper and lower section and 127756 SS 3 mm 2) union nut made from black plastic (HOSTAFORM ). Fittings are offered separately. LP single holder for installation in pipelines SS 6 mm 2) SS 8 mm 2) SS ¼" 2) SS 1 /8 " 2) SS quick-release fittings 127604 127603 127590 126967 127628 127029 LP stand/wall mount Upper section, base and union nut made from black plastic (HOSTAFORM ). Screws and rawl plugs for wall-mounting are part of the standard delivery. Inlet and outlet fittings are offered separately. 127756 SS 3 mm 2) SS 6 mm 2) SS 8 mm 2) SS ¼" 2) SS 1 /8 " 2) SS quick-release fittings 127604 127603 127590 126967 127628 127029 Note: Two pieces (inlet and outlet) required. 2) Stainless steel compression fitting. 3) Install holder so that cartridges are mounted vertically. 8

Point-of-use Purifiers...... for laboratory and specific applications Mounting systems for small cartridges Low pressure (LP) mounting systems for small cartridges 3) Name Description/Scope of delivery Part no. LP combination system Vertical LP combination Vertical LP combination adaptor and union nut made from black plastic (HOSTAFORM ). This connection unit allows, in conjunction with the single LP holder or the LP bench/wall mount, for serial installation of two or more small cartridges to remove various contaminants from the gas flow. 127754 Horizontal LP combination Quick release fitting, coil and 3 mm compression fitting made from stainless steel. This connection unit allows, in conjunction with the LP bench/wall mount, for serial installation of two or more small cartridges to remove various contaminants from the gas flow. 127756 Splinter guard For safety reasons required for glass cartridges. 125428 Stainless steel high pressure (HP) mounting system for small cartridges 3) Name Description/Scope of delivery Part no. Fittings Part no. HP housing PN 200 Brass housing (nickel plated) for installation in pipelines: A wallmounting 132233 SS 3 mm 2) SS 6 mm 2) 127604 127603 bracket is part of the SS 8 mm 2) 127590 standard delivery. A HP holder SS ¼" 2) 126967 PN 200 is required for system SS 1 /8 " 2) 127628 pressure > 10 bar (max. 200 bar). SS VCR fitting upon request Fittings are offered separately. Note: Two pieces (inlet and outlet) required. 2) Stainless steel compression fitting. 3) Install holder so that cartridges are mounted vertically. 9

Mounting systems...... for point-of-use purifiers Low pressure (LP) mounting systems for large cartridges 3) Name Description/Scope of delivery Fittings Part no. Single holder for a large aluminum cartridge Two wall-mounting brackets incl. screws and rawl plugs; inlet and outlet valves of the large cartridge are sealed with a 1/4" dummy plug. After removing this plug, NPT 1/4" pipe fittings with NPT 1/4" male threads can be inserted. Fittings are offered separately. Part no. 124535 SS 3 mm 2) SS 6 mm 2) SS 8 mm 2) SS ¼" 2) SS 1 /8 " 2) SS VCR fittings 127604 127603 127590 126967 127628 upon request Wall-mounting bracket with flushing facility for a large aluminium cartridge Wall-mounting bracket with facility for flushing the pipeline after cartridge replacement; incl. safety, shut-off and flushing valves. Fittings are preassembled on a panel for wall-mounting; materials: stainless steel, chromeplated brass. Inlet and outlet: NPT 1/4" female threads. Fittings are offered separately. Part no. 129427 Double mounting bracket with flushing facility for the connection of two large aluminum cartridges in conjunction with O 2 -FREE, small glass cartridge for optical load indication Double mounting bracket with optical load indication and facility for flushing the connected pipeline after cartridge replacement; incl. safety, shut-off and flushing valves. LP mounting bracket for small cartridge; fittings preassembled on a panel for wall-mounting; materials: stainless steel, chromeplated brass. Inlet and outlet: NPT 1/4" female threads. Fittings are offered separately. Part no. 124531 Two pieces (inlet and outlet) required. 2) Stainless steel compression fitting. 3) Install holder so that cartridges are mounted vertically. 10

ALPHAGAZ Purifiers...... for large-scale technical applications Regenerable gas purification units for large-scale technical applications For higher gas throughput, adsorbers type R20 (operating pressure < 25 bar) and type R200 (operating pressure < 230 bar) are available. These gas purification cylinders offer, contrary to the gas purification systems for laboratory applications, the advantage of being able to be regenerated. Gas purification systems for the installation of R20 or R200 cylinders in large-scale technical applications are complete units, requiring only to be connected to the gas pipeline system on site always comprise a safety valve, shut-off and test valves as well as a particle filter do not require any auxiliary energy for their function are completely maintenance free, except for the replacement of loaded with regenerated cylinders. Units for large-scale technical applications Specifications and supply forms ALPHAGAZ Purifier O Name/Type 2 -Free ALPHAGAZ Purifier H 2 O-Free R20 R200 R20 R200 Applications Rare gases, nitrogen, hydrogen, carbon monoxide, carbon dioxide, saturated HC Non-saturated HC, oxygen, compressed air, nitrous oxide Rare gases, nitrogen, hydrogen, carbon monoxide, carbon dioxide, halogenated HC, saturated HC, nitrous oxide, compressed air, oxygen Not suitable for Contaminants Oxygen, moisture (side effect) Moisture (carbon dioxide is adsorbed, if gases are dry) Process Chemisorption Physisorption Final purity Oxygen < 5 ppb Moisture < 20 ppb Capacity Oxygen 65 l Oxygen 41 l Moisture 430 l Moisture 270 l Max. throughput 100 m 3 /h 100 m 3 /h Max. operating pressure 25 bar 230 bar 25 bar 230 bar Length 1,590 mm 1,400 mm 1,590 mm 1,400 mm Diameter 160 mm 160 mm 160 mm 160 mm Weight approx. 40 kg approx. 95 kg approx. 40 kg approx. 95 kg Material Stainless steel Stainless steel Part no. 123331 123316 123332 123317 Name/Type ALPHAGAZ Purifier HC-Free ALPHAGAZ Purifier EM-KAT R20 R200 R20 R200 Applications Rare gases, nitrogen, hydrogen, carbon monoxide, carbon Hydrogen, hydrogenous gas mixtures dioxide, compressed air Not suitable for Oxygen All gases other than those cited above Contaminants Hydrocarbons, oil vapour Oxygen Process Physisorption Catalytic reforming (Pd catalyst) Final purity Total AC < 10 ppb Oxygen < 1 ppm Capacity Ethane: 0.14 g Ethane: 0.12 g None (catalytic process) Higher HC: 0.25 g Oil vapour: 1,000 g Higher HC: 0.20 g Oil vapour: 900 g Max. throughput 100 m 3 /h 100 m 3 /h Max. operating pressure 25 bar 230 bar 25 bar 230 bar Length 1,590 mm 1,400 mm 1,590 mm 1,400 mm Diameter 160 mm 160 mm 160 mm 160 mm Weight approx. 40 kg approx. 95 kg approx. 40 kg approx. 95 kg Material Stainless steel Stainless steel Part no. 123531 123532 128071 123549 11

Contact AIR LIQUIDE Deutschland GmbH Hans-Günther-Sohl-Straße 5 D-40235 Düsseldorf Phone: +49 (0)211 66 99-0 Fax: +49 (0)211 66 99-222 labor-analytik@airliquide.de www.airliquide.de 152805 06.12 Air Liquide is the world leader in gases for industry, health and the environment, and is present in 80 countries with 46,200 employees. Oxygen, nitrogen, hydrogen and rare gases have been at the core of Air Liquide s activities since its creation in 1902. Using these molecules, Air Liquide continuously reinvents its business, anticipating the needs of current and future markets. The Group innovates to enable progress, to achieve dynamic growth and a consistent performance. Air Liquide explores the best that air can offer to preserve life, staying true to its Corporate Social Responsibility and sustainable development approach.