Specialty Graphites for the Semiconductor Industry

Graphite Materials and Systems Specialty Graphites for the Semiconductor Industry

2 Specialty Graphite and Process Solutions made by SGL Group. Advanced material, equipment, and process solutions Engineered for customers from more than 35 industries Tailor-made from the most comprehensive product portfolio In-depth production and material knowledge Consistent high quality, performance, and service Attractive total cost of ownership Broad Base. Best Solutions.

Business Unit Graphite Materials and Systems 3 Advanced solutions enable our customers to get ahead. SGL Group offers advanced solutions even for challenging applications. We understand the specific requirements of our customers and combine in-depth production, material, and engineering knowledge with the most comprehensive specialty graphite portfolio. This makes us the partner of choice to leading companies in many different industries. Exceptional resistance to heat and corrosion, high purity and mechanical strength are just a few of the outstanding properties which our materials offer. Specialty graphite products from SGL Group achieve optimal results where other materials fail. No matter what your specific requirements might be, we will identify the best solution from the most comprehensive range of specialty graphites. Fine grain graphite: isostatic, vibrationmolded, die-molded, extruded Expanded natural graphite Carbon fiber-reinforced carbon (C/C) Soft and rigid graphite felts Silicon carbide-coated graphite materials SGL Group covers the entire value chain of specialty graphite production, including raw material processing, semi-finished product manufacture, precision machining, purification, and coating. When it comes to engineering of equipment and process solutions our service range makes the difference: We offer mechanical and process design, production, assembly, commissioning, and service all from a one-stop shop. This is how we control and ensure the consistent high quality, reliability, and performance of our products and enable our customers to become more competitive. Challenge us. We are there for you worldwide. Additionally we use other materials like PTFE, silicon carbide, and specialty metals. Specialty graphite solutions for the semiconductor industry With our portfolio and technical know-how spanning more than 35 different industries, we engineer tailor-made solutions in close partnership with our customers. b Machining a wafer carrier Innovative specialty graphite solutions play a key role in the challenging processes of the semiconductor industry. With optimized plant components and high-performance materials, we are a partner of choice to leading original equipment manufacturers (OEMs) and semiconductor producers.

4 Specialty graphites made by SGL Group. Solutions for the semiconductor and LED industries. Base material Sapphire (Al2O3) Al2O3 single crystal growing substrate wafer Silicon carbide (SiC) SiC sublimation growing substrate wafer semiconductor wafer Silicon (Si) Si monocrystal pulling (CZ process) substrate wafer semiconductor wafer Converter Siemens reactor Value chain Polysilicon Growing single crystals Wafer slicing Products of the SGL Group Heaters Heat shields Insulation Electrodes (polychucks) Heaters Crucibles Heat shields Insulation Slicing beams Materials made of carbon and graphite SIGRAFINE extruded, isostatic and vibration molded graphites SIGRABOND carbon fiber-reinforced carbon (C/C) SIGRATHERM carbon and graphite felts SIGRAFINE SiC Coating SIGRAFINE extruded, isostatic graphites SIGRABOND carbon fiber-reinforced carbon (C/C) SIGRATHERM carbon and graphite felts SIGRAFINE SiC Coating SIGRAFINE isostatic graphites

SPECIALTY GRAPHITE solutions FOR THE SEMICONDUCTOR INDUSTRY 5 For many processes in semiconductor production, components made from specialty graphites are indispensable, e.g. in crystal growing or subsequent finishing by epitaxy, ion implantation or plasma etching, and also in the production of LED chips. This is because the processes usually operate at very high temperatures and in an extremely corrosive environment: at the same time, high purity and absolute precision are required. For the challenging processes of semiconductor production, we offer reliable solutions with specialty graphites. Our portfolio includes heaters, support crucibles, heat shields, and insulating components for many single crystal growing processes, such as the Czochralski (CZ) process, the sublimation or physical vapor transport method (PVT), and the heat exchange method (HEM). We also supply susceptors for silicon epitaxy and MOCVD (metal organic chemical vapor deposition) reactors. Our components are normally manufactured to individual requirements. In addition, we assist our customers in planning, design, and operational optimization. + SIGRAFINE is the new brand name for our fine -grain graphites, previously known under the names RINGSDORFF, SIGRAFORM, SIGRAMENT and CRYSTA-SIL. MOCVD Silicon epitaxy Epitaxy Further stages in wafer processing Susceptors Components for ion implantation SIGRAFINE isostatic graphites SIGRAFINE SiC Coating SIGRAFINE isostatic graphites

6 Products for the semiconductor industry As a reliable supplier and partner to our customers, we offer optimum solutions and process reliability for every application. What differentiates us: Most comprehensive selection of highpurity specialty graphites Consistently high material and product quality Long-standing experience and material know-how Individualized production tailored exactly to customer requirements Application-specific finishing by cleaning, mechanical processing or coating

SPECIALTY GRAPHITES FOR THE semiconductor INDUSTRY 7 Specialty graphites for polysilicon production c Electrodes (polychucks) for Siemens reactors b Meander heater for CZ units c Graphite rigid felt cylinder for insulation of converters In Siemens reactors and STC-TCS converters for recycling process gases, temperatures up to 1000 C (1800 F) and a highly corrosive environment prevail. Our graphite components perform impressively well here because they are extremely resistant to heat and corrosion. For many years now, we have been supplying polysilicon manufacturers with a range of plant components. These include purified electrodes for polysilicon deposition, heaters, gas ducts for STC-TCS converters, heat shields and thermal insulation components. Our experts select the best materials for the specific requirements and operating conditions and manufacture tailored products from them. With our newly developed shaping and connecting solutions, for example, we can supply converter insulation in virtually any length and diameter. To increase the service life of highly stressed components like those in converters we offer special silicon carbide (SiC) coatings. Application-specific specialty graphites for polysilicon production Applications Products Fluidized-bed reactors (FBR) Reactors isostatic Siemens CVD process Polychucks Converters (STC-TCS) Graphite extruded vibrationmolded Soft felt Rigid felt C/C SiC coated Gas distributors Heating elements Heat shields Insulating cylinders

8 Specialty graphites for growing semiconductor and sapphire single crystals c Support crucible made from C/C c Rigid felt cylinder for insulation c Graphite components for CZ units Whichever process is used for growing single crystals (HEM for sapphire, CZ for silicon or PVT for SiC), it always operates at very high temperatures in an aggressive environment. To meet these challenges, the high-temperature zone ( hot zone ) in the furnace consists almost entirely of heat- and corrosionresistant graphite components. SGL Group produces all the graphite components for crystal growing units of every kind either individually or as a set. These include heaters, crucibles, reflectors, and heat shields made from high-strength, homogeneous fine-grain graphite or carbon fiber-reinforced carbon, as well as insulating components produced from graphite felts. We select the best materials in the highest purity (ash value < 5 ppm) to suit the particular type of crystal growing unit. To extend the service life of highly stressed components, we supply special SiC coatings. For these, we use the specially suitable isostatic graphites R6510 and R6810. Application-specific specialty graphites for crystal growing units Applications Products Monocrystal pulling Sapphire monocrystal growing isostatic Graphite extruded vibrationmolded Soft felt Rigid felt C/C SiC coated Crucibles Heaters Heat shields Reflectors Insulation Heaters Heat shields Insulation

SPECIALTY GRAPHITES FOR THE SEMICONDUCTOR INDUSTRY 9 Specialty graphites for silicon epitaxy Before becoming a finished semiconductor product, a wafer passes through numerous steps. One increasingly important process is silicon epitaxy, in which the wafers are carried on graphite susceptors. The properties and quality of the susceptors have a crucial effect on the quality of the end product. Our SiC-coated graphite susceptors offer the particular advantages of extremely high purity, homogeneous coating, and an excellent service life. In addition, they have high chemical resistance and thermal stability. The SiC coating is applied homogeneously to very close tolerances. High-precision machining ensures a uniform susceptor profile. For inductively heated systems, we also produce material with optimum electrical resistance. The finished components are supplied with a purity and dimensional compliance certificate. SGL Group supplies susceptors and graphite components for all current epitaxy reactors. Our portfolio includes barrel susceptors for Applied Materials, Moore and LPE reactors, pancake susceptors for LPE, CSD, and Gemini units, and single-wafer susceptors for Applied Materials and ASM units. All our susceptors are produced from high-strength, isosatic graphite. In addition, we manufacture components for ion implantation from specially suitable high-purity isostatic graphite. Thanks to our exhaustive quality controls, we offer our customers top-quality products that are fully traceable. We are also continually developing our materials and products further in close collaboration with manufacturers and operators of epitaxy units. c Susceptors for epitaxy reactors Application-specific specialty graphites for silicon epitaxy Application Silicon epitaxy Products isostatic Graphite extruded vibrationmolded Soft felt Rigid felt C/C SiC coated Barrel susceptors Pancake susceptors Single Wafer susceptors

10 Specialty graphites for LED chip production in MOCVD reactors During the extensive coating process in the MOCVD reactor, the substrate wafers are supported by rotating susceptors or carriers. The properties of the susceptor material have a key influence on coating quality and therefore on the chip reject rate. Our SiC-coated susceptors help ensure efficient manufacture of high-quality LED wafers with low wavelength deviation. Many important factors contribute to this, such as the very high purity and uniform thermal conductivity of both our isostatic graphite and the SiC coating. We use specially selected graphite grades for our susceptors and carriers. High-precision machining and homogeneous coating ensure that the wafer carrier pockets have a uniform profile and minimum flatness deviation. Thanks to our exhaustive quality controls, we offer our customers top-quality products that are fully traceable. c Wafer carrier for LED chip production in MOCVD reactors We are also continually developing our materials and components further in close collaboration with manufacturers and operators of MOCVD units. Together we want to increase chip yield in the production of LED wafers and further minimize wavelength deviation. In addition to susceptors and carriers, we also supply other graphite components for all current MOCVD reactors. Nearly every component can be SiC-coated, even with diameters exeeding 1 m (3'). a Pre-assembly of a high-temperature furnace at SGL Group Application-specific specialty graphites for MOCVD reactors Application MOCVD (metalorganic chemical vapor phase deposition) Graphite Products vibration- Soft felt Rigid felt C/C SiC coated isostatic extruded molded Susceptors/carriers Lids, rings, satellites

11 Full service partner to manufacturers of furnace equipment A furnace manufacturer previously used to buy hot zone components individually, assemble them at his factory, then deliver the finished product. This process extended beyond core competencies, was complex, and delayed lead times. Together we have optimized this process. Today, we manufacture the required products, assemble them, and often supply direct to end customers all over the world This saves our customer time and money. This is just one example of an applicationspecific optimized solution from the SGL Group.

12 Fine-grain graphites for the semiconductor industry Many applications in the semiconductor production benefit from our wide range of isostatic, extruded, and vibration-molded fine-grain graphites and their outstanding properties: High mechanical strength Consistently high quality High purity Large range of dimensions High corrosion resistance Excellent heat resistance

FINE-GRAIN GRAPHITES 13 SIGRAFINE fine-grain graphites Isostatic, extruded, vibration-molded. Our SIGRAFINE materials span the complete range of finegrain graphites from isostatic and extruded to vibrationmolded graphites. For the many different applications in the semiconductor indu stry, we supply the optimum material in the usual market sizes. For heater systems, certain of our isostatic and extruded graphite grades are suitable. Very long tubes can be produced in one piece with excellent results from extruded graphite. For extra-large components, we offer special vibration-molded and isostatic graphite grades. All components produced from the above-mentioned materials can be supplied, if necessary, in extremely high purity and generally also with a SiC coating. We generally use isostatic graphites with a suitable thermal expansion coefficient as a substrate for SiC coating, but can use other graphites or carbon/carbon materials as well to satisfy specific customer requirements. + More information under: www.sglgoup.com/productionprocessfine-graingraphites Material data of our isostatic SIGRAFINE fine-grain graphite Typical properties Units Isostatic graphite R6300 R6340 R6500 R6510 R6650 Average grain size µm (µin) 20 (800) 15 (600) 10 (400) 10 (400) 7 (300) Bulk density g/cm3 1.73 1.72 1.77 1.83 1.84 Resistivity µωm 16 12 14 13 14 Flexural strength MPa 40 45 50 60 65 Compressive strength MPa 85 90 110 130 150 Thermal expansion 20 200 C (68 392 F) 10-6 K-1 2.7 3.2 4.2 4.2 4.1 Ash content ppm 200 200 200 200 200 Ash content (purified, P30) 1) ppm 10 10 10 10 10 Ash content (high-purity, P5) 2) ppm 2 2 2 2 2 Material data of our extruded and vibration-molded SIGRAFINE fine-grain graphite Typical properties Units Extruded graphite Vibration-molded graphite HLM3) SDR MKUN MKUS4) Average grain size mm (in) 0.8 (0.03) 0.2 (0.008) 0.8 (0.03) 0.8 (0.03) Bulk density g/cm3 1.72 1.75 1.67 1.79 Resistivity µωm 7.8/9.5 9.0 10/12 8/9 Flexural strength MPa 19/19 33 10/10 18/17 Compressive strength MPa 40/39-25/25 41/39 Thermal expansion 20 200 C (68 392 F) 10-6 K-1 3.0/3.5 2.2 2.3/3.2 2.7/3.3 Ash content ppm 800 500 700 700 Ash content (purified, P30) 1) ppm 10 10 10 10 Ash content (high-purity, P5) 2) ppm 2 2 2 2 1) Specifiction limit for ash values: < 30 ppm 2) Specifiction limit for ash values: < 5 ppm 3) Ø 400... 780 mm (Ø 16... 31 in); 500 x 500,... 610 x 760 mm ( 20 x 20,... 24 x 30 in) 4) Ø 760... 1360 mm (Ø 30... 54 in); 630 x 1300 x 1420 mm ( 25 x 51 x 56 in)

14 SIGRATHERM graphite soft felts For optimum thermal insulation. c SIGRATHERM soft felt Our soft felts offer a unique combination of thermal, chemical and textile properties. This makes them highly suitable for insulation of Czochralski crystal growing units. Thermal conductivity of SIGRATHERM GFA as a function of temperature (vacuum/inert gas atmosphere) Thanks to their special manufacturing process, our SIGRATHERM graphite soft felts have very low thermal conductivity. They also have the unique advantage of an extremely homogeneous thickness and density distribution throughout the roll length. As a result, our soft felts guarantee a uniform and consistently high insulating effect. Our SIGRATHERM graphite soft felts are also supplied in ultra-high purity and special customer-tailored dimensions. Thermal conductivity [Wm-1K-1] 0.6 0.5 0.4 0.3 0.2 0.1 Inert gas Vakuum 0 200/390 1000/1800 2000/3600 Temperature [ C/ F] Material data of our SIGRATHERM graphite soft felt Typical properties Units GFA5 GFA10 Thickness mm (in) 6 (1/4) 11.5 (1/2) Area weight g /m2 500 1000 Width mm (in) 1220 (48) 1270 (50) Length m (ft) 25 30 (82 98) 25 30 (82 98) Ash content ppm 400 400 Ash content (purified) ppm 20 20 Maximum application temperature C ( F) 2000 (3600) in vacuum or inert gas

CARBON AND GRAPHITE FELTS 15 SIGRATHERM graphite rigid felts For mechanically stable thermal insulation. Thermal conductivity of SIGRATHERM MFA as a function of temperature (inert gas atmosphere) c SIGRATHERM rigid felt with different surface layers Thermal conductivity [Wm-1K-1] 1.0 0.8 0.6 0.4 0.2 0 0 Temperature [ C/ F] 1000/1830 2000/3600 Sheets and cylinders produced from SIGRATHERM graphite rigid felts are particularly valued for their consistently good thermal insulating properties. In addition, they are corrosionresistant, easy to process, and allow self-supporting structures for insulating even relatively large components. With our innovative connection solutions, we can, for example, supply tailor-made cylinders in virtually any size, which is particularly beneficial to polysilicon manufacturers. We also supply rigid felts in ultrapure quality for semiconductor applications. Besides SIGRATHERM insulating sheets as semi-finished products, we also supply ready-to-use components to customer-specific requirements. One or more layers of graphite foil inseparably attached to the insulating felt can be applied as a convection barrier and reflective coating. For mechanical surface protection, we supply an insulating composite comprising felt covered on both sides with C/C fabric. Material data of our SIGRATHERM graphite rigid felt Typical properties Units Boards Cylinder MFA RFA MFA RFA Bulk density g/cm3 0.2 0.2 0.2 0.2 Compressive strength MPa 1 1 1 1 Flexural strength MPa 1 1 1 1 Moisture absorption % < 1.0 < 1.0 < 1.0 < 1.0 Ash content ppm 1000 1000 1000 1000 Ash content (purified) ppm < 20 < 20 < 20 < 20 Length/Width 1524/1219 (60/48) 1524/1219 (60/48) mm (in) Diameter max /Length max unlimited 2000/2500 (79/98) Thickness 20 400 (3/4 16) 20 400 (3/4 16) mm (in) Wall thickness max 150 (6) 300 (12) Maximum application temperature C ( F) 2000 (3600) in an inert gas atmosphere or vacuum

16 CARBON FIBER-REINFORCED CARBON SIGRABOND carbon fiber-reinforced carbon (C/C) For lightweight, rigid, durable carrier structures. High mechanical loadbearing capacity, light weight, low thermal expansion, extremely good corrosion resistance and thermal stability, high purity: these are the properties of our SIGRABOND composites. c SIGRABOND Performance Coefficient of thermal expansion 12 10 8 6 4 vertical to direction of fiber alignment Besides plates and profiles, we also produce rotationally symmetrical components such as crucibles and cylinders from SIGRABOND. Our SIGRABOND Performance is a newly developed C/C plate with improved rigidity for even lighter-weight components such as wafer carrier systems for PEVCD units or cover plates for DSS units. SIGRABOND FilWound products are used mainly as C/C support crucibles in CZ units. Our C/C semi-finished products can be machined or finished with an SiC coating according to customer requirements. α = x 10-6/K 2 0-2 parallel to direction of fiber alignment 0 400/750 1200/2200 2000/3600 Temperature [ C/ F] Material data of our SIGRABOND carbon-fiber reinforced carbon Typical properties Units Plates Rotationally symmetric parts Performance Standard FilWound Bulk density g/cm3 1.5 1.5 1.4 Flexural strength MPa 200 150 Elastic modulus GPa 70 60 Interlaminar shear strength MPa 8 8 depending on the structure of the lay-up Ash content ppm 1000 1000 1000 Ash content (purified) ppm 10 10 10 Length/Width 1) Diameter max /Length max mm (in) 1220 x 1220/2450 x 1220 (48 x 48/96 x 48) special dimensions on request 1220 x 1220/2450 x 1220 (48 x 48/96 x 48) special dimensions on request 2000/2500 (79/98) Thickness Wall thickness max mm (in) 1.8 15 (0.07 0.6) 0.7 30 (0.03 1.2) 100 (4) Maximum application temperature C ( F) 2000 (3600) in vacuum or inert gas 1) Standard dimensions

SiC COATING 17 SIGRAFINE SiC Coating To extend the service life of graphite components. SIGRAFINE SiC Coating is a dense, wear-resistant silicon carbide coating with high corrosion and heat resistance and an excellent thermal conductivity. We apply SiC in thin layers onto the graphite using the chemical vapor deposition (CVD) process. The coating Improves product quality, increases process efficiency, and so reduces the overall operating costs of our customers. With this coating, we extend the service life of graphite components and achieve the high-purity surface structures required in processing semiconductor materials. SGL Group supplies SiC-coated products made from high-strength isostatic graphite and carbon fiber-reinforced carbon. These include components for fluidized-bed reactors and STC-TCS converters as well as reflectors for CZ units and wafer carriers for PECVD, Si epitaxy, and MOCVD units. Purity data of SIGRAFINE SiC Coating (glow discharge mass spectroscopy) Element ppm Element ppm Sodium < 0.05 Copper < 0.01 Magnesium < 0.01 Zinc < 0.05 Aluminum < 0.04 Gallium < 0.05 Phosphorus < 0.01 Germanium < 0.05 Sulfur < 0.04 Arsenic < 0.005 Potassium < 0.05 Indium < 0.01 Calcium < 0.05 Tin < 0.01 Titanium < 0.005 Antimony < 0.01 Vanadium < 0.001 Tungsten < 0.01 Chromium < 0.05 Tellurium < 0.01 Manganese < 0.005 Lead < 0.01 Iron < 0.01 Bismuth < 0.01 Nickel < 0.005 c Micrograph of SiC surface Material data of SIGRAFINE SiC Coating Typical properties Units Values Analysis technique Structure beta (cubic) 3C polytype XRD Orientation Fraction [%] 111 preferred XRD Bulk density g/cm3 3.2 XRD Stoichiometry 1:1 Si/C XPS Hardness GPa 40 Nanoindentation Fracture toughness MPa m1 / 2 3.0 Vickers identer Thermal expansion 100 600 C (212 1112 F) 10-6 K-1 4.3 Dilatometer E-modulus GPa 435 Nanoindentation Typical film thickness µm 100 Beta backscatter Surface roughness µm 2.5 Profilometer

18 We will find the best solution in partnership with you. The fascinating potential of carbon as a material excites us and inspires us to develop optimum solutions in partnership with our customers. With our comprehensive material portfolio and valuable specialist know-how, we can manufacture tailored products even for the most challenging applications. Consistently high quality, a global presence, innovative strength, and the extensive experience of our employees make us a reliable partner to our customers. Whatever challenges you face, together we will find the best solution.

sgl group the carbon company 19 SGL Group The Carbon Company. A leading global manufacturer of carbon-based products. Unique product portfolio Innovative technologies and solutions Production sites close to sales markets Technology & Innovation Center in Germany with international networks b Machining of a SIGRAFINE meander heater at SGL Group We have wide-ranging expertise in raw materials, advanced manufacturing processes, and longstanding application and engineering know-how. We have a comprehensive portfolio of carbon, graphite, and carbon fiber products and our integrated value chain covers everything from carbon fibers to composites. With a global sales and distribution network and modern production sites in Europe, North America, and Asia, we are close to our customers throughout the world. We use this broad base to offer our customers the best solutions possible. That s how we live up our claim: Broad Base. Best Solutions. This claim is also upheld by our corporate SGL Excellence philosophy of continuous improvement. + More information can be found by visiting: www.sglgroup.com sglgroup sglgroup

Contact EUROPE/MIDDLE EAST/AFRICA SGL CARBON GmbH Drachenburgstrasse 1 53170 Bonn/Germany gms-europe@sglgroup.com AmericaS SGL CARBON LLC 900 Theresia Street PA 15857 St. Marys/USA gms-americas@sglgroup.com asia/pacific SGL CARBON Far East Ltd. 12 Fl, Shanghai Oriental Plaza, 31 Wujiang Road Shanghai 200041/PR China gms-asia@sglgroup.com registered trademarks of SGL CARBON SE 07 2015/0 2NÄ Printed in Germany This information is based on our present state of knowledge and is intended to provide general notes on our products and their uses. It should therefore not be construed as guaranteeing specific properties of the products described or their suitability for a particular application. Any existing industrial property rights must be observed. The quality of our products is guaranteed under our General Conditions of Sale. Graphite Materials & Systems SGL CARBON GmbH Soehnleinstrasse 8 65201 Wiesbaden/Germany www.sglgroup.com/gms