Photonic Sintering of Silver for Roll-to-Roll Printed Electronics. Saad Ahmed, PhD Manager-Engineering

Similar documents
LOW TEMPERATURE PHOTONIC SINTERING FOR PRINTED ELECTRONICS. Dr. Saad Ahmed XENON Corporation November 19, 2015

Advances in Intense Pulsed Light Solutions For Display Manufacturing. XENON Corporation Dr. Saad Ahmed Japan IDW 2016

Photonic Drying Pulsed Light as a low Temperature Sintering Process

PULSED LASER WELDING

CREOL, The College of Optics & Photonics, University of Central Florida

Glass Processing Course

The application of nano metal powder

Mater. Res. Soc. Symp. Proc. Vol Materials Research Society

Solar Cells and Photosensors.

PEC (Printed Electronic Circuit) process for LED interconnection

Productivity versus Profitability in Vacuum Web Coating

A Survey of Laser Types. Gas Lasers

Cavity Filters. KIGRE, INC., 100 Marshland Road, Hilton Head, SC 29926, USA PH: FAX: Web:

Thin Films: Sputtering Systems (Jaeger Ch 6 & Ruska Ch 7,) Sputtering: gas plasma transfers atoms from target to substrate Can deposit any material

Coatings. Ion Assisted Deposition (IAD) process Advance Plasma Source (APS) plasma-ion assisted Deposition. Coatings on Optical Fibers

Structure and optical properties of M/ZnO (M=Au, Cu, Pt) nanocomposites

Laser printing and curing/sintering of silver paste lines for solar cell metallization

High Efficiency UV LEDs Enabled by Next Generation Substrates. Whitepaper

Understanding Optical Coatings For Military Applications

INTERVIA BPP-10 Photoresist

Energy Efficient Glazing Design. John Ridealgh Off-Line Coatings Technology Group Pilkington European Technology Centre

X-ray Photoelectron Spectroscopy

Processing guidelines

Towards scalable fabrication of high efficiency polymer solar cells

High performance radio frequency generator technology for the Thermo Scientific icap 7000 Plus Series ICP-OES

Synergetic plasmonic effect of Al and Au nanoparticles for efficiency. enhancement of air processed organic photovoltaic devices

ABSTRACT: INTRODUCTION:

Advances in Printed Electronic Materials that Meet Cost and Performance Needs

Linear Plasma Sources for Surface Modification and Deposition for Large Area Coating

Amorphous Oxide Transistor Electrokinetic Reflective Display on Flexible Glass

LASER MICROPROCESSING POWERED BY UV PHOTONS Paper #P109

Optical Coatings. Photonics 4 Luxury Coatings , Genève. Dr. Andreas Bächli Head of Optical Coatings at RhySearch, Buchs (SG)

Multiphoton lithography based 3D micro/nano printing Dr Qin Hu

REVIEW OF LASER PLASTIC WELDING PROCESS

Lecture 19 Microfabrication 4/1/03 Prof. Andy Neureuther

Laser Welding of Engineering Plastics

KGC SCIENTIFIC Making of a Chip

Growth Of TiO 2 Films By RF Magnetron Sputtering Studies On The Structural And Optical Properties

UV LED Curing for Wood Coatings

Plasmonics: Application-oriented fabrication. Part 1. Introduction

UV-LED: Beyond the Early Adopters


DIRECT LASER SINTERING OF BOROSILICATE GLASS

Excimer Laser Annealing of Hydrogen Modulation Doped a-si Film

"ITO Film Trend for Touch Panel Applications"

Experiences of PLD Technology for LIB Separators. PICODEON Oy. Neal White

HBLED packaging is becoming one of the new, high

Optical and Electrical Characterization of CuO Thin Films as Absorber Material for Solar Cell Applications

Satoshi Kawata. Near-Field Optic s and Surface Plasmon Polaritons

Visit

Doris Ehrt and Doris Möncke. Friedrich Schiller University of Jena, Otto-Schott-Institut, Fraunhoferstr. 6, D Jena, Germany,

GVB GmbH Solutions in Glass Nordstern-Park Herzogenrath Germany Fax

White Paper: Pixelligent Internal Light Extraction Layer for OLED Lighting

Preparation and characterization of nanostructured thermoelectric materials

RARE-EARTH DOPED PHOSPHATE GLASSES FOR NEODYMIUM LASER SYSTEMS POSSESSING A GREATLY ENHANCED PUMP POWER CONVERSION

micro resist technology

LED Die Attach Selection Considerations

Abcite 585 EF. Technical Data and Application Guide. Product description. Typical applications. Product range. Product certifications.

Lead-Free Solder Bump Technologies for Flip-Chip Packaging Applications

Applications of Successive Ionic Layer Adsorption and Reaction (SILAR) Technique for CZTS Thin Film Solar Cells

Fluxless soldering using Electron Attachment (EA) Technology

CYRANNUS. Welcome at iplas. See the latest developments! CYRANNUS.

Photoresist Coat, Expose and Develop Laboratory Dr. Lynn Fuller

UTILIZATION OF ATMOSPHERIC PLASMA SURFACE PREPARATION TO IMPROVE COPPER PLATING PROCESSES.

In-Situ Monitoring of Pattern Filling in Nano-Imprint Lithography Using Surface Plasmon Resonance

Metallization deposition and etching. Material mainly taken from Campbell, UCCS

Vacuum deposition of TiN

3M Contrast Enhancement Film

Transmission Mode Photocathodes Covering the Spectral Range

Process steps for Field Emitter devices built on Silicon wafers And 3D Photovoltaics on Silicon wafers

MRSI-175Ag Epoxy Dispenser

Applied Research for Vacuum Web Coating: What is Coming Next?

PRECISION OPTICAL FILTERS BY EOSS - ENHANCED OPTICAL SPUTTERING SYSTEM. Fraunhofer

Thermal Diffusivity - Thermal Conductivity LFA 447

Modification of Glass by FS Laser for Optical/Memory Applications

SUPPLEMENTARY INFORMATION

Early Sintering Stage

DEVELOPMENT OF HIGH EFFICIENCY FLEXIBLE CdTe SOLAR CELLS

ROLINX Laminated Busbar. Design Rules Version 01 (12/2015)

AC : MICROWAVE PLASMA CLEANER DESIGN FOR SEMI- CONDUCTOR FABRICATION AND MATERIALS PROCESSING LABO- RATORY USE

THERMAL DIFFUSIVITY THERMAL CONDUCTIVITY

Transactions on Engineering Sciences vol 2, 1993 WIT Press, ISSN

A new Glass GEM with a single sided guard-ring structure

COMPATIBILITY OF THE ALTERNATIVE SEED LAYER (ASL) PROCESS WITH MONO- Si AND POLY-Si SUBSTRATES PATTERNED BY LASER OR WET ETCHING

MI USA. 1, Eggenstein-Leopoldshafen, Germany. Engineering, University of Michigan, Ann Arbor, MI USA

Producing Metal Parts

Photolithography I ( Part 2 )

Amorphous Silicon Solar Cells

DuPont MX5000 Series

This is an electronic reprint of the original article. This reprint may differ from the original in pagination and typographic detail.

Radiation Tolerant Isolation Technology

Factors Affecting the Adhesion of Thin Film Copper on Polyimide

3D inkjet printing of conductive structures using in-situ IR sintering

Study on Infrared Absorption Characteristics of Ti and TiN x Nanofilms. Mingquan Yuan, Xiaoxiong Zhou, Xiaomei Yu

UVTOP280-FW-SMD. Description. Maximum Rating (T CASE = 25 C) Electro-Optical Characteristics (T CASE = 25 C, I F = 20 ma)

UV-Visible Spectrophotometer Calibration. S.ZALI M.Sc. Dept. of Analytical chemistry Razi vaccine serum research institute

EFFECT OF DEPOSITION TIME ON CHEMICAL BATH DEPOSITION PROCESS AND THICKNESS OF BaSe THIN FILMS.

Investigation of cw and ultrashort pulse laser irradiation of powder surfaces a comparative study

Transcription:

Photonic Sintering of Silver for Roll-to-Roll Printed Electronics Saad Ahmed, PhD Manager-Engineering

Topics Introduction Significance of nanotechnology Conductive inks Pulsed light for sintering Reel-to-reel challenges Conclusions

Current Printed Circuit Process Current process for printed electronic system requires multiple process steps They do not lend themselves to Reel-to-reel Systems Flexible substrates Low Temperature Substrates Complex steps A simpler process would be to print conductive traces and cure to form conductive traces Substrate Deposit Copper layer (Vacuum Sputter) Deposit Etch Resist Light Mask Etch (Chemical) Substrate Print traces with Ink Sinter (High energy Pulsed light) Comparison of Standard Printed Circuit Manufacture and Photonic Sintering

Sintering Definition: Sintering is a method for making objects from powder typically below its melting point Traditionally use heat, pressure and time History 1906: first patent on sintering using vacuum by A. G. Bloxam. Decades of development with around 640 patents Some current methods of sintering: Sintering ovens Arc discharge Laser And now: pulsed light Vacuum sintering oven Xenon arc lamp on a reel-to-reel system at Western Michigan University (USA)

Nanoparticles Definition: Particles that have a size between 1nm to 100nm are referred to as nanoparticles Diameter of a hydrogen atom is about 0.1 nm Nanotechnology creates and uses structures that have novel properties because of their small size. Classic nanoparticle Buckminsterfullerene C60

Nanoparticles All materials have basic properties Melting point, light absorption (color) etc. Governed by laws of particle physics These are independent of size Melting point for a gram of copper is the same as for a kg of copper. It still looks like the same material Once materials become around the size of 1 to 100 nanometers quantum effects becomes significant Optical absorption characteristics change: quantum dots Opens up new possibility of sintering at significantly lower temperature when compared to bulk material When particle size becomes smaller than the wavelength of light plasmon effects play a role in its absorption spectra Metallic gold and gold nanoparticles in ruby glass

Melting Point Depression Melting point depression is a feature of metal nanoparticles where the melting point of the particle is lower than that of bulk based on the size of the particle This effect can be explained by classical physics as the surface area to volume ratio of the material is changed. As surface area to volume for material becomes large a phenomenon called melting point depression occurs. The Gibbs-Thomson relation is shown below: Melting point Gold Clusters Where: T MB =bulk melting temperature σ sl =solid liquid interface energy H f =bulk heat of fusion ρ s =density of solid d=particle diameter

Absorption Spectra As particle size becomes smaller their absorption characteristics change Example: quantum dots E = Extinction N A = aerial density of nanoparticles, a = radius of the metallic nanosphere, Є m =dielectric constant of the medium surrounding the metallic nanosphere λ = the wavelength of the absorbing radiation, Є i = imaginary portion metallic nanosphere s dielectric function, Є r = real portion metallic nanosphere s dielectric function. Quantum dots---same material (different sizes have different colors) Mie theory estimation of the extinction of a metallic sphere in the dipole limit UV-visible extinction spectra of Ag SL PPA

The Nanoparticle Advantage Combination of melting point depression and absorption characteristics change mean that photonic energy can cause sintering, i.e., the bonding of nanoparticles together to form bulk metal Once sintering has taken place the material behaves like bulk material and loses the nanoparticle characteristics (we want this) If photonic energy is too high then the metal can evaporate (we don t want this) Photonic sintering of Cu nanoparticles on teflon showing unsintered, partially sintered, sintered and blow-off regions (2X mag)

Flash Lamps Xenon flash lamps have a broad spectrum of light from deep UV to IR. Typically used for curing and sterilization where high photon energy is required When xenon gas is broken down due to a high energy field it goes from being an insulator to a conductor Excitation and recombination of ions within the arc plasma creates light. The envelope used can determine the spectral content of the lamp Lamps can explode due to excess energy Typically operate at 10% of explosion energy Equation for explosion energy (E exp ) as a function of pulse duration time (t), arc length (l) and diameter of lamp (d). E exp = 12. l. d. t

Pulsed vs. Continuous If we try to expend 100 Joules of energy we can do it in two ways 10 W lamp for 10 seconds or 1 MW pulse for 100 microseconds. Continuous systems like mercury or halogen lamps cannot deliver this kind of peak power. High peak power means the system is more efficient at delivering useful energy Intensity attenuates as it penetrates into a material so peak power phenomenon allows for deeper penetration depths Shorter pulse duration means that the process can take place quicker Pulsed is instant on-off. It is harder to do that with continuous systems Pulsed systems can be frequency adjusted to allow time for cooling Power (Watts) Cooling Time Cooling Time Energy Cooling Time Time Time

Advantages Pulsed Xenon light for Photonic Sintering High intensity Can achieve results faster and with fewer pulses Non-contact Process Lamp units are relatively small, can be retro fitted to an existing process Is easy to maintain (no moving parts) Low temperature Produces high energy pulsed light which has a very short duration (few us to few ms) Have comparatively high conversion efficiency. This allows the use of low temperature substrates like paper or plastic Simple to implement and use No scanning laser, no rolling plasma, no oven Pulse rate can be synchronized with the system No special requirements for process, e.g. vacuum, temperature or gasses Fast Sintering occurs in fractions of seconds, does lend itself to roll-to-roll Scalable Faster process speeds can have multiple systems operating in synchrony No waste No chemicals used Flexible Broad spectrum light means that different inks/substrates can be processed with the same system.

Conductive Inks There are many type of conductive inks that can benefit from photonic sintering Copper nanoparticles May have core shell structure May have reduction agents in the carrier May require photo reduction by UV Silver ink Flakes (not nanoparticles, but photonics can remove carrier) Silver nanoparticles Semi-conductive inks For photovoltaics, electronic components Tin- and gold-based inks Ink particle size, carrier medium, substrate, deposited thickness, all play a role in defining the required parameters for effective sintering

Functional Inks Often use of printed electronics demands a range of functions defined by their use Resistivity is the most common requirement Transparency for touch panels Adhesion Flexibility Reflectivity In the standard printing world these functions are not required Accuracy of the print process in terms of layer thickness and placement is more critical than for standard printing Layer thickness relates with resistance R=ρ l / A Poor accuracy may lead to shorts or open circuits l A

Silver Inks Silver inks are well suited to photonic sintering Both silver and its oxide are conductive Formulation and manufacture of silver nano inks are easier and more prevalent Their operational window is large Their size can be tightly controlled They can show improvement in their functionality with multiple pulses (contrary to the concept of nanoparticle advantage) SEM of Silver Nano particle 5-6nm in size AG Film on PET

Silver Ink Tests We have the greatest success with photonic sintering of silver. Silver requires lower energy per pulse and can be flashed a number of times to bring the resistivity down. This means that stitching problems can be effectively mitigated It seems like total incident energy is the dominant factor with the majority of inks tested. Silver typically has some resistance before sintering and so unsintered areas do not cause open circuits. conductive particles substrate carrier carrier removed with light

Silver Test Results 65 % reduction of resistance 55 45 35 25 15 1.0 inch height 1.6 inch height 2.0 inch height 1.6 inch Cerium 1.6 inch Germisil 5-5 0 0.5 1 1.5 2 Time of exposure

Silver - Dynamic testing Dynamic Testing -- % Reduction across length (4") as a function of conveyor speed 60 Conveyor Speed (ft/min) 50 40 30 20 10 0 0 10 20 30 40 50 60 70 % Reduction of resistance

Stitching Stitching is important for roll-to-roll applications If pulse rate is too slow for the reelto-reel speed then we get banding with regions of unsintered area and regions of sintered area. Impact of the nanoparticle advantage needs to be considered Overlapped regions may impact uniformity requirements Use of close proximity mask may be required Accurate control of flash may be required

Substrate Types Substrates play a vital role in the photonic sintering domain. Paper can absorb some of the carrier and can help with adhesion and sintering PET can have adhesion issues, can warp with too much energy Metal substrates like aluminum can be hard to sinter as it acts like a heat sink in some cases; significant for silver, not so much for copper. Some substrates do not allow the ink to dry effectively and this can negatively impact sintering. paper absorbs carrier PET

Dynamic testing for different substrates Dynamic Testing 100% % Reduction in resistance 80% 60% 40% 20% 0% 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 Conveyor Speed (ft/min) WMU Silver on Paper Substrate WMU Silver on Pet Substrate

Printing Process Different kinds of printing processes can be used for photonic sintering Choice determined by desired thickness and feature size

Reel-to-Reel Application Reel-to-reel applications have unique requirements Process speeds 5ft/min to 100s ft/min Faster throughput increases efficiency and reduces costs Synchronization is important Web based systems demand higher reliability Down time and failure generates waste Web size can vary Flexibility is required Different inks, different substrates, different applications Functional uniformity of result is important. Tolerant to ink thickness and printing process

Silver- Multi Lamp System Design Conveyor Speed 5 10 15 20 % 25Reduction 30 Goal 35 40 45 50 55 60 2.5 1 1 1 1 1 1 1 1 1 1 1 1 5 1 1 1 1 1 1 1 1 1 1 1 2 10 1 1 1 1 1 1 1 1 1 2 2 3 15 1 1 1 1 1 1 1 2 2 2 3 5 20 1 1 1 1 1 1 2 2 2 3 4 7 25 1 1 1 1 2 2 2 2 3 3 5 9 30 1 1 1 1 2 2 2 3 3 4 6 10 35 1 1 1 2 2 2 3 3 4 4 7 12 40 1 1 2 2 2 2 3 4 4 5 8 14 45 1 2 2 2 2 3 3 4 5 5 9 15 50 2 2 2 2 2 3 4 4 5 6 10 17 55 2 2 2 2 3 3 4 5 5 7 11 19 60 2 2 2 2 3 3 4 5 6 7 12 20 65 2 2 2 2 3 4 5 5 6 8 13 22 70 2 2 2 3 3 4 5 6 7 8 14 24 75 2 2 2 3 3 4 5 6 7 9 15 25 80 2 2 3 3 3 4 5 7 8 9 16 27 85 2 3 3 3 4 5 6 7 8 10 17 29 90 2 3 3 3 4 5 6 7 9 10 18 30 95 3 3 3 3 4 5 6 8 9 11 19 32 100 3 3 3 3 4 5 7 8 10 12 20 34

Process speeds based on printing technology

Process Speed based on Photonic Technology For photonic sintering process speeds are defined by the flash rate, energy per pulse and number of flashes required. For optimal performance the lowest energy required with the shortest pulse needs to be identified for the process. These define the total energy demand of the system and the required cooling for safe operation of the lamp. The lower the energy per pulse the faster the lamp can be flashed Flash lamp systems can be scaled to include multiple sources to keep up with process speed. Example values for a 16" lamp housing is 12" x 1" optical footprint with a pulse rate of 3 Hz = 15 ft /min web speed Optical Footprint Per pulse Flow Speed Overlap Flow too fast for Pulse rate Banding

Integration into Process In most cases integration of a photonic sintering system can be done as a retrofit to an existing print process Systems are typically modular Lamp system has a small footprint Indexing is a standard requirement for print process and this can be used to synchronize lamps May require additional sensors for monitoring the desired ink function May require redundant systems for easy maintenance and correction for lamp failure lamp A lamp B lamp C controller sensor position web flow

Strategy Bringing Photonic Sintering to Reel-to-Reel Product development plan Build flexible low-cost static systems that can establish the key parameters for formulators/manufacturers Build systems that operate for small-scale, low-speed systems to evaluate stitching Build multi lamp high speed pilot systems for reel-to-reel developers Use all of above to provide customized solution for the industry.

Rapid Deployment Success revolves around a program that interacts with all parts of the system Industry provides application demands that can be tested at Xenon facility Industry may buy low cost equipment to validate the application Ink manufacturers can do the same Print developers can evaluate systems on a small scale with moving stage These groups can interact to optimize and parameterize the application Process developers can use all these components to develop custom reelto-reel systems Must establish symbiotic and synergistic partnerships INK R&D Application Lab Low Cost Static Equipment PROCESS Low Cost Static Equipment Low Cost Stage XENON PHOTONIC SINTERING Reel-to-Reel Systems PRINT R&D Application Lab Low Cost Static Equipment APP

Products Lowest cost static sintering solution Sinteron 500 More flexible, more powerful system Sinteron 2000 Small scale linear stage LS-845 Reel-to-reel prototype system Under development

Partnerships

Conclusions Photonic sintering: Works with many conductive nanoparticles for printed electronics needs Requires high energy which can be generated by a flash lamp fast, compact and cost effective alternative to ovens easy retrofit to existing process for roll to roll deployment Needs to be flexible to work with various ink formulations Should be scalable for different process speeds Reel-to-reel offers unique challenges for pulsed light. Xenon is actively involved in creating synergies between researchers, developers and manufacturers for printed electronics

Comments Thanks for inviting me. For further details see us at Booth 1924 Contact info: Saad Ahmed ( Engineering Manager ) Xenon Corp 37 Upton Drive Wilmington, MA 01887 USA Tel: +1 978 661 9033 ext 253 Fax: +1 978 661 9055 sahmed@xenoncorp.com www.xenoncorp.com Joe Peirce ( North America Sales ) Xenon Corp 37 Upton Drive Wilmington, MA 01887 USA Tel: 978 661 9033 ext 216 Fax: 978 661 9055 jpeirce@xenoncorp.com www.xenoncorp.com Questions /Comments