Conductive glass (NTA glass )

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Art Beam Co. Ltd.

Conductive glass (NTA glass ) Nano Technology Assorted Glass Japanese Patent No. 3854985 (applied for 2001, granted 2006) Vanadate glass and its manufacturing method Patent holder: Tetsuaki Nishida (Professor, Kinki University, Faculty of Humanity-Oriented Science and Engineering) License granted (No. 8389, registered in the Patent Registry on January 15, 2007) NTA glass Registered trademark (registered in 2006 by Tokai Industry) Registration number: 50099023 Kinki University Nishida Laboratory 2

Features of NTA glass Conventional conductive glass Conventional NTA glass (black) Substrate NTA glass Conductive solid glass Thin film Substrates and processed products Thin film Powder

Major Advantages Conductive Low softening point NTA glass Lead- and bismuth-free Noncorrosive Use for soldering Processable by a variety of methods From machining to Focused Ion Beam (FIB)

Properties of NTA glass (standard) and comparison Electrical resistivity 30 Ω cm or less Glass transition point 400 C Note 10-4 Ω cm or less depending on constituents and formula References: Properties of glass (Source: Rikagaku Jiten ) Deformation point 460 C 500 C - 700 C Expansion coefficient 9.32 x 10-6 /K 20 C - 300 C 0.5-20 x 10-6 /K Hardness 460 kg/mm 2 Approx. 5.5 (Mohs hardness) 5-7 (Mohs hardness) Transmittance 0 % 200 nm - 2,400 nm Reflectivity Thermal conductivity 17-13 % 12 % 0.88 W/m K At 26 C Thermal diffusivity 0.363 mm 2 /s At 26 C Specific heat (heat capacity) 0.642 J/g K At 26 C Compared to aluminum with reflectivity taken as 100% 350 nm - 750 nm Compared to aluminum with reflectivity taken as 100% 750 nm - 2,600 nm Density 3.78 g/cm 3 At 26 C 2.2-6.3 g/cm 3 Young's modulus 81.6-85.0 Gps 5-9 Mps Modulus of rigidity 32 Gpa Poisson's ratio 0.286

Focused Ion Beam (FIB) Micromachining Cross-view image: Pattern of 100 nm width, 200 nm depth Machining conditions: Accelerating voltage of 40 kv, current of 11 pa/cm 2 Micromachining at the order of 10 nm Aspect ratio 1:10 High-speed machining (at more than five times the speed of aluminum material) Application in MEMS and nano imprint fields

Application to Nano Imprint FIB machining of NTA glass Resin coating Imprinting Main material for nano imprint technology Pattern 7

Glass Powder (1) Glass frit for metal paste (2) NTA glass paste

(1) Glass frit for metal paste Low softening point, lead- and bismuth-free Glass composition Properties Mean particle diameter Linear expansion coefficient Uses Composite oxide of V, Ba and Fe Black powder 2.5-3.0 ( m) 85-105 (x 10-7 / C) Electrodes, sintering aids for electrodes, conductive bonds, antistatic agents, etc. 9

(2) NTA glass paste (Pro Glass VP) Properties Viscosity Application method Recommended drying temperature Recommended standard operating temperature Blackish brown paste 30-80 (Pa s) Screen printing 130 C -150 C for 10 to 20 minutes Temperature rise/fall: 20 C - 40 C per minute Peak temperature: Maintained at 460 C - 510 C for 5 to 10 minutes

Applications of NTA glass paste Encapsulant and sealant for LSI, etc. Conductive and noncorrosive

Application of NTA glass paste: Heat glass Conductive, noncorrosive, used for soldering

Other Applications Example of machining products: Ionizer discharge nozzle Conductive Noncorrosive (no dust produced) 13

NTA glass nanoparticles (spherical, 100 nm or less) Nanoparticles formed by use of radio-frequency thermal plasma

Offering dispersion samples tailored to customer s needs NTA nanoparticle dispersion (1) (DAA) (solid content 10%) Tokai Industry NTA nanoparticle dispersion (2) (DAA) (solid content 10%) Tokai Industry

Types and applications of MSCoating films Ti (titanium) coating Si (silicon) coating Aims Anti-abrasion Anti-corrosion, anti-erosion Appearance Tic layer Si layer Cross-sectional image Substrate S45C 10 m Substrate SUS304 10 m Applications Metal coating Molds, jigs, turret punch press and chucks * Thickness: 5-15 m * Hardness: 1,200-2,500 HV * Surface roughness: 6-20 mrz Anti-corrosion/Anti-erosion parts * Thickness: 5-10 m * Hardness: 1,000 HV * Surface roughness: 1-4 mrz

Art Beam Chromium-free chemical conversion coating AT-21 Chromium-free chemical conversion coating AT-21 is an environmentallyfriendly coating liquid that forms an anti-corrosive film on zinc and zinc alloy plates without the use of chromium compounds. Advantages of AT-21 coating - Environmentally-friendly Chromium-free coating - Anti-corrosive Equal to trivalent chromium coating - Cost More cost-effective than trivalent chromium coating Major constituents of AT-21 AT-21 chemical conversion c oat ing Galvanized layer Fe substrate Cross-sectional view of chemical conversion coating The major constituents of AT-21 are tannin and citric acid. Tannin is made from persimmon juice, and has anti-corrosion and antiseptic effects. This makes AT-21 an environmentally-friendly coating.

We look forward to doing business with you. Art Beam Co. Ltd. Joint development with