EE C245 ME C218 Introduction to MEMS Design Fall PDF Free Download

EE C245 ME C218 Introduction to MEMS Design Fall 2007 Prof. Clark T.-C. Nguyen Dept. of Electrical Engineering & Computer Sciences University of California at Berkeley Berkeley, CA 94720 Lecture 10: Bulk Micromachining C 245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 1 Announcements HW# will be due on Friday, Oct. 5, one day later than the original Thursday due date (this to accommodate those who have a 141 exam) C 245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 2 1

Lecture Outline Reading: Senturia Chpt., Jaeger Chpt. 11, Handouts: Bulk Micromachining of Silicon Lecture Topics: Foundry MEMS: the MUMPS process The Sandia SUMMIT process Bulk Micromachining Anisotropic Etching of Silicon Boron-Doped Etch Stop Electrochemical Etch Stop Isotropic Etching of Silicon Deep Reactive Ion Etching (DRIE) C 245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 Foundry MEMS: The MUMPS Process EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 4 2

Minimum set set of of masks that that must be be used in in MUMPS Masks in polymumps Extra masks for for more Field type: flexibility & ease of of release Light (or clear) field (cf): in layout, boxes represent features that will stay through fabrication Dark field (df): in layout, boxes represent holes to be cut out EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 7 MUMPS Process Flow Deposit PSG on the starting n- type (100) wafers Anneal to heavily dope the wafers Remove the PSG LPCVD 600 nm of low stress nitride LPCVD 500 nm of polysilicon Lithography using the POLY0(cf) mask and RIE etching to pattern the poly0 ground plane layer LPCVD 2 μm of PSG as the 1 st sacrificial layer Lithography using the DIMPLE(df) mask (align to poly0) RIE 750 nm deep to form dimple vias Lithography using the ANCHOR1 (df) mask (align to poly0) RIE anchor vias down to the nitride surface EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 8 4

MUMPS Process Flow (cont.) LPCVD 2 μm undoped polysilicon LPCVD 200 nm of PSG Anneal for 1 hr. @ 1050 o C This both dopes the polysilicon and reduces its residual stress Lithography using the POLY1(cf) mask to define structures (align to anchor1) RIE the PSG to create a hard mask first, then RIE the polysilicon LPCVD 750 nm of PSG Lithography using the P1_P2_VIA (df) mask to define contacts to the poly1 layer (align to poly1) EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 9 EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 10 5

MUMPS Process Flow (cont.) Recoat with photoresist and do lithography using the ANCHOR2(df) mask to define openings where poly2 contacts nitride or poly0 (align to poly0) RIE the PSG at ANCHOR2 openings LPCVD 1.5 μm undoped polysilicon LPCVD 200 nm PSG as a hard mask and doping source Anneal for 1 hr @ 1050 o C to dope the polysilicon and reduce residual stress Lithography using the POLY2(cf) mask (align to anchor2) RIE PSG hard mask RIE poly2 film Remove PR and hard mask EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 11 MUMPS Process Flow (cont.) Poly1 Rotor Poly1 Stator Lithography using the METAL (df) mask (align to poly2) Evaporate titanium (Ti) (as an adhesion layer for gold) Evaporate gold (Au) Liftoff to remove PR and define metal interconnects Coat wafers with protective PR Dice wafers Ship to customer Final Structure: Micromotor Customer releases structures by dipping and agitating dies in a 48.8 wt. % HF solution or via vapor phase HF Anti-stiction dry, if needed EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 12 6

MUMPS: MultiUser MEMS ProcesS Originally created by the Microelectronics Center of North Carolina (MCNC) now owned by MEMSCAP in France Three-level polysilicon surface micromachining process for prototyping and foundry services Designed to service as many users as possible; basically an attempt to provide a universal MEMS process 8 photomasks $4,900 for 1 cm 2 dies Micromotor fabricated via MUMPS EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 1 polymumps Minimum Feature Constraints Minimum feature size Determined by MUMPS photolithographic resolution and alignment precision Violations result in missing (unanchored), under/oversized, or fused features Use minimum feature only when absolutely necessary POLY0, POLY1, POLY2 POLY1_POLY2_VIA ANCHOR1, ANCHOR2 DIMPLE METAL HOLE1, HOLE2 HOLEM Nominal [μm] 4 5 Min Feature [μm] 2 2 2 4 Min Spacing [μm] 2 2 2 4 EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 14 7

MUMPS Design Rules Enclosure Boundary Cut Inside Spacing Cut Outside EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 15 MUMPS Design Rules (cont.) Cross Sections Oxide1 Poly0 POLY0 Mask Levels ANCHOR1 EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 16 8

MUMPS Design Rules (cont.) Oxide1 Poly1 Poly0 G N H O K R Cross Sections POLY0 POLY1 Mask Levels ANCHOR1 EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 17 MUMPS Design Rules (cont.) EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 18 9

MUMPS Design Rules (cont.) EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 19 The Sandia SUMMIT Process EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 20 10

Sandia s SUMMiT V SUMMiT V: Sandia Ultra-planar Multi-level MEMS Technology 5 fabrication process Five-layer polysilicon surface micromachining process One electrical interconnect layer & 4 mechanical layers Uses chemical mechanical polishing (CMP) to maintain planarity as more structural layers are realized 14 masks EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 21 SUMMiT V Layer Stack Uses chemical mechanical polishing (CMP) to maintain planarity as more structural layers are realized EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 22 11

Chemical Mechanical Polishing (CMP) Used to planarize the top surface of a semiconductor wafer or other substrate Uses an abrasive and corrosive chemical slurry (i.e., a colloid) in conjunction with a polishing pad Wafer and pad are pressed together Polishing head is rotated with different axes of rotation (i.e., non-concentric) to randomize the polishing Top View Carrier/Chuck DI Water Side View Slurry Pad Conditioner Slurry Platen Carrier Chuck Pad Pad Conditioner Wafer Backing-Film Pad EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 2 CMP: Not the Same as Lapping Lapping Lapping is merely the removal of material to flatten a surface without selectivity Everything is removed at approximately the same rate Chemical Mechanical Polishing CMP is selective to certain films, and not selective to others Lapping Removes diff. materials at at same rate rate CMP Stops at at nonselective layer EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 24 12

Actual SUMMiT Cross-Section No CMP until after the first three polysi layers 1 μm mmpoly1 and 1.5 μm mmpoly2 can be combined to form a 2.5 μm polysilicon film Refer to the SUMMiT V manual (one of your handouts) for more detailed information on masks and layout instructions EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 25 Bulk Micromachining EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 26 1

Bulk Micromachining Basically, etching the substrate (usually silicon) to achieve microstructures Etching modes: Isotropic vs. anisotropic Reaction-limited Etch rate dep. on temp. Diffusion-limited Etch rate dep. on mixing Also dependent on layout & geometry, i.e., on loading Choose etch mode based on Desired shape Etch depth and uniformity Surface roughness (e.g., sidewall roughness after etching) Process compatiblity (w/ existing layers) Safety, cost, availability, environmental impact EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 27 Mechanical Properties of Silicon Crystalline silicon is a hard and brittle material that deforms elastically until it reaches its yield strength,at which point it breaks. Tensile yield strength = 7 GPa (~1500 lb suspended from 1 mm²) Young s Modulus near that of stainless steel {100} = 10 GPa; {110} = 169 GPa; {111} = 188 GPa Mechanical properties uniform, no intrinsic stress Mechanical integrity up to 500 C Good thermal conductor Low thermal expansion coefficient High piezoresistivity EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 28 14

Anisotropic Etching of Silicon Etching of Si w/ KOH Si + 2OH - Si(OH) 2 2+ + 4e - 4H 2 O + 4e - 4(OH) - + 2H 2 Crystal orientation dependent etch rates {110}:{100}:{111}=600:400:1 {100} and {110} have 2 bonds below the surface & 2 dangling bonds that can react {111} plane has three of its bonds below the surface & only one dangling bond to react much slower E.R. {111} forms protective oxide {111} smoother than other crystal planes good for optical MEMS (mirrors) Self-limiting etches Front side mask Membrane Back side mask EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 29 Anisotropic Etching of Silicon Photoresist Nitride Mask Silicon Substrate Opening to Silicon Silicon Substrate <111> (100) 54.74 o Silicon Substrate Deposit nitride: Target = 100nm 22 min. LPCVD @800 o C Lithography to define areas of silicon to be etched Etch/pattern nitride mask RIE using SF 6 Remove PR in PRS2000 Etch the silicon Use 1:2 KOH:H 2 O (wt.), stirred bath @ 80 C Etch Rates: (100) Si 1.4 μm/min Si N 4 ~ 0 nm/min SiO 2 1-10 nm/min Photoresist, Al fast Micromasking by H 2 bubbles leads to roughness Stir well to displace bubbles Can also use oxidizer for (111) surfaces Or surfactant additives to suppress bubble formation EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 0 15

Silicon Wafers [Maluf] EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 1 Silicon Crystallography Miller Indices (h k l): Planes Reciprocal of plane intercepts with axes e.g., for (110), intercepts: (x,y,z) = (1,1, ); reciprocals: (1,1,0) (110) (unique), {family} Directions One endpoint of vector @ origin [unique], <family> EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 2 16

Determining Angles Between Planes The angle between vectors [abc] and [xyz] is given by: ( a, b, c) ( x, y, ) cosθ ax + by + cz = z ax + by + cz θ a b c x y z = cos 1,,,,, a, b, c x, y, z For {100} and {110} 45 o For {100} and {111} 54.74 o For {110} and {111} 5.26 o, 90 o, and 144.74 o ( )( ) ( ) ( ) EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 Silicon Crystal Origami Silicon fold-up cube Adapted from Profs. Kris Pister and Jack Judy Print onto transparency Assemble inside out Visualize crystal plane orientations, intersections, and directions [Judy, UCLA] EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 4 17

Undercutting Via Anisotropic Si Etching Concave corners bounded by {111} are not attacked but convex corners bounded by {111} are attacked Two {111} planes intersecting now present two dangling bonds no longer have just one dangling bond etch rate fast Result: can undercut regions around convex corners Convex corner Suspended Beam Concave corner [Ristic] EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 5 Corner Compensation Protect corners with compensation areas in layout Below: Mesa array for selfassembly structures [Smith 1995] Mask pattern Shaded regions are the desired result Mask pattern EE C245: Introduction to MEMS Design Lecture 10 C. Nguyen 9/27/07 6 18