Note Fabrication of Flexible Micro CO Sensor for Proton Exchange Membrane Fuel Cell Applications

Similar documents
Note Flexible Four-in-one Micro Sensor for Reliability and 100-hour Durability Testing

Note Application of Screen Printing in Flexible Miniature Thermocouple Process Development

Real-time monitoring of internal temperature, flow rate and pressure in the high-temperature PEMFC stack using flexible integrated micro sensor

HYDROGEN FUEL CELL TECHNOLOGY

NO x gas response characteristics of thin film mixed oxide semiconductor

Proceedings Aerosol/Ink Jet Printing Technology for High-Temperature MEMS Sensors

Chapter 7 Conclusions

Thin Film Gas Sensor. Nanoelectronics and MEMS Laboratory National Electronics and Computer Technology

Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes

Advanced Analytical Chemistry Lecture 10. Chem 4631

Jing Su and Chang-Won Park Dept. of Chemical Engineering, University of Florida, Gainesville, FL 32611

Report On Adsorption/Desorption Studies of CO on PEM Electrodes Using Cyclic Voltammetry. Sethuraman, Vijay Anand

sensors ISSN

ENVIRONMENT-FRIENDLY HYDROGEN GAS AS FUEL IN FUEL CELL AND ITS CHALLENGES

Introduction Fuel Cells

Novel Fuel Cell MEA Based on Pt-C Deposited by Magnetron Sputtering

Methanol Steam Reformer High Temperature PEM Fuel Cell System Analysis

Fuel Cell Systems: an Introduction for the Engineer (and others)

Optimization of operating conditions of a mini fuel cell for the detection of low or high levels of CO in the reformate gas

Electrochemical Energy Conversion Revised Roadmap

An Electricity and Value-added Gases Co-generation via Solid Oxide Fuel Cells

Change in stoichiometry

PULSE ELECTRODEPOSITION OF Pt Co CATALYST ONTO GLASSY CARBON FOR OXYGEN REDUCTION REACTION TO USE IN PEMFC

ENHANCED SENSING CHARACTERISTICS IN MEMS-BASED FORMALDEHYDE GAS SENSOR

Motivation: Biofunctional Composite Nanoparticles

A THEORETICAL SIMULATION OF A PEM FUEL CELL WITH 4-SERPENTINE FLOW CHANNEL

Effect of Preparation Conditions on the Performance of CO Preferential Methanation Catalyst

9-11 April 2008 Micro-electroforming Metallic Bipolar Electrodes for Mini-DMFC Stacks

Chapter 3 Silicon Device Fabrication Technology

6.1 Summary. Summary and Scope for Further Study

A NOVEL METHOD FOR THE IMPROVEMENT IN THERMOELECTRIC PROPERTY OF TIN OXIDE THIN FILMS AND ITS APPLICATION IN GAS SENSING

Sustainable Energy Science and Engineering Center. Fuel Cell Systems and Hydrogen Production

PHYS 534 (Fall 2008) Process Integration OUTLINE. Examples of PROCESS FLOW SEQUENCES. >Surface-Micromachined Beam

In Situ Monitoring of Temperature inside Lithium-Ion Batteries by Flexible Micro Temperature Sensors

Supporting Information

METAL FINISHING. (As per revised VTU syllabus: )

Silver Diffusion Bonding and Layer Transfer of Lithium Niobate to Silicon

Transmission electron microscopy a versatile tool to study the microstructure of HT-PEMFC

1. Introduction. 2. Objectives

Temperature profiles of an air-cooled PEM fuel cell stack under active and passive cooling operation

Investigation of Two-Phase Transport Phenomena in Microchannels using a Microfabricated Experimental Structure

Fully-integrated, Bezel-less Transistor Arrays Using Reversibly Foldable Interconnects and Stretchable Origami Substrates

Control of High Efficiency PEM Fuel Cells for Long Life, Low Power Applications Part 2

Hydrogen Separation Membrane Applications

Fuel Cell Systems: an Introduction for the Chemical Engineer

S. Authayanun 1 and A. Arpornwichanop 2 1

CARBON DIOXIDE POISONING ON PROTON-EXCHANGE-MEMBRANE FUEL CELL ANODES

Application Note. Hydrogen Purity Analysis by FTIR PROBLEM BACKGROUND

Development of Polyaniline Based Gas Sensor

Ceramic Processing Research

Chapter 4 Fabrication Process of Silicon Carrier and. Gold-Gold Thermocompression Bonding

micro-hotplate-sensors

HYDROGEN H2 SS SOLID ELECTROCHEMICAL SENSOR

Gas and surface applications of atmospheric pressure plasmas

Fuel Cell Performance Augmentation: Gas Flow Channel Design for Fuel Optimization

Mass Transport Effects on Electroreduction of Carbon Dioxide

DISCLAIMER. Portions of this document may be illegible electronic image products. Images are produced from the best available original document.

Surface Micromachining

The flow-field pattern Optimization of the Bipolar Plate for PEMFC Considering the Nonlinear Material

Trends in the Use of Fuel

Physical Vapor Deposition (PVD) Zheng Yang

Development of high temperature PEM fuel cells. Simplification and CO tolerance mapping

Etching Mask Properties of Diamond-Like Carbon Films

Supporting Information: Model Based Design of a Microfluidic. Mixer Driven by Induced Charge Electroosmosis

THICK-FILM NANOSIZED METAL OXIDE SnO 2 DOPED WITH Y 2 O 3 FOR GAS SENSING APPLICATIONS ABSTRACT INTRODUCTION EXPERIMENTAL WORKS

Investigation on performance of SOFC in hydrocarbon fuel

The Role of Fuel Cells in a Sustainable Energy Economy

EECS130 Integrated Circuit Devices

I. INTRODUCTION. II. OBJECTIVE OF THE EXPERIMENT. III. THEORY

CORROSION of Metals CORROSION CORROSION. Outline ISSUES TO ADDRESS... Why does corrosion occur? What metals are most likely to corrode?

FORMATION OF TiO 2 THIN FILM BY ION-BEAM-MIXING METHOD AND ITS APPLICATION AS THE CORROSION PROTECTING FILM

Mass Transport Analysis of a PEM Fuel Cell (High Temperature-PEMFC) Under Different Operating Conditions

Study of an integrated system for the production of hydrogen by autothermal reforming of methanol

Integrated Electrochemical Thermal Ammonia Production Process

GENERAL CLASSIFICATION

3.155J / 6.152J Micro/Nano Processing Technology TAKE-HOME QUIZ FALL TERM 2005

Figure 8: Typical Process Flow Diagram Showing Major Components of Direct Hydrogen PEFC System. Lecture No.8 Page 1

Durability studies of membrane electrode assemblies for high. temperature polymer electrolyte membrane fuel cells. Nolubabalo Hopelorant Fanapi

Keywords: Reformer model; Preferential oxidation; Water-gas shift reaction

Metallization deposition and etching. Material mainly taken from Campbell, UCCS

FABSTRACT. Technical Overview of Fuel Cell Systems: How Computer Simulation is Used to Reduce Design Time

Simple fabrication of highly ordered AAO nanotubes

Prof. Mario L. Ferrari

Proceedings Post Fabrication Processing of Foundry MEMS Structures Exhibiting Large, Out-of-Plane Deflections

Development of Technology for Advanced Utilization of Hydrogen from By-product Gas of Steelmaking Process

Provided for non-commercial research and education use. Not for reproduction, distribution or commercial use.

ROOM TEMPERATURE HYDROGEN SENSOR BASED ON NANO-MICRO INTEGRATION FOR SPACE EXPLORATION

Novel Mn 1.5 Co 1.5 O 4 spinel cathodes for intermediate temperature solid oxide fuel cells

Danish Power Systems. Progress in HT-PEM fuel cells F-Cell, Stuttgart 30 th Sep Hans Aage Hjuler and Thomas Steenberg

An Investigation on Metallic Bipolar Plate Corrosion in Simulated Anode and Cathode Environments of PEM Fuel Cells using Potential-pH Diagrams

Hydrogen Generation Programme at ONGC Energy Centre

Development of Ceria-Zirconia Solid Solutions and Future Trends

Membrane Technologies for Tritium Recovering in the Fusion Fuel Cycle

Proceedings Study of a Layered Au, Pt-YSZ Mixed-Potential Sensing Electrode by ESEM, XRD and GD-OES with Relation to Its Electrochemical Behaviour

Direct Energy Conversion: Fuel Cells

High Sensitivity and Low Power Consumption Gas Sensor Using MEMS Technology and Thick Sensing Film

Applications of hydrogen permeable membranes in ammonia synthesis and decomposition

P21 WHITE PAPER FUNCTIONAL DESCRIPTION PREMION T FUEL CELL SYSTEM. Copyright 2006 P21 GmbH. All rights reserved.

FABRICATION FOR MICRO PATTERNS OF NICKEL MATRIX DIAMOND COMPOSITES USING THE COMPOSITE ELECTROFORMING AND UV- LITHOGRAPHY

Transcription:

Int. J. Electrochem. Sci., 11 (2016) 2269-2275 International Journal of ELECTROCHEMICAL SCIENCE www.electrochemsci.org Note Fabrication of Flexible Micro CO Sensor for Proton Exchange Membrane Fuel Cell Applications Chi-Yuan Lee *, Chung-Wen Hsu Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C. * E-mail: cylee@saturn.yzu.edu.tw Received: 15 December 2015 / Accepted: 18 January 2016 / Published: 1 February 2016 Carbon monoxide poisons the catalyst of the proton exchange membrane fuel cell (PEMFC) subsequently degrading the fuel cell performance. The molecular bond of platinum (Pt) in the catalyst electrode will be seized by carbon monoxide. The transformation of hydrogen molecules into hydrogen ions decreases fuel cell performance. The size of the hole in the gas diffusion layer (GDL) affects the energy of the gas fuel supply; that is, providing an excessive amount of hydrogen wastes energy, whereas providing an insufficient amount of hydrogen decreases catalyst effectiveness. Therefore, this work applied the micro-electro-mechanical systems (MEMS) technology to develop flexible micro CO sensors. The advantages of flexible micro CO sensors include their flexibility, against breakage and ability to be placed anywhere in a fuel cell. Keywords: Flexible micro CO sensor; PEMFC; MEMS. 1. INTRODUCTION In recent years, the oil price rises continuously, the global energy is about to be exhausted, looking for alternative energy sources has become a very important subject in the world. Therefore, the fuel cell is paid increasing attention to for its high energy conversion efficiency and harmless emissions and extensive range of application. However, using H 2 as fuel in the proton exchange membrane fuel cell (PEMFC) has several constraints, because the H 2 is usually produced by water electrolysis, the byproduct of the reaction process is CO. In order to reduce the CO content, the water gas shift reaction and low temperature preferential oxidation can be used, the obtained CO concentration is 10-50 ppm. However, even a low CO content degrades the performance of fuel cell apparently [1-5]. Spallina [6] presented an assessment of the impact on solid oxide fuel cell (SOFC)

Int. J. Electrochem. Sci., Vol. 11, 2016 2270 performance prediction of the effect of the combined electrochemical oxidation of CO and H 2, proposing additional analyses to delve into the effects of different steam methane reforming (SMR) and water gas shift (WGS) kinetics models, along with the risk of carbon deposition. Oh [7] investigated the effects of CO poisoning on the performance of high-temperature proton exchange membrane fuel cells (HT-PEMFCs) with phosphoric acid (PA)-doped polybenzimidazole (PBI) membranes. Pedersen [8] presented up-to-date benchmarking methods for testing electrocatalysts for polymer exchange membrane fuel cells (PEMFCs), using the rotating disk electrode (RDE) method. Hu [9] showed that platinum-gold nanoalloy (PtAu/GNR) has much superior catalytic activity and higher poisoning tolerance than the monometal composite catalyst. CO concentration concerning the real environmental circumstances inside the proton exchange membrane fuel cell is still unable to be obtained in a complete, real-time and accurate manner due to the current monitoring technology bottleneck, which can only be estimated indirectly by way of external measurement, theoretical evaluation or simulation analysis and other methods. Therefore, this study uses tin dioxide as gas-sensing thin film, and uses micro-electro-mechanical systems (MEMS) to develop flexible micro CO sensor to monitor the CO concentration. The advantages of this technology include (1) very small volume; (2) flexible measurement position and accurate embedding; (3) high measurement accuracy and sensitivity and quick response; (4) customized design and development. 2. INTRODUCTION TO MICRO CO SENSOR 2.1 Gas sensor The gas sensor technology has developed from traditional ceramics and liquid electrochemical techniques into thick film, thin film and semiconductor technologies gradually, even MEMS technology now. At present, the gas sensors on the market mostly use ceramic as substrate, produced by crazing and sintering. The sensitivity is good, but the single-unit production is inapplicable to mass manufacture, so the prices are high, and the thermal response time or gas response time is a little long, reducing the practicability. Therefore, the production mode of gas sensor is combined with the present semiconductor industry in this study, the micro-electromechanical process is used to produce the flexible micro CO sensor, aiming to develop a gas sensor with low cost, low reaction temperature, high sensitivity, quick thermal response and gas response. 2.2 Brief introduction to characteristics of tin dioxide as gas-sensing thin film material The gas-sensing thin film used in this study is SnO 2, it is the most suitable gas-sensing material for its sensitivity to hydrocarbon compounds, stable voltinism and high production compatibility. The SnO 2 based oxide is one of the most extensively used materials. Because the SnO 2 can work at a low operation temperature, and it has relatively high sensitivity at the operation temperature. However, besides sensitivity, the principal characteristics of gas sensor include stability, repeatability and selectivity. There are oxygen adsorption and desorption at an appropriate operating temperature, and

Int. J. Electrochem. Sci., Vol. 11, 2016 2271 the sensitivity to different gases varies with the temperature. An appropriate temperature range can accelerate the reaction, shortening the response time of SnO 2 to reducing gas. At a low working temperature, the adsorption and desorption reactions on the material surface are too slow. If the working temperature is too high, the reducing gas desorption is influenced, so that the measurement result is influenced. An appropriate addition of catalyst can reduce the reaction temperature and increase the response and recovery time and selectivity. Certainly, high sensitivity, quick response and repeatability are essential conditions of good gas sensors. 2.3 Introduction to sensing principle of micro CO sensor Among the CO gas sensors, the commercialized CO gas sensors include (1) constant potential amperometry type sensors; (2) semiconductor type sensors and (3) catalytic combustion type sensors. This study uses semiconductor type gas sensor for its high sensitivity and quick response. The sensing principle of the sensing metal layer is that a space-charge region is formed on the surface of metal oxide grains, resulting in electron transfer, forming an electron depletion layer on the surface. When the CO gas passes, the CO molecules are adsorbed, so that the resistance is changed, measurable signals are generated. In terms of electrode, the platinum is used as electrode material, because the platinum has stable properties and it is unlikely to oxidize. In various literatures, the sensitivity of CO gas sensor is related to the gas temperature. Therefore, a microheater is integrated within the sensing range of CO gas sensor as compensation without influencing the operation of fuel cell, so that the detected gas temperature is increased, the sensitivity can be enhanced. 3. PROCESS OF FLEXIBLE MICRO CO SENSOR The MEMS technology is used to develop the flexible micro CO sensor on the PI flexible substrate, the thickness is 50μm. The PI polymer is characterized by high temperature resistance, compression resistance, high flexibility and good durability. The production process is shown in figure 1, including the following steps: (a) The PI substrate is cleaned with acetone and methanol organic solutions, the residual methanol is removed by DI water, and the surface dust and residual oil and fat are removed, so as to enhance the adhesive ability of thin film metal; (b) The Cr is evaporated as the adhesion layer between Au and lower insulating layer, enhancing the adhesion between Au and PI; (c) Exposure and development define the sensing pattern of micro CO sensor; The pattern is transferred by wet etching to the metal film of Cr and Au; (d, e) The SnO 2 is evaporated on the PI one side with pattern defined as gas sensing layer; (f) Finally, PI 7505 is spin coated on the flexible micro CO sensor to complete the protective layer. The real product and optical micrograph are shown in figure 2.

Int. J. Electrochem. Sci., Vol. 11, 2016 2272 (a) PI film cleaning (d) SnO 2 evaporating (b) Cr/Au evaporating (e) Define CO sensor sensing pattern (c) Define sensing pattern (f) Protection layer definition Figure 1. Process of flexible micro CO sensor. Flexible micro CO sensor Figure 2. Real product and optical micrograph of flexible micro CO sensor. 4. CORRECTION OF FLEXIBLE MICRO CO SENSOR The micro CO sensor shall be corrected before it is embedded in the fuel cell to measure signals. The correction relation must be created for each micro CO sensor, because the data (sensitivity, resistivity range) of CO concentration corresponding to the resistivity in the measurement of fuel cell can be obtained from the relation between resistivity of micro CO sensor and CO concentration. In terms of the correction of micro CO sensor, 10, 50 and 100 ppm commercial CO gas cylinders are led in one runner of a fuel cell in turn, the schematic of correction is shown in figure 3. The resistivity of micro CO sensor is measured when the concentration changes, the measured resistivity is read by LCR measuring instrument in the process, and the correction curve is drawn, as

Response (Rt-R0/R0) Int. J. Electrochem. Sci., Vol. 11, 2016 2273 shown in figure 4. The advantages of flexible micro CO sensors include their flexibility, against acidic environment and ability to be placed anywhere in a proton exchange membrane fuel cell. Figure 3. Schematic diagram of correction of micro CO sensor. CO (ppm) Figure 4. Correction curve of micro CO sensor. 5. CONCLUSION This study used MEMS technology to develop a flexible micro CO sensor on PI substrate successfully, it is characterized by free plugin, high accuracy, high linearity, high sensitivity, flexibility

Int. J. Electrochem. Sci., Vol. 11, 2016 2274 and robustness, batch manufacturing and quick response. The CO concentration is corrected for the flexible micro CO sensor. The experimental results prove its reliability and linearity. The flexible micro CO sensor can be embedded in the low temperature fuel cell (figure 5) for local measurement in the future, so that the internal microscopic diagnosis information can be fed back to the user accurately for operation management, and the internal reaction information when the low temperature fuel cell is in operation can be known completely, so as to improve the performance and life of low temperature fuel cell. Fuel cell Flexible micro CO sensor Figure 5. Stereogram of fuel cell embedded with flexible micro CO sensor. ACKNOWLEDGEMENTS This work was accomplished with much needed support and the authors would like to thank for the financial support by Ministry of Science and Technology of R.O.C. through the grant MOST 102-2221-E-155-033-MY3, 103-2622-E-155-006-CC2, 104-2622-E-155-007-CC2, 104-2623-E-155-004- ET, 104-2622-E-155-004 and 105-ET-E-155-002-ET. In addition, we would like to thank the YZU Fuel Cell Center and NENS Common Lab, for providing access to their research facilities. References 1. S. J. Lee, S. Mukerjee, E. A. Ticianelli and J. McBreen, Electrochimica Acta, 44 (1999) 3283-3293. 2. L. Y. Sung, B. J. Hwang, K. L. Hsueh and F. H. Tsau, Journal of Power Sources, 195 (2010) 1630-1639. 3. T. Kadyk, S. Kirsch, R. H. Rauschenbach and K. Sundmacher, Electrochimica Acta, 56 (2011) 10539-10602. 4. T. V. Reshetenko, K. Bethune, M. A. Rubio and R. Rocheleau, Journal of Power Sources, 296 (2014) 344-362. 5. L. Y. Sung, B. J. Hwang, K. L. Hsueh, W. N. Su and C. C. Yang, Journal of Power Sources, 242 (2013) 264-272. 6. V. Spallina, L. Mastropasqua, P. Iora, M. C. Romano and S. Campanari, International Journal of Hydrogen Energy, 40 (2015) 15012-15031.

Int. J. Electrochem. Sci., Vol. 11, 2016 2275 7. K. Oh and H. Ju, International Journal of Hydrogen Energy, 40 (2015) 7743-7753 8. C. M. Pedersen, M. Escudero-Escribano, A. Velázquez-Palenzuela, L. H. Christensen, I. Chorkendorff and I. E. L. Stephens, Electrochimica Acta, 179 (2015) 647-657. 9. X. Hu, C. Lin, L. Wei, C. Hong, Y. Zhang and N. Zhuang, Electrochimica Acta, 187 (2016) 560-566. 2016 The Authors. Published by ESG (www.electrochemsci.org). This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/4.0/).