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Tel: 514-956-7503 Fax: 514-956-7504 Internet: www.megs.ca Email : support@megs.ca Montreal Ottawa St-Laurent Nepean Tel : 514-956-7503 Tel : 613-226-4228 Fax : 514-956-7504 Fax : 613-226-4229 Quebec Quebec Tel : 418-834-7447 Fax : 418-834-3774 MSDS: Boron Trichloride PRODUCT INFORMATION PRODUCT: Boron Trichloride TRADE NAME: Boron Trichloride CHEMICAL NAME: Boron Trichloride SYNONYMS: Trichloro Borane or Boron chloride FORMULA: BCl 3 CHEMICAL FAMILY: Boron Halide SUPPLIER'S NAME: MEGS Inc. SUPPLIER'S ADDRESS: 2675 De Miniac Ville St-Laurent, Qc, H4S 1E5 EMERGENCY PHONE NUMBER: (514) 956-7503 MOLECULAR WEIGHT: 117.16 PRODUCT USE: Various PRODUCT IDENTIFICATION UN 1741 NUMBER: CHEMICAL ID Boron Trichloride HAZARDOUS INGREDIENTS CONCENTRATION 100% CAS # 10294-34 LD(50) None published LC(50) Inhl-Rat 20 ppm/7 h PHYSICAL DATA PHYSICAL STATE: Corrosive liquid with fuming vapors APPEARANCE: Colorless gas producing heavy acidic fumes in moist air. ODOR: Pungent and irritating ODOR THRESHOLD: Unknown SPECIFIC GRAVITY (H 2 O = 1): 1.34

VAPOR PRESSURE: 110 kpa VAPOR DENSITY (air = 1): 4.04 EVAPORATION RATE: Unknown BOILING POINT: 12.5 C FREEZING POINT: -107.5 C ph: Acidic GAS DENSITY: 2.86 kg/m³ @ 15 C, 101.3 kpa COEFFICIENT OF WATER/OIL Hydrolyzes in water to form DISTRIBUTION: hydrochloric and boric acids CONDITIONS OF FLAMMABILITY: FIRE OR EXPLOSION HAZARD MEANS OF EXTINCTION: FLASHPOINT AND METHOD OF DETERMINATION: UPPER EXPLOSION LIMIT (% BY VOL): LOWER EXPLOSION LIMIT (% BY VOL): AUTO-IGNITION TEMPERATURE: FLAMMABILITY CLASSIFICATION: HAZARDOUS COMBUSTION PRODUCTS: EXPLOSION DATA: SENSITIVITY TO STATIC DISCHARGE: None REACTIVITY DATA CHEMICAL STABILITY: Stable INCOMPATIBLE MATERIALS: Water and water vapor CONDITIONS OF REACTIVITY: Presence of moisture & heat HAZARDOUS DECOMPOSITION Hydrolysis yields hydrochloric and PRODUCTS: boric acids ROUTES OF ENTRY: TOXICOLOGICAL PROPERTIES SKIN CONTACT: Boron trichloride is irritating and corrosive to all living tissues. Toxic level exposure to dermal tissue causes hydrochloric acid burns and skin lesions resulting in early necrosis and scarring. SKIN ABSORPTION: None

EYE: Burns to the eye result in lesions and possible loss of vision. INHALATION: Corrosive and irritating to the upper and lower respiratory tracts. Skin burns and mucosal irritation are like that from exposure to hydrochloric acid. Hydrochloric acid burns exhibit severe pain, redness, possible swelling and early necrosis. INGESTION: None ACUTE OVER EXPOSURE EFFECTS: Boron trichloride is irritating and corrosive to all living tissues. Toxic level exposure to dermal tissue cause hydrochloric acid burns and skin lesions resulting in early necrosis and scarring. Chemical pneumonitis and pulmonary edema result from exposure to the lower respiratory tract and deep lung. Symptoms of exposure include tearing of eyes, coughing, laboured breathing, and excessive salivary and sputum formation. Residual pulmonary malfunction might also occur. CHRONIC OVER EXPOSURE EFFECTS: None other than residual pulmonary malfunction which might result from acute effects. EXPOSURE LIMITS: No TWA is established. Recommend using hydrogen chloride which is a hydrolysis product of boron trichloride. Hydrogen chloride has a ceiling limit of 5 molar ppm (ACGIH 1995-1996). IRRITANCY OF PRODUCT: Yes, see above SENSITIZATION TO MATERIAL: None CARCINOGENICITY, REPRODUCTIVE EFFECTS: None known TERATOGENICITY, MUTAGENICITY: None known TOXICOLOGICALLY SYNERGISTIC PRODUCTS: None PREVENTIVE MEASURES PERSONAL PROTECTIVE EQUIPMENT: Gloves of neoprene or butyl rubber, PVC or polyethylene. Safety goggles or glasses and face shield. Safety shoes, safety shower and eyewash "fountain". SPECIFIC ENGINEERING CONTROLS: Any materials suitable for use with anhydrous hydrogen chloride may be used with boron trichloride. Systems and equipment must be kept scrupulously dry. Metals which may be employed are; nickel steel (13.5-32% Ni), Ni-Cu alloys, Hastelloy A, B, C. Refer to Liquid Air's

Gas Encyclopedia for a complete listing. LEAK AND SPILL PROCEDURES: EVACUATE ALL PERSONNEL FROM AFFECTED AREA. Use appropriate protective equipment. If leak is in user's equipment, be certain to purge piping with an inert gas prior to attempting repairs. If leak is on container or container valve, contact the closest MEGS location. WASTE DISPOSAL: Do not attempt to dispose of waste or unused quantities. Return in the shipping container properly labeled, with any valve outlet plugs or caps secured and valve protection cap in place to MEGS for proper disposal. For emergency disposal, contact the closest MEGS location. HANDLING PROCEDURES AND EQUIPMENT: USE ONLY IN WELL- VENTILATED AREAS. Valve protection caps must remain in place unless container is secured with valve outlet piped to use point. Do not drag, slide or roll cylinders. Use a suitable hand truck for cylinder movement. Do not heat cylinder by any means to increase the discharge rate of product from the cylinder. Use a check valve or trap in the discharge line to prevent hazardous back flow into the cylinder. Do not tamper with (valve) safety device. Close valve after each use and when empty. STORAGE REQUIREMENTS: Protect cylinders from physical damage. Store in cool, dry, well-ventilated area of non combustible construction away from heavily trafficked areas and emergency exits. Do not allow the temperature where cylinders are stored to exceed 52 C. Cylinders must be stored upright and firmly secured to prevent falling or being knocked over. Full and empty cylinders should be segregated. Use a "first in - first out" inventory system to prevent full cylinders being stored for excessive periods of time. TDG CLASSIFICATION: 2.3 (8) WHMIS CLASSIFICATION: A, D1, E SPECIAL SHIPPING INFORMATION: Always secure cylinders in an upright position before transporting them. NEVER transport cylinders in trunks of vehicles, enclosed vans, truck cabs or in passenger compartments. Transport cylinders secured in open flatbed or in open pick-up type vehicles. FIRST AID MEASURES SPECIFIC FIRST AID PROCEDURES: PROMPT MEDICAL ATTENTION IS MANDATORY IN ALL CASES OF OVEREXPOSURE TO BORON TRICHLORIDE.

INHALATION: Conscious persons should be assisted to an uncontaminated area and inhale fresh air. Unconscious persons should be moved to an uncontaminated area, given assisted resuscitation and supplemental oxygen. Keep the victim warm and quiet. Assure that mucous or vomited material does not obstruct the airway by positional drainage. Delayed pulmonary edema may occur. Keep patient under medical observation for at least 24 hours. EYE CONTACT: PERSONS WITH POTENTIAL EXPOSURE TO BORON TRICHLORIDE SHOULD NOT WEAR CONTACT LENSES. Flush contaminated eye(s) with copious quantities of water. Part eyelids to assure complete flushing. Continue for a minimum of 15 minutes. SKIN CONTACT: Flush affected area with copious quantities of water. Remove affected clothing as rapidly as possible. PREPARED BY: Safety Department DATE PREPARED: 09/01/1999 LAST REVISION DATE: 05/21/2002 PREPARATION INFORMATION THE INFORMATION, RECOMMENDATIONS AND DATA CONTAINED IN THIS DOCUMENT ARE INTENDED TO BE USED BY PROPERLY TRAINED AND QUALIFIED PERSONNEL ONLY AND AT THEIR SOLE RISKS AND DISCRETION. THE INFORMATION, RECOMMENDATIONS AND DATA HEREIN CONTAINED ARE DERIVED FROM SOURCES WHICH WE BELIEVE TO BE RELIABLE. HOWEVER, MEGS INC. MAKES NO REPRESENTATION AND GIVES NO WARRANTY OF ANY KIND WHATSOEVER WITH RESPECT TO THEIR ACCURACY OR COMPLETENESS AND ASSUMES NO LIABILITY FOR DAMAGES OR LOSS ARISING DIRECTLY OR INDIRECTLY FROM THEIR USE, WHETHER PROPER OR IMPROPER.