Technologies challenges and opportunities in UV and thermal Nanoimprint Lithography Roll2Roll technologies for flexible hybrid electronics Thomas Kolbusch, Vice President, Coatema GmbH Wilfried Schipper, Head of BU Films, Temicon GmbH 05.04.2018 2011 2018 COATEMA Coating Machinery GmbH www.coatema.de 1
Outline Coatema & TEMICOAT Introduction Products Equipment Summary 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 2
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innovations Introduction Coatema quality made in Germay working widths from100 mm coating bespoken equipment up to 5,400 mm printing laminating founded 1974 Film/Paper Printed Electronics Prepreg Membranes Renewables Textile Glass From Lab2Fab R&D projects & network worldwide service 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 4
Introduction 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 5
Introduction TEMICOAT The leading producer of high-quality micro- and nanostructured products serving as key components for applications like lighting, display, life science, solar technology and environmental engineering. The market leader in coating, printing and laminating technology with more than 40 years of experience in providing the most advanced scale-up solutions from lab to fab as well as state-of-art full production lines. 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 6
Introduction Why we are here? 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 7
Introduction Applications 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 8
Introduction Why we are here! We developed a seamless, endless patterning technology and deliver the chemistry, substrates and the equipment to provide you with patterns beyond light guides. This is the added surface value revolution in trillions of products 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 9
Nanoimprint technology Technology & Processes 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 10
Hard mold Soft mold Ultra Violet NIL Thermal NIL Technology & Processes NIL Nano imprint lithography R2R roll-to-roll R2P roll-to-plate P2P plate-to-plate UV-curable lacquer/ resin short process time processing at room temperature Hard or soft molds Low imprint pressure High replication resolution Low material shrinkage Thermoplastic substrate/ resin Long process time processing above T G Hard molds High imprint pressure one-component system High material shrinkage + wear behaviour + imprint pressure + life time of replication mold + life time of master mold + resolution + flexibilty 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 11
Nanoimprinting Combi System 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 12
Introduction Comparison of Printing Processes Nanoscaled Imprint Microscaled Imprint 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 13
Technologies & Processes Nanoimprint Lithography THERMAL NIL UV NIL (1) Resist coating (1) Resist coating Imprint mold Imprint mold (solid) thermoplastic polymer resist Photopolymer resist (liquid) Substrate Temperature above glass transition temp Substrate (2) Heat and Press (2) Expose and Press Heat UV light Room temperature (3) Cool and Separate (3) Separate (no cooling) 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 14
Technologies & Processes Nanoimprint Lithography THERMAL NIL vs UV NIL Imprint into substrate possible Great depths possible (slower) heat distribution Thermal conductive mold Thermal expansion of mold and resist Cooling Higher pressure (faster) Uniformity Less viscous resists (less pressure) Soft molds possible UV resists (Transparent substrate or mold) 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 15
Technologies & Processes Nanoimprint Lithography UV-NIL system designs: Surface activation Corona, plasma, chemical treatment Coating Slot die, knife, roller coater UV curing Mercury, LED UV radiator NIL system designs: Heating IR/ NIR, inductive, laser heating or heated fluids in embossing drum Replication mold Drum, endless belt, film One-/ Multi-Temperature zones 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 16
Technologies & Processes Nanoimprint Lithography 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 17
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UV - NIL Machines for Lab2Fab - R2R R2P 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 19
Technologies & Processes Nanoimprint Lithography Process parameters (selection): Resist Chem. Formulation Viscosity/ Rheology Film Chem. Formulation Chemical/ mechanical pre-treatment Tool Hard/ soft mold Anti-adhesion layer UV-source Spectral distribution LED-/ conventional source Production system Web (tension) control Process specific sub-assemblies 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 20
Technologies & Processes Nanoimprint Lithography 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 21
Technologies & Processes Nanoimprint Lithography Influences on the quality mainly result from Substrate: Impurities/ Dust Wetting behaviour Embossing drum: Bubble enclosures Machining errors (e.g. badly joint sleeves) Wear Partial/ total lacquer adhesion Resist: Impurities/ Dust Bubbles/ Foam Geometrical defects Coating homogeneity 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 22
Technologies & Processes 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 23
echnologies & Processes Nanoimprint Lithography Protective film Coating Unit: Knife Slotdie Rewinding Unwinding UVNIL 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 24
Coating and Printing for NIL Nanoimprint Lithography Slot die coating for pre-metered film coating Layer control Level control in the nip 12/9 position Intermittent ink control 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 25
Coating and Printing for NIL Nanoimprint Lithography Nip coating Layer control by gap Level control in the nip Compact process 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 26
Coating and Printing for NIL Nanoimprint Lithography Homogeneous Structure Inhomogeneous Structure 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 27
Coating and Printing for NIL Nanoimprint Lithography Printing for inhomogeneous structure? Case Knife Inkjet Layer control inhomogeneous Matched level control in the nip Nip material fits sleeve consumption 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 28
Coating and Printing for NIL Nanoimprint Lithography Pretreatment of substrate? Good nip material control? Total layer thickness? Coating void free? 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 29
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Introduction Comparison Printing Parameters 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 31
Technologies & Processes Classical Approach Structured nickel plate Welded sleeve with seam Final product with seamlines New Approach Seamless structured sleeve Seamless sleeve on imprint cylinder Final product without seamlines 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 32
Imprint tools 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 33
UV - NIL Laser Interference patterning 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 34
Coating and Printing for NIL Nanoimprint Lithography Aspect ratio (AR) 5.4:1 (h:w) (ETFE mold, UV R2R NIL) [1] Residual layer (RL) thickness 30 nm [2] Coating thickness 160 nm [2] 150 µm [3] Film speed 15m/min [4] Resolution 70 nm (gratings of 70-nm lines) [4] [1] Ahn, B.S.H.; Guo, L.J.: High-Speed Roll-to-Roll Nanoimprint Lithography on Flexible Plastic Substrates. In: Advanced Materials. vol. 20. 2008, p. 2044-2049 [2] Mäkelä, T.; Haatainen, T.; Majander, P.; Ahopelto, J.: Continuous roll to roll nanoimprinting of inherently conducting polyaniline. In: Microelectronic Engineering. vol. 84, 2007, p. 877-879 [3] Shan, X.C.; Lau, S.K.; Mohahidin, M.B.; Liu, T.; Lu, A.C.W.: Formation of Large Format Functional Films via Roll-to-Roll (R2R) Ultraviolet (UV) Embossing. In: IEEE Proc. of 13th Electronics Packinging Technology Conference. 2011 [4] Kooy, N.; Mohamed, K.; Pin, L.T.; Guan, O.S.: A review of roll-to-roll nanoimprint lithography. In: Nanoscale Research Letters. vol. 9:320, 2014 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 35
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Display Bionics Life Science Photonics Applications Lightguides OLED 3D Displays Light Enhancement AR Surfaces Lotus Moth Eye Shark Skin Gecko Micro Fluidics Micro Titer Plates Cell Separation Printed Electronics Solar Optical Encoders Micro Lens Arrays Waveguides 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 37
Applications Display Photonics Bionics Life Science Diffractive Printed Electronics Retroreflectors Optical Elements Antibacterial Surfaces Super Hydrophobic Surfaces Shark Skin Haptic Surfaces Microfluidic Structures 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 38
Applications 50 µm 10 µm Shark Skin (Riblet) 10 µm Anti-bacterial Surfaces Micro and Nanostructures under SEM Haptic Surfaces 200 500 µm µm 50 µm 10 µm Micro Pillars (Super-Hydrophobic Surfaces) 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 39
Applications 100 µm Diffractive Optical Elements Retroreflectors Micro and Nanostructures under SEM 500 nm Microfluidic Structures 500 nm 10 µm Printed Electronics 2 µm 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 40
Applications Hierarchical Structures Hierarchical Micro-/ nano structures Anti-sticking properties Perforation 3-layered antimicrobial film Active Layer Intermediate layer References: [19-20] Inner layer 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 41
Products 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 42
roducts temilux TO Transmission Optics temilux LG Lightguide Solutions temilux 3D 3D lighting effects 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 43
Equipment 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 44
Nanoimprinting Combi System 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 45
UV - NIL Lab2Fab - R2R & R2P Temicoat Test Solution S2S Temicoat Test Solution R2R Temicoat 300mm R2R Temicoat 300mm R2P 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 46
UV - NIL Machines for Lab2Fab - S2S A4 Size or A3 Structures on film supplied from Temicoat 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 47
UV - NIL Machines for Lab2Fab - R2R - 100mm 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 48
UV - NIL Machines for Lab2Fab - R2R 300mm 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 49
UV - NIL Machines for Lab2Fab - R2P 300 mm 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 50
UV - NIL Machines for Lab2Fab - R2R - 1.600 mm 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 51
UV - NIL Machines for Lab2Fab - R2P - 1.600 mm 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 52
UV - NIL Machines for Lab2Fab - R2R & R2P - 1.600 mm 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 53
Proof of concept 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 54
Temicoat Nanoimprint R2R 300 Qualification Coating Unit: Knife Slotdie Protective film Unwinding UVNIL Rewinding 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 55
Temicoat Nanoimprint R2R 300 Qualification direct resist application Unwinding UVNIL 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 56
Temicoat Nanoimprint R2R 300 Qualification How to not do NiL: Too much resist Too little UV Too fast substrate speeds 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 57
Internal Qualification Microscale Successful Imprint several mm down to 40µm feature size 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 58
Internal Qualification Microscale Characterization 25µm dry layer thickness Aspect ratio 1:1 But: 50µm Resist too brittle 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 59
Internal Qualification Nanoscale 380nm feature size Aspect ratio 2:1 low density of defects 10µm 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 60
Internal Qualification Typical Defects Imprint defects: 1. Surface scratches 2. Pointdefects 3. Damages in sleeve 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 61
Temicoat Nanoimprint R2R 300 Nano scale 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 62
Temicoat Nanoimprint R2R 300 Nano scale 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 63
Temicoat Nanoimprint R2R 300 Nano scale 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 64
Summary 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 65
Summary Process value chain Simulation Origination Tooling Replication 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 66 3
Summary Process value chain 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 67
Process value chain Products 3D effects Life sciences Architecture Solar Automotive Security Hologramms Optics Display 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 68
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Thank You www.coatema.de tkolbusch@coatema.de 05.04.2018 2018 COATEMA Coating Machinery GmbH www.coatema.de 70