Nanoenabled Directions for N/MEMS

Transcription

1 Nanoenabled Directions for N/MEMS MTO Symposium Dennis Polla DARPA MTO 6 March 2007 San Jose, CA

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3 A MTO Nanotechnology Vision Nanotechnology Enabled Opportunities Chip-Scale Microfluidic Analyzers Nanosensors Nanowires for Sensors and Electronics 2

4 Nanotechnology and N/MEMS Two key themes: Nanotechnology enables new applications and drives performance Nanotechnology is emerging as a key aspect of integrated microsystems 50µm light in STM Image 1 µm B Images courtesy of Philip Wong, Stanford University Figures courtesy of IBM Research A 3

5 N/MEMS Program Examples Micro Gas Analyzers N/MEMS S&T Fundamentals Micro Cryogenic Coolers CNT Preconcentrators CNT Sensors Thermal nanostructures Nanomechanical Sensors NEMS Biosensors Nanoenabled cryogenic cooling CNT Detectors Nanoresonators Functionalized Chemiresistors Reconfigurable Nanoelectronics 4

6 Chip-Scale Gas Analyzers Program Objective: Enable remote detection of chemical agents via tiny, ultra-low power, fast, high sensitivity, chip-scale gas analyzers with low incidence of false positives. 5

7 Sugar Cube Size Instrument Objective: Enable remote detection of chemical agents via tiny, ultra-low power, fast, high sensitivity, chip-scale gas analyzers with low incidence of false positives. Air Sample Preconcentrator Separator Detector Control Electronics C B A D E 6

8 Integrated N/MEMS Components Analytes Compacted Slice of Analytes Separated Analytes Input Gas Mixture Pre-Concentrator Separator Detector 2.5µm Very high effective surface area Chemical functionalization DRIE Chemical polishing Low proff-mass Chemical functionalization 7

9 Enhancement of Performance No Preconcentrator Preconcentrator Preconcentrator Signal per ppb Time seconds Signal per ppb Gain ~ 10, Time seconds TOL C-12 FID signal, pa DMMP DEMP DIMP No Preconcentrator DCH C9-OH H2O Added Mass (ag) f (khz) 75 mv bias 7 ag SF 6 pulses Time (sec) CO 2 SF 6 1 Hz/zg slope f (khz) CO 2 : (1.0 +/-0.3) Hz/zg SF 6 : (0.9 +/- 0.3) Hz/zg Time, sec 8

10 Nanotechnology Benefit Nanotechnology Lessons Learned: Nanotechnology and MEMS (a terrific combination!) Size: 40,500 cm 3 20,000X 2 cm 3 Nanotechnology enables systems with unprecedented performance: Sensitivity: 1 ppb 1,000X < 1 ppt Analysis time: 15 min 225X 4 s Energy per analysis: 10 4 J 10,000X 1 J Nanotechnology Opportunity Collection Clean-up Micro Gas Analyzers (MGA) Program Preconcentration Separation Detection Possible Possible Possible Multiplexing Multiplexing Multiplexing 9

11 N/MEMS S&T Fundamentals Microfluidics Data Storage Biology & Medicine rf Comms Optical Comms MEMS/NEMS - Surfaces & Interfaces - Reliability Physics - Scaling Physics - Materials & Processes - Interconnections - Noise Mechanisms - Modeling - Signal Processing Chemical Sensing Navigation Goal: Support basic research of importance to DoD in N/MEMS Technical Challenges Failure Mechanisms and physics New materials and processes Scaling laws in multiple domains Interfaces and interconnects between the macro-micro-nano worlds. Biotechnology Uncooled IR Displays 10

12 N/MEMS S&T Fundamentals Microfluidic Processors RF Scaling UC Berkeley Reliability Physics Non-lithographic Fabrication MIT UC Irvine Biosensors Harvard Functionalized Surfaces Nano Probes Cornell MEMS/NEMS - Surfaces - Interfaces - Reliability - Scaling - Materials - Fabrication - Modeling - Nanostructures Self-Configuring ICs UC San Diego Materials Interfaces Stanford Nanowire Sensors Multi-Physics Modeling Colorado Metallization Layers STI M1 Caltech A B BOX Carnegie Mellon Illinois Silicon substrate 500 nm 11

13 Nanotechnology Vision Six Nanoenabled Opportunities 1. Nanoenabled Electronics 2. Nanoenabled Informatics 3. Nanoenabled Biotechnology 4. Nanoenabled Plasmonics and Photonics 5. Nanoenabled Sensors 6. Nanoenabled Energy 12

14 Nanoenabled Electronics Nanowire Electronics PMMA Nanotube gate Self-Configuring Electronics. K -V CNT V out V in n-fet +V p-fet SiO 2 back gate A B phase change material GeSbTe V out [V] V in Gain~2 [V] Key Challenges Controlled Growth Selective Placement Interconnections plan view of 1 tile on chip (100 um x 100 um) Total T. number Schlesinger, of tiles DARPA = N/MEMS S&TFundamentals, CMU

15 Self-Configuring ICs NEMS Thermal Actuators Designed-in stress gradient 3 µm post, 230 nm tip area oxide Si substrate PC via 230 nm 1.2 µm Imagine Dynamically changing the basic function of an electronic chip according to current need. 14

16 Nanoenabled Informatics Storage Media Feature size reductions dramatically increase the capacity of storage media. Nanotechnology enables future optical and magnetic storage. Nanomechanical Memory IBM A probe cantilever array in the IBM Millipede. [H. Goldstein] Key Aspects MEMS probes used for media read/write 3 Tbits/inch2 demonstrated V = 0.1 m/s dwell 1 µm = 10 µs switching 10 nm = 100 ns 15

17 Nanoenabled Biotechnology Medical Therapeutics / Drug Delivery Therapeutic nanoparticles can be targeted to specific biological sites. Nanoparticles N. Halas, Rice University Imagine Site specific targeting of nerves with therapeutic nanoparticles that enhance sensory perception. 16

18 Nanoenabled Plasmonics/Photonics Plasmonics SERS Nanosensors Basic physics and materials science associated with SERS nanoparticles as physical, chemical, and biological nanosensors Spectral finger-printing - sub-ppt sensitivity - P D > 99.99% - FAR < 1: Fast response < 1 s Key Challenges 2000nm Control of EM-field Enhancement Materials properties Imagine Nanosensors with ppq sensitivities and no false alarms. 17

19 Nanoenabled Sensors Nanowire Sensors Nanomechanical Sensors Nanowires, CNTs, nanocantilevers, nanoparticles, quantum dots, nanoporous, magnetic materials Application examples: Gas sensing Protein/DNA detection Particle detection Chemical detection Signal amplification (e.g.spr) Imagine Integrated multi-functional nanosensor modules capable of multiplexed bioanalysis and physical sensing

20 Nanoenabled Energy Nanobatteries Piezoelectric Energy Scavengers Zhang, Nano Letters, 3 (2004) ZhangP. Yang, U.C. Berkeley Sandia National Laboratories Thermophotovoltaic Power Converter 1 μm Cornell Prototype MEMS Continuous- Mode Piezo-Cantilever Beta converter Imagine Never having to replace a battery. 19

21 Nanowires for Sensors & Electronics P. Yang, U.C. Berkeley Ag nanowires for explosives detection M. Natan, Oxonica Scattering Intensity (AU) SurroMed Encoded nanowires Raman Shift (cm -1 ) Au nanowires for multiplexed bioanalysis A. Zhang, GE Goal: Develop new chemical, and biological nanosensors based on nanowires Applications All types of sensing Energy harvesting Thermal management New class of nanosensors for the detection of biochemical warfare agents. S. Guha, IBM Vertical selective growth of Ge nanowires for sensor and electronics applications Assembled Co nanowire 20

22 Lessons Learned What are the opportunities for nanotechnology? 1. Largest opportunities for nanotechnology are in enabling new systems 2. Look to nanotechnology to enable performance; not drive down cost. 3. Nanotechnology apps are best driven from top-down not bottomup. 4. Multi-domain scaling is the key to performance-driven nanotechnology. 5. World competition is intense. Success in nanotechnology requires a vision, patience, and entrepreneurial spirit. 21

23 Summary Many, many new challenges remain (Challenge = Opportunity) Microfluidic Analyzers Preparation (nanostructures) Preconcentration (nanochem) Nanoanalytics Nanodetectors (multiplexing) SERS Nanosensors Enhancement Factor (EM) Substrates Geometries Porous nanoparticles Nanowires Nanosensors Nanosolar cells Nanoenergy scavenging Thermal interfaces 22

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