Bearings for Clean Environments

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1 SPACEA Series Bearings for Clean Environments Virtually no particle emissions Optimum performance at high temperatures

2 Part of NSK s SPACEA Series for special environments, these bearings for clean environments utilize stainless steel combined with NSK cleanroom grease, LDF (special fluororesin) coating, self-lubricating fluorine resin and/or ceramics. They are especially suitable for liquid crystal and semiconductor manufacturing equipment. Bearings for Clean Environments SPACEA Series Bearings for Special Environments Clean Vacuum Bearings for Cleanrooms (Normal atmosphere, room temperature) LG2 Grease-Packed Bearings LGU Grease-Packed Bearings Corrosion-Resistant High Temperature Nonmagnetic Bearings for Conveyors (Normal atmosphere, high temperature/ Vacuum, room temperature) LGA Grease-Packed Bearings Low Temperature Bearings for Coating Processes (Vacuum, high temperature) Bearings for clean rooms Radiation-Resistant Water and Particle Contaminated LDF-Coated Bearings Bearings with Self-Lubricating Fluorine s High Speed Application Ranges of Bearings for Clean Environments - Degree of vacuum, Pa LGA grease-packed bearings Bearings with self-lubricating fluorine cages (T3 specification) LDF-coated bearings Bearings with self-lubricating fluorine cages (TA specification) 2 LG2 grease-packed bearings LGU grease-packed bearings -3 3 Temperature, C Note: LDF-coated bearings and bearings with self-lubricating fluorine cages can also be used under the operating conditions of the grease-packed bearings. 1

3 SPACEA Series Bearings for Clean Environments Bearings for conveyors Bearings for coating processes Types of Bearings for Clean Environments Operating conditions Application Bearing type and nomenclature Bearing specifications Temperature Normal atmosphere Vacuum Cleanrooms LG2 grease-packed bearings Example: LZZ-H, LG2 LGU grease-packed bearings Example: LZZ-H, LGU : : Resin or stainless steel : LG2 grease : : Resin or stainless steel : LGU grease C max C max No No Conveyors LGA grease-packed bearings Example: LZZC3-H, LGA : : Resin or stainless steel : LGA grease C max C max No LDF-coated bearings Example: 1LZZC-HPF : or ceramics : + LDF coating : Solid lubricant (fluororesin) C max Coating processes Bearings with self-lubricating fluorine cages T3 specification Example: 1LZZC3-HT3 TA specification Example: 2LZZC-HTA : or ceramics s: Self-lubricating fluorine resin : Solid lubricant (fluororesin) C max 3 C max 2

4 Bearings for Cleanrooms (Normal atmosphere, room temperature) Bearings with LG2 and LGU Grease Compared to fluorine grease, LG2 and LGU have: Lower particle emissions Lower and more stable torque Longer life and superior rust prevention LGU is free from metallic elements Temperature ranges: LG2: - C C LGU: -3 C C Particle emissions (.11 µm or larger), Bearing: VV 1,,,,, Total revolutions LG2 LGU Grease A: Mineral oil/li soap Grease B: Ester oil/li soap Grease C: Fluorine oil/fluorine compound Fig. 1 Particle emissions of bearings with LG2, LGU and competing greases Resin or stainless steel LG2 or LGU Cleanroom Grease Atmospheric and room temperature Liquid crystal and semiconductor manufacturing equipment Hard disk manufacturing equipment Food processing equipment Medical equipment Bearing Nomenclature: LZZ-HT1, LG2 or LGU Fig. 2 Silicon wafer transfer robot Bearings for Conveyors (Normal atmosphere, high temperature/vacuum, room temperature) LGA Grease-Packed Bearings Resin or stainless steel LGA Grease (Wear-resistant fluorine grease) Greater durability than obtained with fluorine grease (Fig. 3) Low particle emissions in vacuum environments (Fig. ) Low vapor pressure Life, h LGA grease-packed bearing Bearing with competing fluorine grease Fig. 3 Bearing durability in vacuum environment Bearing Nomenclature: Test conditions Bearing: Axial load: N Speed: rpm Pressure: - Pa Temperature: 2 C LZZC3-H, LGA Total particle emissions up to. rotations Normal atmosphere, high temperature/ Vacuum, room temperature Liquid crystal and semiconductor manufacturing equipment Hard disk manufacturing equipment Food processing equipment 1 Test conditions Bearing: Axial load: 1 N Speed: rpm (Rotational direction reversed after every revolutions) Pressure: - Pa Temperature: 2 C LGA grease-packed Bearing with Bearing with bearing fluorine grease A fluorine grease B Fig. Particle emissions of bearings in vacuum environment 3

5 Bearings for Coating Processes (Vacuum, high temperature) LDF-Coated Bearings LDF coating or ceramics + LDF coating LDF coating Low particle emissions in normal atmosphere and vacuum environments (Fig. ) Excellent heat resistance Long life Low outgassing Particle emissions (.21 µm or larger), ft 3 Bearing Nomenclature: LDF coating Sintered fluororesin Silver coating Temperature, C Speed: rpm; Axial load:. N Fig. Particle emissions of bearings in hightemperature, vacuum environment LZZC-HPF Vacuum ( - Pa) Vacuum, high temperature Sputtering equipment (Fig. ) Substrate transporter Wheels containing LDF-coated bearings Fig. Sputtering equipment Bearings with Self-Lubricating Fluorine Resin s Self-lubricating fluorine resin cage or ceramics Self-lubricating fluorine resin Provided by cage Long life Low particle emissions in normal atmosphere and vacuum environments (Fig. ) Excellent heat resistance (T3 specification: up to C; TA specification: up to 3 C) Low outgassing (Fig. ) Particle emissions (.21 µm or larger), h 1 LDF-coated bearing Bearing with self-lubricating fluorine resin cage Bearing: Axial load: N Rotating speed: rpm Degree of vacuum: 1. - Pa 3 Hours Fig. Particle emissions in vacuum environment Electric current, A - 1 Pressure: 2. - Pa Temperature: C Mass number Fig. Analysis results on outgassing Vacuum, high temperature Sputtering equipment (Fig. ) Liquid crystal and semiconductor manufacturing equipment Hard disk manufacturing equipment Solar cell manufacturing equipment Robots for vacuum environments Bearing Nomenclature: LZZC3-HT3 (Up to C) LZZC-HTA (Up to 3 C)

6 Standard Bearing Numbers R Basic bearing number Shaft (mm) Boundary dimensions (mm) Bore Outside Width SPACEA Series Bearings for Clean Environments Basic bearing number Shaft (mm) Boundary dimensions (mm) Bore Outside Width

7 Addendum The use of fluorine in the lubrication for bearings for clean, vacuum environments limits the bearings to light-load applications. For heavy-load applications in vacuum environments where low particle emissions are required, NSK recommends the three types of bearings with MoS 2 solid lubricant listed below. Bearings with Self-Lubricating s (up to C) Please refer to catalog number E2 for details. Outer ring Self-lubricating cage Inner ring with MoS 2 solid lubricant cage Long life in high-temperature vacuum environments (up to C) Low particle emissions Low outgassing Bearing Nomenclature LZZC3-HMST Bearings with Self-Lubricating Spacer Joints (up to 3 C) Availability Ball bearings with bore s of mm or more Please refer to catalog number E2 for details. Outer ring Spacer joints Inner ring with MoS 2 solid lubricant spacer joints Long life in high-temperature vacuum environments (up to 3 C) Low outgassing Bearing Nomenclature LZZC-HMSS2 Availability Ball bearings with bore s of mm or more SJ Bearings (up to C) Please refer to catalog number E23 for details. Spacer joint with MoS 2 solid lubricant spacer joints using a specially shaped cage Long life in high-temperature vacuum and normal environments (up to C) Low outgassing Bearing Nomenclature LZZ-HMLSJ Availability Bearing nos.,, 1, 2, 3,,, 1, 2 and 3