Plasma and Beam Equipment for Materials Processing (Education and Science)

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Tomsk Polytechnic University (TPU) Physics and Technology Institute (PTI) Plasma and Beam Equipment for Materials Processing (Education and Science) Prof. Valery Krivobokov

Russia, Siberia and Tomsk Moscow Tomsk

Tomsk city Founded: 1604 Population: 520 000 River: Tom Universities: 6 Students: 90 000 Tomsk is a prominent academic and scientific centre. There are 6 universities, 20 higher research institutes and many specialized colleges and schools training specialists in engineering, medicine, education, art, etc. About 90 thousand students live and study in Tomsk. Currently, each sixth person of the city is a student. Tomsk is often called a students' town. There are more than 70 industrial enterprises in Tomsk region. The main branches of industry are: oil and gas, instrument making, machine building, metal and wood processing, food processing, thermal and electric power production. Tomsk Scientific Center of Siberian branch of Russian Academy of Sciences is located here. It consists of 5 academic institutes and a series of subdivisions. Tomsk is a cultural centre. There are many theatres, Philharmonic Society, art and museums of local lore, cinemas, libraries and historical places. Tomsk is remarkable for its wooden architecture. Tomsk carefully keeps houses and buildings of 19th century in the «Old Town».

Tomsk Polytechnic University Founded in 1896, Tomsk Polytechnic University is the oldest technical educational institution in the Asian part of Russia. More than 120 000 specialists have graduated from the university, over 300 of them have become Academicians of the Russian Academy of Sciences, honorary instructors and researchers, winners of prestigious Russian and international awards. Graduates of Tomsk Polytechnic University work at many industrial plants, research institutes, and socioeconomic services throughout Russia and abroad. Nowadays, 23,400 under- and post-graduates, 580 PhD-students and 46 doctoral students study at the university comprehending more than 120 courses in different fields of engineering, economics, marketing, management, humanities and linguistics under the guidance and supervision of 1,924 professors and instructors of which 195 Doctors and 800 Candidates of Sciences (Ph.D). Annual number of graduates amounts to nearly 2500. 7 university branch campuses and 12 representative offices functionate in many cities of Russia, CIS countries, as well as in Germany (Karlsruhe), Czech Republic (Prague), Republic of Cyprus (Nicosia).

Physics and Technology Institute (PTI) The Physics and Technology Institute (PTI) was organized on June 1, 2010 according to the Developing Program of TPU as a National Research University. It includes the scientific laboratories of Nuclear Physics Institute and 2 academic departments (physical technical faculty and faculty of the natural science and mathematics). PTI was a base for formation of several institutes, including Institute of High Current Electronics of the Siberian Branch of Russian Academy of Sciences, more than a ten of departments and laboratories in other universities and scientific organizations. The total number of employee (including part time employed) 760, among them, research and teaching staff 390 (2 of academicians, 54 of DSc., and 157 of PhD.). The number of doctoral candidate is 10, post graduates 80, students of PI about 1,300, students of the whole TPU (physical and mathematical training) about 4,000. 5

Structure of the Institute Director Academic Council Deputy Director for Research Scientific Division Deputy Director for Academic Work Academic Division Deputy Director for Engineering Support Division of Engineering Support IT Division Library, Patent work group, Metrological service, and so on Department of Teaching Foreign Language Department of Radiation Safety, Department of Chief Engineer, Material Processing Factory Nuclear Physics Division Nuclear Technology Division Technical Physics Division 6

Educational Programs 011200 Physics Bachelor s Degree Majors: Condensed-Matter Physics, Beam and Plasma Technologies. 140800 Nuclear Physics and Technology Majors: Atomic Nucleus Physics, Radiation Safety of a Human and Environment, Kinetic Phenomena Physics, Nuclear Reactors and Energy Facilities, Safety and Nonproliferation of Nuclear Materials. Engineer s Diploma 140306 Electronics and Automatics of Physical Facilities 240601 Chemical Technology of Present Power Engineering Materials 7

Academics: Master Courses 011200 Physics Master s degree Medical Physics, Accelerator s Physics, Kinetic Phenomenon Physics, Condensed-Matter Physics, Physics and Technical Problems of Atomic Power Engineering, Nuclear-Technical Checking and Regulation 223200 Engineering Physics Programs: Hydrogen Power, Beam and Plasma Technology (65 studients+40 staffs), 4 years (Bachelor)+ 2 years (Master)+ PhD. 150100 Material Science and Technologies of Modern Materials Programs: Up-to-Date Materials and Technologies in Medicine, Medical Engineering, and Dentistry. 8

Applied Physics Institute Facilities and Laboratory Equipment cyclotron with controlled ion energy; nuclear reactor; high current impulse ion and electron accelerators; microtones (2 units); Van de Graaff accelerator for 2.5 MeV; analytical equipment for investigation of properties, composition, and structure of substances; plasma facilities (about 20 units); laboratory equipment for academic process (about 300 sets); and so on. 10

Science in PTI The main areas of research 1.Radiation physics of solids. 2.Nuclear physics and technologies. 3.Techniques of charged particles beam generation and transportation (accelerators). 4.Developiment of technologies and equipment for plasma processing of materials. 5.Generation of microwave irradiation (more than 1 GHz) by high-power pulsed electron beams. 6.Production of isotopes for medicine. 7.Silicon nuclear doping. 9

Linear induction accelerator of electrons with relativistic magnetron Electron energy 400 kev. Impulse current 5000 A. Impulse frequency 300 Hz. Impulse duration 200 ns. 11

Impulse source of microwave radiation Components: inductive energy storage, vircator (virtual cathode), anechoic chamber. Parameters: energy 500 kv; radiation power 200 MW; impulse frequency 2.8 3 GHz; pulse duration 100 200 ns. 14

Setup for complex ion beam and plasma processing Vacuum arc source with filter to clean plasma from micro drops Gas plasma generator Magnetron sputtering system High frequency short pulse voltage generator Ion and plasma source RADUGA-5

Applications Surface modification of turbine blades and cutting tools. It is possible to treat both metals and dielectrics and make nanostructured intermetallids, diamond like and some other coatings with high adhesion. The coatings have close packed structure with low surface roughness (laboratory # 22).. 17

Research Developments and Implementations 2010 1. Technological complex for beam and plasma processing of structural parts of new generation aircraft engine (laboratory # 22). 2. Resource efficient plasma chemical technology for producing carbon nanomaterial and hydrogen from natural gas (laboratory # 42). 18

Plasma equipment and technologies of material processing The aim is development and production of new technological plasma sources for space, optical, microelectronics industries, production of building materials and other branches. 20

Setup with magnetron plasma sources and ion beams Yashma 16

Setup Opal 3 PRO 21

Technological line based on Opal 5

Plasma coatings for satellites protection In 2 O 3 (95%) - SnO 2 (5%) (antistatic agent) Ag Glass Bonding agent Ni(80%) Cr (20%) Setup ARM NTP 2 23

Developments and Implementations Facility for plasma coating deposition on elements of space craft ARM UVK Setup for metallization of large size reflectors of space craft KO MKR 23

Developments and Implementations Facility for plasma coating deposition on elements of space craft ARM UVK (laboratory # 23) 1. The setup for metallization of large size reflectors of space craft KO MKR. 2. The setup Yashma 4 for

Plasma systems used in educational process

New Projects 1. New vacuum setup for simulation of space conditions by means of plasmas and charge particle beams. 2. Magnetron with liquid target. 12

Thank you!