curamik CERAMIC SUBSTRATES AMB technology Design Rules Version #04 (09/2015)

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curamik CERAMIC SUBSTRATES AMB technology Design Rules Version #04 (09/2015)

Content 1. Geometric properties 1.01. Available ceramic types / thicknesses... 03 1.02. thicknesses (standard)... 03 3. Quality 3.01. Solderability wetting on metallization... 08 3.02. Thick wire bondability on metallization... 08 1.03. Max. usable area... 03 1.04. Delivery form... 03 1.05. Tolerances of single parts outside dimensions... 04 1.06. Available material thickness combinations... 04 1.07. free perimeter... 04 1.08. Conductor dimensions width / spacing... 04 1.09. Sidewall of etched pattern + Brazing side clearance... 04 1.10. Mismatch copper pattern front/back... 05 1.11. Flatness (layout related)... 05 1.12. Etching tolerance... 05 1.13. Chip-off at ceramic edge... 05 1.14. Tolerance of total thickness (ceramic + copper)... 05 4. Physical properties 4.01. Thermal conductivity... 09 4.02. Electrical resistivity of ceramic... 09 4.03. Dielectric constant... 09 4.04. Dielectric loss... 09 4.05. Dielectric strength (DC voltage) of ceramic... 09 4.06. Electrical conductivity of copper surface... 09 4.07. peeling strength... 09 4.08. Application temperature... 09 4.09. Bending strength (bare ceramic)...10 4.10. Fracture toughness (K 1c )...10 4.11. Young s modulus (bare ceramic)...10 2. Additional design features 4.12. Coefficient of linear thermal expansion (CTE)...10 2.01. Platings over entire surface... 06 2.02. surface... 06 2.03. Lifetime AMB vs. DBC (typ. values)... 06 2.04. Solder stop... 07 2.05. Holes and laser cut outlines... 07 02

Available ceramic material Si 3 N 4 Silicon Nitride 1. Geometric properties 1.01. Available ceramic types / thicknesses ceramic thickness mm 0.25 0.32 Si3N4 1.02. thicknesses (standard) Si3N4 copper thickness mm 0.3 0.5 0.8 Note other thicknesses on request 1.03. Max. usable area 127 x 178 mm 1.04. Delivery form Single parts Master card minimum dimension 15 x 15 mm edge length, smaller on request 127 x 178 mm, defect parts inked 03

1.05. Tolerances of single parts outside dimensions + 0.2 mm / - 0.05 mm 1.06. Available material thickness combinations Si 3 N 4 copper thickness mm ceramic thickness mm 0.25 0.32 0.3 0.5 0.8 Note Other copper thicknesses on request. The copper thickness difference front side to back side shall not exceed 100 μm. 1.07. free perimeter A A Cu-thickness 0.3 mm 0.5 mm 0.8 mm A 0.4 mm 0.5 mm 0.6 mm Ceramic B A = free perimeter B = Brazing layer Note Metallization is measured at the interface of ceramic and copper. Final perimeter depend on ceramic thickness and manufacturing tolerances such as etching or lasering. For laser cut geometries in ceramic (e.g. holes) the copper free perimeter may vary. 1.08. Conductor dimensions width / spacing Cu-thickness (d) Conductor dimensions width / spacing (W) Min. Pitch 0.3 mm typ. 0.5 mm 1.0 mm 0.5 mm typ. 0.8 mm 1.6 mm 0.8 mm typ. 1.0 mm 2.0 mm W Pitch Ceramic d W = Width d = Cu-thickness Note Metallization is measured at the interface of ceramic and copper. Upper width of conductors on Cu-layout side could be smaller (see sidewall of etched pattern). 1.09. Sidewall of etched pattern + Brazing side clearance ½ d Note Metallization is measured at the interface of brazing layer and copper. ½ d Ceramic d = Cu-thickness d 04

1.10. Mismatch copper pattern front/back M 0.2 mm for standard types Note Metallization is measured at the interface of brazing layer and copper. M A Ceramic A M A = Layout side / Bottom side M = Mismatch copper pattern 1.11. Flatness (layout related) Requested flatness of single AMB substrates or master cards cannot be guaranteed in advance due to specific design influences of the circuit. A flatness (not 100% inspected) can only be specified after design definition and sample delivery with initial sample test report. 1.12. Etching tolerance Cu-thickness tolerance 0.3 mm typ. ± 0.2 mm 0.5 mm typ. ± 0.3 mm 0.8 mm typ. ± 0.4 mm B A Ceramic A = pad/conductor B = Brazing layer Note Metallization is measured at the interface of ceramic and copper. The etching tolerance is always symmetric to the center axis of the pad/conductor. 1.13. Chip-off at ceramic edge Length Width Depth max. 1 x ceramic thickness max. ½ x ceramic thickness max. ½ x ceramic thickness W L D W = Width L = Length D = Depth 1.14. Tolerance of total thickness (ceramic + copper) ± 10 % 05

2. Additional design features 2.01. Platings over entire surface Electroless Ni 3 7 µm (8% ± 2% P) Electroless Ag 0.1 0.6 µm Electroless NiAu Ni: 3 7 µm (8% ± 2% P) Au Class A: 0.01 0.05 µm Au Class B: 0.03 0.13 µm 2.02. surface Roughness R max = 50 µm; R a 1.5 µm; R z 16 µm Note Lower roughness on request. 2.03. Lifetime AMB vs. DBC (typ. values) Measurement conditions -55 C up to 150 C shock testing ceramic AMB ceramic DBC Cu layout side ceramic thickness Cu back side cycles without dimples [б 0 ] Al2O3 0.3 mm 0.32 mm 0.3 mm > 65 HPS 0.3 mm 0.32 mm 0.3 mm > 110 AlN 0.3 mm 0.63 mm 0.3 mm > 35 Si3N4 0.5 mm 0.32 mm 0.5 mm > 5000 Note curamik internal tests with curamik test layout. Lifetime Number of Thermal Cycles 5000 4000 3000 2000 1000 800 600 400 200 0 DBC AMB Al2O3 HPS AlN Si3N4 06

2.04. Solder stop standard solder stop high temperature solder stop * Width Mismatch solder stop line (center) to layout (center) min. 0.4 mm tolerance ± 0.2 mm ± 0.2 mm ± 0.2 mm min. 0.4 mm tolerance ± 0.2 mm Temperature resistance 288 C / 10 sec. 400 C / 5 min. Note In case of mismatch between Cu pad and outside edge, the etching tolerance is to be considered. Higher/ longer temperature exposure only possible at customer s own risk. Solder stop is available for all platings except Au-platings. * samples available 2.05. Holes and laser cut outlines Minimum hole diameter 1 mm, smaller on request. 07

3. Quality 3.01. Solderability wetting on metallization Soldering conditions on Cu surface SnCu3ln0.5 - Preform 95 % wetting, forming gas (10 % H2, 90 % N2) and vacuum 3.02. Thick wire bondability on metallization 300 µm aluminum wire AlH11 Shear speed 500 µm/s Shear height 30 µm Shear force 1000 cn 50 % aluminum residue on AMB after shear test 08

4. Physical properties 1 1 Values from literature 4.01. Thermal conductivity Si3N4 90 W/mK @ 20 C 4.02. Electrical resistivity of ceramic > 10 14 Ωcm @ 20 C 4.03. Dielectric constant Si3N4 8.0 @ 1 MHz 7.5 @ 1 GHz 4.04. Dielectric loss Si3N4 < 0.001 @ 20 C, 1MHz 4.05. Dielectric strength (DC voltage) of ceramic > 20 kv/mm 4.06. Electrical conductivity of copper surface 58 x 10 6 S/m @ 20 C 4.07. peeling strength 10 N/mm @ 50 mm/min @ Cu-thickness 0.5 mm on Si3N4 Note According to curamik internal tests. 4.08. Application temperature -55 C up to +650 C depending on atmosphere and time 09

4.09. Bending strength (bare ceramic) Si3N4 > 700 N/mm 2 Note According to curamik internal tests. б 0 -value 4.10. Fracture toughness (K 1c ) Si3N4 > 6 MPa m 4.11. Young s modulus (bare ceramic) Si3N4 300 GPa 4.12. Coefficient of linear thermal expansion (CTE) ceramic α ceramic substrate Si3N4 2.5 ppm/k @ 20 C 300 C 5% to 30% higher (dependent on copper thickness) 10

The information contained in this document is intended to assist you in designing with Rogers Power Electronics Solutions Materials. It is not intended to and does not create any warranties, express or implied, including any warranty of merchantability or fitness for a particular purpose or that the results shown in this document will be achieved by a user for a particular purpose. The user should determine the suitability of Rogers curamik products for each application. The Rogers logo, the curamik logo and curamik are trademarks of Rogers Corporation or one of its subsidiaries. 2015 Rogers Corporation. All rights reserved. This document is not subject of updating. Version #04 issued in September 2015. Issued by Bernd Lehmeier / Nico Kuhn Approved by Tomas Block 11

Rogers Germany GmbH Am Stadtwald 2 92676 Eschenbach Germany Phone +49 9645 92 22 0 Fax +49 9645 92 22 22 www.rogerscorp.com/pes