Vacuum Optics Standard Viewports Viewports for Optical pplications Special Viewports and dditional Components Optical Fiber Feedthroughs Singlemode Optical Fiber Feedthroughs Multimode ccessories for Optical Fiber Feedthroughs
Contents Introduction Page -3 to -8 Standard Viewports Introduction Page -9 Standard Viewports with demountable O-Ring Seal Page -10 to -11 Viewports with permanent Joint Page -12 to -14 Viewports for Optical pplications Introduction Page -15 to -16 Viewports for UV-VIS-NIR, (Fused Silica), CF Page -1 Viewports for UV-VIS-NIR, with nti-reflection Coating Page -18 to -21 Viewports for Optical pplications, KF Page -22 to -23 Viewports for UV-VIS-NIR, CF Page -24 to -26 Viewports for VIS-IR, CF Page -2 to -28 Viewports for IR, CF Page -29 to -30 High Precision Optics Series Page -32 to -35 luvac Precision Optics Series Page -36 to -39 Special Viewports and dditional Components Introduction Page -40 Viewports with Conducting, Transparent ITO Coating Page -41 to -42 Viewports with uminescent ayer Page -43 Borosilicate Glass in Quick ccess oors (Q) Page -44 ead-glass Safety-Caps with Radiation Shielding Page -45 Viewport Shutters Page -46 Viewports with d Socket Page -46 Optical Fiber Feedthroughs Singlemode Page -4 to -50 Optical Fiber Feedthroughs Multimode Page -51 to -55 ccessories for Optical Fiber Feedthroughs Page -56 bis -59 - -2 www.vacom.de
Vacuum Optics Vacuum Optics pplications and Requirements For a large number of applications it is necessary to transport electromagnetic waves such as light or laser radiation from atmosphere into vacuum or from vacuum into atmosphere. The range of possible applications covers simple tasks like viewing the inside of a vacuum chamber or illuminating such a chamber, as well as the defined coupling in and out of light for scientific or processing purposes. High requirements to optics have to be fulfilled for high-precision, nearly loss-free transmission of optical information. This large number of applications leads to a variety of optical components and systems with different characteristics. Monitoring and illumination can be realized with simple viewports made out of borosilicate glass. For defined coupling in and out of light, viewport materials with defined optical quality, special viewport designs and optical fiber feedthroughs are available. Here, the application and its requirements define the choice of optical material. The main aspects in choosing the right optical material are wavelength, transport distance, birefringence or wavefront deformation and possible losses in power or energy. Viewports are preferred, when the target in the chamber can be reached directly in a straight line or with the help of a small number of mirrors. Typical viewport materials have a low absorption in the desired wavelength range and feature minimal losses for a given thickness. dditionally anti-reflection coatings, optimized for the wavelength or wavelength range of interest are used to minimize surface reflections. High absorbing materials can be used to block radiation e.g. lead-glass is a good X-Ray shielding material. The choice of materials and components of the flange-to-viewport assembly can be optimized to fulfill special requirements on magnetic permeability or conductivity. Optical fibers are used when the source or destination for the radiation is not easily accessible or when flexible guiding of optical signals or waves is necessary. Here, in comparison to viewports the electromagnetic wave travels a rather long distance through the optical material, so dispersion (wavelength-dependent velocity of propagation) is relevant. Special fibers minimize or neutralize this effect. Not only optical properties like transmission range, parallelism, surface quality or polarization maintenance (PM) are relevant for vacuum optics components. Further requirements crucial for vacuum components have to be fulfilled. These are for example the right flange type and size, pressure and temperature stability, radiation and corrosion resistance or requirements to electrical and magnetic properties as well as minimal outgassing or qualification for cleanroom applications. Such a profile of requirements is accomplished by a selection of appropriate optic materials, joining technologies and coating or processing methods. n experienced team of specialists in optics, material sciences and vacuum technology is looking forward to finding a solution for your special application. -3
Vacuum Optics Basics Interactions between electromagnetic waves and optical material When an electromagnetic wave passes through an optical material such as glass, a large number of interactions take place (refraction, reflection, absorption, scattering). These interactions can change the radiation itself as well as the optical material. For typical applications in optics, transmission T or alternatively decay in terms of damping are highly relevant. Both parameters describe the amount of the original intensity I or power P that remains after transmitting through the optical material. a) b) Figure 1 Basic phenomena when light passes through an optical material. a) intensities I for direct material transmission (e.g. viewport), b) powers P when total reflection occurs at the vertical interfaces (optical fiber) Figure 1 shows the basic phenomena when light passes through an optical material (refractive index n 2 ). In this case the surrounding medium has a lower optical density (refractive index n 1 ) than the optical material, meaning n 1 < n 2. The transmission T Ges is defined as the fraction of intensity of the light leaving the material I T2 and intensity of the light coupled into the material I 0 (figure 1a). The intensity being the energy divided by time and area or in other words power density is connected to power P. So above remarks also apply for powers P T2 and P 0 (figure 2a). In this case, for smaller numbers, a decay in power is described by damping = 10 log ( P T2 / P 0 ). The unit of damping is decibel (db). In part a) of figure 1 (viewport) light propagation takes place in a straight line without interference of the vertical interfaces. This is always the case when the dimensions of the optical material are big compared to the light beam or the beam displacement. This assumption holds true for conventional viewports. In part b) the same process is shown supposed that vertical interfaces affect the propagation of light. This is the case for optical elements where lateral dimensions are small compared to dimensions in the direction of the beam. Entry into optical material ight entry is the first part of the whole process. The wave hits interface 1 with the original intensity I 0 and angle α. t this event, which is a transition with growing optical density (n 2 > n 1 ), a fraction of the intensity I R1 is reflected under the same angle α, and the rest of the beam is refracted into the optical material with intensity I T1 and angle β. Because n 2 > n 1 the angle β is smaller than α. The following transmission and damping is reached: and Neglecting absorption at interface 1 transmission and reflection R 1 = I R1 / I 0 add up to T 1 + R 1 = 1. The damping 1 is also called insertion loss I. -4
Vacuum Optics Basics Beam transmission The wave with the intensity I T1 or power P T1 propagates in the optical material. Here, further decay in intensity I T (d) or in power P T (d) takes place, depending on the distance d. This decay is due to absorption and can be described by an exponential decay I T (d)= I T1 e -ad with absorption coefficient a. Transmission and damping can be written for this process also: and In this case transmission is also called internal or material transmission, damping is also called intrinsic damping or intrinsic loss. In case of damping, it is common to divide by length to get a length independent value (d) / d. With optical fibers lengths have to be very high for significant damping to occur, so the signal loss is divided by length in kilometers. The unit is [] = db / km. Beam exit The last process is similar to the first process of material entry. The beam is coupled out of the material again. part of the beam is reflected with intensity I R2 and angle β and a part of the beam is refracted with intensity I T2 and angle α out of the optical material. Because the refraction now takes place from high refractive index to low refractive index, the angle of the out-coupled beam is again α, when the surrounding material is the same on both sides. Transmission and damping are: and With optical fibers, 2 is not used at all. Rather a return loss R is specified, which characterizes the fraction of the signal that is lost during coupling out. This is a bit misleading, because by its definition R = 10 log ( P T (d) / P R2 ) return loss is an amplification. Optical specifications Concluding, intensity and damping for the whole process can be composed by the values of the single processes: and For viewports, where lateral dimensions are big compared to the light beam, it is likely to use the transmission T. Included in this transmission are material properties, dimensions of the optical element, as well as quality and condition of the surfaces. For optical fibers, and especially for fiber lengths of a couple of meters, intrinsic loss and return loss are not relevant. Here insertion loss I = 1 is the most relevant value, specifying quality of interfaces and of interconnect confectioning. Only when passing an interface, where the transition takes place from a material with higher refractive index (e.g. glass) to a lower refractive index (e.g. air), total reflection may occur. This allows for nearly loss-free transport of light over very long distances. If a critical angle θ K is exceeded during transition (e.g. in interface 2 in figure 1 as well as in every vertical interface in figure 1, part b), refraction is not possible anymore because the resulting angle is too high. In this case the whole wave is reflected back. For this effect to occur a minimal coupling angle α has to be obeyed. This angle results from: The sine of this angle is also called numerical aperture N, which is used for specifying optical fibers. Furthermore an acceptance cone results for optical fibers. In order to be transmitted through the fiber, light has to be coupled-in within the area of this cone. -5
Vacuum Optics Materials for Vacuum Optics and Their Properties Transmission and quality of optical materials bsorption coefficient a, transmission T and reflection R all depend on the wavelength l used in the application. The wavelength and the spectral width of radiation therefore limit and define the material that can be used. For use as transmission optics, key features are low absorption meaning high material transmission. In figure 2, some optical materials and their transmission ranges used by VCOM for ultraviolet (UV), visible (VIS) and infrared radiation are shown. Figure 2 Transmission ranges for some of the optical materials used by VCOM These materials are not only suitable for optics applications, but also for vacuum use (pressure and temperature stability). These materials are in principle only available for viewports. For optical fibers, only quartz (Fused Silica) is used. To make optical fibers available for applications where a larger transmission range is needed, currently alternatives in material are discussed and tested. For many applications it is not only important to have a high transmission, but also to ensure that the wave itself or the light path is not influenced. Examples are microscopy, lithographic applications, optical measurements or high power applications. Here, irregularities such as inhomogeneity, bubbles, striae or inclusions have to be kept minimal. lso lattice defects and impurities in crystals are a problem. Especially in high power applications defects in the surface or impurities result in a high energy take-up and could lead to material damage. ccording to the requirements, different cleanliness grades and scratch / dig or homogeneity classes are specified. Quality and cleanliness of optical surfaces While the optical material itself, as well as cleanliness and quality of the material mainly affects the losses while the radiation is inside the optical element, the surfaces and their constitution define the losses for entry and discharge of wave. Therefore, these optical interfaces define the transmissions T 1 and T 2 and the insertion loss 1 and return loss R or damping 2. Impurities, scratches and roughness or surface curvature lead to losses due to scattering or affect the wave. Surface quality can be improved by using special production methods (e.g. float glass technology, CV) or additional production steps (e.g. polishing). For optical surfaces it is common to specify scratches and digs in classes, further form tolerance or flatness (e.g. inter-ferometrically determined errors with respect to a reference wavelength) and parallelism (inclination of the optical interfaces to each other). Scratch / ig The different scratch / dig classes are specified by the use of reference samples, which are compared to the optical specimen. The value specified by the according scratch class is the maximal width of the included scratches in µm. In an optical element with scratch class 20 for example, scratches are 20 µm in width or lower. The dig class is a measure for the maximal diameter of included point defects (digs) in 0.01 mm. For example, an optical element with a dig class of 20 holds defects with a maximal diameter of 20 x 0.01 mm = 0.2 mm. Typical values for scratch / dig are 80 / 50 for standard optics, 60 / 40 for elements with optical quality and 20 / 10 or lower for high precision optics. Flatness Flatness for planar surfaces or more general form tolerance for arbitrary surfaces, describes the difference of the surface tested from an ideal shape. Because interferometry is used to specify flatness, it is common, to specify flatness as a multiple of the test wavelength λ (e.g. 632 nm). For flatness, 1 λ is standard quality, λ / 4 is optical quality and λ / 8 and smaller is high precision grade. To ensure cleanliness of optical elements and vacuum components, vacuum optic products at VCOM are partly available as a cleanroom packed version with low outgassing rates. For more information, please refer to chapter 2 Service. -6
Vacuum Optics Materials for Vacuum Optics and Their Properties nti-reflection coating of optical surfaces Transmissions T 1 and T 2 can be further raised, when anti-reflection (R) coatings are applied to optical surfaces. These multilayer systems are based on optical interference. esigning and choosing the right layer system can significantly lower reflectance for one or some specific wavelengths (e.g. VR for one, WR for two wavelengths, from the form of the reflectance curves). lso optimization of reflectance for a broad range of wavelengths is possible (BBR, broadband anti-reflection). s an example, reflectance of uncoated quartz (Fused Silica) viewport as well as the same material with VR and BBR coating is shown in figure 3 as a function of wavelength. The reflectance curves shown on the following pages depict the different coatings schematically and therefore only represent reference values. Figure 3 Schematic reflectance curves for a quartz surface: uncoated, with BBR-coating and with VR-coating For materials with a low refractive index (e.g. magnesium fluoride) the overall transmission is mainly defined by material absorption and not by reflection at the interfaces. Here, applying an anti-reflection coating does not lead to a significant increase in transmission. Optical Fibers, Feedthroughs and Connectors The composition of an optical fiber is shown in figure 4. The parts, which allow for light transmission, are a fiber core with a high refractive index and a fiber cladding with a low refractive index. ight propagation is possible using total reflection. For protection of the sensitive fiber, additional layers are used. One or more coating layers provide a basic protection. One or more buffers provide further protection against mechanical stress or damage due to chemicals. Figure 4 Composition of an optical fiber -
Vacuum Optics Optical Fibers, Feedthroughs and Connectors The diameter of the fiber core determines if light of just one wavelength or a comparably short wavelength range is transmitted (singlemode fibers) or if light of a rather large wavelength range (multimode fibers) is transmitted. VCOM standard fibers and their respective operation wavelengths / wavelength ranges are shown in figure 5. Special fibers are available on request. Please do not hesitate to contact as for special solutions. Figure 5 Standard fibers available at VCOM and their respective operations wavelengths / wavelength ranges With VCOM s solution, an atmosphere cable, an optical fiber feedthrough with short coupling length and a vacuum cable realize transporting light from the atmosphere into vacuum or out of vacuum onto the atmosphere. With this assembly, in case of a fiber fracture, only the broken cable has to be replaced, whereas in a solution with continuous fiber the whole assembly would have to be replaced. To maintain low insertion losses, high quality in connection technology is required. Therefore VCOM optical fiber feedthroughs use FC/PC and FC/PC connectors, which couple fiber end faces by physical contact to one another. With FC/PC fiber end faces are tilted by 8 to minimize back reflections, which is often needed in laser applications. For atmosphere cables, adapters to nearly any connector are possible. Handling and ccessories for Optical Components Optical components and surfaces are very sensitive to scratches, dirt or particles like dust, especially when polished or coated. When cleaning, only appropriate tools (lint free optic wipes, cleaning sticks) and chemicals (isopropyl alcohol p.a., acetone p.a.) are to be used. Wiping on coated viewports damages the coating. Please refer to the brochures and data sheets supplied with our products. If you have questions concerning assembly, installation, cleaning or handling of vacuum optic components, please contact us! We also offer special cleaning accessories for our products. -8
Standard Viewports Standard Viewports pplications of standard viewports made of borosilicate and fused silica are mainly monitoring and illumination tasks. Requirements to these viewports are primarily the flange type (CF, KF, ISO), desired pressure range and operation temperature. Viewports with removable O-ring seals are suitable for high vacuum applications and for temperatures up to 150 C. For higher requirements in pressure or temperature, viewports are required in which glass and flange are permanently joined (e.g. by soldering). To prevent tensions that occur during heating, cooling or installing viewports most commonly an intermediate material like e.g. Kovar (an iron-nickel-cobalt alloy) is used that compensates tension. When magnetic permeability is an issue, tantalum, titanium or baked steel is used as an intermediate material for standard viewports. t VCOM viewports for the most common CF, KF and ISO flange sizes are available as well as Q (quick access doors, see Special viewports) for an easy, quick access to a vacuum chamber. Furthermore, standard viewports are available as Quick CF version with integrated glass window which can be installed more rapidly. Figure 6 Schematic transmission of borosilicate glass (top) and fused silica (SiO 2, bottom) as a function of wavelength The reflectance curves shown here and on the following pages depict the different materials schematically and therefore only represent reference values. -9
Standard Viewports Standard Viewports with emountable O-ring Seal Borosilicate and fused silica (SiO2), KF/ISO demountable KF Viewport ISO-K Viewport (flange mounting) Technical data escription viewport with demountable O-ring seal (FKM) Connection type KF, ISO-K or ISO-F flange He leak rate < 1.0E-9 mbar l/s Window material borosilicate (Borofloat 33) or fused silica (Silux ) material - KF, ISO-K: stainless steel 304 - ISO-F: aluminum, anodized Frame material FKM, O-ring Transmission range ca. 400...2500 nm (Borofloat 33), ca. 300...2000 nm (Silux ) Max. bakeout temperature Max. 150 C (with aluminum frame 120 C) Viewports The listed products and replacement parts are also available as clean room products (CRP). Please contact us for further information. Borosilicate Quartz connection: KF, T(max) = 150 C VPKF40B-E-Z VPKF40Q-E-Z N40KF 5 40 10 3.8 VPKF50B-E-Z VPKF50Q-E-Z N50KF 50 10 3.8 connection: ISO-K (flange mounting with claw clamps), T(max) = 150 C VPISOK63B-E-Z VPISOK63Q-E-Z N63ISO-K 98 0 14 3.8 VPISOK100B-E-Z VPISOK100Q-E-Z N100ISO-K 133 102 13 5 VPISOK160B-E-Z VPISOK160Q-E-Z N160ISO-K 183 153 1 9 VPISOK200B-E-Z VPISOK200Q-E-Z N200ISO-K 243 200 1 13 connection: ISO-F (wall mounting with screws), T(max) = 120 C VPISOF63B-E VPISOF63Q-E N63ISO-F 130 0 12 3.8 VPISOF100B-E VPISOF100Q-E N100ISO-F 165 102 12 5 VPISOF160B-E VPISOF160Q-E N160ISO-F 225 153 16 9 VPISOF200B-E VPISOF200Q-E N200ISO-F 285 200 16 13 connection: ISO-K (wall mounting with wall clamps), T(max) = 150 C VPISOK63B-E VPISOK63Q-E N63ISO-K 98 0 12 3.8 VPISOK100B-E VPISOK100Q-E N100ISO-K 133 102 12 5 VPISOK160B-E VPISOK160Q-E N160ISO-K 183 153 15 9 VPISOK200B-E VPISOK200Q-E N200ISO-K 243 200 19 13 Option: KF and ISO-K flange made of stainless steel 316. -10
Standard Viewports Standard Viewports with emountable O-ring Seal ISO-K Viewport (wall mounting) ISO-F Viewport (wall mounting) Replacement windows Borosilicate glass VPWB-44X4-CONE VPWB-54X4-CONE VPWB-5X4-CONE VPWB-109X5-CONE VPWB-160X9-CONE Fused silica VPWQ-44X4-CONE VPWQ-54X4-CONE VPWQ-5X4-CONE VPWQ-109X5-CONE VPWQ-160X9-CONE ccessories for VPKF40B-E VPKF50B-E VPKISOK63B-E VPKISOK100B-E VPKISOK160B-E VPKF40Q-E VPKF50Q-E VPKISOK63Q-E VPKISOK100Q-E VPKISOK160Q-E Replacement O-rings KF40VR-VP VR53X5-VI400-65 VR-4X5-VI563-0 ISO100VR-VP ISO160VR-VP ccessories for flange N40KF flange N50KF flange N63ISO flange N100ISO flange N160ISO -11
Standard Viewports Viewports with Permanent Joint Borosilicate glass, KF/ISO KF Viewport ISO Viewport Technical data escription viewports with permanent flange-window-joint Connection type KF, ISO-K flange He leak rate < 1.0E-9 mbar l/s Window material borosilicate (Corning 056) material stainless steel 304 Frame material Kovar Transmission range ca. 400...2500 nm Bakeout temperature Max. 150 C Max. heating and cooling rate 3 K/min Borosilicate glass, KF/ISO The listed products and replacement parts are also available as clean room products (CRP). Please contact us for further information. connection: KF VPKF16B- N16KF 30 16 13 1.6 VPKF25B- N25KF 40 16 13 1.6 VPKF40B- N40KF 55 32 13 3 VPKF50B- N50KF 5 32 13 3 connection: ISO-K VPISOK63B- N63ISO-K 95 49 14 3.5 VPISOK100B- N100ISO-K 130 65 16 3.5 VPISOK160B- N160ISO-K 180 90 18 6 VPISOK200B- N200ISO-K 240 135 18 8 VPISOK250B- N250ISO-K 290 135 18 8-12
Standard Viewports Viewports with Permanent Joint Borosilicate glass, CF/QCF CF Viewport QCF Viewport Technical data escription viewports with permanent flange-window-joint Connection type CF flange He leak rate < 1.0E-10 mbar l/s Window material borosilicate (Corning 056) material stainless steel 304 or 316N Binding material Kovar Transmission range ca. 400...2500 nm Bakeout temperature (QCF) Max. 350 C Max. heating and cooling rate 3 K/min Borosilicate glass, CF Some of listed products and replacement parts are also available as clean room products (CRP). Please contact us for further information. Stainless steel 304, Kovar sleeve, T(max) = 350 C VPCF16B- N16CF 34 16 12. 1.5 VPCF40B- N40CF 0 38 12. 3 VPCF63B- N63CF 114 63 1.4 3.5 VPCF100B- N100CF 152 90 19.9 6 VPCF160B- N160CF 203 136 22.3 8 Magn. permeability µ(r) < 1.005, stainless steel 316N, tantalum sleeve, T(max) = 120 C VPCF16B-K-NM N16CF 34 16 12. 1.5 VPCF40B-K-NM N40CF 0 32 12. 3 VPCF63B-K-NM N63CF 114 63 1.4 3.5 VPCF100B-K-NM N100CF 152 90 19.9 6 VPCF160B-K-NM N160CF 203 136 22.3 8 Borosilicate glass, QCF The listed products and replacement parts are also available as clean room products (CRP). Please contact us for further information. VPQCF40B- N40QCF 55 25 12 2.5 VPQCF63B- N63QCF 8 49 1 2.5 VPQCF100B- N100QCF 134 65 14 3.5 For further information please see chapter Standard Components - QCF Components. -13
Standard Viewports Viewports with Permanent Joint Fused silica (SiO2), CF CF Viewport Technical data escription viewports with permanent flange-window-joint Connection type CF flange He leak rate < 1.0E-10 mbar l/s Window material fused silica (SiO2) material stainless steel 304, 304 or 316N Transmission range ca. 300...2000 nm Bakeout temperature Max. 200 C Max. heating and cooling rate 25 K/min Fused silica (SiO2), CF Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C Heating rate [K/min] VPCF16UVQ- N16CF 34 16 8.9 2.5 25 VPCF40UVQ- N40CF 0 35 12. 3.3 25 VPCF63UVQ- N63CF 114 68 1.3 6.4 25 VPCF100UVQ- N100CF 152 98 19.8 6.4 25 VPCF160UVQ- N160CF 203 13 22.4 9.4 25 VPCF200UVQ- N200CF 254 198 24.6 9.4 25 Magn. permeability µ(r) < 1.005, stainless steel 316N, titanium sleeve, T(max) = 200 C VPCF16UVQ--NM N16CF 34 16 8.9 2.5 25 VPCF40UVQ--NM N40CF 0 35 12. 3.3 25 VPCF63UVQ--NM N63CF 114 68 1.3 6.4 25 VPCF100UVQ--NM N100CF 152 98 19.8 6.4 25-14
Viewports for Optical pplications Introduction The main requirement for a viewport in an optical application is excellent transmission in a defined wavelength range and thus the choice of the optical material. For UV-VIS-NIR (appr. 200 nm to µm) VCOM offers quartz / fused silica, quartz crystal, sapphire, magnesium fluoride and calcium fluoride. Zinc selenide and zinc sulfide are mainly used in VIS-IR applications (approx. 0.6 µm to 15 µm). For IR use, the semiconducting viewport materials silicon and germanium are an option. Further requirements are temperature stability or radiation resistance. Quartz viewports feature high radiation resistance (for e.g. high power laser applications) while sapphire is applicable in high temperature applications (up to 450 C). epending on further requirements, viewports are available in different configurations. Main differences are optical quality, temperature stability, magnetic permeability and heating and cooling rates. Here the joining technology (e.g. soldering) and choice of material define the properties of the product. For optimized transmission in some commonly used spectral ranges, we offer viewports with different anti-reflection coatings. Furthermore, special R coatings for individual wavelengths or wavelength ranges are available on request. lso, exceeding the list of products in this chapter, other materials (e.g. barium fluoride or beryllium) and flange types and sizes are available. Please do not hesitate to contact us for further questions or requests. Quality and cleanliness of optical surfaces While the optical material itself, as well as cleanliness and quality of the material mainly affects the losses while the radiation is inside the optical element, the surfaces and their constitution define the losses for entry and discharge of wave. Therefore, these optical interfaces define the transmissions T 1 and T 2 and the insertion loss 1 and return loss R or damping 2. Impurities, scratches and roughness or surface curvature lead to losses due to scattering or affect the wave. Surface quality can be improved by using special production methods (e.g. float glass technology, CV) or additional production steps (e.g. polishing). For optical surfaces it is common to specify scratches and digs in classes, further form tolerance or flatness (e.g. interferometrically determined errors with respect to a reference wavelength) and parallelism (inclination of the optical interfaces to each other). Scratch / ig The different scratch/dig classes are specified by the use of reference samples, which are compared to the optical specimen. The value specified by the according scratch class is the maximal width of the included scratches in µm. In an optical element with scratch class 20 for example, scratches are 20 µm in width or lower. The dig class is a measure for the maximal diameter of included point defects (digs) in 0.01 mm. For example, an optical element with a dig class of 20 holds defects with a maximal diameter of 20 x 0.01 mm = 0.2 mm. Typical values for scratch/dig are 80/50 for standard optics, 60/40 for elements with optical quality and 20/10 or lower for high precision optics. Flatness Flatness for planar surfaces or more general form tolerance for arbitrary surfaces, describes the difference of the surface tested from an ideal shape. Because interferometry is used to specify flatness, it is common, to specify flatness as a multiple of the test wavelength λ (e.g. 632 nm). For flatness, 1 λ is standard quality, λ/4 is optical quality and λ/8 and smaller is high precision grade. To ensure cleanliness of optical elements and vacuum components, vacuum optic products at VCOM are partly available as a cleanroom packed version with low outgassing rates. For more information, please refer to chapter 2 Service. -15
Viewports for Optical pplications Introduction nti-reflection coating of optical surfaces Transmissions T 1 and T 2 can be further raised, when anti-reflection (R) coatings are applied to optical surfaces. These multilayer systems are based on optical interference. esigning and choosing the right layer system can significantly lower reflectance for one or some specific wavelengths (e.g. VR for one, WR for two wavelengths, from the form of the reflectance curves). lso optimization of reflectance for a broad range of wavelengths is possible (BBR, broadband anti-reflection). s an example, reflectance of uncoated quartz (Fused Silica) viewport as well as the same material with VR and BBR coating is shown in figure 3 as a function of wavelength. The reflectance curves shown on the following pages depict the different coatings schematically and therefore only represent reference values. For materials with a low refractive index (e.g. magnesium fluoride) the overall transmission is mainly defined by material absorption and not by reflection at the interfaces. Here, applying an anti-reflection coating does not lead to a significant increase in transmission. -16
Viewports for Optical pplications Viewports for UV-VIS-NIR, CF Fused silica (SiO2), CF CF Viewport Technical data escription CF viewport with fused silica Connection type CF flange He leak rate < 1.0E-10 mbar l/s Window material fused silica (Corning HPFS 980) material stainless steel 304 or 316N Transmission range ca. 190...2000 nm (EUVQ), ca. 250...2000 nm (UVQ) Max. bakeout temperature 200 C Max. heating and cooling rate 25 K/min Surface quality 20/10 (scratch/dig) Flatness < /4 (at 632 nm) Parallelism < 10'' Coating see viewports for UV-VIS-NIR, with anti-reflection coating Fused silica (SiO2), CF UV Fused silica (bis 250 nm) EUV Fused silica (bis 190 nm) Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C VPCF16UVQ- VPCF16EUVQ- N16CF 34 16 8.9 2.2 VPCF40UVQ- VPCF40EUVQ- N40CF 0 35 12. 3.3 VPCF63UVQ- VPCF63EUVQ- N63CF 114 68 1.3 6.4 VPCF100UVQ- - N100CF 152 98 19.8 6.4 VPCF160UVQ- - N160CF 203 13 22.4 9.4 Magn. permeability µ(r) < 1.005, stainless steel 316N, titanium sleeve, T(max) = 200 C VPCF16UVQ--NM VPCF16EUVQ--NM N16CF 34 16 8.9 2.2 VPCF40UVQ--NM VPCF40EUVQ--NM N40CF 0 35 12. 3.3 VPCF63UVQ--NM VPCF63EUVQ--NM N63CF 114 68 1.3 6.4 VPCF100UVQ--NM - N100CF 152 98 19.8 6.4 For fused silica on KF see Viewports for Optical pplications, KF. -1
Viewports for Optical pplications Viewports for UV-VIS-NIR, with nti-reflection Coating BBR coated fused silica (SiO2) CF Viewport Technical data escription fused silica with broad band anti-reflection coating with CF flange Connection type CF flange He leak rate < 1.0E-10 mbar l/s Window material fused silica (Corning HPFS 980) material stainless steel 304 or 316N Transmission range ca. 200...2000 nm Max. bakeout temperature 200 C Max. heating and cooling rate 25 K/min Surface quality 20/10 (scratch/dig) Flatness < /4 (at 632 nm) Coating BBR1 (ca. 225...450 nm), BBR2 (ca. 425...60 nm), BBR3 (ca. 550...1100 nm) Note Please do not hesitate to contact us for special coatings for individual wavelengths / wavelength ranges. -18
Viewports for Optical pplications Viewports for UV-VIS-NIR, with nti-reflection Coating BBR1 (225 nm... 450 nm) on fused silica (UV) Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C VPCF16UVQ--BBR1 N16CF 34 16.4 2.5 VPCF40UVQ--BBR1 N40CF 0 35 12. 3.3 VPCF63UVQ--BBR1 N63CF 114 68 1.3 6.4 VPCF100UVQ--BBR1 N100CF 152 98 19.8 6.4 Magn. permeability µ(r) < 1.005, stainless steel 316N, titanium sleeve, T(max) = 200 C VPCF16UVQ--BBR1-NM N16CF 34 16.4 2.5 VPCF40UVQ--BBR1-NM N40CF 0 35 12. 3.3 VPCF63UVQ--BBR1-NM N63CF 114 68 1.3 6.4 VPCF100UVQ--BBR1-NM N100CF 152 98 19.8 6.4 BBR2 (425 nm... 60 nm) on fused silica (UV) Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C VPCF16UVQ--BBR2 N16CF 34 16.4 2.5 VPCF40UVQ--BBR2 N40CF 0 35 12. 3.3 VPCF63UVQ--BBR2 N63CF 114 68 1.3 6.4 VPCF100UVQ--BBR2 N100CF 152 98 19.8 6.4 Magn. permeability µ(r) < 1.005, stainless steel 316N, titanium sleeve, T(max) = 200 C VPCF16UVQ--BBR2-NM N16CF 34 16.4 2.5 VPCF40UVQ--BBR2-NM N40CF 0 35 12. 3.3 VPCF63UVQ--BBR2-NM N63CF 114 68 1.3 6.4 VPCF100UVQ--BBR2-NM N100CF 152 98 19.8 6.4 BBR1 (550 nm... 1100 nm) on fused silica (UV) Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C VPCF16UVQ--BBR3 N16CF 34 16.4 2.5 VPCF40UVQ--BBR3 N40CF 0 35 12. 3.3 VPCF63UVQ--BBR3 N63CF 114 68 1.3 6.4 VPCF100UVQ--BBR3 N100CF 152 98 19.8 6.4 Magn. permeability µ(r) < 1.005, stainless steel 316N, titanium sleeve, T(max) = 200 C VPCF16UVQ--BBR3-NM N16CF 34 16.4 2.5 VPCF40UVQ--BBR3-NM N40CF 0 35 12. 3.3 VPCF63UVQ--BBR3-NM N63CF 114 68 1.3 6.4 VPCF100UVQ--BBR3-NM N100CF 152 98 19.8 6.4 Fused silica with BBR coating on KF flange available on request. -19
Viewports for Optical pplications Viewports for UV-VIS-NIR, with nti-reflection Coating VR on fused silica (SiO2) CF Viewport Technical data escription fused silica with narrow band anti-reflection coating with CF flange Connection type CF flange He leak rate < 1.0E-10 mbar l/s Window material fused silica (Corning HPFS 980) material stainless steel 304 or 316N Transmission range ca. 190...2000 nm (EUVQ), ca. 250...2000 nm (UVQ) Max. bakeout temperature 200 C Max. heating and cooling rate 25 K/min Surface quality 20/10 (scratch/dig) Flatness < /4 (at 632 nm) Coating VR1 (193 nm), VR2 (248 nm), VR3 (80 nm), VR4 (1064 nm) Note Please do not hesitate to contact us for special coatings for individual wavelengths / wavelength ranges. -20
Viewports for Optical pplications Viewports for UV-VIS-NIR, with nti-reflection Coating VR1 (193 nm) on fused silica (EUV) Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C VPCF40EUVQ--VR1 N40CF 0 35 12. 3.3 VPCF63EUVQ--VR1 N63CF 114 68 1.3 6.4 Magn. permeability µ(r) < 1.005, stainless steel 316N, titanium sleeve, T(max) = 200 C VPCF40EUVQ--VR1-NM N40CF 0 35 12. 3.3 VPCF63EUVQ--VR1-NM N63CF 114 68 1.3 6.4 VR2 (248 nm) on fused silica (EUV) Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C VPCF40UVQ--VR2 N40CF 0 35 12. 3.3 VPCF63UVQ--VR2 N63CF 114 68 1.3 6.4 Magn. permeability µ(r) < 1.005, stainless steel 316N, titanium sleeve, T(max) = 200 C VPCF40UVQ--VR2-NM N40CF 0 35 12. 3.3 VPCF63UVQ--VR2-NM N63CF 114 68 1.3 6.4 VR3 (80 nm) on fused silica (EUV) Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C VPCF40UVQ--VR3 N40CF 0 35 12. 3.3 VPCF63UVQ--VR3 N63CF 114 68 1.3 6.4 Magn. permeability µ(r) < 1.005, stainless steel 316N, titanium sleeve, T(max) = 200 C VPCF40UVQ--VR3-NM N40CF 0 35 12. 3.3 VPCF63UVQ--VR3-NM N63CF 114 68 1.3 6.4 VR4 (1064 nm) on fused silica (EUV) Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C VPCF40UVQ--VR4 N40CF 0 35 12. 3.3 VPCF63UVQ--VR4 N63CF 114 68 1.3 6.4 Magn. permeability µ(r) < 1.005, stainless steel 316N, titanium sleeve, T(max) = 200 C VPCF40UVQ--VR4-NM N40CF 0 35 12. 3.3 VPCF63UVQ--VR4-NM N63CF 114 68 1.3 6.4 Fused silica with VR coating in other sizes and on KF flange available on request. -21
Viewports for Optical pplications Viewports for Optical pplications, KF Viewports for optical applications KF Viewport Technical data escription various optical materials with KF flange Connection type KF flange He leak rate < 1.0E-9 mbar l/s material stainless steel 304 Max. bakeout temperature 150 C Max. heating and cooling rate 25 K/min -22
Viewports for Optical pplications Viewports for Optical pplications, KF Fused silica (SiO2), CF Flatness (632 nm) VPKF40UVQ- N40KF 55 36 14 2.5 20/10 /4 VPKF50UVQ- N50KF 5 36 16 2.5 20/10 /4 Sapphire (I203), KF S/ Flatness (632 nm) VPKF40UVS- N40KF 55 24 13 2 50/20 VPKF50UVS- N50KF 5 24 13 2 50/20 Quartz crystal, Z-Cut (SiO2), KF S/ Flatness (632 nm) VPKF40QZCUT- N40KF 55 23 14 2.5 20/10 /4 VPKF50QZCUT- N50KF 5 23 16 2.5 20/10 /4 Magnesium fluoride (MgF2), KF S/ Flatness (632 nm) VPKF40MGF2- N40KF 55 23 14 2.5 20/10 /4 VPKF50MGF2- N50KF 5 23 16 2.5 20/10 /4 Calcium fluoride (CaF2), KF S/ Flatness (632 nm) VPKF40CF2- N40KF 55 23 14 2.5 20/10 /4 VPKF50CF2- N50KF 5 23 16 2.5 20/10 /4 Zinc selenide (ZnSe), KF S/ Flatness (632 nm) VPKF40ZNSE- N40KF 55 23 14 2.5 40/20 /4 VPKF50ZNSE- N50KF 5 23 16 2.5 40/20 /4 Fused silica (SiO2), quartz crystal and zinc selenide available with anti-reflection coating. S/ -23
Viewports for Optical pplications Viewports for UV-VIS-NIR, CF Calcium fluoride (CaF2), CF CF Viewport Technical data escription CF viewport with calcium fluoride Connection type CF flange He leak rate < 1.0E-10 mbar l/s Window material calcium fluoride, crystalline material stainless steel 304, 304 or 316N Transmission range ca. 120 nm... µm Calcium fluoride (CaF2), CF Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C Heating rate [K/min] Flatness (632 nm) VPCF40CF2- N40CF 0 23 12. 2.5 10 20/10 /4 VPCF63CF2- N63CF 114 48 1.3 3.8 10 20/10 /4 VPCF100CF2- N100CF 152 48 19.8 3.8 10 20/10 /4 Stainless steel 304, Kovar sleeve, T(max) = 120 C VPCF16CF2-K N16CF 34 16 12. 1.5 3 60/40 /4 VPCF40CF2-K N40CF 0 32 12. 3 3 60/40 /4 VPCF63CF2-K N63CF 114 63 1.4 5 3 60/40 /4 VPCF100CF2-K N100CF 152 89 19.9 6 3 60/40 /4 VPCF160CF2-K N160CF 203 136 22.3 9.5 3 60/40 /4 Magn. permeability µ(r) < 1.005, stainless steel 316N, tantalum sleeve, T(max) = 120 C VPCF16CF2-K-NM N16CF 34 16 12. 1.5 3 60/40 /4 VPCF40CF2-K-NM N40CF 0 32 12. 3 3 60/40 /4 VPCF63CF2-K-NM N63CF 114 63 1.4 5 3 60/40 /4 VPCF100CF2-K-NM N100CF 152 89 19.9 6 3 60/40 /4 VPCF160CF2-K-NM N160CF 203 136 22.3 9.5 3 60/40 /4 KF Viewport with calcium fluoride see Viewports for Optical pplications, KF. S/ -24
Viewports for Optical pplications Viewports for UV-VIS-NIR, CF Magnesium fluoride (MgF2), CF CF Viewport Technical data escription CF viewport with magnesium fluoride Connection type CF flange He leak rate < 1.0E-10 mbar l/s Window material magnesium fluoride, crystalline material stainless steel 304, 304 or 316N Transmission range ca. 150 nm... 6 µm Magnesium fluoride (MgF2), CF Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C Heating rate [K/min] Flatness (632 nm) VPCF40MGF2- N40CF 0 23 12. 2.5 10 20/10 /4 VPCF63MGF2- N63CF 114 48 1.3 3.8 10 20/10 /4 VPCF100MGF2- N100CF 152 48 19.8 3.8 10 20/10 /4 Stainless steel 304, Kovar sleeve, T(max) = 120 C VPCF16MGF2-K N16CF 34 16 12. 1.5 3 60/40 /4 VPCF40MGF2-K N40CF 0 32 12. 3 3 60/40 /4 VPCF63MGF2-K N63CF 114 63 1.4 5 3 60/40 /4 VPCF100MGF2-K N100CF 152 89 19.9 6 3 60/40 /4 VPCF160MGF2-K N160CF 203 136 22.3 9.5 3 60/40 /4 Magn. permeability µ(r) < 1.005, stainless steel 316N, tantalum sleeve, T(max) = 120 C VPCF16MGF2-K-NM N16CF 34 16 12. 1.5 3 60/40 /4 VPCF40MGF2-K-NM N40CF 0 32 12. 3 3 60/40 /4 VPCF63MGF2-K-NM N63CF 114 63 1.4 5 3 60/40 /4 VPCF100MGF2-K-NM N100CF 152 89 19.9 6 3 60/40 /4 VPCF160MGF2-K-NM N160CF 203 136 22.3 9.5 3 60/40 /4 KF Viewport with magnesium fluoride see Viewports for Optical pplications, KF. S/ -25
Viewports for Optical pplications Viewports for UV-VIS-NIR, CF Quartz crystal, Z-Cut (SiO2), CF CF Viewport Technical data escription Connection type He leak rate Window material material Transmission range Surface quality Coating CF viewport with quartz crystal CF flange < 1.0E-10 mbar l/s quartz crystal, Z-Cut stainless steel 304, 304 or 316N ca. 200...3000 nm 20/10 (scratch/dig) anti-reflection coating available Quartz crystal (SiO2), CF Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C Heating rate [K/min] Flatness (632 nm) VPCF40QZCUT- N40CF 0 23 12. 2.5 25 VPCF63QZCUT- N63CF 114 48 1.3 3.8 25 VPCF100QZCUT- N100CF 152 48 19.8 3.8 25 Stainless steel 304, Kovar sleeve, T(max) = 120 C VPCF16QZCUT-K N16CF 34 16 12. 1.5 3 /2 VPCF40QZCUT-K N40CF 0 32 12. 3 3 /2 VPCF63QZCUT-K N63CF 114 63 1.4 5 3 /2 VPCF100QZCUT-K N100CF 152 89 19.9 6 3 /2 Magn. permeability µ(r) < 1.005, stainless steel 316N, tantalum sleeve, T(max) = 120 C VPCF16QZCUT-K-NM N16CF 34 16 12. 1.5 3 /2 VPCF40QZCUT-K-NM N40CF 0 32 12. 3 3 /2 VPCF63QZCUT-K-NM N63CF 114 63 1.4 5 3 /2 VPCF100QZCUT-K-NM N100CF 152 89 19.9 6 3 /2 KF Viewport with quartz crystal see Viewports for Optical pplications, KF. -26
Viewports for Optical pplications Viewports for VIS-IR, CF Zinc selenide (ZnSe), CF CF Viewport Technical data escription CF viewport with zinc selenide Connection type CF flange He leak rate < 1.0E-10 mbar l/s Window material zinc selenide, crystalline material stainless steel 304, 304 or 316N Transmission range ca. 0.6... 15 µm Coating available (optimized for 10.6 µm) Zinc selenide (ZnSe), CF Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C Heating rate [K/min] Flatness (632 nm) VPCF40ZNSE- N40CF 0 23 12. 2.5 10 40/20 /4 VPCF63ZNSE- N63CF 114 48 1.3 3.8 10 40/20 /4 VPCF100ZNSE- N100CF 152 48 19.8 3.8 10 40/20 /4 Stainless steel 304, Kovar sleeve, T(max) = 120 C VPCF16ZNSE-K N16CF 34 16 12. 1.5 3 60/40 VPCF40ZNSE-K N40CF 0 32 12. 3 3 60/40 VPCF63ZNSE-K N63CF 114 63 1.4 5 3 60/40 VPCF100ZNSE-K N100CF 152 89 19.9 6 3 60/40 VPCF160ZNSE-K N160CF 203 136 22.3 9.5 3 60/40 Magn. permeability µ(r) < 1.005, stainless steel 316N, tantalum sleeve, T(max) = 120 C VPCF16ZNSE-K-NM N16CF 34 16 12. 1.5 3 60/40 VPCF40ZNSE-K-NM N40CF 0 32 12. 3 3 60/40 VPCF63ZNSE-K-NM N63CF 114 63 1.4 5 3 60/40 VPCF100ZNSE-K-NM N100CF 152 89 19.9 6 3 60/40 VPCF160ZNSE-K-NM N160CF 203 136 22.3 9.5 3 60/40 KF Viewport with zinc selenide see Viewports for Optical pplications, KF. S/ -2
Viewports for Optical pplications Viewports for VIS-IR, CF Zinc sulfide (ZnS), CF CF Viewport Technical data escription CF viewport with zinc sulfide Connection type CF flange He leak rate < 1.0E-10 mbar l/s Window material zinc sulfide, crystalline material stainless steel 304, 304 or 316N Transmission range ca. 0.4...13 µm Coating available Zinc sulfide (ZnS), CF Stainless steel 304, Kovar sleeve, T(max) = 120 C Heating rate [K/min] Flatness (632 nm) VPCF16ZNS-K N16CF 34 16 12. 1.5 3 60/40 VPCF40ZNS-K N40CF 0 32 12. 3 3 60/40 VPCF63ZNS-K N63CF 114 63 1.4 5 3 60/40 VPCF100ZNS-K N100CF 152 89 19.9 6 3 60/40 VPCF160ZNS-K N160CF 203 136 22.3 9.5 3 60/40 Magn. permeability µ(r) < 1.005, stainless steel 316N, tantalum sleeve, T(max) = 120 C VPCF16ZNS-K-NM N16CF 34 16 12. 1.5 3 60/40 VPCF40ZNS-K-NM N40CF 0 32 12. 3 3 60/40 VPCF63ZNS-K-NM N63CF 114 63 1.4 5 3 60/40 VPCF100ZNS-K-NM N100CF 152 89 19.9 6 3 60/40 VPCF160ZNS-K-NM N160CF 203 136 22.3 9.5 3 60/40 KF Viewport with zinc sulfide available on request. S/ -28
Viewports for Optical pplications Viewports for IR, CF Silicon (Si), CF CF Viewport Technical data escription Connection type He leak rate Window material material Transmission range CF viewport with silicon CF flange < 1.0E-10 mbar l/s silicon, crystalline stainless steel 304 or 304 ca. 1.2... 6 µm and far IR (FIR) Silicon (Si), CF Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C Heating rate [K/min] Flatness (632 nm) VPCF40SI- N40CF 0 23 12. 2.5 10 40/20 VPCF63SI- N63CF 114 48 1.3 3.8 10 40/20 VPCF100SI- N100CF 152 48 19.8 3.8 10 40/20 Stainless steel 304, Kovar sleeve, T(max) = 120 C VPCF16SI-K N16CF 34 16 12. 1.5 3 20/10 VPCF40SI-K N40CF 0 32 12. 3 3 20/10 VPCF63SI-K N63CF 114 63 1.4 5 3 20/10 VPCF100SI-K N100CF 152 89 19.9 6 3 20/10 S/ -29
Viewports for Optical pplications Viewports for IR, CF Germanium (Ge), CF CF Viewport Technical data escription CF viewport with germanium Connection type CF flange He leak rate < 1.0E-10 mbar l/s Window material germanium, crystalline material stainless steel 304, 304 or 316N Transmission range ca. 2...15 µm Germanium (Ge), CF Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 C Heating rate [K/min] Flatness (632 nm) VPCF40GE- N40CF 0 23 12. 2.5 10 40/20 VPCF63GE- N63CF 114 48 1.3 3.8 10 40/20 VPCF100GE- N100CF 152 48 19.8 3.8 10 40/20 Stainless steel 304, Kovar sleeve, T(max) = 120 C VPCF16GE-K N16CF 34 16 12. 1.5 3 20/10 VPCF40GE-K N40CF 0 32 12. 3 3 20/10 VPCF63GE-K N63CF 114 63 1.4 5 3 20/10 VPCF100GE-K N100CF 152 89 19.9 6 3 20/10 Magn. permeability µ(r) < 1.005, stainless steel 316N, tantalum sleeve, T(max) = 120 C VPCF16GE-K-NM N16CF 34 16 12. 1.5 3 20/10 VPCF40GE-K-NM N40CF 0 32 12. 3 3 20/10 VPCF63GE-K-NM N63CF 114 63 1.4 5 3 20/10 S/ -30
Viewports for Optical pplications Viewports for UV-VIS-NIR, CF Sapphire (I2O3), CF CF Viewport Technical data escription CF viewport with sapphire Connection type CF flange He leak rate < 1.0E-10 mbar l/s Window material sapphire, crystalline material stainless steel 304 Transmission range ca. 250 nm... 5 µm Max. bakeout temperature 450 C Max. heating and cooling rate 25 K/min Surface quality 50/20 (scratch/dig), 20/10 on request Flatness < 2 (at 632 nm) Sapphire (I2O3), CF Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 450 C VPCF16UVS- N16CF 34 15.4 1.5 VPCF40UVS- N40CF 0 24 12. 2 VPCF63UVS- N63CF 114 3 1.3 2 VPCF100UVS- N100CF 152 5 19.8 3 Sapphire on KF flange see Viewports for Optical pplications, KF. -31
Viewports for Optical pplications High Precision Optics Series Excellent optical properties Premium anti-refl ection coatings for the whole clear aperture, with a high degree of versatility Vacuum suited up to UHV-applications Technical ata Connection KF CF ISO (see table) material Stainless steel 1.4404 (316 ) Binding material FKM O-ring He leak rate of glass metal connection < 5 E-10 mbar l / s He leak rate of flange ccording to the standard flange properties Max. bakeout temperature 180 C Max. heating and cooling rate 3 K / min View diameter 20 mm / 34 mm / 44 mm Window thickness 4 mm / 5 mm / 12 mm Window material Borosilicate, fused silicia, zinc selenide, silicon, calcium flouride, barium flouride, germanium, sapphire KF viewport CF viewport ISOK viewport ISOF viewport Type of flange KF25 40 mm 20 mm 2 mm 5 mm KF40 55 mm 20 mm 19 mm 5 mm CF40 0 mm 20 mm / 34 mm 16 mm / 19 mm 5 mm / 4 mm CF63 114 mm 20 mm / 44 mm 21 mm / 22 mm 5 mm / 12 mm ISOK63 95 mm 20 mm / 44 mm 15 mm / 19 mm 5 mm / 12 mm ISOF63 130 mm 20 mm / 44 mm 15 mm / 19 mm 5 mm / 12 mm Ordering text: VP 1 2 - E - 3 - X 4 Example: VPKF25UVQ-E-R290-30-X1 Order text postion Property Options 1 Type of flange KF25, KF40, CF40, CF63, ISOF63, ISOK63 2 Optical material B, UVQ, CF2, BF2, S, SI, ZNSE, GE 3 4 Coating according to table View diameter 1 for 20 mm, 1,6 for 34 mm, 2 for 40 mm -32
Viewports for Optical pplications High Precision Optics Series Configurable Viewports for aser pplications The optic fi ts perfectly to your application due to its highquality processing. The viewports are qualified for challenging laser applications thanks to minimal scattering and distortion. Refl ection in % Wavelength in nm Refl ection in % Wavelength in nm Optical Material Surface Finish Flatness S / Parallelism Coating aser damage threshold (for 10 ns, 10 Hz) Fused Silica λ / 10 10 / 5 5 261 266 nm 2 J / cm 2 350 450 nm 10 J / cm 2 400 00 nm,5 J / cm 2 View iameter 20 mm Borosilicate BK λ / 10 10 / 5 5 523 532 nm 10 J / cm 2 610 860 nm R avg < 0,5 %,5 J / cm 2 00 1100 nm,5 J / cm 2 104 1064 nm 10 J / cm 2 523 532 nm & 104 1064 nm 405 nm 5 J / cm 2 10 J / cm 2 > 1 J / cm 2 532 nm > 1 J / cm 2 34 mm Borosilicate BK λ / 4 60 / 40 1 633 nm > 1 J / cm 2 85 nm R avg < 0,25 % > 1 J / cm 2 980 nm > 1 J / cm 2 1064 nm > 1 J / cm 2 1550 nm > 1 J / cm 2-33
Viewports for Optical pplications High Precision Optics Series Configurable Viewports for Wide Range pplications The wide range series offers a great variety of crystals for applications in the IR spectrum (e. g. thermographic metrology) and materials with a high transmission from UV to IR such as Calcium- and Barium fl uoride. Refl ection in % Wavelength in nm Refl ection in % Wavelength in nm View iameter 20 mm 34 mm Optical Material Borosilicate BK Surface Finish Flatness S / Parallelism λ / 10 20 / 10 5 Fused Silica λ / 10 20 / 10 5 Borosilicate BK λ / 4 60 / 40 1 Fused Silica λ / 10 20 / 10 5 Coating uncoated 350 00 nm 650 1050 nm 1050 1620 nm uncoated 290 30 nm 350 00 nm 650 1050 nm 1050 1620 nm uncoated 425 65 nm 400 1000 nm 600 1050 nm uncoated 250 425 nm 250 00 nm 400 1000 nm 600 1050 nm -34
Viewports for Optical pplications High Precision Optics Series Configurable Viewports for UV-VIS pplications The standard HiPO-series is available with a selection of established R-coatings from UV to NIR. The high-quality optics allow an outstanding transmission quality of optical signals into your vacuum chamber. Refl ection in % Wavelength in nm Refl ection in % Wavelength in nm 20 mm Surface Finish Optical Material Coating Flatness S / Parallelism Barium fluoride λ / 4 @ 633 nm 40 / 20 1 uncoated 3 5 µm Germanium 1 λ @ 633 nm 40 / 20 1 uncoated 8 12 µm Sapphire 1 λ @ 633 nm 60 / 40 3 uncoated Silicon λ / 2 @ 633 nm 40 / 20 3 uncoated 3 5 µm View iameter 20 mm / 44 mm 34 mm Calcium fluoride λ / 8 @ 633 nm 40 / 20 10 uncoated Zinc selenide 1 λ @ 633 nm 40 / 20 1 uncoated 12 µm uncoated Germanium λ / 10 @ 10,6 µm 60 / 40 1 3 5 µm 3 12 µm 8 12 µm uncoated Zinc selenide λ / 10 @ 10,6 µm 60 / 40 1 3 5 µm 8 12 µm Zinc sulfide λ / 10 @ 10,6 µm 60 / 40 1 uncoated 3 12 µm -35
Viewports for Optical pplications luvac Precision Optics Precision made of luminum lightweight, not magnetizable and CF knife edges in approved luvac quality. Configurable viewport with coatings for near UV to medium IR range. CF knife edges in approved luvac quality N-BK, fused silica and crystal optics with various VR and BBR coatings Not magnetizable Technical ata View iameter 34 mm Spectral Ranges UV-VIS, VIS, VIS-IR, IR Coatings uncoated, VR and BBR Flatness own to λ / 10 Surface Finish (S/ ) own to 20-10 Types N40CF Material luminum EN W-6XXX Max. Operation Temperature 120 C Max. Heating / Cooling Rate 3 K / min Helium eak Rate 5 10-10 mbar l / s imensions 0 mm 34 mm 3 1 18 mm 13 mm 3 4 mm 1 Ordering text: VP CF40 1 - E - 2 - X 1.6 - Example: VPCF40UVQ-E-R250-00-X1.6- position Property Options 1 Optical material B, UVQ, ZNS, ZNSE, GE 2 Coating according to table -36 www.vacom.de
Viewports for Optical pplications luvac Precision Optics Configurable luvac Viewports for aser pplications The optic fits perfectly to your application due to its high-quality processing. The viewports are qualified for challenging laser applications thanks to minimal scattering and distortion. Transmission* a b Transmission in % c d e f g Wavelength in nm Optical Material Surface Finish Flatness S / Parallelism Coating aser damage threshold (for 10 ns, 10 Hz) a 405 nm b 532 nm Borosilicate N-BK λ / 4 60 / 40 1 c d e 633 nm 85 nm 980 nm R avg < 0,25 % > 1 J / cm 2 f 1064 nm g 1550 nm * The graph represents the coating properties in general. eviations at the product are valid. Only the written-out specs are mandatory. www.vacom.de -3
Viewports for Optical pplications luvac Precision Optics Configurable luvac Viewports for UV-VIS pplications The standard luvac Precision Optics is available with a selection of established R-coatings from UV to NIR. The high-quality optics allow an outstanding transmission quality of optical signals into your vacuum chamber. Reflection / Transmission* Reflection in % Transmission in % Wavelength in nm Optical Material Borosilicate N-BK Surface Finish Flatness S / Parallelism λ / 4 60 / 40 < 1 Fused Silica λ / 10 20 / 10 < 5 Coating uncoated 425 65 nm 400 1000 nm 600 1050 nm uncoated 250 425 nm 250 00 nm 400 1000 nm 600 1050 nm * The graph represents the coating properties in general. eviations at the product are valid. Only the written-out specs are mandatory. -38 www.vacom.de
Viewports for Optical pplications luvac Precision Optics Configurable luvac Viewports for Wide Range pplications The wide-range series offers a great variety of crystals for applications in the IR spectrum (e. g. thermographic metrology) and materials with a high transmission from UV to IR such as Calcium- and Barium fluoride. Reflection* Transmission in % Wavelength in nm Surface Finish Optical Material Flatness S / Parallelism Germanium λ / 10 @ 10.6 µm 60 / 40 < 1 Zinc selenide λ / 10 @ 10.6 µm 60 / 40 < 1 Zinc sulfide λ / 10 @ 10.6 µm 60 / 40 < 1 Coating uncoated 3 5 µm 3 12 µm 8 12 µm uncoated 3 12 µm 8 12 µm uncoated 3 12 µm * The graph represents the coating properties in general. eviations at the product are valid. Only the written-out specs are mandatory. www.vacom.de -39
Special Viewports and dditional Components Special Viewports and dditional Components ITO (Indium Tin Oxide) is used as a coating to borosilicate or sapphire viewports to allow electric conductivity while maintaining optical transmission. This prevents charge-build-up, the distortion of electric fields and the adsorption of charged particles (e.g. ceramic powders). dditionally scintillation films (also known as phosphor films) can be deposited on these viewports to visualize diffraction patterns of electrons. Such coated viewports mainly used in surface analytical techniques such as RHEE (reflection high energy electron diffraction). In some applications (e.g. RHEE) X-ray radiation is generated or used. To prevent this radiation from leaving the vacuum chamber X-ray absorbing lead glass caps can be attached to VCOM vacuum viewports. To keep a clear view, rotatable viewport shutters can be placed on the vacuum-side of the viewport to shield the glass from heat or material deposition during processing. In order to position optical elements more flexibly a variety of special designs such as glass-to-metall-adaptors, re-entry-viewports, viewports connected with metal tubes or bellows are available. With such designs optical elements can for example be dunked into the vacuum chamber and thus be brought closer to the test object. This can be used for focusing purposes. nother example is the connection of two chambers with a transparent glass-tube for monitoring purposes. -40
Special Viewports and dditional Components Viewports with Conducting, Transparent ITO Coating Borosilicate glass with ITO-coating Technical data escription borosilicate with ITO coating Connection type CF flange He leak rate < 1.0E-10 mbar l/s Window material borosilicate (Corning 056) material stainless steel 304 Bakeout temperature Max. 300 C Max. heating and cooling rate 3 K/min Coating indium tin oxide (ITO) Borosilicate glass with ITO-coating Stainless steel 304, Kovar sleeve, T(max) = 300 C VPCF40B--ITO N40CF 0 32 12. 3 VPCF63B--ITO N63CF 114 63 1.4 3.5 VPCF100B--ITO N100CF 152 90 19.9 6 KF fittings on request. -41
Special Viewports and dditional Components Viewports with Conducting, Transparent ITO Coating Sapphire with ITO-coating Technical data escription sapphire with ITO coating Connection type CF flange He leak rate < 1.0E-10 mbar l/s Window material sapphire, crystalline material stainless steel 304 or 316N Bakeout temperature Max. 300 C Max. heating and cooling rate 3 K/min Coating indium tin oxide (ITO) Sapphire with ITO-coating Stainless steel 304, Kovar sleeve, T(max) = 300 C VPCF40S--ITO N40CF 0 38 12. 3 VPCF63S--ITO N63CF 114 63 1.4 3.5 VPCF100S--ITO N100CF 152 90 19.9 6 Magn. permeability µ(r) < 1.005, stainless steel 316N, tantalum sleeve, T(max) = 300 C VPCF40S--ITO-NM N40CF 0 38 12. 3 VPCF63S--ITO-NM N63CF 114 63 1.4 3.5 VPCF100S--ITO-NM N100CF 152 90 19.9 6 KF fittings on request. -42
Special Viewports and dditional Components Viewports with uminescent ayer Borosilicate glass with luminescent layer P43 Technical data escription borosilicate glass with luminescent layer P43 and intermediate ITO coating Connection type CF flange He leak rate < 1.0E-10 mbar l/s Window material borosilicate (Corning 056) material stainless steel 304 Bakeout temperature Max. 300 C Max. heating and cooling rate 3 K/min Coating luminescent layer P43 (Gd2O25:Tb) Borosilicate glass with luminescent layer P43 VPCF40B--ITOP43 N40CF 0 38 12. 3 VPCF63B--ITOP43 N63CF 114 63 1.4 3.5 VPCF100B--ITOP43 N100CF 152 90 19.9 6 Other luminescent layers on request. -43
Special Viewports and dditional Components Borosilicate Glass in Quick ccess oors (Q) Borosilicate glass in quick access doors (Q) N63CF - N200CF N250CF, N300CF Technical data escription viewport with CF quick access door Connection type CF flange He leak rate < 1.0E-9 mbar l/s Window material borosilicate (Borofloat 33) material stainless steel 304 (aluminum door frame, anodized) Frame material FKM, O-ring Transmission range ca. 400...2500 nm Bakeout temperature Max. 120 C Borosilicate glass in quick access doors (Q) Q63VP--304 N63CF 80 103 63 5 30 Q100VP--304 N100CF 124 149 100 95 33 Q160VP--304 N160CF 165 194 150 145 35 Q200VP--304 N200CF 29 24 200 195 43 Q250VP--304 N250CF 360 305 350 150 53 Q300VP--304 N300CF 410 368 305 150 53 For further information on CF Quick access doors please see chapter Standard Components. 2 3 4-44
Special Viewports and dditional Components ead-glass Safety-caps with Radiation Shielding ead-glass safety-caps with radiation shielding Technical data escription lead-glass in stainless steel caps suitable for all CF viewports. assembly with 3 set screws. Connection type CF flange Window material lead-glass (lead equivalent ca. 1.6 mm at 100 kv... 200 kv) Frame material stainless steel 304 or 316 ead-glass safety-caps with radiation shielding, stainless steel 304 GH-100-304 N100CF 160 89 153 25 6 GH-160-304 N160CF 212 138 204 25 6 ead-glass safety-caps with radiation shielding, stainless steel 316 2 GH-16-316 N16CF 44 15 36 18 6 GH-40-316 N40CF 80 36 1 23 6 GH-63-316 N63CF 123 66 115 26 6 GH-100-316 N100CF 160 89 153 25 6 GH-160-316 N160CF 212 138 204 25 6 2-45
Special Viewports and dditional Components Viewport Shutters The rotary feedthrough type Magirive M16 serve as drive for all viewport shutters. The basic version of the rotary feedthrough is pivote and hold the shutter in any position. Please find further drive options in chapter 10 Mechanical Feedthroughs. Viewport shutters Technical data: escription viewport shutters protect the vacuum side of a viewport from material deposition (e.g. in coating applications) rive rotary feedthrough Magirive M16 Connection type CF flange Bakeout temperature Max. 250 C VPSCF40 N40CF 0 3 31.8 116 10 VPSCF63 N63CF 114 63.5 5 135 19.5 VPSCF100 N100CF 152 101.6 8 158 35.5 VPSCF160 N160CF 203 152.4 133.2 13 52.5 Viewports with d Socket 2 ifferent glass-metal-constructions make it possible to limit the position of the optical components not only to the flange connection e. g. on the chamber wall. Tubulations (of metal or glass), flexible hoses or other connection elements allow to bring the coupling position of the viewport very close to the sample inside the chamber (e. g. to ease the focusing of beams on the sample surface) or to connect two chambers with a transparent tube. -46
Optical Fiber Feedthroughs Singlemode Optical Fiber Feedthroughs Singlemode VCOM optical fiber feedthroughs with integrated singlemode fiber are designed for the respective specified wavelength and can be used in a rather narrow wavelength range surrounding the design wavelength. For geometrical reasons (small fiber core) propagation of one or few modes is possible. Each singlemode fiber has a cutoff-wavelength. Below that wavelength the singlemode fiber turns into multimode. VCOM standard fibers are SM633, SM80, SM850 and SM1310 which already cover a wide range of possible applications. Furthermore, special fibers may be integrated in our feedthroughs on request. Please also find cables and accessories in section ccessories for optical fiber feedthroughs. r n ight propagation (schematic) in a singlemode fiber and refractive index n as a function of fiber radius r Ultra high vacuum optical fiber feedthrough Integrated singlemode fiber ouble ended female connector (coupling) UHV compatible Weldable singlemode feedthrough Technical data He leak rate < 1 10-10 mbar l/s Housing material stainless steel 304 Operation temperature -25... 5 C Max. bakeout temperature 180 C Max. heating / cooling rate 3 K/min Coupling length 41 mm Singlemode feedthrough in CF16 flange Schematic drawing Singlemode optical fibers for optical fiber feedthroughs available at VCOM and their design wavelengths -4
Optical Fiber Feedthroughs - Singlemode Optical Fiber Feedthroughs - Singlemode Fiber SM633, FC/PC connector Fiber construction Technical data: Optical fiber singlemode fiber SM633 Wavelength 633 nm Numerical aperture 0.12 Cut-off wavelength 580 nm Coupling FC/PC (8 ferrule angle) Typical insertion loss 1 db Typical return loss 60 db Ferrule 2.5 mm ceramics (ZrO2) Number of feedthroughs 1234 3456890 W-SM633-FCPC - 1 CF16-SM633-FCPC-1 N16CF 1 CF40-SM633-FCPC-1 N40CF 1 CF40-SM633-FCPC-2 N40CF 2 CF40-SM633-FCPC-3 N40CF 3 CF63-SM633-FCPC-1 N63CF 1 CF63-SM633-FCPC-2 N63CF 2 CF63-SM633-FCPC-3 N63CF 3 CF63-SM633-FCPC-4 N63CF 4 CF63-SM633-FCPC-5 N63CF 5 Fiber SM80, FC/PC connector Fiber construction Technical data: Optical fiber singlemode fiber SM80 Wavelength 80 nm Numerical aperture 0.12 Cut-off wavelength 20 nm Coupling FC/PC (8 ferrule angle) Typical insertion loss 1 db Typical return loss 60 db Ferrule 2.5 mm ceramics (ZrO2) Number of feedthroughs 1234 3456890 W-SM80-FCPC - 1 CF16-SM80-FCPC-1 N16CF 1 CF40-SM80-FCPC-1 N40CF 1 CF40-SM80-FCPC-2 N40CF 2 CF40-SM80-FCPC-3 N40CF 3 CF63-SM80-FCPC-1 N63CF 1 CF63-SM80-FCPC-2 N63CF 2 CF63-SM80-FCPC-3 N63CF 3 CF63-SM80-FCPC-4 N63CF 4 CF63-SM80-FCPC-5 N63CF 5-48
Optical Fiber Feedthroughs - Singlemode Optical Fiber Feedthroughs - Singlemode Fiber SM850, FC/PC connector Fiber construction Technical data: Optical fiber singlemode fiber SM850 Wavelength 850 nm Numerical aperture 0.12 Cut-off wavelength 0 nm Coupling FC/PC (8 ferrule angle) Typical insertion loss 1 db Typical return loss 60 db Ferrule 2.5 mm ceramics (ZrO2) Number of feedthroughs 1234 3456890 W-SM850-FCPC - 1 CF16-SM850-FCPC-1 N16CF 1 CF40-SM850-FCPC-1 N40CF 1 CF40-SM850-FCPC-2 N40CF 2 CF40-SM850-FCPC-3 N40CF 3 CF63-SM850-FCPC-1 N63CF 1 CF63-SM850-FCPC-2 N63CF 2 CF63-SM850-FCPC-3 N63CF 3 CF63-SM850-FCPC-4 N63CF 4 CF63-SM850-FCPC-5 N63CF 5 Fiber SM1310, FC/PC connector Fiber construction Technical data: Optical fiber singlemode fiber SM1310 Wavelength 1310 nm / 1550 nm Numerical aperture 0.12 Cut-off wavelength 1260 nm Coupling FC/PC Typical insertion loss 0.5 db at 1310 nm Typical return loss 50 db Ferrule 2.5 mm ceramics (ZrO2) Number of feedthroughs 1234 3456890 W-SM1310-FCPC - 1 CF16-SM1310-FCPC-1 N16CF 1 CF40-SM1310-FCPC-1 N40CF 1 CF40-SM1310-FCPC-2 N40CF 2 CF40-SM1310-FCPC-3 N40CF 3 CF63-SM1310-FCPC-1 N63CF 1 CF63-SM1310-FCPC-2 N63CF 2 CF63-SM1310-FCPC-3 N63CF 3 CF63-SM1310-FCPC-4 N63CF 4 CF63-SM1310-FCPC-5 N63CF 5-49
Optical Fiber Feedthroughs - Singlemode Optical Fiber Feedthroughs - Singlemode Fiber SM1310, FC/PC connector Fiber construction Technical data: Optical fiber singlemode fiber SM1310 Wavelength 1310 nm / 1550 nm Numerical aperture 0.12 Cut-off wavelength 1260 nm Coupling FC/PC (8 ferrule angle) Typical insertion loss 0.5 db Typical return loss 60 db Ferrule 2.5 mm ceramics (ZrO2) Number of feedthroughs 1234 3456890 W-SM1310-FCPC - 1 CF16-SM1310-FCPC-1 N16CF 1 CF40-SM1310-FCPC-1 N40CF 1 CF40-SM1310-FCPC-2 N40CF 2 CF40-SM1310-FCPC-3 N40CF 3 CF63-SM1310-FCPC-1 N63CF 1 CF63-SM1310-FCPC-2 N63CF 2 CF63-SM1310-FCPC-3 N63CF 3 CF63-SM1310-FCPC-4 N63CF 4 CF63-SM1310-FCPC-5 N63CF 5 QCF16-SM1310-FCPC-1 N16QCF 1 QCF40-SM1310-FCPC-1 N40QCF 1 QCF63-SM1310-FCPC-2 N63QCF 2 QCF100-SM1310-FCPC-3 N160QCF 3-50
Optical Fiber Feedthroughs Multimode Optical Fiber Feedthroughs Multimode VCOM optical fiber feedthroughs with integrated multimode fiber are designed for the specified wavelength ranges and already cover many applications in ultraviolet, visible and near infrared. The fibers MM400UV, MM400IR and MMGE400IR feature a step index profile (i.e. discrete change in refractive index). The fiber MM50 is a gradient index fiber with an optimized refractive index profile with minimized mode dispersion (wavelength-dependent propagation of light) commonly found in step index fibers. Beyond these standard fibers, special fibers are available on request. Please find our ready to use cables, connectors and accessories in section ccessories for optical fiber feedthroughs. r n r n ight propagation (schematic) in a multimode fiber and refractive index n as a function of radius r. Upper part: step index fiber, lower part: gradient index fiber Ultra high vacuum optical fiber feedthrough Integrated multimode fiber ouble ended female connector (coupling) UHV compatible Weldable multimode feedthrough Technical ata He leak rate < 1 10-10 mbar l/s Housing material stainless steel 304 Operating temperature -25... 5 C Max. bakeout temperature 180 C Max. heating / cooling rate 3 K/min Coupling length 41 mm Multimode feedthroughs in CF40 flange Schematic drawing Multimode fibers for optical fiber feedthroughs available at VCOM and their operating wavelength ranges -51
Optical Fiber Feedthroughs - Multimode Optical Fiber Feedthroughs - Multimode Fiber MM50, FC/PC connector Technical data: Optical fiber multimode fiber MM50 Wavelength ca. 850...1300 nm Numerical aperture 0.2 Coupling FC/PC Typical insertion loss 0.5 db at 1300 nm Ferrule 2.5 mm ceramics (ZrO2) Fiber construction Number of feedthroughs 1234 3456890 W-MM50-FCPC - 1 CF16-MM50-FCPC-1 N16CF 1 CF40-MM50-FCPC-1 N40CF 1 CF40-MM50-FCPC-2 N40CF 2 CF40-MM50-FCPC-3 N40CF 3 CF63-MM50-FCPC-1 N63CF 1 CF63-MM50-FCPC-2 N63CF 2 CF63-MM50-FCPC-3 N63CF 3 CF63-MM50-FCPC-4 N63CF 4 CF63-MM50-FCPC-5 N63CF 5 Fiber MM50, FC/PC connector Technical data: Optical fiber multimode fiber MM50 Wavelength ca. 850...1300 nm Numerical aperture 0.2 Coupling FC/PC Typical insertion loss 0.5 db at 1300 nm Ferrule 2.5 mm ceramics (ZrO2) Fiber construction Number of feedthroughs 1234 3456890 W-MM50-FCPC - 1 CF16-MM50-FCPC-1 N16CF 1 CF40-MM50-FCPC-1 N40CF 1 CF40-MM50-FCPC-2 N40CF 2 CF40-MM50-FCPC-3 N40CF 3 CF63-MM50-FCPC-1 N63CF 1 CF63-MM50-FCPC-2 N63CF 2 CF63-MM50-FCPC-3 N63CF 3 CF63-MM50-FCPC-4 N63CF 4 CF63-MM50-FCPC-5 N63CF 5-52
Optical Fiber Feedthroughs - Multimode Optical Fiber Feedthroughs - Multimode Fiber MM400UV, FC/PC connector Technical data: Optical fiber multimode fiber MM400UV Wavelength ca. 190...1100 nm Numerical aperture 0.22 Coupling FC/PC Typical insertion loss 0.5 db at 850 nm Ferrule 2.5 mm metal (RCP P4) Fiber construction Number of feedthroughs 1234 3456890 W-MM400UV-FCPC - 1 CF16-MM400UV-FCPC-1 N16CF 1 CF40-MM400UV-FCPC-1 N40CF 1 CF40-MM400UV-FCPC-2 N40CF 2 CF40-MM400UV-FCPC-3 N40CF 3 CF63-MM400UV-FCPC-1 N63CF 1 CF63-MM400UV-FCPC-2 N63CF 2 CF63-MM400UV-FCPC-3 N63CF 3 CF63-MM400UV-FCPC-4 N63CF 4 CF63-MM400UV-FCPC-5 N63CF 5 Fiber MM400IR, FC/PC connector Technical data: Optical fiber multimode fiber MM400IR Wavelength ca. 400...2400 nm (optional 500...2600 nm) Numerical aperture 0.22 Coupling FC/PC Typical insertion loss 0.5 db at 850 nm Ferrule 2.5 mm metal (RCP P4) Fiber construction Number of feedthroughs 1234 3456890 W-MM400IR-FCPC - 1 CF16-MM400IR-FCPC-1 N16CF 1 CF40-MM400IR-FCPC-1 N40CF 1 CF40-MM400IR-FCPC-2 N40CF 2 CF40-MM400IR-FCPC-3 N40CF 3 CF63-MM400IR-FCPC-1 N63CF 1 CF63-MM400IR-FCPC-2 N63CF 2 CF63-MM400IR-FCPC-3 N63CF 3 CF63-MM400IR-FCPC-4 N63CF 4 CF63-MM400IR-FCPC-5 N63CF 5-53
Optical Fiber Feedthroughs FSM 905 Optical fiber feedthroughs for vacuum applications with FSM connectors Technical data Fiber construction Coupling FSM (SM-905) Insertion loss < 1.2 db Wavelength range UV-VIS 190 to 1100 nm Wavelength range VIS-IR 400 to 2400 nm Numerical aperture 0.22 Core diameter 200 μm 400 μm 600 μm Housing material Stainless steel 1.4404 (316) Ferrule material Ceramic (ZrO 2 ) systems KF CF QCF Bakeout temperature CF: 180 C, 250 C (depending on model) KF: 120 C Max. heating and cooling rate 3 K/min He leak rate < 1 x 10-10 mbar l/s Transmission curves 100 90 80 Transmission von of UV-VIS-Fasern UV-VIS-fibers 1 m 10 m 100 90 80 Transmission von of VIS-IR-Fasern VIS-IR-fibers 1 m Transmission transmission [%] 0 60 50 40 30 transmission Transmission [%] [%] 0 60 50 40 30 10 m 20 20 10 10 0 200 300 400 500 600 00 800 900 1000 1100 1200 1300 1400 1500 1600 0 200 400 600 800 1000 1200 1400 1600 1800 2000 2200 wavelength Wellenlänge [nm] Wellenlänge wavelength [nm] : 1 - MM 2 3 - FSM 4 5 Example: CF16-MM200UV-FSM-1-T250 position 1 2 3 4 5 ttribute Core diameter [μm] UV or IR version: UV/IR Number of optical fiber feedthroughs per flange Optional - "T250" for a high temperature model -54
Optical Fiber Feedthroughs FSM 905 FSM 905 for weldable or screw-in solutions Optical fiber feedthroughs in screw-in adapter Weldable optical fiber feedthroughs as standard version Weldable optical fiber feedthroughs for 250 C T-MM200UV-FSM W-MM200UV-FSM W-MM200UV-FSM-T250 T-MM200IR-FSM W-MM200IR-FSM W-MM200IR-FSM-T250 T-MM400UV-FSM W-MM400UV-FSM W-MM400UV-FSM-T250 T-MM400IR-FSM W-MM400IR-FSM W-MM400IR-FSM-T250 T-MM600UV-FSM W-MM600UV-FSM W-MM600UV-FSM-T250 T-MM600IR-FSM W-MM600IR-FSM W-MM600IR-FSM-T250 FSM 905 on KF flange KF40 1x KF40 2x KF40 3x FSM 905 on CF flange CF16 CF40 1x CF40 2x CF40 3x Standard version KF40-MM200UV-FSM-1 KF40-MM400UV-FSM-1 KF40-MM600UV-FSM-1 KF40-MM200UV-FSM-2 KF40-MM400UV-FSM-2 KF40-MM600UV-FSM-2 KF40-MM200UV-FSM-3 KF40-MM400UV-FSM-3 KF40-MM600UV-FSM-3 Standard version Model for 250 C CF16-MM200UV-FSM-1 CF16-MM200UV-FSM-1-T250 CF16-MM200IR-FSM-1 CF16-MM200IR-FSM-1-T250 CF16-MM400UV-FSM-1 CF16-MM400UV-FSM-1-T250 CF16-MM400IR-FSM-1 CF16-MM400IR-FSM-1-T250 CF16-MM600UV-FSM-1 CF16-MM600UV-FSM-1-T250 CF16-MM600IR-FSM-1 CF16-MM600IR-FSM-1-T250 CF40-MM200UV-FSM-1 CF40-MM200UV-FSM-1-T250 CF40-MM200IR-FSM-1 CF40-MM200IR-FSM-1-T250 CF40-MM400UV-FSM-1 CF40-MM400UV-FSM-1-T250 CF40-MM400IR-FSM-1 CF40-MM400IR-FSM-1-T250 CF40-MM600UV-FSM-1 CF40-MM600UV-FSM-1-T250 CF40-MM600IR-FSM-1 CF40-MM600IR-FSM-1-T250 CF40-MM200UV-FSM-2 CF40-MM200UV-FSM-2-T250 CF40-MM200IR-FSM-2 CF40-MM200IR-FSM-2-T250 CF40-MM400UV-FSM-2 CF40-MM400UV-FSM-2-T250 CF40-MM400IR-FSM-2 CF40-MM400IR-FSM-2-T250 CF40-MM600UV-FSM-2 CF40-MM600UV-FSM-2-T250 CF40-MM600IR-FSM-2 CF40-MM600IR-FSM-2-T250 CF40-MM200UV-FSM-3 CF40-MM200UV-FSM-3-T250 CF40-MM200IR-FSM-3 CF40-MM200IR-FSM-3-T250 CF40-MM400UV-FSM-3 CF40-MM400UV-FSM-3-T250 CF40-MM400IR-FSM-3 CF40-MM400IR-FSM-3-T250 CF40-MM600UV-FSM-3 CF40-MM600UV-FSM-3-T250 CF40-MM600IR-FSM-3 CF40-MM600IR-FSM-3-T250-55
ccessories for Optical Fiber Feedthroughs Introduction You can easily realize a complete solution with the provided accessories for optical fiber feedthroughs consisting of atmosphere side fiber cable, feedthrough and vacuum compatible cable. Especially the fiber cables represent only a small choice of our product range. Only a few combinations of cable length and plug configuration are listed as an example for fiber SM1310. The provided cables are available for all standard fibers at any length and with many possible plug types. We are pleased to provide a solution espacially adapted to your requirements. In addition, we gladly offer you special accessories e. g. for the cleaning of connector ferrules. FC Coupling Singlemode and multimode FC coupling FC coupling for FC connector with holes for two M2 screws Coupling of FC/PC to FC/PC or FC/PC to FC/PC For singlemode or multimode connectors Ceramic sleeve (ZrO2) Technical data: Operating temperature -40...85 C Bakeout temperature Max. 200 C escription e3456890 1234 KUP--FC KUP-V-FC for air side UHV compatible -56
ccessories for Optical Fiber Feedthroughs Optical Fiber Cables tmospheric cables Optical fiber cable for use in atmosphere With protective jacket (hollow hose) Technical data: Optical fiber Material connector Interlock SM1310 zinc threading / key ength [m] Connector Configuration KB--SM1310-500-FCPC-SE 0.5 FC/PC single-sided KB--SM1310-1000-FCPC-SE 1.0 FC/PC single-sided KB--SM1310-3000-FCPC-SE 3.0 FC/PC single-sided KB--SM1310-5000-FCPC-SE 5.0 FC/PC single-sided l b KB--SM1310-500-FCPC-E 0.5 FC/PC double-sided KB--SM1310-1000-FCPC-E 1.0 FC/PC double-sided KB--SM1310-3000-FCPC-E 3.0 FC/PC double-sided KB--SM1310-5000-FCPC-E 5.0 FC/PC double-sided KB--SM1310-500-FCPC-SE 0.5 FC/PC single-sided KB--SM1310-1000-FCPC-SE 1.0 FC/PC single-sided KB--SM1310-3000-FCPC-SE 3.0 FC/PC single-sided KB--SM1310-5000-FCPC-SE 5.0 FC/PC single-sided KB--SM1310-500-FCPC-E 0.5 FC/PC double-sided KB--SM1310-1000-FCPC-E 1.0 FC/PC double-sided KB--SM1310-3000-FCPC-E 3.0 FC/PC double-sided KB--SM1310-5000-FCPC-E 5.0 FC/PC double-sided KB--SM1310-500-FCPC-FCPC 0.5 FC/PC, FC/PC KB--SM1310-1000-FCPC-FCPC 1.0 FC/PC, FC/PC KB--SM1310-3000-FCPC-FCPC 3.0 FC/PC, FC/PC KB--SM1310-5000-FCPC-FCPC 5.0 FC/PC, FC/PC -5
ccessories for Optical Fiber Feedthroughs Optical Fiber Cables Ultra high vacuum cables Optical fiber cable for ultra high vacuum applications Technical data: Optical fiber SM1310 Material connector stainless steel 303 Interlock threading / key usheiztemperatur Max. 180 C ength [m] Connector Configuration KON-V-SM1310-500-FCPC-SE 0.5 FC/PC single-sided KON-V-SM1310-1000-FCPC-SE 1.0 FC/PC single-sided KON-V-SM1310-3000-FCPC-SE 3.0 FC/PC single-sided KON-V-SM1310-5000-FCPC-SE 5.0 FC/PC single-sided l b KON-V-SM1310-500-FCPC-E 0.5 FC/PC double-sided KON-V-SM1310-1000-FCPC-E 1.0 FC/PC double-sided KON-V-SM1310-3000-FCPC-E 3.0 FC/PC double-sided KON-V-SM1310-5000-FCPC-E 5.0 FC/PC double-sided KON-V-SM1310-500-FCPC-SE 0.5 FC/PC single-sided KON-V-SM1310-1000-FCPC-SE 1.0 FC/PC single-sided KON-V-SM1310-3000-FCPC-SE 3.0 FC/PC single-sided KON-V-SM1310-5000-FCPC-SE 5.0 FC/PC single-sided KON-V-SM1310-500-FCPC-E 0.5 FC/PC double-sided KON-V-SM1310-1000-FCPC-E 1.0 FC/PC double-sided KON-V-SM1310-3000-FCPC-E 3.0 FC/PC double-sided KON-V-SM1310-5000-FCPC-E 5.0 FC/PC double-sided KON-V-SM1310-500-FCPC-FCPC 0.5 FC/PC, FC/PC KON-V-SM1310-1000-FCPC-FCPC 1.0 FC/PC, FC/PC KON-V-SM1310-3000-FCPC-FCPC 3.0 FC/PC, FC/PC KON-V-SM1310-5000-FCPC-FCPC 5.0 FC/PC, FC/PC -58
ccessories for Optical Fiber Feedthroughs Connectors for Optical Fiber Cables Technical data: Suitable for cable diameter 0.9...3.5 mm Strain relief 150 N Product life > 1000 connection cycles Operating temperature -40...85 C Bakeout temperature Max. 180 C tmospheric connectors Connector for use in atmosphere Housing material: zinc ccessories for Connector 1234 3456890 CONN-SM-FCPC- SM633, SM80, SM850, SM1310 FC/PC CONN-SM-FCPC- SM633, SM80, SM850, SM1310 FC/PC CONN-MM50-FCPC- MM50 FC/PC CONN-MM50-FCPC- MM50 FC/PC CONN-MM400-FCPC- MM400UV, MM400IR, MMGE400IR FC/PC Ultra high vacuum connectors Connectors for ultra high vacuum applications Cleaned in ultrasonic bath Packed for vacuum application Housing material: stainless steel 303 ccessories for Connector 1234 3456890 CONN-SM-FCPC-V SM633, SM80, SM850, SM1310 FC/PC CONN-SM-FCPC-V SM633, SM80, SM850, SM1310 FC/PC CONN-MM50-FCPC-V MM50 FC/PC CONN-MM50-FCPC-V MM50 FC/PC CONN-MM400-FCPC-V MM400UV, MM400IR, MMGE400IR FC/PC -59