Coatings. Ion Assisted Deposition (IAD) process Advance Plasma Source (APS) plasma-ion assisted Deposition. Coatings on Optical Fibers

Similar documents
Understanding Optical Coatings For Military Applications

Optical Coatings. Photonics 4 Luxury Coatings , Genève. Dr. Andreas Bächli Head of Optical Coatings at RhySearch, Buchs (SG)

Precision Optical Engineering

About us. Capabilities

SELECTION OF OPTICAL COMPONENTS FOR COMMON LASER TYPES

Mirrors, Lenses, and IR Components

Optical Coatings. Phone: Fax: Domostroitelnaya str St. Petersburg, Russia

TECHNICAL PAPER. UNDERSTANDING SPECIAL MATERIAL REQUIREMENTS FOR DEEP ULTRA VIOLET COATINGS Author: Samuel Pellicori Materion Coating Materials News

Dielectric II-VI and IV-VI Metal Chalcogenide Thin Films in Hollow Glass Waveguides (HGWs) for Infrared Spectroscopy and Laser Delivery

Potassium Titanyl Phosphate (KTP) Crystals

Application note. Quality control of beam splitters and quarterwave-mirrors using the Agilent Cary 7000 Universal Measurement Spectrophotometer (UMS)

VACUUM VIEWPORTS. Introduction... I 03 KF Viewports... I 09 I 01. VACUUM / Components & Consumables

HOMOSIL, HERASIL 1, 2 and 3

OPTICS AND COATINGS. MADE in GERMANY

COMMERCIAL PRODUCTS GROUP. World Leader in High Performance, Ultra-Durable Thin Film Coatings

PRECISION OPTICAL FILTERS BY EOSS - ENHANCED OPTICAL SPUTTERING SYSTEM. Fraunhofer

BBO Crystals. Features. Broad phase-matchable second-harmonic-generation (SHG) range from nm to 2500 nm

For historical reasons the range of glasses is divided into two subgroups: The crown glasses with n d. > 55 or n d

Standard Optics Information

Table 1. Chemical and Structural Properties. About 1095 C g/cm 3 1.2W/m/K( c); 1.6W/m/K(//c)

Power Vision Ltd. PV Research. Power Vision Ltd. Unit R2, Herald Park, Crewe, Cheshire, CW1 6EA, UK Tel:

Using Atomic Force Microscopy (AFM) for Engineering Low Scatter Thin Film Optics

Polarizing and non-polarizing mirrors in far UV for the Hydrogen Lyman-α radiation (λ = 121.6nm)

PELHAM RESEARCH OPTICAL L.L.C.

Hafnium(IV) Oxide Patinal

Hafnium(IV) Oxide Patinal

Fused Silica: Bakeout to 200 C Operating Temperature -65 C to 150 C Standard Transmission Range 0.25 to 2 microns

Multilayer Silver / Dielectric Thin-Film Coated Hollow Waveguides for Sensor and Laser Power Delivery Applications

Damage Threats and Response of Final Optics for Laser-Fusion Power Plants

The ratio of total pulse energy to maximum pulse power.

Spectrometer gratings based on direct-write e-beam lithography

Thin Films & AR Coated. Viewports. Thin Film & AR Coated. Viewports

Optical Component Catalog

Recent Progress on 2012 SAT for UVOIR Coatings

>10 11 ohm-cm. ε T 11/ε0=6.7, ε T 33/ε0=8.1; Tan δ<0.001

High Performance Optical Coatings Deposited Using Closed Field Magnetron Sputtering

Suprasil and Infrasil Material Grades for the Infrared Spectrum

Click here to continue >

Introduction to Lithography

Studies Toward Improving the Laser Damage Resistance of UV Coatings. Authors: Samuel Pellicori and David Sanchez Materion Coating Materials News

PROCEEDINGS OF SPIE. Thin-film polarizer for high power laser system in China

Laser damage threshold of AR coatings on phosphate glass

Effect of γ irradiation on optical components

An innovative approach to coatings on large optics

ise J. A. Woollam Ellipsometry Solutions

Optical Coatings for Laser Facets Fabricated by Reactive Ion-Beam Sputter Deposition

Your Supplier for Fused Silica

Simultaneous Reflection and Transmission Measurements of Scandium Oxide Thin Films in the Extreme Ultraviolet

Metallization deposition and etching. Material mainly taken from Campbell, UCCS

Platypus Gold Coated Substrates. Bringing Science to the Surface

Substance M2 Patinal GENERAL INFORMATION AREAS OF APPLICATION THIN FILM PROPERTIES. Product Information

Kanigen Group, your partner for electroless nickel plating

Reflectivity Reduction of RetroReflector Installed in LHD due to. Plasma Surface Interaction

In-situ laser-induced contamination monitoring using long-distance microscopy

Product specification TiNOX energy

REVIEW OF LASER PLASTIC WELDING PROCESS

Deep-etched fused silica grating as a (de)multiplexer for DWDM application at the wavelength of 1.55µm

Detectors and Coatings for Efficient Systems for Future UV Astronomy

TECHNICAL PAPER. Author: Samuel Pellicori Materion Coating Materials News

Comparison of Carbon Coatings Deposited by Different Techniques

Optics for Advanced 50 J/cm µm Applications. By Laurynas Šatas, 2018

PATTERNING OF OXIDE THIN FILMS BY UV-LASER ABLATION

PREMIUM LASER OPTICS & COATINGS


Precision Micro-Aperture Catalog

Plasmonics using Metal Nanoparticles. Tammy K. Lee and Parama Pal ECE 580 Nano-Electro-Opto-Bio

105 Micron Core Power Delivery Fibers

Plastic Coated Silica/Silica (Low OH) FIBER CROSS SECTION Polyimide and Acrylate Coated. Nylon and Tefzel Coated

Deposition of Multilayer Optical Coatings Using Closed Field Magnetron Sputtering

Energy-efficient glazing

BAK EVAPORATOR FAMILY

Properties of Inclined Silicon Carbide Thin Films Deposited by Vacuum Thermal Evaporation

The Effect of Protective Coatings on Mirrors Reflectance of Nd-YAG Laser Resonator طالءات الحماية على انعكاسية مرايا أشعة ليزر النديميوم- ياك

P. N. LEBEDEV PHYSICAL INSTITUTE OF THE RUSSIAN ACADEMY OF SCIENCES PREPRINT

BAK EVAPORATOR FAMILY

Cavity Filters. KIGRE, INC., 100 Marshland Road, Hilton Head, SC 29926, USA PH: FAX: Web:

MIRacle Single Reflection ATR: Design and Performance Features

LASER GALVO SCANNING MIRRORS OPTOSIC SIC OPTICS FOR HIGH-END LASER PROCESSES

Laser Produced Plasma for Production EUV Lithography

Growth Of TiO 2 Films By RF Magnetron Sputtering Studies On The Structural And Optical Properties

Additive Manufacturing of Materials. Dr Helen Swygart Qioptiq Capability Improvement Manager

"ITO Film Trend for Touch Panel Applications"

Fused silica and fused quartz: experience from GW projects

PROPERTIES OF MATERIALS PART HARDNESS

LASER GALVO SCANNING MIRRORS OPTOSIC SIC OPTICS FOR HIGH-END LASER PROCESSES

A Tutorial on Infrared Optical Materials. M.R. Burgener. 7 November 2016

Abstract. Introduction. Key Words: Residual Film Stress Laser Damage Threshold

Quartz Glass for Optics

New Performance Levels for TPV Front Surface Filters

BAK. Evaporator Family

11.3 Polishing with Laser Radiation

Low-cost, deterministic quasi-periodic photonic structures for light trapping in thin film silicon solar cells

Welcome to Today s Webinar

optosic SiC optics for high-end laser processes

State of the art in silicon immersed gratings for space - Aaldert van Amerongen, Hélène Krol, Catherine Grèzes-Besset, Tonny Coppens, Ianjit Bhatti,

Integrated Target Reflectivity Analysis

Simulation Studies on Ceramic Coatings on Aluminium thin films for Solar Reflector Application

Durable Neutral Color Anti-Reflective Coating for Mobile Displays

CREOL, The College of Optics & Photonics, University of Central Florida

PRACTICAL DESIGN AND PRODOCTION OF OPTICAL THIN FILMS

Transcription:

Anti-Reflection Custom Ion Assisted Deposition (IAD) process Advance Plasma Source (APS) plasma-ion assisted Deposition Anti-Reflection on Optical Fibers OptoSigma supplies a wide selection of optical thin film coatings. These coatings are often provided as part of the optical component but they may also be ordered separately to be applied to an uncoated element. For example, it is possible to apply an Anti- Reflection coating to any uncoated lenses, windows or optical fibers. Also reflecting coatings may be applied to uncoated substrates to form mirrors or partial reflectors. To make this process simple we have listed some of our most common standard coatings. To order you simply append the coating suffix to the base part number and specify the surfaces to be coated. If you don t find the exact coating you need please ask us to provide you with a custom solution. Our coating engineers will use the latest design software and production techniques to provide you with the coating you require. Optical thin film coatings are used to control the intensity, wavelength selection and polarization characteristics of incident electro-magnetic radiation. For laser and precision optical applications the quality of the coating is critical. must be precise as well as durable and damage resistant. OptoSigma s advanced IAD and advanced plasm source (APS) coating facility in Santa Ana, California is able to supply high performance laser coatings covering the optical spectrum from 190 to 3000nm. 14

Anti-Reflection THIN FILM COATINGS Anti-Reflection Lenses Windows Optical Fiber Endfaces Custom We offer a wide range of Anti-Reflection coatings which may be applied to any of our glass or fused silica lenses or windows to reduce reflection losses. Through use of our Ion Assisted Deposition (IAD) process we also specialize in AR coatings on optical fiber endfaces. Low temperature IAD coatings may be applied to most fiber endface terminations. Pre and post coating inspection is performed in our dedicated facility to ensure high quality. Our Super-V represent the ultimate in low reflection coatings (R<0.1%) for narrowband applications. We also offer laser line V, Broadband Multilayer AR, Multiband AR, Telecom AR and Single Layer AR MgF 2. Standard coatings may be ordered by simply appending a coating suffix to the product number and specifying the number of sides to be coated. For more complex requirements we suggest that you call - our applications engineers will be pleased to advise you on the best coating for your needs. Standard Anti-Reflection coatings are listed in the following table. Specifications Tolerances On BK-7 Substrates: Super V: R<0.1% per surface at designated wavelength V Coating: ( λ<325nm) R<0.5% per surface at designated wavelength V Coating: ( λ>325nm) R<0.25% per surface at designated wavelength Multiband AR: R<0.25% per surface at designated wavelengths Broadband AR: R<0.6% per surface over the designated range MgF 2 AR: R<2.5% per surface over the designated range Durability and Laser damage threshold depend on the substrate so please see the later sections of this catalog for these specifications. The curves on the following pages show typical single surface reflectance for each of the specified coating types. 15

Anti-Reflection Custom 16

Anti-Reflection Custom 17

Anti-Reflection 5 4 Custom R (%) 3 2 1 0 400 600 800 1000 1200 1400 1600 1800 NEAR IR BROADBAND ANTI-REFLECTION COATING A59 (600-1600 nm) OptoSigma coatings are manufactured using Ion Assisted Deposition (IAD) technology yielding highly densified coatings with extremely low losses and high laser damage thresholds. Anti-Reflection (Continued) Type Wavelength Range, λ 0 (nm) Reflectivity per Surface (%) Minimum Price per Side 1-9 Pieces Price per Side 10 Pieces Coating suffix Super V Coat 633 <0.1 V33 Super V Coat 670 <0.1 V36 Super V Coat 780 <0.1 V40 Super V Coat 830 <0.1 V43 Super V Coat 980 <0.1 V44 Super V Coat 1012 <0.1 V45 Super V Coat 1064 <0.1 V46 Super V Coat 1310 <0.1 V48 Super V Coat 1550 <0.1 V49 V Coat 193 <0.5 A03 V Coat 248 <0.5 A04 V Coat 266 <0.5 A05 V Coat 281 <0.5 A06 V Coat 308 <0.5 A07 V Coat 325 <0.25 A08 18

Anti-Reflection (Continued) THIN FILM COATINGS Type Wavelength Range, λ 0 (nm) Reflectivity per Surface (%) Minimum Price per Side 1-9 Pieces Price per Side 10 Pieces Coating suffix Anti-Reflection Custom V Coat 337 <0.25 A11 V Coat 352 <0.25 A13 V Coat 355 <0.25 A14 V Coat 351-364 <0.25 A15 V Coat 405 <0.25 A18 V Coat 416 <0.25 A16 V Coat 428-441 <0.25 A17 V Coat 476-488 <0.25 A19 V Coat 514 <0.25 A22 V Coat 521-532 <0.25 A26 V Coat 543 <0.25 A28 V Coat 594 <0.25 A30 V Coat 612 <0.25 A31 V Coat 633-635 <0.25 A33 V Coat 670-694 <0.25 A36 V Coat 750 <0.25 A39 V Coat 780 <0.25 A40 V Coat 830 <0.25 A41 V Coat 905 <0.25 A43 V Coat 980 <0.25 A44 V Coat 1064 (1047-1080) <0.25 A46 V Coat 1150 <0.25 A47 V Coat 1310 <0.25 A48 V Coat 1540-1550 <0.25 A49 V Coat 2060-2100 <0.25 A50 Multiband AR 510-530 745-765 <0.4 A57 Multiband AR 633 1064 <0.25 A77 Multiband AR 532 1064 <0.25 A78 Multiband AR 266 532 <0.5 <0.25 A79 Broadband AR 240-360 <0.5 A51 Broadband AR 360-532 <0.6 A52 Broadband AR 425-675 <0.6 A55 Broadband AR 525-975 <1.0 A56 Broadband AR 600-900 <0.6 A58 Broadband AR 600-1600 <2.0 A59 Broadband AR 670-1100 <0.6 A62 Broadband AR 850-1500 <0.6 A63 Broadband AR 800-1200 <0.6 A66 Broadband AR 1100-1600 <0.6 A67 Broadband AR 2600-3000 <0.6 A69 MgF2 400-700 <2.5 A88 MgF2 650-1250 <2.5 A89 MgF2 1100-1600 <2.5 A99 Telecom AR 1260-1650 <0.4 A92 Telecom AR 1300 1550 <0.25 A93 Telecom AR 1500-1630 <0.1 A95 For components over 55mm diameter the price per surface will be doubled. For quantities in excess of 20 pieces ask for our discounted prices. 19

Anti-Reflection Custom We offer narrowband and broadband dielectric high reflecting coatings as well as a range of metal coatings. Laser Line HR are offered for all major laser wavelengths in the range of 193 to 2100nm. Broadband HR are offered for a selection of bandwidths. They provide a very high degree of spectrally neutral reflection and represent the ultimate in optical mirror coatings. Most of the coatings listed are for use at 45 degrees angle of incidence, but we do offer a selection of Broadband, Normal Incidence HR. Other normal incidence coatings can be provided on special request. Metal coatings, such as Protected Aluminum, Protected Silver or Protected Gold provide reflectance over an extremely broad spectral range. These coatings are protected by a thin layer of dielectric material in order to make them durable. It is also possible to enhance the performance of metal coatings by adding several dielectric layers over the metal coating. Specifications Tolerances Narrowband Laser HR: ( λ=193nm) Rav >95% for 45 incidence at designated wavelength Narrowband Laser HR: ( λ>193 and <300nm) Rav >95% for 45 incidence at designated wavelength Broadband HR: (45 AOI) R av >99.0% for 45 incidence over designated bandwidth Protected Aluminum: R av >88.0% from 400 to 2000nm Enhanced Aluminum: R av >94.0% from 400 to 700nm Protected Silver: R av >96% from 400 to 2000nm Enhanced Silver: R av >97.5% from 400 to 700nm Protected Gold: R av >96% from 650nm to >20µm Durability and Laser damage threshold depend on the substrate so please see the product sections of this catalog for these specifications. The curves show typical average reflectivity for a selection of our standard coatings. 20

Anti-Reflection Custom 21

Anti-Reflection Custom 22

Anti-Reflection Custom 23

Anti-Reflection Custom 24

Anti-Reflection Custom 25

Anti-Reflection Custom 26

Anti-Reflection Custom 27

Anti-Reflection Type Wavelength Range (nm) Reflectivity per Surface (%) Minimum Price per Side 1-9 Pieces Price per Side 10 Pieces Coating suffix Custom Laser Line HR 193 >95.0 R03 Laser Line HR 248 >99.0 R04 Laser Line HR 266 >99.0 R05 Laser Line HR 281 >99.0 R06 Laser Line HR 308 >99.5 R07 Laser Line HR 325 >99.5 R08 Laser Line HR 335 >99.5 R09 Laser Line HR 337 >99.5 R11 Laser Line HR 345 >99.5 R12 Laser Line HR 352 >99.5 R13 Laser Line HR 355 >99.5 R14 Laser Line HR 405 >99.5 R16 Laser Line HR 532 >99.5 R26 Laser Line HR 543 >99.5 R28 Laser Line HR 594 >99.5 R30 Laser Line HR 632.8 >99.5 R33 Laser Line HR 670-694 >99.5 R36 Laser Line HR 780-905 >99.5 R42 Laser Line HR 980-1012 >99.5 R45 Laser Line HR 1064 >99.5 R46 Laser Line HR 1550 >99.5 R48 Laser Line HR 2060-2100 >99.5 R50 Broadband HR 420-480 >99.5 avg R52 Broadband HR 480-540 >99.5 avg R53 Broadband HR 630-700 >99.5 avg R54 Broadband HR 425-675 >99.0 avg R55 Broadband HR 420-540 >99.0 avg R56 Broadband HR 540-650 >99.0 avg R57 Broadband HR 600-900 >99.0 avg R58 Broadband HR 770-830 >99.5 avg R59 Broadband HR 730-900 >99.0 avg R60 Broadband HR 570-640 >99.5 avg R61 Broadband HR 700-1000 >99.0 avg R62 Broadband HR 800-1200 >99.0 avg R66 Broadband HR 1100-1600 >99.0 avg R67 Enhanced Silver 400-2000 >97.5 avg R77 Protected Silver 400-2000 >96.0 avg R78 Protected Gold 650-IR >96.0 avg R79 UV Enhanced Aluminum 250-400 >85.0 avg R87 Enhanced Aluminum 400-700 >94.0 avg R88 Protected Aluminum 400-2000 >88.0 avg R89 28

Custom Optical THIN FILM COATINGS Anti-Reflection High, partial, and anti-reflection Edge, notch, band pass filters Plate and cube beam splitters Wavelength ranges 190 2500nm Sizes up to 10 x 10 inches Various angle of incidence and polarization requirements OptoSigma and customer furnished materials Optical glasses, crystals, polymers, fibers, fiber assemblies, and cemented substrates Custom Here at OptoSigma we specialize in custom optical coatings from the ultra-violet to the near infrared. Every day we provide a variety of custom coatings from simple modifications of the catalog specifications to entirely specialized designs. If the custom coating design is straightforward, we will perform a single test run immediately before the production run. For more complicated designs, a development process will be needed to establish the specifications which can be met in a production environment. This could potentially include multiple test runs, design modifications, and data analysis. We work closely with our customers through every step in the process to determine which specifications are suitable for both their applications and a manufacturing environment. It is in the best interest of OptoSigma and our customers to get through the development stage and on to production as quickly as possible. Once production is reached, the specialized processes and inspection are documented and established to ensure ongoing success. 29

Anti-Reflection Custom Most of our coatings are deposited using a computer controlled electron beam ion assisted deposition process allowing us to provide durable precision all dielectric coatings. Before coating, the substrates are ion cleaned to decrease surface contamination, which helps the coating bind to the substrate. During coating, these energetic ions help densify the coating which both increases the coatings optical performance and reduces the internal stress thus increasing the durability. Because of this process, we are able to maintain a temperature of less than 100 C to accommodate temperature sensitive substrates, such as optical fibers, fiber assemblies, crystals, select polymers, and cemented optics. Additionally, each chamber is equipped with a Polycold system to aid in the pumping of water vapor, which decreases the time required to coat and helps eliminate the moisture within the coating. The coating process is completely computer controlled and monitored by a technician. The final product is an extremely dense durable precision coating. The substrates are mounted on a planetary system, where each planet measures 15 inches in diameter. In addition to the availability of a wide range of tooling, we have the ability to both aid the customer in the designing process, or to provide complete custom tooling to accommodate their parts. Durability/Low Stress with a high internal stress have a tendency to craze and delaminate or deform the substrate increasing the wavefront error. Our ion assisted process minimizes this stress within each coating layer, and our designs are created to balance the stress over the entire coating. The ion cleaning process prior to coating enhances the adhesion of the coating to the substrate, increasing the durability and longevity of the coating. During coating, the ion bombardment minimizes internal stress build up by increasing the homogeneity within the layers. The final product is an extremely durable coating which maintains the original substrate wavefront error. High Damage To produce a coating, which can withstand high levels of incident laser energy, the appropriate design and process must be used. Our ion assisted deposition process produces coatings which are highly homogeneous, dense and completely oxidized. Reducing the inhomogenaities minimizes the internal scattering and increases the thermal conductivity of the coating. Our designs for high damage use all oxides rather than fluorides and metals which reduce the amount of absorption within the coating. Temperature Sensitive Substrates The energy required to produce highly homogeneous and dense coatings comes from our ion assisted process rather than temperature. During our coating runs we can maintain a temperature below 100 C. This allows us to produce precision coatings on a variety of temperature sensitive substrates, such as polymers, optical fibers, fiber assemblies, cemented substrates, and a variety of specialized crystals. If you do not find the coating specifications you need in our catalog, please call with your request. 30

Broadband All Dielectric THIN FILM COATINGS Anti-Reflection All dielectric multi-layer coatings are much more durable and of higher optical performance that those which involve metals. These can be offered with almost zero absorption and reflectivities greater than 99%. The all dielectric design is limited to a specific spectral bandwidth around the center design wavelength. Large bandwidth requirements demand the use of high precision coatings. These types of coatings are performed regularly at OptoSigma. Two actual spectral curves demonstrating this type of coating can be seen in the following plots. Anti-Reflection Specifications Tolerances Custom Substrate material: BK7 Grade A Angle of incidence: 0 degrees %R <0.3: 1250-1650nm High Reflector Specifications Tolerances Substrate material: BK7 Grade A Wide Angle Particular applications demand the use of all dielectric coatings due to their durability and superb optical performance. The all dielectric design is however highly sensitive to angular variation, which can create problems for broadband applications involving large angular variations, such as those with non-collimated beams or rotating substrates. To accommodate the need for angular variation, a coating bandwidth substantially greater than the source bandwidth is required. This requires a highly precise all dielectric coating. Two actual spectral curves demonstrating our capabilities follow. Angle of incidence: 0 degrees %R ave >97.0: 400-1000nm Reflector Specifications Tolerances Substrate material: BK7 Grade A Angle of incidence: 40±15degrees %R ave >98.0: 450-650nm Cube Specifications Tolerances Substrate material: BK7 Grade A Angle of incidence: 45±5degrees %T p >98: 780nm %T s <1.0: 780nm 31

Anti-Reflection Custom Filters Many standard types of custom filters, such as short wave pass, long wave pass, multiple notch, and band pass filters are manufactured at OptoSigma. In addition, a variety of highly customized coatings which do not fall into a general category are produced regularly at OptoSigma. Our engineers design to the specific targets established by our customers needs. The designs are then tested in our chambers and we work closely with our customers to arrive at a final manufacturable coating. Two actual spectral curves demonstrating our capabilities follow. Specifications Tolerances Substrate material: BK7 Grade A Angle of incidence: 45 degrees %T <3.0: 532nm %T >85: 488, 632.8, and 1064nm Specifications Tolerances Substrate material: BK7 Grade A Angle of incidence: 0 degrees Region 1: %T <5.0: 425-525nm Region 2: %T >90: 590nm Region 3: %T = 20±10: 670nm Region 4: %R >99.0: 1064nm If you do not find the coating specifications you need in our catalog, please call with your request. 32