Anti-collapse Reflow Encapsulant Technology for FCOF. IMAPS Flip-Chip 2003, Austin TX

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Anti-collapse Reflow Encapsulant Technology for FCOF IMAPS Flip-Chip 2003, Austin TX

Overview Background Problem Statement Development Process Timeline Anti-collapse approaches Test Methodology Results & Discussion Process and reliability tests Conclusions

Background 9110S Development overview 3 year process, defined FCOF optimal behaviors Mechanical, dispense, curing, etc. Developed in partnership with Seagate Technology Need for Anti-collapse Behavior Make behavior independent of pad definition Driven by economics Pb-free transition New resin & catalyst technology Control of voiding From substrate & (sometimes) component

Background Basic RE Process Targets Metric Throughput Product Quality Target/Rationale >30% increase in line throughput Product cost reduction Fewer steps; higher yield Equal or better reliability with increased product density Product Density Reduce space required for capillary underfill Floor Space & Equipment Eliminate post-cure Simplify dispensing process

Anti-collapse Problem Definition Kapton coverlay opening tolerances Chip standoff variations Solder alloy variations (Pb-free)

Two Anti-collapse Approaches Anti-collapse Beads Proven technology Simple implementation Requires bead diameter tailored to standoff bead dispersion must be well understood Die size dependence! Rheology Control More than one way to accomplish this Kester chose inorganic viscosity modifiers Performance independent of standoff Some die size dependence is possible

Anti-Collapse via Beads Chip W: 2.5 mm Chip L: 2.5 mm Gap H: 0.1 mm Fillet Dim: 0.35 mm Material Density: 1.29 g/cm^3 Silica density: 2.202 g/cm^3 Silica Sphere Dia: 0.045 mm Sphere Weight: 1.05E-04 mg Sphere Concentration: 0.50% Minimum N: 10 Spheres Volume in Gap: 0.625 mm^3 Volume in Fillet: 0.856 mm^3 Total Volume: 1.481 mm^3 % of Volume in Fillet: 57.8% % of Volume in Gap: 42.2% ppm With <Nmin Spheres 1000000 100000 10000 1000 100 10 1 0.1 0.01 0.001 Chips With < Nmin Spheres 0 0.2 0.4 0.6 0.8 1 1.2 1.4 Target Dispense Weight: 1.91 mg N total: 90 Spheres N gap: 37 Spheres P of <= Nmin: 0.00% ppm of chips with < Nmin: 0.040 ppm 0.0001 0.00001 0.000001 Weight % Silica Spheres

Timeline for Development Eutectic Anti-collapse Development Resin Technology Define Anti-collapse Approach(es) Refine Anti-collapse Approach(es) Qualification in Disc Drive Products General Market Release N/A 2002 2003 2004 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Pb-free Anti-collapse Development Resin Technology Filler Technology Product Formulation Qualification In Disc Drive Products General Market Release

Test Methodology Focused on actual process performance Dispense testing performed with Cam/Alot 1414 and DL Tech. Pump Placement with Universal GSM Reflow with Heller 1700 oven X-ray with Fein Focus FOX Cross section as required

Dispense Testing Pattern Repeat Test 45-dot pattern repeated every 5 minutes for one hour Measure average dispensed weight for each pattern Twenty-dot test Measure individual dispense weights to measure repeatability Measure anti-collapse materials against baseline material

Dispense Testing Weight, mg Twenty Dot Dispense Results 3.0 Baseline 2.5 Rheology Beads 2.0 1.5 1.0 0.5 0.0 0 5 10 15 20 25 Dot Number Rheology-controlled material failed twenty dot test Baseline & bead-based materials were equivalent Slightly higher volume required for bead-based material

Dispense Testing Baseline Set A Set B Set C Set D Set E Total Weight (mg) 91.38 89.73 92.38 92.77 92.92 Weight per Dot (mg) 2.03 1.99 2.05 2.06 2.06 Rheology-controlled Set A Set B Set C Set D Set E Total Weight (mg) 12.48 N/A N/A N/A N/A Weight per Dot (mg) 0.27 N/A N/A N/A N/A Bead-based Set A Set B Set C Set D Set E Total Weight (mg) 102.85 102.81 103.11 103.23 103.05 Weight per Dot (mg) 2.29 2.28 2.29 2.29 2.29 Rheology-controlled material also failed pattern repeat test Again, equivalent performance for baseline vs. bead based material

Soldering Performance

Soldering Performance X-ray Evaluation Technique 2-D x-ray, normal to surface Sobel filter applied Image inverted Normalize background density Yields information on wetting and bump mass

Soldering Performance Baseline Material KNORMAL KESTER 6 Placement Error Placement Error

Soldering Performance KNORMAL KESTER 6 Rheology Controlled Material

Soldering Performance KNORMAL KESTER 6 Bead Based Material Placement Error

Reliability Reliability Test Matrix

Reliability Summary Eutectic, bead-based materials have passed all reliability testing to date Thermal Cycle & Thermal Shock complete Awaiting final results BTH & HTOL tests near completion BTH, HTOL were passed previously using same resin system

Conclusions Anti-collapse technology incorporated in RE is most economical approach Eliminate need to incorporate substrate or die features to limit collapse Eliminate need for pad definition Two viable approaches to anti-collapse RE for FCOF have been demonstrated Bead-based control Rheology-based control

Conclusions Bead-based anti-collapse will be qualified for disc drive applications For Eutectic die, Q3 2003 For Pb-free die, Q4 2003 Rheology-based anti-collapse will also be pursued for the general market. Requires change of filler technology Provides the greatest application flexibility