MATERIAL NEEDS AND RELIABILITY CHALLENGES IN AUTOMOTIVE PACKAGING UNDER HARSH CONDITIONS

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MATERIAL NEEDS AND RELIABILITY CHALLENGES IN AUTOMOTIVE PACKAGING UNDER HARSH CONDITIONS Varughese Mathew NXP Semiconductors 6501 William Cannon Drive, Austin TX, USA

Automotive Innovation Driven by Electronics Security and Connected Network Advanced Driver Assistance Systems (ADAS) Safe Autonomous Systems Smart Sensors Radar and Vision Infotainment Audio & Amplifier Application Processors Advance Energy systems Advance Batteries Electric Motor Drivers 2 Body Controls Suspension, traction, power steering Position/ Angle sensors Powertrain & chassis Pressure/ motion sensors Battery management engine controllers, transmission controllers, voltage regulators Safety Airbag Collision avoidance Vehicle stability system

Harsh Environments in Automotive Electronics Harsh Environments - Cause extreme stresses and device failures. Typical harsh environments for Automotive electronics include Extreme temperatures, temperature cycling, high humidity. Underhood components ambient temperature can be 150 C or higher (may range 175ºC - 200ºC, and peak temperature may even higher). Extreme temperature cycles - thermal expansion coefficients of materials in the system and ICs are very important. Other potentially damaging conditions include corrosive environments, electrostatic discharge (ESD),high voltage environments electromagnetic interference (EMI), vibrations, physical impact etc.. This presentation focuses on reliability and material concerns under extreme temperatures and temperature cycling. 3 Varughese Mathew

Challenges in Automotive Packaging Extended Reliability Life time reliability for wide temperature range and extreme conditions Vehicle life for >>10 years Advanced Functionality Basic functions Sense Think Act Zero Defect People trust their life on some functions Zero defect for AEC Q100 Grade 0 for production Cost sensitive Manufacturing Achieve the above three cost effectively. 4 Varughese Mathew

Reliability Requirements The Automotive Electronics Council (AEC) defines requirements for automotive grade electronic components. AEC Requires Grade 0 or 1 for Harsh environments. Power Train Grade 1 & 0 Body Grade 1 Chasis & Safety Grade 1 ADAS Grade 1 Discrete Grade 2 & 3 Packaging reliability is governed by materials and interfaces. Wire and mold compound-metal interface reliability at high temperature / temperature cycle are two key areas of focus. 5 Varughese Mathew

Improved high temperature reliability with Cu wirebonding Au wire bond (Al-Au ) cannot pass high temperature (> 175º C) reliability requirements due to excessive Au-Al intermetallics and Kirkendall voiding. Leading automotive electronic packaging SO,QFP, BGA and QFN demonstrated AEC Q100 Grade 1/0 realiability. Au wire 1620hr HTB-175ºC Cu wire- 1620hr HTB-175ºC Au-Al: Au-Al intermetallics and voids continue to grow with HTB. ~6um IMC measured at 1620hr HTB-175ºC. Cu-Al: IMC thickness averaged ~1um. IMC formation with Cu wire slow and can pass AECG0 HTB conditions. However Cu wirebonding (CuWB) /Epoxy mold compound (EMC) has several challenges to overcome to achieve reliability under harsh conditions. Varughese Mathew and Tu Anh Tran IMAPS -2012-45th International Symposium on Microelectronics 6 Varughese Mathew

Copper Wirebond (CuWB) Reliability Bonding of Cu to Al form various Cu-Al Intermetallic compounds (IMC) such as Cu 9 Al 4 (close to Cu), CuAl, CuAl2 ( Close to Al). CuWB failure is mainly caused by the corrosive opening of IMC at the Cu-Al interface. Mold compound Al Cu ball bond Good Cu- Al bond Al Cu 9 Al 4 CuAl CuAl2 Failed Cu- Al bond Cl - ion concentration and ph of the mold compound matrix are two of the key factors influencing corrosion. CuWB Failure Mode +9 Atomic Ratio Locations Al :Cu 1, 3, 6 Pure Cu 2 8.07 : 18.06 4 0.91 : 20.24 5 8.78 : 8.41 7 8.13 : 16.09 8 5.97 : 14.7 Mold compound is a major source of various corrosive ions. What is impact of these ions on CuWB reliability? Varughese Mathew, Sheila Chopin, Leo Higgins and Ingrain Zhang, IMAPS 2013-46th International Symposium on Microelectronics 7 Varughese Mathew

Impact of bias voltage on CuWB corrosion reliability ph and corrosive ionic concentration( Cl ) of the mold compound matrix along with applied bias determines/influences CuWB reliability. Pass Fail As the biased voltage increases either the ph should be higher towards the neutral region or the Cl concentration be lower in order to avoid a corrosive opening and CuWB failure. Bromide ions can also cause corrosion in an additive fashion with Cl. Influence of ph, Cl concentration and bias voltage on CuWB reliability Some ions in the mold compound matrix is beneficial or benign. If the mold compound matrix Cl concentration is kept low with a ph high, even at a relatively high voltage ( studied up to 65V) no corrosion failure observed. Varughese Mathew and Sheila Chopin -IMAPS 2015-48 th International Symposium on Microelectronics 8 Varughese Mathew

HTSL (High temperature storage life) Reliability A B Cu Al C D EDX Site 5- EDX- Site 4 (Si O,C, Cu) (Al, Si O, C, Cu) Copper WB ball shear strengths after HTSL for CuWB dies encapsulated with sulfur compound containing mold compounds ( Sulfate A- 35-40; B- 40-45 ppm). FIB cross-section of CuWB ball bond after 2016 hours of HTSL at 175 C - (A) CuWB ball bond (B) Cu-Al interface (C) EDX spectrum of site 4 (D) EDX spectrum of site 5. No gaseous sulfur compound detected at high temperatures (up to 200 C) Bare Cu wire( 1mil- passed AECG0-2X conditions. Pd coated Cu wire HTSL behavior different than bare Cu wire Varughese Mathew and Sheila Chopin -Journal of Microelectronics and Electronic Packaging (2015) 12, 226-231 9 Varughese Mathew

HTSL Reliability due to S compounds Pd Coated Cu wire Site-4 Cu Al Site-3 Cu Al Si Cu Si C O Si C O Si o Cu S O C Al S (8.8 ppm sulfate) after 1008 hrs. of HTSL stress. (34.5ppm sulfate) after 1008 hrs. of HTSL stress. (47.5ppm sulfate) after 1008 hrs. of HTSL stress. The CuAl IMC Al interface was found to be intact and not corroded. No significant corrosion of any part of the ball bond. EDX at various sites did not indicate presence of S. No corrosive opening occurred at the CuAl IMC-Al interface. Some level of copper corrosion (voiding of copper) close to the periphery of the CuWB ball bond. S is detected in the area. No open failures. Experimental sample Extensive corrosion was observed and corrosive opening was also present leading to electrical open failure. S was also detected. Varughese Mathew and Sheila Chopin -Journal of Microelectronics and Electronic Packaging (2015) 12, 226-231 10 Varughese Mathew

Al pad corrosion Al pad can also undergo extensive corrosion under certain conditions such as bias voltage, presence of high Cl etc. Non-corroded pad Corroded pad This corrosion is characterized by unusually thick Al oxide/hydroxide EDX detect presence of large amounts of Cl. Al surface has a mud-crack appearance. FIB Cross-section of the corroded pad V. Mathew et al. ;IMAPS 2016-49 th International Symposium on Microelectronics 11 Varughese Mathew

High temperature reliability with Over Pad Metallization (OPM) Both Au and Cu wires on OPM(nickel / palladium / immersion gold) can meet AEC grade 0 requirements and beyond. Since no IMC and no exposed Al pad present Cl induced corrosion can be eliminated/minimized Au Wire on OPM (1um Ni) No IMC Cu Wire on OPM (1um Ni) No IMC No Al splash No Al remnant Minor Al deformation Package Reliability Electrical Test Results for Au-OPM and Cu-OPM Wire Type Au Wire Cu Wire MSL3/260C + AATC-C (-65C to 150C) Passed 4000 cycles Passed 4000 cycles MSL3/260C + HAST (130C / 85%RH / 33.3 PSIA) Passed 240 hours Passed 240 hours High Temperature Bake - 175C Passed 2016 hours Passed 2016 hours Varughese Mathew and Tu Anh Tran IMAPS -2012-45th International Symposium on Microelectronics 12 Varughese Mathew High Temperature Bake - 150C Passed 6048 hours Passed 6048 hours

Second Bond Delamination Reliability A major difficulty in achieving AEC Grade 0 reliability is second bond delamination followed by temperature cycling. For lead frame products, some of the main material considerations are wire type, epoxy mold compound (EMC), die attach (DA) materials and lead frame/die design features. Lead frames with roughened surfaces, less Ag plating area, appropriate LF design features, die/ LF design, will help to overcome this challenge. Mold compound formulation can also be engineered to improve LF- mold compound adhesion. Delamination detected by CSAM Delamination Ag plating Heel Crack Mold Compound 13 Varughese Mathew

Summary Materials and assembly processes play a major role in addressing reliability challenges under harsh conditions. Copper wire and mold compounds are key players in achieving AEC Q100 G0 conditions. Al- Cu-Al IMC corrosion,al pad corrosion, EMC- LF adhesion are critical factors to be considered to achieve towards zero defectivity. 14 Varughese Mathew

Acknowledgments Sheila Chopin Darrel Frear Tu Anh Tran Leo Higgins 15

Thank you