Integrated Sub-Fab Equipment Solutions The Key to Manufacturing Peace of Mind Andrew Chambers & Steve Cottle, Edwards Ltd.
Contents Equipment supplier Value Engine Improving the equipment installation experience System solutions and operational benefits Utility cost control and optimisation Conclusions
Role of Equipment Supplier in HVM User requirements HVM Fabs. Focus on reliability and stability BKM deployment & improvement Strong focus on applications and robust processes Global learning and CIP Continuous cost reduction Process Tool Makers Early development of solutions On-tool pumps for low CoO New technology development BKM development and support R&D Community Advanced research & innovation 450-mm process development Advanced materials development Equipment supplier contribution Before After
Equipment Supplier Value Engine Low Total Cost of Ownership Leverage learning to develop best-inclass integrated solutions Core product innovation and development Performance-centric service capability World- Class Solutions Customer Value Build-up strong semiconductor process knowledge and experience Establish BKMs for HVM through global learning Provide expertise in chemistry and materials science Implement continuous improvement in collaboration with end-users Work with OEMs & R&D consortia for early learning on emerging processes Customer Applications and R&D Customer Customer Customer
Integrated System Cost and Value Elements Equipment installation cost Installation components fitted on-board to reduce cost Total points-of-connection (POC) reduction Reduced installation project administration and sub-fab layout design burden Sub-fab equipment footprint Minimized equipment footprint Frees-up sub-fab space Provides layout flexibility Can be selected to provide upgrade options System Solution Benefits Deployment of Edwards BKMs Complete process solution Single point of ownership / responsibility Risk mitigation Equipment data management / finger-printing / reporting Annual utility costs Development of products with low utility consumption Integration into a total sub-fab system Implementation of Green Modes (idle mode operational states) to reduce utility consumption
Sub-Fab Installation Planning and Implementation Fab layout Footprint requirements Capital cost and budget Design costs and engineering capacity Purchasing overhead Redundancy policy Equipment selection process Planning Execution Installation / hook-up Project management Schedule adherence Risk management Change management Cost management Utility costs Sub-fab management BKM development MTBS and MTTR Service costs / schedules Networking / data management Yield management Vendor management Operation
Integrated Sub-Fab Systems Planning Benefits Fab layout Footprint requirements Capital cost and budget Design costs and engineering capacity Purchasing overhead Redundancy policy Equipment selection process Planning Execution Planning Smaller footprint Reduces stress on sub-fab space Installation Provides / hook-up flexibility Project Double-enclosure management for safety Schedule Enhanced adherence risk mitigation Risk Single management installation owner Change Reduced management management overhead Cost Reduced management installation complexity Reduced design / engineering time Predictable installation costs Planned installation activity Reduced installation component count No surprises Utility costs Sub-fab management BKM development MTBS and MTTR Service costs / schedules Networking / data management Yield management Vendor management Operation
Integrated Sub-Fab Systems Execution Benefits Fab layout Footprint requirements Capital cost and budget Design costs and engineering capacity readiness Purchasing overhead Redundancy policy Equipment selection process Execution Execution Installation / hook-up Project management Schedule adherence Risk management Change management Cost management On-time installation and equipment Take equipment off the critical path Less chance of cost over-runs One throat to choke Installation management Planning Schedule adherence Pre-tested system No start-up surprises Faster vacuum availability Predictable installation cost Utility costs Sub-fab management BKM development MTBS and MTTR Service costs / schedules Networking / data management Yield management Vendor management Operation
Integrated Sub-Fab Systems Operational Benefits Fab layout High uptime Footprint requirements Capital cost and budget Design costs and engineering capacity Purchasing overhead Redundancy policy Equipment selection process Operation Global process BKMs Process stability Execution High productivity Networking / data management Predictive maintenance options Equipment finger-printing data Reduced burden on sub-fab management and operations planning Faster, comprehensive CIP programmes Improved safety Planning On-board leak-test facility Double containment Joined-up service planning Green mode enabled Optimised utilities consumption Installation / hook-up Project management Schedule adherence Risk management Change management Cost management Utility costs Sub-fab management BKM development MTBS and MTTR Service costs / schedules Networking / data management Yield management Vendor management Operation
Integrated System Cost and Value Elements Equipment installation cost Sub-fab equipment footprint System Solution Benefits Annual utility costs Installation components fitted on-board to reduce cost Total points-of-connection (POC) reduction Reduced installation project administration and subfab layout design burden Minimized equipment footprint Frees-up sub-fab space Provides layout flexibility Can be selected to provide upgrade options Deployment of global BKMs Complete process solution Single point of ownership / responsibility Risk mitigation Equipment data management / finger-printing / reporting Development of products with low utility consumption Integration into a total sub-fab system Implementation of Green Modes (idle mode operational states) to reduce utility consumption
Implementation of Process BKMs Global BKM benefits Accumulation of global process experience Exhaust pipe management Reduced downtime Extended service intervals Access to CIP programmes
Risk Mitigation Through Integration Foreline isolation valve, leak checking, purge, soft-start Secondary enclosure for leak containment Mechanical protection and isolation of hot surfaces Single point of responsibility for all service interventions Trained specialist service personnel Consistent practices Global experience Heated forelines and exhaust pipes per BKM Integration of innovative Monitored Pipe Joint Leak detection Continuous monitoring Degraded components
EADS Advanced Diagnostic Systems Monitor sub-fab equipment operating parameters Analyse data trends during normal operation Determine systematic changes in multiple parameters Correlate with equipment interventions Deploy diagnostic model to predict failure
Integrated System Cost and Value Elements Equipment installation cost Installation components fitted on-board to reduce cost Total points-of-connection (POC) reduction Reduced installation project administration and subfab layout design burden Sub-fab equipment footprint Minimized equipment footprint Frees-up sub-fab space Provides layout flexibility Can be selected to provide upgrade options System Solution Benefits Annual utility costs Deployment of Edwards BKMs Complete process solution Single point of ownership / responsibility Risk mitigation Equipment data management / finger-printing / reporting Development of products with low utility consumption Integration into a total sub-fab system Implementation of Green Modes (idle mode operational states) to reduce utility costs
Utilities Cost Reduction by Integration a) Continuous evolution of integrated components Examples: a) Improved understanding of abatement mechanisms allows development of optimised combustors b) Development of new pumping mechanisms reduces dry-pump power consumption b) Utilities consumption reduction by application of Green Modes Fuel flow adjustment according to number of active inlets Fuel savings when the system is in idle mode Real-time calculation of average fuel consumption in normal operation Fuel consumption during idle operation
System Integration Energy Reporting FabWorks Energy Reports Device level report Utilisation report per device Utilities consumption report per device Power, N 2, fuel, water reports FabWorks Energy Reports Group level report Equipment utilisation report Utilities consumption report Savings report
Conclusions Integration Benefits Low Total Cost of Ownership Installation cost Overhead costs Operating costs Rapid design / fast installation Fast start-up for new process tools Improved EHS features Process gas risk mitigation GHG destruction Small Footprint Flexible floor layout Single Owner Access to complete global BKMs Expert applications and service support Flexibility for future upgrades Vacuum pump / abatement / TMS upgrades Simple installation Fewer contractors Less management Lower cost Single-point connections for each module Monitored Joints for exhaust pipe safety Small footprint Flexible layout
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