HERO unchained Modular AGV for multiple handling applications Semicon Europa 2015, Dresden HAP Handhabungs-, Automatisierungs- u. Präzisionstechnik GmbH Dresden Gostritzer Str. 63, 01217 Dresden, Germany
Company Overview HAP Handhabungs-, Automatisierungs- u. Präzisionstechnik GmbH Dresden Gostritzer Str. 63, 01217 Dresden, Germany
Quick Facts Established 1991 Background Carl Zeiss Jena Today Automation specialist 70 employees 15 Mio Euro turnover in 2014 Based in Dresden, Germany HAP Company Info 3
Business Fields Carrier Handling PCB Handling Mask Handling Wafer Handling 40% 30% 30% Share of turnover in 2014 HAP Company Info 4
Up to 2014 HAP - Automated Carrier Handling Confidential Information
LUNA & HAP-HERO 180 installations Serving approx. 800 equipment HAP - Automated Carrier Handling Confidential Information 6
LUNA & HAP-HERO 180 installations Serving approx. 800 equipment But all either in safety cells or RGVs, which are connected by rail and cable chain limited applications due to low distance and flexibility HAP - Automated Carrier Handling Confidential Information 7
LUNA in FSI Bay Quelle: Robert Bosch GmbH Separated handling area (safety cell) High throughput Loading of up to 3 equipment Possibility of additional applications, as: Sorting from transport to process carriers Batch alignment Wafer-ID reading Filling with dummy wafers Start in 2006 Installed base > 60 HAP - Automated Carrier Handling Confidential Information 8
HAP-HERO Mobile RGV Moving distance of up to 35m Loading of many systems in a row Safe man-machine interaction Start in 2009 Installed base > 110 Quelle: Infineon Technologies Dresden HAP - Automated Carrier Handling Confidential Information 9
HAP-HERO HAP - Automated Carrier Handling Confidential Information 10
Since 2015 HAP - Automated Carrier Handling Confidential Information
HERO FAB Fully free travelling AGV HAP - Automated Carrier Handling Confidential Information
Application Expertise HAP Company Info 13
HERO FAB Modular Approach HAP - Automated Carrier Handling Confidential Information
HERO FAB - Base System Most modular base unit, incl.: Navigation Energy Safety base package Advantages Versatile applications all based on same system Fast and efficient adaptions HAP - Automated Carrier Handling Confidential Information 15
HERO FAB Modular Approach SMIF pods Open cass. Boxes FOUP FOSB 200mm Carrier 300mm Carrier Spares Special Apps. Handling (with or w/o buffer) Transport Base system HAP - Automated Carrier Handling Confidential Information 16
Version for Open Cassettes Optionally with 2 buffers ISO 3 and better Robot reach up to 85cm Optional vertical safety scanners HAP - Automated Carrier Handling Confidential Information 17
Version for SMIF Pods Optionally with up to 4 buffers Robot reach up to 85cm can reach 4 rack levels Optional vertical safety scanners HAP - Automated Carrier Handling Confidential Information 18
Version for Transport Boxes Optionally with up to 6 buffers Robot reach up to 85cm can reach 4 rack levels Optional vertical safety scanners Optional box opener Adaptive endeffector to handle both, boxes and cassettes HAP - Automated Carrier Handling Confidential Information 19
Version for Transport Boxes Optionally with up to 6 buffers Robot reach up to 85cm can reach 4 rack levels Optional vertical safety scanners Optional box opener Adaptive endeffector to handle both, boxes and cassettes HAP - Automated Carrier Handling Confidential Information 20
Special Applications Finally, a verion for special wet transport applications HAP - Automated Carrier Handling Confidential Information 21
TWK Advantages HAP - Automated Carrier Handling Confidential Information 22
Thank you for your attention! HAP - Automated Carrier Handling Confidential Information
For more information please contact: Tel.: +49 351 871 80 60 Fax: +49 351 871 84 01 Mail: Web: contact@hap.de www.hap.de HAP Company Info 24