Study of the phase composition of silicide coatings, based on layered Nb-Mo structures, obtained by vacuum-arc deposition

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Journal of Physics: Conference Series PPER OPEN CCESS Study of the phase composition of silicide coatings, based on layered Nb-Mo structures, obtained by vacuum-arc deposition To cite this article: Lozovan et al 2016 J. Phys.: Conf. Ser. 729 012020 View the article online for updates and enhancements. This content was downloaded from IP address 148.251.232.83 on 18/08/2018 at 09:22

Study of the phase composition of silicide coatings, based on layered Nb Mo structures, obtained by vacuum-arc deposition Lozovan 1, S Ya Betsofen 1 and S Lenkovets 2 1 Moscow viation Institute (National Research University), ul. Orshanskaya 3, Moscow, 121552, Russia 2 JSC «Kоmposit», Korolev, Moskovskaya obl., 141070, Russia E-mail: loz-plasma@yandex.ru bstract. multilayer composite ~1000 μm in thickness, formed by niobium and molybdenum layers (number of layers n = 230), is obtained by vacuum-arc deposition with subsequent siliconization of the surface layers at a temperature of 1200 C. Layer-by-layer phase analysis is performed by X-ray diffraction and scanning electron microscopy. It is found that in the surface layers ~130 μm in thickness, single-phase silicides (Nb x Mo 1 x )Si 2 are formed with the hexagonal C40 structure (Strukturbericht designations). lternating layers of solid solutions based on niobium and molybdenum with a body-centered cubic (BCC) lattice are observed within the composite. The formation of solid solutions caused by heating of the coating leads to convergence of the values of the linear thermal expansion coefficient and Young s modulus at the interface between the layers. 1. Introduction Multilayer coatings of alternating metal or ceramic layers are attracting increasing attention because of their excellent mechanical properties, such as high hardness, adhesion strength and toughness, and wear resistance, and relatively low levels of residual stress [1 3]. These properties are the result of deviation of the crack path due to the presence of a soft metal layer in conjunction with an obstacle in the form of a solidceramic layer; the ability to create favorable residual stress gradients; a decrease in the bending stress resulting from better load distribution in a layered material compared to a monolithic material; and the branching of cracks because of different values of the elastic moduli of the layers. Therefore, investigations of the formation of silicide coatings based on layered structures obtained by the ion-vacuum deposition of alternating layers of niobium and molybdenum, followed by saturation of the surface layers with silicon, are of considerable scientific and practical interest, which is selected as the topic of this paper. 2. Experimental To obtain a multilayer coating, an NNV-6.6-I1 setup equipped with three vacuum-arc evaporators was selected. 5VMTs niobium alloy and molybdenum (MCh grade) were used as evaporated materials (cathode materials). The coatings were deposited on a cylindrical substrate of copper (M1 grade) mounted in a mandrel. The chamber was evacuated to a residual pressure of P = 0.33 10 3 Pa; argon was introduced to a pressure of Р = 3 4 Pa; and the surface of the samples was purified in the glow Content from this work may be used under the terms of the Creative Commons ttribution 3.0 licence. ny further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Published under licence by Ltd 1

discharge plasma at a voltage of 1.1 kv for 30 min. fter purification, the argon pressure was reduced P = 4 10 1 Pa, and the sample was heated by an electron beam. Then, layers of niobium and molybdenum were sputtered alternatively at a substrate bias voltage of U = 40 V to form a layered metal composite approximately 1 mm in thickness. The thickness of the molybdenum layer was 1 μm, and the niobium layer was 3 4 μm thick. The copper substrate was then removed by selective chemical etching, and the composite was subjected to diffusion siliconization at 1200 С for 10 h. 3. Results and discussion Figure 1 shows a cross-sectional structure of the multilayer coating, which testifies to the absence of cracks and bundles in alternating layers of molybdenum and niobium. Figure 1(b) shows a few traces of the droplet phase. (a) (b) Figure 1. The structure of the cross section of the coating (a) and droplet phase region (b) recording in the reflected electrons, the thickness of the surface indicated "siliconized" coating layers. diffraction pattern obtained from an assembled sample is shown in figure 2. In the diffraction pattern, there are reflections of a BCC phase located between the reflections of Mo and Nb, but shifted respectively toward smaller and larger values of the Bragg diffraction angles. Such a shift in reflections indicates that during siliconization (Т = 1200 C) a substitutional solid solution is formed by the interdiffusion of metal atoms between adjacent layers. 2θ, deg Figure 2. Diffraction pattern of the assembled sample of Nb Mo solid solutions; arrows indicate the positions of the reflections of pure niobium and Mo. In the diffraction pattern of the surface layer, there are all reflections of the NbSi 2 phase without exception corresponding to the ICDD-2003 database, and there are no extraneous reflections (figure 3), 2

which is very rare in such complex non equilibrium systems as multilayer vacuum-arc coatings, particularly those subjected to high-temperature siliconization. Therefore, we can assume that there are no other silicides in the surface layer. The mean values of the composition of the solid-solution phases with a predominance of niobium (solid solution ) and molybdenum (solid solution B) were estimated by averaging over all available reflections in the diffraction pattern, taking into account the texture and proportions of the two phases for each reflection according to equation where C Mo and B CMo 1 C ( C P f C P f ), (1) n B B B Mo Mo i i Mo i i n i 1 are the molybdenum concentrations in solid solutions and B, respectively; B and Pi are the pole densities of the i-th reflex in solid solutions and B, respectively; the volume fractions of solid solutions and B. fi and fi P i are 2θ, deg Figure 3. Diffraction pattern obtained from the outer surface of the sample after siliconization. X-ray diffraction studies have shown that as a result of the diffusion siliconization at 1200 С of a Nb Mo layered composite (n = 230, Т ~ 1000 μm) with alternating metal layers in the surface region ~130 μm in thickness, single-phase silicides (Nb x Mo 1 x )Si 2 with the hexagonal C40 structure are formed. The single phase structure of the silicide, formed from bicomponent solid solutions of Mo and Nb, corresponds to the pseudobinary state diagram of NbSi 2 MoSi 2 and is characteristic of a number of similar systems MoSi 2 XSi 2 (where X = Ta, Ti, Ir, Zr, V or Cr) [4, 5]. ll of these elements except molybdenum form silicides with the C40 structure, this structure is metastable only for MoSi 2, and the stable silicide forms the tetragonal C11b structure. The pseudobinary state diagrams of MoSi 2 XSi 2 are characterized by a wide homogeneity range of solid solutions of the C40 structure and relatively narrow two-phase and single-phase regions of the C11b structure. This explains the presence of the coating of single-phase silicide C40 in the surface layer, despite the significant concentration of molybdenum in the initial coating: the ratio of the metal components corresponds to the composition of Nb 0.62 Mo 0.38. 4. Conclusions multilayer Nb Mo coating (n = 230) with a thickness of ~1 mm is obtained by vacuum-arc deposition. 3

It was found that in the surface layers ~130 μm in thickness silicides (Nb x Mo 1 x )Si 2 are formed with the hexagonal C40 structure. The rest of the coating section by heating accompanying siliconizing process formed of alternating layers of BCC solid solutions based on Nb and Mo nominal composition Nb 0.75 Mo 0.25 (78 %) and Nb 0.18 Mo 0.82 (22 %), respectively. cknowledgments The study was performed by a grant from the Russian Science Foundation (project 15-19-00241). References [1] Yanhui Z, Guoqiang L, Jinquan X, Hao D, Chuang D and Gao L 2011 pplied Surface Science 257 2683 [2] Hovsepian P Eh, Ehiasarian P, Braun R, Walker J and Du H 2010 Surf. & Coat.Technol. 204 2702 [3] Pearson W B 1958 Handbook of lattice spacings and structures of metals and alloys (NewYork: Pergamon Press) [4] Hagihara K, Nakano T, Hata S, Zhu O and Umakoshi Y 2010 Scripta Materialia 62 613 [5] Hagihara K, Hama Y, Nakano T, Yuge K and Nakano T 2013 cta Materialia 61 3432 4