Relation Between Internal Stress and Surface Roughness of Titanium Nitride Films Deposited by HCD Ion Plating
|
|
- Piers Freeman
- 6 years ago
- Views:
Transcription
1 No.22,28 65 Relation Between Internal Stress and Surface Roughness of Titanium Nitride Films Deposited by HCD Ion Plating Itsuo Ishigami Ken-ichi Miura Hideaki Hoshino Tomoyuki Mizukoshi ( ) An experiment was made to elucidate variations in surface roughness of Ti-N films with process parameters: deposition temperature, deposition time, electron beam current, substrate bias voltage, total gas pressure, mixture ratio of nitrogen to argon, distance between the substrate and evaporation source, and inclination of a substrate. Furthermore, an attempt was made to find out factors controlling the roughness and to reveal the relation between the factors and the roughness. The Ti-N films were deposited onto SKH51 substrates. A main constituent in the films was TiN. A surface roughness tester is contact type, of which the stylus tip has a 5 μm radius. No accounting for changes in the roughness existed based on material characteristics such as phase, chemical composition, and grain size. Deposition in a lower temperature range brought about excess surface roughening due to flaking and the formation of cracks which might be given rise to compressive stress in the films. Comparison of smooth surfaces free from the above shape defects revealed that the film of a stronger (hkl) fiber structure possessed a smooth surface. The strain ε'33 normal to the film surface was measured using an X-ray diffraction technique, revealing that the ε'33 values depended on crystal orientations of the film surface planes. Changes in the surface roughness can be interpreted in terms of a difference in strain of columnar grains perpendicular to the substrate surface, for TiN films. HCD (PVD) PVD (HCD) 1 9) 9 13)
2 66 ( ) 14, 15) 16) 17 19) HCD (c) Plane (1) HCD SHP-4T Fig mm CA 14.5cm 3 SKH51 Table mm 718 HV.5 Rz nm Table 2 Ar vol% (2) (A) ( 713D) 5 μm (b) Side (a) Front Fig. 1 Schematic representation of an HCD type ion plating unit. Table 1 Chemical composition of SKH51 substrate used (mass%). C Si Mn Cr Mo V Co W mm/s4. mm.8 mm.2 μm Rz Ra Rz
3 No.22,28 67 Table 2 Deposition parameters and their ranges applied to titanium nitride depositing *1. Parameter Range Standard Deposition temperature, T (K) Deposition time, t (s) Electron beam current *2, I b(a) Substrate bias voltage, V B (V) 9 3 Total gas flow *3, F (cm 3 /s) Total gas pressure, P (Pa) ,.67 [N 2 /(Ar+N 2 )], R N 2 () 2.89 Pa Pa Distance *4, L (mm) Tilting angle *5, θ (rad) π *1 Depositions were carried out by varying one parameter; the others were fixed at the values in the right column. *2 Electron beam voltages applied were within the range of 2 to 25 V. *3 Volume in the standard state; total gas pressure changes according to total gas, Ar + N 2, flow. *4 Distance between a substrate and an evaporation source. *5 A substrate axis was tilted θ from the direction in which an evaporation source was located (see Fig. 1 (b)). (B) X sin2ψ 2) CuKα TiN θ sin2ψ σ E π 2θ = cot θ (1) 2 ( 1+ ν) 18 sin 2 ψ E ν X 2θ TiN E = 411 GPaν =.236 2θ = ) (C) (EPMA) ZAF 21, 22) 2, 3) (D) X 23) TiN111 k λ Gs = (2) BcosθB G s k *1 1) (.9 )λ X (CuKα )B θ B (E) ( VK-G3) 1/3 (F) X (SEM) (1) Fig. 2 Rz *1 95 % Fig K (Fig. 3 (a), (b)) 69 K 659 K 1 2 μm 77 K Fig. 3 (c) μm Fig. 2 Roughness, Rz (μm) Substrate Rz Deposition Temperature, T (K) Fig. 2 Changes in surface roughness Rz and internal stress σ with deposition temperature T Stress, (GPa)
4 68 (a) (b) (c) 1μm 2μm 1μm Fig. 3 Surface appearances of TiN films deposited at (a), (b) 33 K and (c) 77 K. 4 11) GPa (Fig. 3 (b))fig. 2 (2) Fig. 4 V (8.9 MPa) Fig. 5 Thornton 24) zone (Fig. 5 (a)) ((b) (d)) zone T Fig. 4 Fig. 5 (a) (b) Roughness, Rz (μm) Substrate Rz Fig. 4 Changes in surface roughness Rz and internal stress σ with substrate bias voltage V B. Substrate Bias Voltage, V B (V) Stress, (GPa) (c) (e) (g) 5nm (d) (f) Fig. 5 Typical SEM micrographs of fracture and surface of TiN films grown at various substrate bias voltages V B ; (a) V, (b) 1V, (c) 5V, (d) 15V, (e) 3V, (f) 6V, (g) 9V.
5 No.22,28 69 Fig. 5 (a) (c) Fig. 4 Fig. 4 5 μm 4. mm(.2 μm) Ra Fig. 4 (3) Fig. 6 Fig. 2 Fig. 4 Fig. 6 Fig. 2 Fig. 4 Fig. 6 Fig. 2 Fig. 4 Fig. 6 (4) Fig Pa α-ti Ti 2 N.67 Pa Ti 2 N TiN.67 Pa 1.6 Pa φ2 1 mm mm.147 rad.67 Pa Fig. 7 (5) Rz Table 3 σ Table 3 Rz K Roughness, Rz (μm) Substrate Rz Deposition Time, t (ks) Stress, (GPa) Roughness, Rz (μm) Substrate -Ti +Ti 2 N TiN+ Ti 2 N (little) Rz TiN Total Gas Pressure, P (Pa) Stress, (GPa) Fig. 6 Changes in surface roughness Rz and internal stress σ with deposition time t. Fig. 7 Changes in surface roughness Rz and internal stress σ with total gas pressure P.
6 7 Table 3 Changes in properties with an increase in process parameter *1. Parameters *2 Rz σ *3 Phase Composition Temperature Deposition Grain size hardness Substrate Deposition Evaporation [O] [N] / [Ti] rate (TiN) chamber chamber T TiN t TiN w w I b w TiN w w V B w TiN w w w P TiN Ti 2 N α-ti R N2 2.89Pa w TiN w w.67pa w TiN+Ti2 N *4 unmeasured L w TiN w θ TiN w w *1, increased, decreased, decreased after increasing, increased after decreasing w, varied weakly, not varied. *2 See Table 2. *3 Compressive stress except when substrate bias voltage was not applied. *4 There existed only a little Ti 2 N. Fig.8 X TiN111 TiN22 TiN111 TiN22 25) 5 cps T I h'k'l' h'k'l' = n TiN22 (1/ n) I ( I TiN111 TiN2 h'k'l' hkl TiN311 / I Fig. 8 X-ray diffraction patterns obtained from titanium nitride films deposited under various total gas pressures P. hkl ) TiN222 TiN42 TiN331 TiN4 TiN111 TiN22 TiN422 TiN Pa 1.6 Pa 1.24 Pa.67 Pa.45 Pa (3) 6.13 Pa 4.4 Pa 2.89 Pa h k l ( )I h k l I h k l T h k l 1 n Fig. 1 1 JPCDS (38-142) Fig. 9 T 111 T 22 Fig. 7 Texture Coefficient, T h'k'l' () T 22 T Total Gas Pressure, P (Pa) Fig. 9 Variations in texture coefficient T h k l with total gas pressure P for TiN films.
7 No.22, ) Fig. 7 Fig V Fig. 1 TiN 27) a a Pearson ([N] / [Ti] a) 28) EPMA [N] / [Ti] 1V 15 V 5.64 μm Fig. 1 ε μm 15 V Fig. 5(d) Fig. 1 ε 33 Fig. 4 Rz.18 μm Rz (2 (2) Diffraction Plane, hkl (A) ) Fig.11 Fig. 4 T 111 T 22 Fig. 11 V B = V 1 V (T 111 T 422 ) (T 111 T 311 ) (T 111 T 422 ) (T 111 T 511 ) 2.89 Pa.975 (T 111 T 422 ).67 Pa (T 111 T 22 ) ( K) Strain,, 33 (%) V B (V) Rz(μm) (GPa) excluded system error Texture Coefficient, T h'k'l' () T 111 lnt h'k'l' =a+bln(-v B ) T cos cot Fig. 1 Elastic strain ε ' 33 measured perpendicular to the substrate surface, for TiN films Substrate Bias Voltage, V B (V) Fig. 11 Variations in texture coefficient T h k l with substrate bias voltage V B for TiN films.
8 72 HCD (<558 K) 4 GPa 1) 59 (1995) p.33 2) 63 (1999) p.949 3) 64 (2) p.58 4) 65 (21) p.972 5) 65 (21) p.981 6) 66 (22) p.935 7) No.17 (23) p.11 8) 43 (23) p.21 9) K. Miura, I. Ishigami and T. Usui: Mater. Trans., 45 (24) p.12 1) 66 (22) p ) No.12 (1999) p ) 43 (2) p ) 46 (1998) p ) P. Sathrum and B. F. Coll: Surf. Coat. Technol., 5 (1992) p ) M. Egawa, K. Miura, M. Yokoi and I. Ishigami: Surf. Coat. Technol., 21 (27) p ) C. N. Tai, E. S. Koh and K. Akari: Surf. Coat. Technol., 43/44 (199) p ) H. Randhawa, J. Vac. Sci. Technol., A4 (1986) p ) ( ) p ) 57, (26) p.283 2) X (1981) p.6 21) 58 (1994) p ) 35 (1995) p ) B. D. Cullity: Elements of X-ray Diffraction, 2nd ed., Addison-Wesley Publishing Company Inc., (1978) p.12 24) J. A. Thornton: J. Vac. Sci. Technol., 11 (1974) p.666; 12 (1975) p.83 25) P. T. Moseley, K. R. Hyde, B. A. Bellamy and G. Tappin: Corros. Sci., 24 (1984) p ) A. J Perry: Thin Solid Films, 17 (1989) p.63 27) T. B. Massalski, J. l. Bennett and H. Baker: Binary Alloy Phase Diagrams, Vol.2, American Society for Metals, (1987) p ) W. P. Pearson: Handbook of Lattice Spacings and Structures of Metals, Pergamon Press, (1958) p.13
X-ray Stress Measurement and Mechanical Properties of TiN Films Coated by Various PVD Methods
50 X-ray Stress Measurement and Mechanical Properties of TiN Films Coated by Various PVD Methods Yasuhiro MIKI Tadashi TANIGUCHI Takao HANABUSA and Kazuya KUSAKA TiN film, 3 m in thickness, was deposited
More informationTHE ANALYSIS OF STRESS DISTRIBUTION BASED ON MEASUREMENTS USING TWO METHODS OF X-RAY APPLICATION
182 THE ANALYSIS OF STRESS DISTRIBUTION BASED ON MEASUREMENTS USING TWO METHODS OF X-RAY APPLICATION ABSTRACT Barbara Kucharska Institute of Materials Engineering, Czestochowa University of Technology,
More informationDeposition and characterization of sputtered ZnO films
Superlattices and Microstructures 42 (2007) 89 93 www.elsevier.com/locate/superlattices Deposition and characterization of sputtered ZnO films W.L. Dang, Y.Q. Fu, J.K. Luo, A.J. Flewitt, W.I. Milne Electrical
More informationFlexible Ti-Ni-N Thin Films Prepared by Magnetron Sputtering
Journal of Materials Science and Engineering A 4 (1) (2014) 27-33 D DAVID PUBLISHING Flexible Ti-Ni-N Thin Films Prepared by Magnetron Sputtering Jindrich Musil, Richard Jílek and Radomír Čerstvý Department
More informationDeposition of TiN/CrN hard superlattices by reactive d.c. magnetron sputtering
Bull. Mater. Sci., Vol. 26, No. 2, February 2003, pp. 233 237. Indian Academy of Sciences. Deposition of TiN/CrN hard superlattices by reactive d.c. magnetron sputtering HARISH C BARSHILIA and K S RAJAM*
More informationSYNTHESIS OF HARD COATINGS AND NANO MODIFICATION WITH ION IMPLANTATION
SYNTHESIS OF HARD COATINGS AND NANO MODIFICATION WITH ION IMPLANTATION Branko Skoric, skoricb@uns.ac.rs Department of Production Engineering, University of Novi Sad, Novi Sad, Serbia Damir Kakas, kakasdam@uns.ac.rs
More informationTHE INFLUENCE OF NITROGEN CONTENT ON THE MECHANICAL PROPERTIES OF TiN x THIN FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING
Bulletin of the Transilvania University of Braşov Series I: Engineering Sciences Vol. 5 (54) No. 2-2012 THE INFLUENCE OF NITROGEN CONTENT ON THE MECHANICAL PROPERTIES OF TiN x THIN FILMS PREPARED BY REACTIVE
More informationTechniques to Improve Coating Adhesion of Superhard Coatings
Journal of Metals, Materials and Minerals. Vol.16 No.2 pp.19-23, 2006 Techniques to Improve Coating Adhesion of Superhard Coatings Nurot PANICH 1, Panyawat WANGYAO 1*, Nuntapol VATTANAPRATEEP 2 and Sun
More informationPrevious Lecture. Vacuum & Plasma systems for. Dry etching
Previous Lecture Vacuum & Plasma systems for Dry etching Lecture 9: Evaporation & sputtering Objectives From this evaporation lecture you will learn: Evaporator system layout & parts Vapor pressure Crucible
More informationApplications of Energy-Assistance to the formation of novel surface coatings
Innovation Into Success; The quarterly Journal of the UK Science Park Association Issue No 17 Spring 2015 p65-8 (www.scienceparks.co.uk) Applications of Energy-Assistance to the formation of novel surface
More informationAgeing Resistance (12 years) of Hard and Oxidation Resistant SiBCN Coatings
Ageing Resistance (12 years) of Hard and Oxidation Resistant SiBCN Coatings Jiri Houska Department of Physics and NTIS - European Centre of Excellence, University of West Bohemia, Czech Republic Acknowledgment
More informationX-ray residual stress measurements on plasma sprayed molybdenum coatings
High Performance Structures and Materials III 351 X-ray residual stress measurements on plasma sprayed molybdenum coatings K. Hirukawa 1, K. Akita 2, S. Tobe 3, T. A. Stolarski 4 & S. Ohya 2 1 Research
More informationTEMPERATURE DEPENDENCE OF RESIDUAL STRESS IN TITANIUM NITRIDE COATINGS ON HAYNES 188 SUPERALLOY
TEMPERATURE DEPENDENCE OF RESIDUAL STRESS IN TITANIUM NITRIDE COATINGS ON HAYNES 188 SUPERALLOY 180 S.H. Ferguson and H.W. King Mechanical Engineering University of Victoria Victoria, BC V8W 3P6 Canada
More informationThin Film Scattering: Epitaxial Layers
Thin Film Scattering: Epitaxial Layers 6th Annual SSRL Workshop on Synchrotron X-ray Scattering Techniques in Materials and Environmental Sciences: Theory and Application May 29-31, 2012 Thin films. Epitaxial
More informationSynthesis of diamond-like carbon films with super-low friction and wear properties
Synthesis of diamond-like carbon films with super-low friction and wear properties MSE 676 All Things Carbon / 09-29-2009 A. Erdemir, O.L. Eryilmaz, and G. Fenske J. Vac. Sci. Technol. A 18(4), Jul/Aug
More informationFatigue strength improvement of Ti alloy with DLC coating
Computer Methods and Experimental Measurements VIII 3 Fatigue strength improvement of Ti alloy with DLC coating S.-I. Nishida 1, N. Hattori 1, Y. Nakabaru 1 & A. Tsuchiyama 2 1 Faculty of Science & Engineering,
More informationFormation mechanism of new corrosion resistance magnesium thin films by PVD method
Surface and Coatings Technology 169 170 (2003) 670 674 Formation mechanism of new corrosion resistance magnesium thin films by PVD method a, a a a b M.H. Lee *, I.Y. Bae, K.J. Kim, K.M. Moon, T. Oki a
More informationJournal of Solid Mechanics and Materials Engineering
and Materials Engineering Effect of Fine Particle Peening Treatment prior to itriding on Fatigue Properties of AISI 4135 Steel* Shoichi KIKUCHI** and Jun KOMOTORI*** ** Graduate School of Science and Technology,
More informationRoman Chistyakov and Bassam Abraham Zond Inc/Zpulser LLC, Mansfield, MA
HIPIMS Arc-Free Reactive Sputtering of Non-conductive Films Using the ENDURA 200 mm Cluster Tool: Direct Comparison Between Pulsed DC Pinnacle Plus and HIPIMS Cyprium Roman Chistyakov and Bassam Abraham
More informationCombinatorial RF Magnetron Sputtering for Rapid Materials Discovery: Methodology and Applications
Combinatorial RF Magnetron Sputtering for Rapid Materials Discovery: Methodology and Applications Philip D. Rack,, Jason D. Fowlkes, and Yuepeng Deng Department of Materials Science and Engineering University
More informationTHE INCREASE IN THICKNESS UNIFORMITY OF FILMS OBTAINED BY MAGNETRON SPUTTERING WITH ROTATING SUBSTRATE
Plasma Physics and Technology 3(3):1 14, 216 Department of Physics, FEE CTU in Prague, 216 THE INCREASE IN THICKNESS UNIFORMITY OF FILMS OBTAINED BY MAGNETRON SPUTTERING WITH ROTATING SUBSTRATE Golosov
More informationAssume that the growth of fatigue cracks in the plate is governed by a Paris type of law, i.e. da
3. Mechanical Properties of Materials Exam #3 May 16, 00 This examination contains 9 single-sided pages. Please give your answers only in this examination booklet. Do not use any other sheets of paper.
More informationNanocrystalline structure and Mechanical Properties of Vapor Quenched Al-Zr-Fe Alloy Sheets Prepared by Electron-Beam Deposition
Materials Transactions, Vol. 44, No. 10 (2003) pp. 1948 to 1954 Special Issue on Nano-Hetero Structures in Advanced Metallic Materials #2003 The Japan Institute of Metals Nanocrystalline structure and
More informationThin Film Scattering: Epitaxial Layers
Thin Film Scattering: Epitaxial Layers Arturas Vailionis First Annual SSRL Workshop on Synchrotron X-ray Scattering Techniques in Materials and Environmental Sciences: Theory and Application Tuesday, May
More informationSynthesis of nanoscale CN x /TiAlN multilayered coatings by ion-beam-assisted deposition
Synthesis of nanoscale / multilayered coatings by ion-beam-assisted deposition M. Cao, D. J. Li, a and X. Y. Deng College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin
More informationMore Thin Film X-ray Scattering and X-ray Reflectivity
Stanford Synchrotron Radiation Laboratory More Thin Film X-ray Scattering and X-ray Reflectivity Mike Toney, SSRL 1. Introduction (real space reciprocal space) 2. Polycrystalline film (no texture) RuPt
More informationFRICTION AND WEAR PROPERTIES OF CN X COATINGS IN THE FLOW OF N 2 GAS
24 th IRG-OECD Meeting, October 16-17 2003, Portoroz, Slovenia FRICTION AND WEAR PROPERTIES OF CN X COATINGS IN THE FLOW OF N 2 GAS Koji Kato, Shin Toyokawa, Koshi Adachi, Boyko Stoimenov Tribology Laboratory,
More informationMechanical Properties and Microstructures of a Thin Plate of Nickel-Free Stainless Steel with Nitrogen Absorption Treatment
Materials Transactions, Vol. 44, No. 7 (2003) pp. 1363 to 1369 #2003 The Japan Institute of Metals Mechanical Properties and Microstructures of a Thin Plate of Nickel-Free Stainless Steel with Nitrogen
More informationEFFECTS OF SUBSTRATE COATING WITH METAL SPRAYING ON RESIDUAL STRESSES IN SPUTTERED TITANIUM-NITRIDE FILMS
Copyright(c)JCPDS-International Centre for Diffraction Data 2000,Advances in X-ray Analysis,Vol.43 163 EFFECTS OF SUBSTRATE COATING WITH METAL SPRAYING ON RESIDUAL STRESSES IN SPUTTERED TITANIUM-NITRIDE
More informationDevelopment of nanostructures in thin films of transition metal nitrides and their properties
Development of nanostructures in thin films of transition metal nitrides and their properties David Rafaja*, Christina Wüstefeld, Steffen Wolf, Milan Dopita, Dietrich Heger: Institute of Materials Science,
More informationDevelopment of diamond coated tool and its performance in machining Al 11%Si alloy
Bull. Mater. Sci., Vol. 25, No. 6, November 2002, pp. 487 491. Indian Academy of Sciences. Development of diamond coated tool and its performance in machining Al 11%Si alloy B SAHOO, A K CHATTOPADHYAY*
More informationInfluence of Surface Pretreatment on Residual Stress Field of Heat-Treated Steel Induced by Laser Local Quenching
Influence of Surface Pretreatment on Residual Stress Field of Heat-Treated Steel Induced by Laser Local Quenching Yoshihisa Sakaida 1,a,*, Yuki Sasaki 2,b and Haruo Owashi 3,c 1 Dept. of Mech. Eng., Shizuoka
More informationStrengthening of Titanium Silicon Carbide by Grain Orientation Control and Silicon Carbide Whisker Dispersion
Materials Transactions, Vol. 48, No. 9 (27) pp. 2427 to 2431 #27 The Japan Institute of Metals Strengthening of Titanium Silicon Carbide by Grain Orientation Control and Silicon Carbide Whisker Dispersion
More informationMeasurement of Residual Stress by X-ray Diffraction
Measurement of Residual Stress by X-ray Diffraction C-563 Overview Definitions Origin Methods of determination of residual stresses Method of X-ray diffraction (details) References End Stress and Strain
More informationEffects of DC plasma nitriding parameters on properties of DIN low alloy steel
2nd National Iranian Conference on Gas Hydrate (NICGH) S Semnan University Effects of DC plasma nitriding parameters on properties of DIN 1.2344 low alloy steel H. Khorsand a*, H. Aghajani b, N. Mohamadian
More informationMicrostructure evolution and fracture behaviour for electron beam welding of Ti 6Al 4V
Bull. Mater. Sci., Vol. 27, No. 4, August 2004, pp. 387 392. Indian Academy of Sciences. Microstructure evolution and fracture behaviour for electron beam welding of Ti 6Al 4V WU HUIQIANG*, FENG JICAI
More informationIn Situ X-ray Fluorescence Measurements During Atomic Layer Deposition: Nucleation and
In Situ X-ray Fluorescence Measurements During Atomic Layer Deposition: Nucleation and Growth of TiO 2 on Planar Substrates and in Nanoporous Films 1 and In-Situ Synchrotron X-Ray Scattering Study of Thin
More informationEFFECT OF RESIDUAL STRESS ON MECHANICAL BEHAVIOR OF SiC/Al COMPOSITE
EFFECT OF RESIDUAL STRESS ON MECHANICAL BEHAVIOR OF SiC/Al COMPOSITE Yun LU 1, Mitsuji HIROHASHI 1 and Jin PAN 2 1 Department of Urban Environment Systems, Faculty of Engineering, Chiba University, 1-33,
More informationThe Tribological Properties of Cu-Ni3Al-Mos2 Composite Coating Deposited by Magnetron Sputtering
M. Mirzaaghaei et al, Journal of Advanced Materials and Processing, Vol. 4, No. 4, 2016, 37-45 37 The Tribological Properties of Cu-Ni3Al-Mos2 Composite Coating Deposited by Magnetron Sputtering Mahdi
More informationNEMI Sn Whisker Modeling Group Part 2:Future Work
NEMI Sn Whisker Modeling Group Part 2:Future Work IPC/NEMI Meeting Maureen Williams, NIST Irina Boguslavsky, NEMI Consultant November 7, 2002 New Orleans, LA Capabilities of NEMI Modeling Group NEMI Fundamental
More informationTHE INFLUENCE OF DEPOSITION CONDITIONS ON STRUCTURE OF PVD COATINGS OBTAINED IN THE MAGNETRON PROCESS
WALDEMAR KWAŚNY, TYMOTEUSZ JUNG * THE INFLUENCE OF DEPOSITION CONDITIONS ON STRUCTURE OF PVD COATINGS OBTAINED IN THE MAGNETRON PROCESS WPŁYW PARAMETRÓW NANOSZENIA NA STRUKTURĘ POWŁOK OTRZYMANYCH W MAGNETRONOWYM
More informationEtching Mask Properties of Diamond-Like Carbon Films
N. New Nawachi Diamond et al. and Frontier Carbon Technology 13 Vol. 15, No. 1 2005 MYU Tokyo NDFCT 470 Etching Mask Properties of Diamond-Like Carbon Films Norio Nawachi *, Akira Yamamoto, Takahiro Tsutsumoto
More informationSOLID SOLUTION METAL ALLOYS
SOLID SOLUTION METAL ALLOYS Synergy Effects vs. Segregation Phenomena D. Manova, J. Lutz, S. Mändl, H. Neumann 1 Table of Content Motivation Alloys vs. Pure Elements or Intermetallic Compounds Introduction
More informationMechanical Properti es of ZnO:Mo Transparent Conducting Oxide Thin Film Prepared by Sputtering
CHINESE JOURNAL OF PHYSICS VOL. 51, NO. 3 June 2013 Mechanical Properti es of ZnO:Mo Transparent Conducting Oxide Thin Film Prepared by Sputtering Y. C. Lin, C. C. Chen, and W. Y. Lai Department of Mechatronics
More informationMEMS 487. Class 04, Feb. 13, K.J. Hemker
MEMS 487 Class 04, Feb. 13, 2003 Materials Come As:!Amorphous Glasses, polymers, some metal alloys Processing can result in amorphous structures! Crystalline Single crystals Textured crystals Polycrystalline
More informationSurface & Coatings Technology
Surface & Coatings Technology 224 (2013) 120 125 Contents lists available at SciVerse ScienceDirect Surface & Coatings Technology journal homepage: www.elsevier.com/locate/surfcoat Microstructure, residual
More informationLIST OF FIGURES Figure 1.1: Figure 1.2: Figure 1.3: Figure 2.1: Figure 2.2: Figure 2.3: Figure 2.4: Figure 2.5: (a) (b) (c): (d) (e) (f):
LIST OF FIGURES Figure 1.1: Types of surface coatings....4 Figure 1.2: PVD processing techniques...8 Figure 1.3: Schematic of PVD process... 11 Figure 2.1: Formation of intrusion and extrusion marks on
More informationGrowth Of TiO 2 Films By RF Magnetron Sputtering Studies On The Structural And Optical Properties
Journal of Multidisciplinary Engineering Science and Technology (JMEST) Growth Of TiO 2 Films By RF Magnetron Sputtering Studies On The Structural And Optical Properties Ahmed K. Abbas 1, Mohammed K. Khalaf
More informationTransactions on Engineering Sciences vol 13, 1996 WIT Press, ISSN
Improvement in corrosion resistance of CrN coating steel with multi-stage deposition method and its corrosion fatigue strength M. Sonobe, K. Shiozawa, K. Motobayashi Department of Mechanical Systems Engineering,
More informationUNIT CELL EXPANSION IN ErT 2 FILMS
188 UNIT CELL EXPANSION IN ErT 2 FILMS Mark A. Rodriguez, James F. Browning, Colleen S. Frazer, Clark S. Snow, Ralph G. Tissot and Elaine P. Boespflug ABSTRACT Sandia National Laboratories, Albuquerque,
More informationMicro-Electro-Mechanical Systems (MEMS) Fabrication. Special Process Modules for MEMS. Principle of Sensing and Actuation
Micro-Electro-Mechanical Systems (MEMS) Fabrication Fabrication Considerations Stress-Strain, Thin-film Stress, Stiction Special Process Modules for MEMS Bonding, Cavity Sealing, Deep RIE, Spatial forming
More informationMicro-Electro-Mechanical Systems (MEMS) Fabrication. Special Process Modules for MEMS. Principle of Sensing and Actuation
Micro-Electro-Mechanical Systems (MEMS) Fabrication Fabrication Considerations Stress-Strain, Thin-film Stress, Stiction Special Process Modules for MEMS Bonding, Cavity Sealing, Deep RIE, Spatial forming
More informationCHEMICAL DEPTH PROFILING OF TOOL MATERIALS USING GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY (GD-OES)
CHEMICAL DEPTH PROFILING OF TOOL MATERIALS USING GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY (GD-OES) T. Björk Swedish Institute for Metals Researc Drottning Kristinas väg 48 114 28 Stockholm Sweden Abstract
More informationAuthor(s) Chayahara, A; Kinomura, A; Horino, RightCopyright 1999 American Vacuum Soci
Title Titanium nitride prepared by plasma implantation Author(s) Yukimura, K; Sano, M; Maruyama, T; Chayahara, A; Kinomura, A; Horino, Citation JOURNAL OF VACUUM SCIENCE & (1999), 17(2): 840-844 TECHNOL
More informationNeutron diffraction residual stress mapping in same gauge and differential gauge tailor-welded blanks
Journal of Materials Processing Technology 148 (2004) 177 185 Neutron diffraction residual stress mapping in same gauge and differential gauge tailor-welded blanks L. Clapham a,, K. Abdullah b, J.J. Jeswiet
More informationAPPLICATIONS OF X-RAY STRESS MEASUREMENT FOR INTERFACE AREA OF Ni 3 Al SYSTEM INTERMETALLIC COMPOUND COATING
Copyright JCPDS - International Centre for Diffraction Data 2004, Advances in X-ray Analysis, Volume 47. 385 APPLICATIONS OF X-RAY STRESS MEASUREMENT FOR INTERFACE AREA OF Ni 3 Al SYSTEM INTERMETALLIC
More informationStudy of the phase composition of silicide coatings, based on layered Nb-Mo structures, obtained by vacuum-arc deposition
Journal of Physics: Conference Series PPER OPEN CCESS Study of the phase composition of silicide coatings, based on layered Nb-Mo structures, obtained by vacuum-arc deposition To cite this article: Lozovan
More informationTo explore the ability of the DVD technology to create dense, pinhole-free metal oxide
Chapter 4 Results 4.1 Strategy To explore the ability of the DVD technology to create dense, pinhole-free metal oxide layers and to develop an initial understanding of the relationship between various
More informationEpitaxy and Roughness Study of Glancing Angle Deposited Nanoarrays. Hamid Alouach and G. J. Mankey
Epitaxy and Roughness Study of Glancing Angle Deposited Nanoarrays Hamid Alouach and G. J. Mankey Introduction Objective: Approach: Characterization: Fabrication of nanoscale magnetic wires for spin transport
More informationTitle. Author(s)Shimozuma, M.; Date, H.; Iwasaki, T.; Tagashira, H.; Issue Date Doc URL. Type. Note. Additional There Information
Title Three-dimensional deposition of TiN film using low f Author(s)Shimozuma, M.; Date, H.; Iwasaki, T.; Tagashira, H.; CitationJournal of Vacuum Science & Technology. A, Vacuum, S Issue Date 1997-07
More informationDEVELOPMENT OF NONDESTRUCTIVE RESIDUAL STRESS PROFILE MEASUREMENT METHODS THE INTEGRAL METHOD
DEVELOPMENT OF NONDESTRUCTIVE RESIDUAL STRESS PROFILE MEASUREMENT METHODS THE INTEGRAL METHOD D. J. Hornbach, P.S. Prevéy 1 and Mark Blodgett 1 Lambda Research, 551 Fair Lane, Cincinnati, OH 457 AFRL/MLLP,
More informationX-ray optical thin film deposition and analysis capability at NASA MSFC. D. Broadway. 11/8/2017 D. Broadway NASA MSFC 1
X-ray optical thin film deposition and analysis capability at ASA MSFC D. Broadway /8/7 D. Broadway ASA MSFC Talk Outline Optical thin film coating capability at MSFC Deposition system X-ray reflectometer
More informationEFFECTS OF DIFFUSION ON INTERFACIAL FRACTURE OF MULTILAYER HYBRID MICROCIRCUIT FILMS
ORAL REFERENCE: ICF100152OR EFFECTS OF DIFFUSION ON INTERFACIAL FRACTURE OF MULTILAYER HYBRID MICROCIRCUIT FILMS N. R. Moody, *D. P. Adams, D. Medlin, **A. Volinsky, N. Yang, **W. W. Gerberich Sandia National
More informationRightCopyright 2006 American Vacuum Soci
Title Gallium nitride thin films deposite magnetron sputtering Author(s) Maruyama, T; Miyake, H Citation JOURNAL OF VACUUM SCIENCE & (2006), 24(4): 1096-1099 TECHNOL Issue Date 2006 URL http://hdl.handle.net/2433/43541
More informationXRD and TEM analysis of microstructure in the welding zone of 9Cr 1Mo V Nb heat-resisting steel
Bull. Mater. Sci., Vol. 25, No. 3, June 2002, pp. 213 217. Indian Academy of Sciences. XRD and TEM analysis of microstructure in the welding zone of 9Cr 1Mo V Nb heat-resisting steel LI YAJIANG*, WANG
More informationFatigue behaviour of duplex treated AISI 316L stainless steel
Kovove Mater. 45 2007 35 40 35 Fatigue behaviour of duplex treated AISI 316L stainless steel A. Çelik*,Y.Arslan,A.F.Yetim,I.Efeoglu Department of Mechanical Engineering, Ataturk University, 25240, Erzurum,
More informationLocal buckling of slender aluminium sections exposed to fire. Residual stresses in welded square hollow sections of alloy 5083-H111
Netherlands Institute for Metals Research Eindhoven University of Technology TNO Built Environment and Geosciences Report no. 8 Local buckling of slender aluminium sections exposed to fire Residual stresses
More informationCHAPTER 3: CRYSTAL STRUCTURES & PROPERTIES
CHAPTER 3: CRYSTAL STRUCTURES & PROPERTIES ISSUES TO ADDRESS... How do atoms assemble into solid structures? (for now, focus on metals) How does the density of a material depend on its structure? When
More informationEffect of V, Nb and Ti Addition and Annealing Temperature on Microstructure and Tensile Properties of AISI 301L Stainless Steel
, pp. 991 998 Effect of V, Nb and Ti Addition and Annealing Temperature on Microstructure and Tensile Properties of AISI 301L Stainless Steel Masayoshi SAWADA, Kazuhiko ADACHI and Takashi MAEDA Corporate
More informationSilver Diffusion Bonding and Layer Transfer of Lithium Niobate to Silicon
Chapter 5 Silver Diffusion Bonding and Layer Transfer of Lithium Niobate to Silicon 5.1 Introduction In this chapter, we discuss a method of metallic bonding between two deposited silver layers. A diffusion
More informationGrain Sizes and Surface Roughness in Platinum and Gold Thin Films. L.L. Melo, A. R. Vaz, M.C. Salvadori, M. Cattani
Journal of Metastable and Nanocrystalline Materials Vols. 20-21 (2004) pp. 623-628 online at http://www.scientific.net 2004 Trans Tech Publications, Switzerland Grain Sizes and Surface Roughness in Platinum
More informationFinite element analysis of residual stress in the welded zone of a high strength steel
Bull. Mater. Sci., Vol. 27, No. 2, April 2004, pp. 127 132. Indian Academy of Sciences. Finite element analysis of residual stress in the welded zone of a high strength steel LI YAJIANG*, WANG JUAN, CHEN
More informationComparison of Different Methods of Residual Stress Determination of Cold-Rolled Austenitic-Ferritic, Austenitic and Ferritic Steels
Comparison of Different Methods of Residual Stress Determination of Cold-Rolled Austenitic-Ferritic, Austenitic and Ferritic Steels ČAPEK Jiří 1,a,*, TROJAN Karel 1,b, NĚMEČEK Jakub 1,c, GANEV Nikolaj
More informationFormation of Cupric Oxide Films on Quartz Substrates by Annealing the Copper Films
Journal of Applied Chemical Research, 9, 2, 73-79 (2015) Journal of Applied Chemical Research www.jacr.kiau.ac.ir Formation of Cupric Oxide Films on Quartz Substrates by Annealing the Copper Films Abstract
More informationBiaxially aligned titanium nitride thin films deposited by reactive unbalanced magnetron sputtering
Surface & Coatings Technology 200 (2006) 2764 2768 www.elsevier.com/locate/surfcoat Biaxially aligned titanium nitride thin films deposited by reactive unbalanced magnetron sputtering S. Mahieu a, *, P.
More informationA METHOD OF DETERMINING THE ELASTIC PROPERTIES OF ALLOYS IN SELECTED CRYSTALLOGRAPHIC DIRECTIONS FOR X-RAY DIFFRACTION RESIDUAL STRESS MEASUREMENT
A MTHOD OF DTRMINING TH LASTIC PROPRTIS OF ALLOYS IN SLCTD CRYSTALLOGRAPHIC DIRCTIONS FOR X-RAY DIFFRACTION RSIDUAL STRSS MASURMNT Paul S. Prevéy ABSTRACT A technique and apparatus are described for obtaining
More informationCOMPARISON OF FRICTIONAL CHARACTERISTICS OF TITANIUM NITRIDE FILMS PRODUCED BY ECR-DC SPUTTERING AND PVD
THE ANNALS OF UNIVERSITY DUNĂREA DE JOS OF GALAŢI 23 ISSN 1221-459 123 COMPARISON OF FRICTIONAL CHARACTERISTICS OF TITANIUM NITRIDE FILMS PRODUCED BY ECR-DC SPUTTERING AND PVD Constantin Rânea 1, Cristian
More informationMEASUREMENT OF RESIDUAL PHASE STRESS OF THE METAL, MATRIX COMPOSITE MATERIAL USING SYNCHROTRON RADIATION
Copyright(c)JCPDS-International Centre for Diffraction Data 2001,Advances in X-ray Analysis,Vol.44 215 MEASUREMENT OF RESIDUAL PHASE STRESS OF THE METAL, MATRIX COMPOSITE MATERIAL USING SYNCHROTRON RADIATION
More informationRESIDUAL STRESS ESTIMATION OF TI CASTING ALLOY BY X-RAY SINGLE CRYSTAL MEASUREMENT METHOD
4 RESIDUAL STRESS ESTIMATION OF TI ASTING ALLOY BY X-RAY SINGLE RYSTAL MEASUREMENT METHOD Ayumi Shiro 1, Masayuki Nishida, Takao Hanabusa and Jing Tian 4 1 Graduate Student, The University of Tokushima,
More informationRecrystallization Effect and Electric Flame-Off Characteristic of Thin Copper Wire
Materials Transactions, Vol. 47, No. 7 (2006) pp. 1776 to 1781 #2006 The Japan Institute of Metals Recrystallization Effect and Electric Flame-Off Characteristic of Thin Copper Wire Fei-Yi Hung*, Yuan-Tin
More informationFree Electron Laser Nitriding of Metals: From. basis physics to industrial applications
Free Electron Laser Nitriding of Metals: From basis physics to industrial applications D. Höche a, G. Rapin b, J. Kaspar c, M. Shinn d, and P. Schaaf a a Universität Göttingen, II. Physikalisches Institut,
More informationPlasma spheroidization of nickel powders in a plasma reactor
Bull. Mater. Sci., Vol. 27, No. 5, October 2004, pp. 453 457. Indian Academy of Sciences. Plasma spheroidization of nickel powders in a plasma reactor G SHANMUGAVELAYUTHAM and V SELVARAJAN* Department
More informationNANOINDENTATION OF SILICON CARBIDE WAFER COATINGS
NANOINDENTATION OF SILICON CARBIDE WAFER COATINGS Prepared by Jesse Angle 6 Morgan, Ste156, Irvine CA 9618 P: 949.461.99 F: 949.461.93 nanovea.com Today's standard for tomorrow's materials. 010 NANOVEA
More informationWEAR PROPERTIES OF PLASMA NITRIDED INCONEL 718 SUPERALLOY
WEAR PROPERTIES OF PLASMA NITRIDED INCONEL 718 SUPERALLOY Halim Kovacı 1, Hojjat Ghahramanzadeh ASL 1, Çiğdem Albayrak 2, Akgün Alsaran 1 1 Ataturk University, Erzurum, Turkey 2 Erzincan University, Erzincan,
More informationPre-treatment of low temperature GaN buffer layer deposited on AlN Si substrate by hydride vapor phase epitaxy
Ž. Surface and Coatings Technology 131 000 465 469 Pre-treatment of low temperature GaN buffer layer deposited on AlN Si substrate by hydride vapor phase epitaxy Ha Jin Kim, Ho-Sun Paek, Ji-Beom Yoo Department
More informationKinematical theory of contrast
Kinematical theory of contrast Image interpretation in the EM the known distribution of the direct and/or diffracted beam on the lower surface of the crystal The image on the screen of an EM = the enlarged
More informationKeywords: Sputter deposition; Reactive deposition; Nitride coatings ABSTRACT
Reactive Cylindrical Magnetron Deposition of Titanium Nitride and Zirconium Nitride Films D.E. Siegfried and D. Cook, Ion Tech, Inc., Ft. Collins, CO; and D. Glocker, Isoflux, Inc., Rush, NY Keywords:
More informationCHAPTER 3 EXPERIMENTAL PROCEDURE
60 CHAPTER 3 EXPERIMENTAL PROCEDURE The objective of this study is to evaluate the performance of cermet tools which is subjected to either plain, coated, cryogenically treated. In order to evaluate these
More informationISSUES TO ADDRESS... What types of defects arise in solids? Can the number and type of defects be varied and controlled?
CHAPTER 4: IMPERFECTIONS IN SOLIDS ISSUES TO ADDRESS... What types of defects arise in solids? Can the number and type of defects be varied and controlled? How do defects affect material properties? Are
More informationOptimization of sputter deposition Process for piezoelectric AlN ultra-thin Films
eidgeno ssische technische hochschule lausanne politecnico federale losanna swiss federal institute of technology SECTION MICROTECHNIQUE Optimization of sputter deposition Process Semester Project Advanced
More informationFundamentals of X-ray diffraction and scattering
Fundamentals of X-ray diffraction and scattering Don Savage dsavage@wisc.edu 1231 Engineering Research Building (608) 263-0831 X-ray diffraction and X-ray scattering Involves the elastic scattering of
More informationStress-Strain Relationship and XRD Line Broadening in [0001] Textured Hexagonal Polycrystalline Materials
(Journal of the Society of Materials Science, Japan), Vol. 60, No. 7, pp. 642-647, July 2011 Original Papers Stress-Strain Relationship and XRD Line Broadening in [0001] Textured Hexagonal Polycrystalline
More informationSurface Structure Effects of Sn electrodeposits on the Sn Whisker Growth. Kil-Won Moon, NIST ECTC, Orlando May 31, 2005
Surface Structure Effects of Sn electrodeposits on the Sn Whisker Growth Kil-Won Moon, NIST ECTC, Orlando May 31, 2005 Co-authors: Chris Johnson, Maureen E. Williams, and William J. Boettinger Metallurgy
More informationInfluence of Underlayer on Crystallography and Roughness of Aluminum Nitride Thin Film Reactively Sputtered by Ion-Beam Kaufman Source
Influence of Underlayer on Crystallography and Roughness of Aluminum Nitride Thin Film Reactively Sputtered by Ion-Beam Kaufman Source GABLECH Imrich 1,*, SVATOŠ Vojtěch 1,, PRÁŠEK Jan 1,, HUBÁLEK Jaromír
More informationEBSD Basics EBSD. Marco Cantoni 021/ Centre Interdisciplinaire de Microscopie Electronique CIME. Phosphor Screen. Pole piece.
EBSD Marco Cantoni 021/693.48.16 Centre Interdisciplinaire de Microscopie Electronique CIME EBSD Basics Quantitative, general microstructural characterization in the SEM Orientation measurements, phase
More informationSTUDY ON COMPUTERIZED TOMOGRAPHY AND STRAIN MAPPING NEAR THE INTERNAL CRACK TIP OF STEEL BAR USING SYNCHROTRON WHITE X-RAY
Copyright JCPDS-International Centre for Diffraction Data 29 ISSN 197-2 376 STUD ON COMPUTERIED TOMOGRAPH AND STRAIN MAPPING NEAR THE INTERNAL CRACK TIP OF STEEL BAR USING SNCHROTRON WHITE X-RA Jun-ichi
More informationProperties of Fe-base Metal Glass Coatings Produced by Gas Tunnel Type Plasma Spraying
Transactions of JWRI, Vol. 35 (2006), No. 2 Properties of Fe-base Metal Glass Coatings Produced by Gas Tunnel Type Plasma Spraying KOBAYASHI Akira*, YANO Shoji**, KIMURA Hisamichi *** and INOUE Akihisa***
More informationTITANIUM MACROPARTICLE FRACTION SUPPRESSION WITH STEERED ARC AND NEGATIVE PULSE BIASING
Jr. of Industrial Pollution Control ()(06) pp 06-0 www.icontrolpollution.com Research TITANIUM MACROPARTICLE FRACTION SUPPRESSION WITH STEERED ARC AND NEGATIVE PULSE BIASING RYABCHIKOV AI, SIVIN DO, ANANIN
More informationBuckling behavior of metal film/substrate structure under pure bending
Buckling behavior of metal film/substrate structure under pure bending Ying Li, Xi-Shu Wang a Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, P.R. China Xiang-Kang Meng National
More informationIon Nitriding of Stainless Steel: III
Ion Nitriding of Stainless Steel: III INFLUENCE OF MICROSTRUCTURE ON NITRIDING PROPERTIES OF STAINLESS STEEL D. Manova, S. Heinrich, I. Eichentopf, S. Mändl, H. Neumann, B. Rauschenbach Financial Support
More information