Pre-Installation Guide DWL 66 66FS. UV 355nm 250mW (Genesis)

Transcription

1 Pre-Installation Guide DWL 66 66FS

2 TABLE OF CONTENTS Table of Contents...2 Introduction...4 Validity...4 Assignment of Responsibilities...5 Heidelberg Instruments Responsibilities:...5 Purchaser Responsibilities...5 Room Requirements...6 Equipment Dimensions:...6 Limitations to Distances of Equipment Components...6 Room Space Requirements...6 Machine Layout...7 Floor Loads at Supporting Points...7 Front View...8 Planning Guidelines...8 Example of a DWL 66FS Floor plan...9 Environmental Requirements...10 Clean room Settings and Specifications...10 Vibrations...10 Heat Load...11 Electrical Requirements...12 General Requirements...12 Electrical Supplies...13 Required Outlets...14 Air, Vacuum, and Water Supply...16 Compressed Air...16 Vacuum Communication Requirements...17 Furnishing, Equipment and Materials...18 Receiving, Handling and Storage...19 Crated Dimensions...19 Planning Guidelines

3 Receiving Guidelines...20 Heidelberg Instruments DWL 66FS Pre-Installation Site Inspection...21 Installation Considerations Overview...23 Doc. No. PI-033 Revision: 1 (January 2011) Copyright 2011 by Heidelberg Instruments 3

4 INTRODUCTION This guide is designed as a layout to aid in the planning stages of installation for a DWL 66FS high-resolution laser plotter. It gives information on: geometrical room requirements: footprints, sketches, distances, door sizes technical requirements: o connections and capacities of services (electricity, air, vacuum, water) o clean room specifications (minimum heat load capacity, temperature, humidity, vibrations, clean room class, lighting) materials required for installation start (additional clean room equipment, blanks, chemistry, processing capabilities, ) organizational processes of the pre-installation period (assignment of responsibilities, directions on receiving and unpacking of the system) It also includes a Pre-Installation Site Inspection Checklist at the end which should be filled out by the customer or a Heidelberg Instruments engineer prior to installation arrangement. It is also a valuable tool for the customer to check if all requirements were already taken into consideration. Warning: This is NOT an installation guide. The DWL 66FS must be unpacked and installed only by Heidelberg Instruments authorized representatives. Please note that while every effort has been made to ensure that the data given in this document is accurate, the information, figures, tables, specifications and schematics contained herein are subject to change without notice. Heidelberg Instruments makes no warranty or representation, either expressed or implied with respect to this document. In no event will Heidelberg Instruments be liable for any direct, indirect, special, incidental or consequential damages resulting from any defects in its documentation. VALIDITY This pre-installation guide is valid only for DWL 66FS systems with Genesis UV 355nm 250mW laser. If your system has a different configuration, please contact Heidelberg Instruments for a pre-installation guide matching your configuration. 4

5 ASSIGNMENT OF RESPONSIBILITIES HEIDELBERG INSTRUMENTS RESPONSIBILITIES: 1. Identify all site requirements and make site-planning recommendations (fulfilled with hand over of this document). 2. Unpack and install systems and conduct operation verification tests according to purchase contract. PURCHASER RESPONSIBILITIES 1. Prepare site as to meet all requirements defined in this guide. 2. Complete the enclosed Pre-Installation Site Inspection Checklist and return it to Heidelberg Instruments. 3. Receiving and delivery of system to destination. 4. Provide adequate indoor storage to accommodate coordinated shipments. 5. Provide labor and transportation equipment (e.g., manual or motorized fork lifts, rollers) for unboxing and positioning of the DWL 66FS system under Heidelberg Instruments supervision. 5

6 ROOM REQUIREMENTS Equipment and room dimension requirements are illustrated graphically at the end of this section. EQUIPMENT DIMENSIONS: Width Depth Height Weight DWL 66FS 1300 mm 51.2" 1100 mm mm kg 1760 lb Electronics Rack 630 mm mm mm kg 175 lb Laser Chiller (water/air) 220 mm mm mm kg 20 lb User PC, Conversion PC Standard enclosure Table 1 LIMITATIONS TO DISTANCES OF EQUIPMENT COMPONENTS Component 1 Component 2 Connection type and available length Main System Electronics rack Cables, 1.2m from center of back side of system (non-extendable) Main System Laser Chiller Hoses, 0.8m from center of back side of system, extendable to max. 3m (option) Electronics Rack User PC Power, serial, and network cable connections, 3.0m, extendable to 8.0m (option) Electronics Rack Conversion PC Network cable connection, not limited if done via hubs / switches / repeaters. ROOM SPACE REQUIREMENTS Table 2 Overall Minimum Room Space Requirement (Installed System) Width 2800 mm 110 Depth 2850 mm 112 Height 2450 mm 97 Minimum Work Space Clearances around Main System Front (loading area) 1500 mm 59 Rear, Left and Right 750 mm 29 Top 500 mm 20 Table 3 Table 4 6

7 MACHINE LAYOUT C 630 C B B A A 910 C C B B A A B B B B FLOOR LOADS AT SUPPORTING POINTS Figure 1 Location Description Footprint size (mm) Footprint Area (cm 2 ) Vertical Load (Newton) Maximum Typical A Main Granite System 76 Diameter B Flow Unit Castor Wheel Approx C Electronics Rack Castor Wheel Approx Table 5 7

8 FRONT VIEW PLANNING GUIDELINES 1. Check the maximum possible floor load. The weight per point is indicated in the installation plan. 2. Engage a professional moving company specializing in the transport of extremely heavy equipment. 3. The equipment will be delivered in parts. The granite system and the laminar flow unit are packed separately and are assembled at the final site. 4. For all doorways through which the DWL 66FS must be moved, a minimum width of 1000mm and a minimum height of 2000mm is required. Corners must allow a total area of 1500mm x 1000mm to pass. 5. All floors and elevators that have to be passed or used during move-in have to be capable to hold the system weight, distributed on the rest points of the moving equipment used. 8

9 EXAMPLE OF A DWL 66FS FLOOR PLAN Connections for utilities E- RACK 750 DWL 66FS 275 CHIL- LER Door Loading Area 1800 TABLE FOR PCs Storage Figure 2 9

10 ENVIRONMENTAL REQUIREMENTS CLEAN ROOM SETTINGS AND SPECIFICATIONS Temperature: Relative Humidity: Particles*: Vibrations: Light: set-point between C (65-75 F) stability ±1 C (±1.5 F) or better 40-60% during operation 20-60% during shutdown non-condensing Class 1000 (Max particles larger than 0.5 micron per cubic foot) or better. Should not exceed the values shown in Figure 3 below. According to photosensitive materials to be processed, safe yellow and/or ruby light. * Clean room class requirements depend on the products to be manufactured by the Heidelberg Instruments DWL 66FS. Especially if the system is to be used with a highresolution write head, a considerably higher clean room quality is required to avoid defects that destroy small structures (class 100 recommended). Please contact Heidelberg Instruments for details. VIBRATIONS The DWL 66FS is equipped with vibration isolation buffers. Special building foundations are usually not necessary. Figure 3 below shows the recommended maximum values. half sine displacement in micrometers a=0,25 m/s Frequency (Hz) Figure 3 10

11 HEAT LOAD The average heat generated by the DWL 66FS is based on its configuration. Please contact Heidelberg Instruments for an exact figure for your system. The values represented in Table 6 serve as a guide. Heat dissipation within the DWL 66FS main system by low energy exposure lasers, steppermotors, the interferometer laser, and most other electronic / optics components mounted directly on the granite system is taken care of by the temperature control system of the flow box. Maximum heat load to the clean room: Component Maximum Heat Dissipation E-rack 1500 W 1290 kcal/h Laser Chiller 350 W 300 kcal/h User PC and monitor 500 W 430 kcal/h Camera monitor 50 W 40 kcal/h Conversion PC and monitor 500 W 430 kcal/h Laminar Flow System 1500 W 1290 kcal/h Table 6 11

12 GENERAL REQUIREMENTS ELECTRICAL REQUIREMENTS No high frequency transients, impulses, sags and surges should be present on the input line. An uninterruptible safety earth ground connection may feed no more than a 2Ω impedance into the system. The voltage differential between neutral and earth ground must not exceed 1V when measured at the system power line input terminals. The fluctuation of this value must not exceed 25mV peak-to-peak. Brownouts (U < 90% U nom ) and Blackouts (U < 1% U nom ) should not occur more often than 10 times per year. If short (< 3 minutes) brownouts or blackouts occur more often, an on-line true UPS should be installed with the capacity to keep up the required voltages and currents for at least 3 minutes. To achieve maximum reliability and safety, Heidelberg Instruments recommends the following: A separate power isolation transformer supplying only the system and its peripherals. Regulation transformers may be required if power exhibits drops or surges in the line voltage beyond those ranges stated below. A transformer must be of an adequate size to power all system components and to accept additional equipment in the future. A power cut-off device, such as a remote trip switch or circuit breaker, to shut off power to all system components in the event of an emergency. This device must be easily accessible and located near a principle exit to the room housing the DWL system. 12

13 ELECTRICAL SUPPLIES Electrical Requirements DWL 66FS (excluding PCs (1) ) Power 230 VAC ±5% 50/60 Hz ±0.5% Service Peak Current Average Operating Current Average Power Consumption Electrical Requirements User PC with monitor and camera monitor (1) Conversion PC with monitor (1) Laser Chiller Flow Unit with Temperature Control 16 Ampere, dedicated, single phase (3-wire: phase, neutral, ground) 16 Ampere 12 Ampere 2800 W Auxiliary units DWL 66FS 230V / 115V, 50 / 60Hz, 550 Watt 230V / 115V, 50 / 60Hz, 450 Watt V, 50 / 60 Hz, 625 Watt 230V, 50Hz, 16A, 750 Watt average consumption Table 7 Note 1 The User PC is usually included in the electronics rack of the main system. In this case, the power consumption has to be added there. Optionally, also the Conversion PC can be integrated in the main system electronics rack. For more detailed information, please contact Heidelberg Instruments. The indicated voltage of 230 V is an absolute requirement. If your facility cannot supply this voltage, transformers are needed. Heidelberg Instruments enforces strict design control over the electrical requirements for each system. Electrical service that does not meet stated requirements can seriously affect the performance and the reliability of a system and may, in some cases, cause damage to the electronics. There are no shortcuts to meeting the electrical requirements. If the general and/or specific power specifications (shown above in Table 7) cannot be met for any reason, an online true sine wave UPS is mandatory. 13

14 REQUIRED OUTLETS Main Connector System Connector DWL 66FS The DWL 66FS is connected with a CEE type 230V, 16A single-phase male connector, 2-pole plus earth (3 wire). System Cable Length The cable length is 5m. Wall Connector System: A CEE type 230V, 16A wall connector should be used. Alternatively the CEE type 230V, 16A single-phase female cable connector (see note) can be used to connect a local type cable to a local type wall connector. A 2.5 mm 2, 3 wire cable should be used. Note: Table 8 A CEE type 230V female cable connector is included. HIMT will include a CEE type wall connector upon request. The system itself has a number of 230V receptacles for auxiliary equipment, such as for the User PC, and for servicing tools. Auxiliary Connectors PCs and Monitors Cable Length Wall connector Laser Chiller Cable Length Wall connector DWL 66FS The PCs and monitors of the DWL 66FS come with a connection plug board. It is connected with a single-phase 230V shockproof plug that can be exchanged for a local type 230V plug matching the power and voltage ratings (see above). The cable length is 3m (10 feet). A V, 16 A single-phase shockproof socket should be used. If the cable plug was exchanged for a local type plug, use the according local type socket. The chiller comes with one cable with german standard single-phase 230V shockproof plug, and one cable with US type connector. The connector can be exchanged for a local type plug matching the power and selected voltage ratings (see above). The unit cable is 1.5 m ( feet). A shockproof 16 A single-phase socket wall connector should be used. If a local type plug is used, a corresponding local type wall socket should be prepared. 14

15 Auxiliary Connectors Flow Unit with Temperature Control Cable Length Wall connector DWL 66FS The laminar flow unit for the DWL 66FS is connected with a single-phase 230V connector. The connector can be exchanged for a local type plug matching the power and voltage ratings (see above). The unit cable is 5m (17 feet). A shockproof 16 A single-phase socket wall connector should be used. If a local type plug is used, a corresponding local type wall socket should be prepared. Table 9 15

16 COMPRESSED AIR AIR, VACUUM, AND WATER SUPPLY Minimum Pressure Maximum Pressure 7 bar (100 psi) 10 bar (145 psi) Filter 5-10 µ Flow Continuous flow: 5 SL/min (2) Incidentally: up to 25 SL/min (2) Temperature Conditions Connection VACUUM 1 Minimum Pressure ±1 C (±1.4 F) with respect to room temperature Free of all contaminating fluids, oil, and water, whether liquid or vapor Cleanliness classes according to ISO : Oil:class 1 Partikels: class 1 Water: class 4 A quick connector (male) is provided with the system, which can be connected to the system side female FESTO connector KD-3/8 (FESTO part# 2144). The purchaser must provide factory side connections for 3/8 inch (9 mm) inside diameter (ID) hose, as well as hose of sufficient length for the connection. 0.5 bar (7 psi) Table 10 Capacity Min. 5 SL/min (2) Connection Connector for 1/6-inch (6mm) internal diameter hose Table 11 Note 1 Vacuum pump can optionally be provided by Heidelberg Instruments. Please contact Heidelberg Instruments for more information. Note 2 1SL = 1 standard liter = 1 liter at 1 bar and 20 C 16

17 COMMUNICATION REQUIREMENTS For the time of installation and during servicing periods, a telephone connection for national and international calls should be available close to the machine. The DWL 66FS main controller, the User PC and the Conversion PC are connected with each other via thin ethernet network connection and a hub. This network can be used as a stand alone network, or included into an existing local area network. In the latter case, the conversion PC can be placed anywhere where there is access to the LAN. Network communication Network connections Telephone connection Ethernet; 100BaseT system (RJ-45 connector) 1 LAN connection at the system location 1 LAN connection at each conversion PC location (if not at system) 3 static IP addresses within the LAN address room one telephone for local and international calls at the system location Table 12 As an option, the conversion PC can also be configured as a gateway PC to separate the system network address room from that of the LAN, and protect the system network from external access. For further information, please contact Heidelberg Instruments. 17

18 FURNISHING, EQUIPMENT AND MATERIALS Clean room furnishing: At least one table of at least 1.6 x 0.6m is required for Control PC, Conversion PC and Camera Monitor. Processing equipment: A wet bench, or comparable site prepared for chemical processing has to be available for exposure processing. DI water for rinsing and clean compressed air or nitrogen for drying have to be available at the processing site, as well as the required chemicals for processing of the available substrates (developer, etcher/fixer, stripper). Lithographic materials: Test blanks in sufficient number for function tests and rough calibration of all write modes have to be present at the site at installation start. These test blanks can be of minor quality (e.g., re-coated plates), but should be close to the preconditions listed in the system specifications. For fine calibration and acceptance exposures, commercial quality blanks are required. At least five blanks per write mode should be available. The blanks should be in accordance with the preconditions listed in the system specifications, or very close to them. For more information, contact Heidelberg Instruments. Evaluation equipment: An optical microscope with a resolution corresponding to the system's specified minimum structure size is required for evaluation of exposures. Recommended: 500x or better. For absolute calibration of the system, a golden plate is required, or a calibrated measuring device. Coolants: For filling of the closed loop water cooling circles, sufficient demineralized water (not deionzied!) has to be available. The required volume for the first filling depends on the system configuration. Please contact Heidelberg Instruments for an exact number for your system. Addition of anticorrosives is recommended in some of the circuits. 18

19 CRATED DIMENSIONS RECEIVING, HANDLING AND STORAGE The DWL 66FS is shipped in several crates. Since exact dimensions depend on the type of shipment, you will be informed on the exact sizes of the crates before shipment. Systems are large and heavy, requiring special loading and receiving dock facilities. PLANNING GUIDELINES 1. The purchaser must provide adequate loading / receiving dock and truck platforms and a receiving area protected from adverse weather conditions for receiving the system from a truck. If purchaser does not have a loading dock, then purchaser must notify Heidelberg Instruments at the time of order, or as soon as possible thereafter, to organize the unloading process. A professional moving company is necessary, and will be included for shipment, if requested. 2. Systems can be delivered to a local warehouse equipped to handle computer equipment and transferred to the purchaser s facility later, if requested. Under no circumstance is equipment to be temporarily stored outside, not even crated. CAUTION: The system must not be stored in damp, humid, or uncontrolled environment. If systems are stored for any length of time, the providing storage facility must adhere to a clean, controlled environment that will safeguard equipment from damage due to dust, humidity, and extreme temperature variations. 3. The purchaser must notify the carrier if there are any restrictions on delivery time, or location. 4. The purchaser must either provide or organize moving equipment (e.g., liftforks capable of lifting the system weight, heavy-weight rollers, pallet trucks, cranes if required) and personnel for transporting the equipment to its destination. It is recommended to engage personnel and equipment from an experienced transport company. We strongly recommend that a Heidelberg Instruments representative is present during unloading and moving of the equipment. 19

20 RECEIVING GUIDELINES 1. The purchaser s Receiving Department must conduct a thorough inspection of all incoming equipment and cartons. The number of packages or crates must match the number listed on the bill of loading. Please make note of any missing items. There should be no signs of abuse, mishandling, or damage due to shipping. Note: Do not open boxes that require unpacking prior to installation, only Heidelberg Instruments personnel or their authorized representatives are to open and inventory equipment. Heidelberg Instruments is not responsible for losses, damage, or missing items from boxes opened by unauthorized personnel. 2. If damage or discrepancies are detected, make the following notifications immediately: Driver of the delivery vehicle -Make note of the damage or discrepancies on the bill of loading Shipping carrier Your insurance company The carrier s insurance company Heidelberg Instruments or your HIMT representative. 20

21 HEIDELBERG INSTRUMENTS DWL 66FS PRE-INSTALLATION SITE INSPECTION Please complete the following checklist and return it to Heidelberg Instruments at least three weeks prior to scheduled shipping. Please attach an explanation of all No answers, and transmit the questionnaire by fax to Heidelberg Instruments. Approximate date facility will be ready: Can separate parts of a coordinated shipment be stored temporarily until all parts are received? Yes No If no, what storage arrangements have been made? Is a loading dock available? Yes No Are passageways and floor loads large enough to allow movement of equipment to destination? Yes No Note height and width of narrowest opening: Have you planned for the size and the weight of the system(s)? Yes No Have you planned for the necessary moving equipment, or have you engaged a professional moving company Yes No Have you allowed for the specified clearance around and above the system? Yes No Have you provided the required electrical service? Yes No Have you provided the compressed air, vacuum and water service? 21

22 Yes No Have all environmental requirements been met? Yes No Is the Local Area Network provided for? Yes No Questionnaire completed by: Name: Date: / Company: (Company) Address: Please complete and fax questionnaire to your local Heidelberg Instruments Service Manager or mail to: Heidelberg Instruments Technical Support Department Tullastrasse Heidelberg, Germany. techsupport@himt.de 22

23 INSTALLATION CONSIDERATIONS OVERVIEW DIMENSIONS System Electronics Module Width: 1300 mm 630 mm Depth: 1100 mm 760 mm Height: 1950 mm 1950 mm WEIGHT 900 kg TEMPERATURE STABILITY ±1 ºC HUMIDITY 50% ± 10% (Non-condensing) CLEAN ROOM Class 1000 (Or better) ELECTRICAL 230 VAC ± 5% 1-phase 50/60Hz 16 A COMPRESSED AIR 7-10 bar clean, dry and oilfree VACUUM 0.5 bar FOR MORE INFORMATION ON OUR DIRECT WRITE LASER SYSTEMS, PLEASE CONTACT OUR WORLDWIDE SERVICE ORGANIZATION: USA Heidelberg Instruments Inc. USA 2807 Oregon Court, Unit E2 Torrance, Ca USA Phone +1-(310) Fax +1-(310) service_usa@himt.de GERMANY Heidelberg Instruments Mikrotechnik GmbH Tullastr. 2, Heidelberg Germany Phone / Fax / service@himt.de CHINA Heidelberg Instruments China Rm.101, Block 1, Animation Park Yuehai Street, Nanhai Road, Nanshan District, Shenzhen China Phone: /-2/-7 Fax: service_china@himt.de JAPAN Heidelberg Instruments Japan Germany Center for Industrie and Trade , Hakusan Midori-ku, Yokohama, Japan Phone Fax service_japan@himt.de KOREA (South) Heidelberg Instruments Office #316 Expo Officetel, 381 Mannyeon-dong, Seo-gu Daejeon, South Korea Phone Fax service_korea@himt.de TAIWAN Heidelberg Instruments Taiwan 5F, No. 174 Chung Yang Road Hsinchu City Taiwan Phone Fax service_taiwan@himt.de 23